2/14/2012	12:03:16 AM	Main Vac valve closed
2/14/2012	12:03:22 AM	Main Vac valve opened
2/14/2012	12:03:35 AM	Main Vac valve closed
2/14/2012	12:03:49 AM	Main Vac valve opened
2/14/2012	12:23:08 AM	Main Vac valve closed
2/14/2012	12:23:30 AM	Main Vac valve opened
2/14/2012	12:25:14 AM	Recipe started at 12:25 AM
2/14/2012	12:25:14 AM	Helium valve closed
2/14/2012	12:25:14 AM	H2 valve closed
2/14/2012	12:25:14 AM	BCl3 valve closed
2/14/2012	12:25:14 AM	PH3 valve closed
2/14/2012	12:25:14 AM	SiCl4 pre valve closed
2/14/2012	12:25:14 AM	SiCl4 post valve closed
2/14/2012	12:25:14 AM	Bypass valve closed
2/14/2012	12:25:14 AM	Bubbler valve closed
2/14/2012	12:25:14 AM	Main Vac valve opened
2/14/2012	12:25:14 AM	Helium MFC set to  0.000000
2/14/2012	12:25:14 AM	H2 MFC set to  0.000000
2/14/2012	12:25:14 AM	BCl3 MFC set to  0.000000
2/14/2012	12:25:14 AM	PH3 MFC set to  0.000000
2/14/2012	12:25:14 AM	SiCl4 MFC set to  0.000000
2/14/2012	12:25:14 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	12:25:14 AM	Tube furnace set to 0
2/14/2012	12:25:17 AM	Helium valve closed
2/14/2012	12:25:17 AM	H2 valve closed
2/14/2012	12:25:17 AM	BCl3 valve closed
2/14/2012	12:25:17 AM	PH3 valve closed
2/14/2012	12:25:17 AM	SiCl4 pre valve closed
2/14/2012	12:25:17 AM	SiCl4 post valve closed
2/14/2012	12:25:17 AM	Main Vac valve closed
2/14/2012	12:25:17 AM	Bypass valve closed
2/14/2012	12:25:17 AM	Bubbler valve closed
2/14/2012	12:25:17 AM	Helium MFC set to  0.000000
2/14/2012	12:25:17 AM	H2 MFC set to  0.000000
2/14/2012	12:25:17 AM	BCl3 MFC set to  0.000000
2/14/2012	12:25:17 AM	PH3 MFC set to  0.000000
2/14/2012	12:25:17 AM	SiCl4 MFC set to  0.000000
2/14/2012	12:25:17 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	12:25:17 AM	Tube furnace set to 0
2/14/2012	12:25:20 AM	Helium valve closed
2/14/2012	12:25:20 AM	BCl3 valve closed
2/14/2012	12:25:21 AM	PH3 valve closed
2/14/2012	12:25:21 AM	SiCl4 pre valve closed
2/14/2012	12:25:21 AM	SiCl4 post valve closed
2/14/2012	12:25:21 AM	Main Vac valve closed
2/14/2012	12:25:21 AM	Bypass valve closed
2/14/2012	12:25:21 AM	Bubbler valve closed
2/14/2012	12:25:21 AM	H2 valve opened
2/14/2012	12:25:21 AM	Helium MFC set to  0.000000
2/14/2012	12:25:21 AM	H2 MFC set to  500.000000
2/14/2012	12:25:21 AM	BCl3 MFC set to  0.000000
2/14/2012	12:25:21 AM	PH3 MFC set to  0.000000
2/14/2012	12:25:21 AM	SiCl4 MFC set to  0.000000
2/14/2012	12:25:21 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	12:25:21 AM	Tube furnace set to 0
2/14/2012	12:26:26 AM	Helium valve closed
2/14/2012	12:26:26 AM	BCl3 valve closed
2/14/2012	12:26:26 AM	PH3 valve closed
2/14/2012	12:26:26 AM	SiCl4 pre valve closed
2/14/2012	12:26:26 AM	SiCl4 post valve closed
2/14/2012	12:26:26 AM	Main Vac valve closed
2/14/2012	12:26:26 AM	Bypass valve closed
2/14/2012	12:26:26 AM	H2 valve opened
2/14/2012	12:26:26 AM	Bubbler valve opened
2/14/2012	12:26:26 AM	Helium MFC set to  0.000000
2/14/2012	12:26:26 AM	H2 MFC set to  500.000000
2/14/2012	12:26:26 AM	BCl3 MFC set to  0.000000
2/14/2012	12:26:26 AM	PH3 MFC set to  0.000000
2/14/2012	12:26:26 AM	SiCl4 MFC set to  0.000000
2/14/2012	12:26:26 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	12:26:26 AM	Tube furnace set to 0
2/14/2012	12:26:27 AM	Helium valve closed
2/14/2012	12:26:27 AM	BCl3 valve closed
2/14/2012	12:26:27 AM	PH3 valve closed
2/14/2012	12:26:27 AM	SiCl4 pre valve closed
2/14/2012	12:26:27 AM	SiCl4 post valve closed
2/14/2012	12:26:27 AM	Main Vac valve closed
2/14/2012	12:26:27 AM	Bypass valve closed
2/14/2012	12:26:27 AM	H2 valve opened
2/14/2012	12:26:27 AM	Bubbler valve opened
2/14/2012	12:26:27 AM	Helium MFC set to  0.000000
2/14/2012	12:26:27 AM	H2 MFC set to  500.000000
2/14/2012	12:26:27 AM	BCl3 MFC set to  0.000000
2/14/2012	12:26:27 AM	PH3 MFC set to  0.000000
2/14/2012	12:26:27 AM	SiCl4 MFC set to  0.000000
2/14/2012	12:26:27 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	12:26:27 AM	Tube furnace set to 1000
2/14/2012	12:51:27 AM	Helium valve closed
2/14/2012	12:51:27 AM	PH3 valve closed
2/14/2012	12:51:27 AM	Main Vac valve closed
2/14/2012	12:51:27 AM	Bypass valve closed
2/14/2012	12:51:27 AM	H2 valve opened
2/14/2012	12:51:27 AM	BCl3 valve opened
2/14/2012	12:51:27 AM	SiCl4 pre valve opened
2/14/2012	12:51:28 AM	SiCl4 post valve opened
2/14/2012	12:51:28 AM	Bubbler valve opened
2/14/2012	12:51:28 AM	Helium MFC set to  0.000000
2/14/2012	12:51:28 AM	H2 MFC set to  450.000000
2/14/2012	12:51:28 AM	BCl3 MFC set to  1.500000
2/14/2012	12:51:28 AM	PH3 MFC set to  0.000000
2/14/2012	12:51:28 AM	SiCl4 MFC set to  50.000000
2/14/2012	12:51:28 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	12:51:28 AM	Tube furnace set to 1000
2/14/2012	12:59:28 AM	Helium valve closed
2/14/2012	12:59:28 AM	BCl3 valve closed
2/14/2012	12:59:28 AM	PH3 valve closed
2/14/2012	12:59:28 AM	SiCl4 pre valve closed
2/14/2012	12:59:28 AM	SiCl4 post valve closed
2/14/2012	12:59:28 AM	Main Vac valve closed
2/14/2012	12:59:28 AM	Bypass valve closed
2/14/2012	12:59:28 AM	H2 valve opened
2/14/2012	12:59:28 AM	Bubbler valve opened
2/14/2012	12:59:28 AM	Helium MFC set to  0.000000
2/14/2012	12:59:28 AM	H2 MFC set to  500.000000
2/14/2012	12:59:28 AM	BCl3 MFC set to  0.000000
2/14/2012	12:59:28 AM	PH3 MFC set to  0.000000
2/14/2012	12:59:28 AM	SiCl4 MFC set to  0.000000
2/14/2012	12:59:28 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	12:59:28 AM	Tube furnace set to 750
2/14/2012	1:14:28 AM	H2 valve closed
2/14/2012	1:14:28 AM	BCl3 valve closed
2/14/2012	1:14:28 AM	PH3 valve closed
2/14/2012	1:14:28 AM	SiCl4 pre valve closed
2/14/2012	1:14:28 AM	SiCl4 post valve closed
2/14/2012	1:14:28 AM	Main Vac valve closed
2/14/2012	1:14:28 AM	Bypass valve closed
2/14/2012	1:14:28 AM	Helium valve opened
2/14/2012	1:14:28 AM	Bubbler valve opened
2/14/2012	1:14:28 AM	Helium MFC set to  500.000000
2/14/2012	1:14:28 AM	H2 MFC set to  0.000000
2/14/2012	1:14:28 AM	BCl3 MFC set to  0.000000
2/14/2012	1:14:28 AM	PH3 MFC set to  0.000000
2/14/2012	1:14:28 AM	SiCl4 MFC set to  0.000000
2/14/2012	1:14:28 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:14:28 AM	Tube furnace set to 0
2/14/2012	1:34:28 AM	Helium valve closed
2/14/2012	1:34:28 AM	H2 valve closed
2/14/2012	1:34:28 AM	BCl3 valve closed
2/14/2012	1:34:28 AM	PH3 valve closed
2/14/2012	1:34:28 AM	SiCl4 pre valve closed
2/14/2012	1:34:28 AM	SiCl4 post valve closed
2/14/2012	1:34:28 AM	Main Vac valve closed
2/14/2012	1:34:28 AM	Bypass valve closed
2/14/2012	1:34:28 AM	Bubbler valve closed
2/14/2012	1:34:28 AM	Helium MFC set to  0.000000
2/14/2012	1:34:28 AM	H2 MFC set to  0.000000
2/14/2012	1:34:28 AM	BCl3 MFC set to  0.000000
2/14/2012	1:34:28 AM	PH3 MFC set to  0.000000
2/14/2012	1:34:28 AM	SiCl4 MFC set to  0.000000
2/14/2012	1:34:28 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:34:28 AM	Tube furnace set to 0
2/14/2012	1:47:33 AM	Run aborted at 1:47 AM
2/14/2012	1:47:33 AM	Helium valve closed
2/14/2012	1:47:33 AM	H2 valve closed
2/14/2012	1:47:33 AM	BCl3 valve closed
2/14/2012	1:47:33 AM	PH3 valve closed
2/14/2012	1:47:33 AM	SiCl4 pre valve closed
2/14/2012	1:47:33 AM	SiCl4 post valve closed
2/14/2012	1:47:33 AM	Bypass valve closed
2/14/2012	1:47:33 AM	Main Vac valve closed
2/14/2012	1:47:33 AM	Bubbler valve closed
2/14/2012	1:47:33 AM	Helium MFC set to  0.000000
2/14/2012	1:47:33 AM	H2 MFC set to  0.000000
2/14/2012	1:47:33 AM	BCl3 MFC set to  0.000000
2/14/2012	1:47:33 AM	PH3 MFC set to  0.000000
2/14/2012	1:47:33 AM	SiCl4 MFC set to  0.000000
2/14/2012	1:47:33 AM	Tube furnace set to 0
2/14/2012	1:47:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2012	1:47:38 AM	Recipe started at 1:47 AM
2/14/2012	1:47:38 AM	Helium valve closed
2/14/2012	1:47:38 AM	H2 valve closed
2/14/2012	1:47:38 AM	BCl3 valve closed
2/14/2012	1:47:38 AM	PH3 valve closed
2/14/2012	1:47:38 AM	SiCl4 pre valve closed
2/14/2012	1:47:38 AM	SiCl4 post valve closed
2/14/2012	1:47:38 AM	Main Vac valve closed
2/14/2012	1:47:38 AM	Bypass valve closed
2/14/2012	1:47:38 AM	Bubbler valve closed
2/14/2012	1:47:38 AM	Helium MFC set to  0.000000
2/14/2012	1:47:38 AM	H2 MFC set to  0.000000
2/14/2012	1:47:38 AM	BCl3 MFC set to  0.000000
2/14/2012	1:47:38 AM	PH3 MFC set to  0.000000
2/14/2012	1:47:38 AM	SiCl4 MFC set to  0.000000
2/14/2012	1:47:38 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:47:38 AM	Tube furnace set to 0
2/14/2012	1:47:41 AM	H2 valve closed
2/14/2012	1:47:41 AM	BCl3 valve closed
2/14/2012	1:47:41 AM	PH3 valve closed
2/14/2012	1:47:41 AM	SiCl4 pre valve closed
2/14/2012	1:47:41 AM	SiCl4 post valve closed
2/14/2012	1:47:41 AM	Main Vac valve closed
2/14/2012	1:47:41 AM	Bypass valve closed
2/14/2012	1:47:41 AM	Bubbler valve closed
2/14/2012	1:47:41 AM	Helium valve opened
2/14/2012	1:47:41 AM	Helium MFC set to  500.000000
2/14/2012	1:47:41 AM	H2 MFC set to  0.000000
2/14/2012	1:47:41 AM	BCl3 MFC set to  0.000000
2/14/2012	1:47:41 AM	PH3 MFC set to  0.000000
2/14/2012	1:47:41 AM	SiCl4 MFC set to  0.000000
2/14/2012	1:47:41 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:47:41 AM	Tube furnace set to 0
2/14/2012	1:47:44 AM	Helium valve closed
2/14/2012	1:47:44 AM	H2 valve closed
2/14/2012	1:47:44 AM	BCl3 valve closed
2/14/2012	1:47:44 AM	PH3 valve closed
2/14/2012	1:47:44 AM	SiCl4 pre valve closed
2/14/2012	1:47:44 AM	SiCl4 post valve closed
2/14/2012	1:47:44 AM	Main Vac valve closed
2/14/2012	1:47:44 AM	Bypass valve closed
2/14/2012	1:47:44 AM	Bubbler valve closed
2/14/2012	1:47:44 AM	Helium MFC set to  0.000000
2/14/2012	1:47:44 AM	H2 MFC set to  0.000000
2/14/2012	1:47:44 AM	BCl3 MFC set to  0.000000
2/14/2012	1:47:44 AM	PH3 MFC set to  0.000000
2/14/2012	1:47:44 AM	SiCl4 MFC set to  0.000000
2/14/2012	1:47:44 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:47:44 AM	Tube furnace set to 0
2/14/2012	1:47:45 AM	Run finished at 1:47 AM
2/14/2012	1:47:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2012	1:51:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2012	1:51:11 AM	Recipe started at 1:51 AM
2/14/2012	1:51:11 AM	Helium valve closed
2/14/2012	1:51:11 AM	H2 valve closed
2/14/2012	1:51:11 AM	BCl3 valve closed
2/14/2012	1:51:11 AM	PH3 valve closed
2/14/2012	1:51:11 AM	SiCl4 pre valve closed
2/14/2012	1:51:11 AM	SiCl4 post valve closed
2/14/2012	1:51:11 AM	Main Vac valve closed
2/14/2012	1:51:11 AM	Bypass valve closed
2/14/2012	1:51:11 AM	Bubbler valve closed
2/14/2012	1:51:11 AM	Helium MFC set to  0.000000
2/14/2012	1:51:11 AM	H2 MFC set to  0.000000
2/14/2012	1:51:11 AM	BCl3 MFC set to  0.000000
2/14/2012	1:51:11 AM	PH3 MFC set to  0.000000
2/14/2012	1:51:11 AM	SiCl4 MFC set to  0.000000
2/14/2012	1:51:11 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:51:11 AM	Tube furnace set to 0
2/14/2012	1:51:14 AM	H2 valve closed
2/14/2012	1:51:14 AM	BCl3 valve closed
2/14/2012	1:51:14 AM	PH3 valve closed
2/14/2012	1:51:14 AM	SiCl4 pre valve closed
2/14/2012	1:51:14 AM	SiCl4 post valve closed
2/14/2012	1:51:14 AM	Main Vac valve closed
2/14/2012	1:51:14 AM	Bypass valve closed
2/14/2012	1:51:14 AM	Bubbler valve closed
2/14/2012	1:51:14 AM	Helium valve opened
2/14/2012	1:51:14 AM	Helium MFC set to  500.000000
2/14/2012	1:51:14 AM	H2 MFC set to  0.000000
2/14/2012	1:51:14 AM	BCl3 MFC set to  0.000000
2/14/2012	1:51:14 AM	PH3 MFC set to  0.000000
2/14/2012	1:51:14 AM	SiCl4 MFC set to  0.000000
2/14/2012	1:51:14 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:51:14 AM	Tube furnace set to 0
2/14/2012	1:51:16 AM	Helium valve closed
2/14/2012	1:51:16 AM	H2 valve closed
2/14/2012	1:51:16 AM	BCl3 valve closed
2/14/2012	1:51:16 AM	PH3 valve closed
2/14/2012	1:51:16 AM	SiCl4 pre valve closed
2/14/2012	1:51:16 AM	SiCl4 post valve closed
2/14/2012	1:51:16 AM	Main Vac valve closed
2/14/2012	1:51:16 AM	Bypass valve closed
2/14/2012	1:51:16 AM	Bubbler valve closed
2/14/2012	1:51:16 AM	Helium MFC set to  0.000000
2/14/2012	1:51:16 AM	H2 MFC set to  0.000000
2/14/2012	1:51:16 AM	BCl3 MFC set to  0.000000
2/14/2012	1:51:16 AM	PH3 MFC set to  0.000000
2/14/2012	1:51:16 AM	SiCl4 MFC set to  0.000000
2/14/2012	1:51:16 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:51:16 AM	Tube furnace set to 0
2/14/2012	1:51:17 AM	Run finished at 1:51 AM
2/14/2012	1:51:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2012	1:56:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2012	1:56:35 AM	Recipe started at 1:56 AM
2/14/2012	1:56:35 AM	Helium valve closed
2/14/2012	1:56:35 AM	H2 valve closed
2/14/2012	1:56:35 AM	BCl3 valve closed
2/14/2012	1:56:35 AM	PH3 valve closed
2/14/2012	1:56:35 AM	SiCl4 pre valve closed
2/14/2012	1:56:35 AM	SiCl4 post valve closed
2/14/2012	1:56:35 AM	Main Vac valve closed
2/14/2012	1:56:35 AM	Bubbler valve closed
2/14/2012	1:56:35 AM	Bypass valve opened
2/14/2012	1:56:35 AM	Helium MFC set to  0.000000
2/14/2012	1:56:35 AM	H2 MFC set to  0.000000
2/14/2012	1:56:35 AM	BCl3 MFC set to  0.000000
2/14/2012	1:56:35 AM	PH3 MFC set to  0.000000
2/14/2012	1:56:35 AM	SiCl4 MFC set to  0.000000
2/14/2012	1:56:35 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:56:36 AM	Tube furnace set to 0
2/14/2012	1:57:35 AM	Helium valve closed
2/14/2012	1:57:35 AM	H2 valve closed
2/14/2012	1:57:35 AM	BCl3 valve closed
2/14/2012	1:57:35 AM	PH3 valve closed
2/14/2012	1:57:35 AM	SiCl4 pre valve closed
2/14/2012	1:57:35 AM	SiCl4 post valve closed
2/14/2012	1:57:35 AM	Main Vac valve closed
2/14/2012	1:57:35 AM	Bubbler valve closed
2/14/2012	1:57:35 AM	Bypass valve opened
2/14/2012	1:57:35 AM	Helium MFC set to  0.000000
2/14/2012	1:57:35 AM	H2 MFC set to  0.000000
2/14/2012	1:57:35 AM	BCl3 MFC set to  0.000000
2/14/2012	1:57:35 AM	PH3 MFC set to  0.000000
2/14/2012	1:57:35 AM	SiCl4 MFC set to  0.000000
2/14/2012	1:57:35 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:57:35 AM	Tube furnace set to 0
2/14/2012	1:58:35 AM	Helium valve closed
2/14/2012	1:58:35 AM	H2 valve closed
2/14/2012	1:58:35 AM	BCl3 valve closed
2/14/2012	1:58:35 AM	PH3 valve closed
2/14/2012	1:58:35 AM	SiCl4 pre valve closed
2/14/2012	1:58:35 AM	SiCl4 post valve closed
2/14/2012	1:58:35 AM	Bypass valve closed
2/14/2012	1:58:35 AM	Bubbler valve closed
2/14/2012	1:58:35 AM	Main Vac valve opened
2/14/2012	1:58:35 AM	Helium MFC set to  0.000000
2/14/2012	1:58:35 AM	H2 MFC set to  0.000000
2/14/2012	1:58:35 AM	BCl3 MFC set to  0.000000
2/14/2012	1:58:35 AM	PH3 MFC set to  0.000000
2/14/2012	1:58:35 AM	SiCl4 MFC set to  0.000000
2/14/2012	1:58:35 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:58:35 AM	Tube furnace set to 0
2/14/2012	1:58:36 AM	Run finished at 1:58 AM
2/14/2012	1:58:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2012	1:59:10 AM	Recipe started at 1:59 AM
2/14/2012	1:59:10 AM	Helium valve closed
2/14/2012	1:59:10 AM	H2 valve closed
2/14/2012	1:59:10 AM	BCl3 valve closed
2/14/2012	1:59:10 AM	PH3 valve closed
2/14/2012	1:59:10 AM	SiCl4 pre valve closed
2/14/2012	1:59:10 AM	SiCl4 post valve closed
2/14/2012	1:59:10 AM	Bypass valve closed
2/14/2012	1:59:10 AM	Bubbler valve closed
2/14/2012	1:59:10 AM	Main Vac valve opened
2/14/2012	1:59:10 AM	Helium MFC set to  0.000000
2/14/2012	1:59:10 AM	H2 MFC set to  0.000000
2/14/2012	1:59:10 AM	BCl3 MFC set to  0.000000
2/14/2012	1:59:10 AM	PH3 MFC set to  0.000000
2/14/2012	1:59:10 AM	SiCl4 MFC set to  0.000000
2/14/2012	1:59:10 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:59:11 AM	Tube furnace set to 0
2/14/2012	2:17:11 AM	Helium valve closed
2/14/2012	2:17:11 AM	H2 valve closed
2/14/2012	2:17:11 AM	BCl3 valve closed
2/14/2012	2:17:11 AM	PH3 valve closed
2/14/2012	2:17:11 AM	SiCl4 pre valve closed
2/14/2012	2:17:11 AM	SiCl4 post valve closed
2/14/2012	2:17:11 AM	Main Vac valve closed
2/14/2012	2:17:11 AM	Bypass valve closed
2/14/2012	2:17:11 AM	Bubbler valve closed
2/14/2012	2:17:11 AM	Helium MFC set to  0.000000
2/14/2012	2:17:11 AM	H2 MFC set to  0.000000
2/14/2012	2:17:11 AM	BCl3 MFC set to  0.000000
2/14/2012	2:17:11 AM	PH3 MFC set to  0.000000
2/14/2012	2:17:11 AM	SiCl4 MFC set to  0.000000
2/14/2012	2:17:11 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:17:11 AM	Tube furnace set to 0
2/14/2012	2:17:14 AM	Helium valve closed
2/14/2012	2:17:14 AM	BCl3 valve closed
2/14/2012	2:17:14 AM	PH3 valve closed
2/14/2012	2:17:14 AM	SiCl4 pre valve closed
2/14/2012	2:17:14 AM	SiCl4 post valve closed
2/14/2012	2:17:14 AM	Main Vac valve closed
2/14/2012	2:17:14 AM	Bypass valve closed
2/14/2012	2:17:14 AM	Bubbler valve closed
2/14/2012	2:17:14 AM	H2 valve opened
2/14/2012	2:17:14 AM	Helium MFC set to  0.000000
2/14/2012	2:17:14 AM	H2 MFC set to  500.000000
2/14/2012	2:17:14 AM	BCl3 MFC set to  0.000000
2/14/2012	2:17:14 AM	PH3 MFC set to  0.000000
2/14/2012	2:17:14 AM	SiCl4 MFC set to  0.000000
2/14/2012	2:17:14 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:17:14 AM	Tube furnace set to 0
2/14/2012	2:18:18 AM	Helium valve closed
2/14/2012	2:18:18 AM	BCl3 valve closed
2/14/2012	2:18:18 AM	PH3 valve closed
2/14/2012	2:18:18 AM	SiCl4 pre valve closed
2/14/2012	2:18:18 AM	SiCl4 post valve closed
2/14/2012	2:18:18 AM	Main Vac valve closed
2/14/2012	2:18:18 AM	Bypass valve closed
2/14/2012	2:18:18 AM	H2 valve opened
2/14/2012	2:18:18 AM	Bubbler valve opened
2/14/2012	2:18:18 AM	Helium MFC set to  0.000000
2/14/2012	2:18:18 AM	H2 MFC set to  500.000000
2/14/2012	2:18:18 AM	BCl3 MFC set to  0.000000
2/14/2012	2:18:18 AM	PH3 MFC set to  0.000000
2/14/2012	2:18:18 AM	SiCl4 MFC set to  0.000000
2/14/2012	2:18:18 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:18:18 AM	Tube furnace set to 0
2/14/2012	2:18:19 AM	Helium valve closed
2/14/2012	2:18:19 AM	BCl3 valve closed
2/14/2012	2:18:19 AM	PH3 valve closed
2/14/2012	2:18:19 AM	SiCl4 pre valve closed
2/14/2012	2:18:19 AM	SiCl4 post valve closed
2/14/2012	2:18:19 AM	Main Vac valve closed
2/14/2012	2:18:19 AM	Bypass valve closed
2/14/2012	2:18:19 AM	H2 valve opened
2/14/2012	2:18:19 AM	Bubbler valve opened
2/14/2012	2:18:19 AM	Helium MFC set to  0.000000
2/14/2012	2:18:19 AM	H2 MFC set to  500.000000
2/14/2012	2:18:19 AM	BCl3 MFC set to  0.000000
2/14/2012	2:18:19 AM	PH3 MFC set to  0.000000
2/14/2012	2:18:19 AM	SiCl4 MFC set to  0.000000
2/14/2012	2:18:19 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:18:19 AM	Tube furnace set to 1000
2/14/2012	2:43:19 AM	Helium valve closed
2/14/2012	2:43:19 AM	PH3 valve closed
2/14/2012	2:43:19 AM	Main Vac valve closed
2/14/2012	2:43:19 AM	Bypass valve closed
2/14/2012	2:43:19 AM	H2 valve opened
2/14/2012	2:43:19 AM	BCl3 valve opened
2/14/2012	2:43:19 AM	SiCl4 pre valve opened
2/14/2012	2:43:19 AM	SiCl4 post valve opened
2/14/2012	2:43:19 AM	Bubbler valve opened
2/14/2012	2:43:19 AM	Helium MFC set to  0.000000
2/14/2012	2:43:19 AM	H2 MFC set to  450.000000
2/14/2012	2:43:19 AM	BCl3 MFC set to  1.500000
2/14/2012	2:43:19 AM	PH3 MFC set to  0.000000
2/14/2012	2:43:19 AM	SiCl4 MFC set to  50.000000
2/14/2012	2:43:19 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:43:20 AM	Tube furnace set to 1000
2/14/2012	2:53:20 AM	Helium valve closed
2/14/2012	2:53:20 AM	BCl3 valve closed
2/14/2012	2:53:20 AM	PH3 valve closed
2/14/2012	2:53:20 AM	SiCl4 pre valve closed
2/14/2012	2:53:20 AM	SiCl4 post valve closed
2/14/2012	2:53:20 AM	Main Vac valve closed
2/14/2012	2:53:20 AM	Bypass valve closed
2/14/2012	2:53:20 AM	H2 valve opened
2/14/2012	2:53:20 AM	Bubbler valve opened
2/14/2012	2:53:20 AM	Helium MFC set to  0.000000
2/14/2012	2:53:20 AM	H2 MFC set to  500.000000
2/14/2012	2:53:20 AM	BCl3 MFC set to  0.000000
2/14/2012	2:53:20 AM	PH3 MFC set to  0.000000
2/14/2012	2:53:20 AM	SiCl4 MFC set to  0.000000
2/14/2012	2:53:20 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:53:20 AM	Tube furnace set to 750
2/14/2012	3:08:20 AM	H2 valve closed
2/14/2012	3:08:20 AM	BCl3 valve closed
2/14/2012	3:08:20 AM	PH3 valve closed
2/14/2012	3:08:20 AM	SiCl4 pre valve closed
2/14/2012	3:08:20 AM	SiCl4 post valve closed
2/14/2012	3:08:20 AM	Main Vac valve closed
2/14/2012	3:08:20 AM	Bypass valve closed
2/14/2012	3:08:20 AM	Helium valve opened
2/14/2012	3:08:20 AM	Bubbler valve opened
2/14/2012	3:08:20 AM	Helium MFC set to  500.000000
2/14/2012	3:08:20 AM	H2 MFC set to  0.000000
2/14/2012	3:08:20 AM	BCl3 MFC set to  0.000000
2/14/2012	3:08:20 AM	PH3 MFC set to  0.000000
2/14/2012	3:08:20 AM	SiCl4 MFC set to  0.000000
2/14/2012	3:08:20 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:08:20 AM	Tube furnace set to 0
2/14/2012	3:28:20 AM	Helium valve closed
2/14/2012	3:28:20 AM	H2 valve closed
2/14/2012	3:28:20 AM	BCl3 valve closed
2/14/2012	3:28:20 AM	PH3 valve closed
2/14/2012	3:28:20 AM	SiCl4 pre valve closed
2/14/2012	3:28:20 AM	SiCl4 post valve closed
2/14/2012	3:28:20 AM	Main Vac valve closed
2/14/2012	3:28:20 AM	Bypass valve closed
2/14/2012	3:28:20 AM	Bubbler valve closed
2/14/2012	3:28:20 AM	Helium MFC set to  0.000000
2/14/2012	3:28:20 AM	H2 MFC set to  0.000000
2/14/2012	3:28:20 AM	BCl3 MFC set to  0.000000
2/14/2012	3:28:20 AM	PH3 MFC set to  0.000000
2/14/2012	3:28:20 AM	SiCl4 MFC set to  0.000000
2/14/2012	3:28:20 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:28:20 AM	Tube furnace set to 0
2/14/2012	3:48:20 AM	Helium valve closed
2/14/2012	3:48:20 AM	H2 valve closed
2/14/2012	3:48:20 AM	BCl3 valve closed
2/14/2012	3:48:20 AM	PH3 valve closed
2/14/2012	3:48:20 AM	SiCl4 pre valve closed
2/14/2012	3:48:20 AM	SiCl4 post valve closed
2/14/2012	3:48:20 AM	Main Vac valve closed
2/14/2012	3:48:20 AM	Bubbler valve closed
2/14/2012	3:48:20 AM	Bypass valve opened
2/14/2012	3:48:20 AM	Helium MFC set to  0.000000
2/14/2012	3:48:20 AM	H2 MFC set to  0.000000
2/14/2012	3:48:20 AM	BCl3 MFC set to  0.000000
2/14/2012	3:48:20 AM	PH3 MFC set to  0.000000
2/14/2012	3:48:20 AM	SiCl4 MFC set to  0.000000
2/14/2012	3:48:20 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:48:20 AM	Tube furnace set to 0
2/14/2012	3:49:06 AM	Helium valve closed
2/14/2012	3:49:06 AM	H2 valve closed
2/14/2012	3:49:06 AM	BCl3 valve closed
2/14/2012	3:49:06 AM	PH3 valve closed
2/14/2012	3:49:06 AM	SiCl4 pre valve closed
2/14/2012	3:49:06 AM	SiCl4 post valve closed
2/14/2012	3:49:06 AM	Main Vac valve closed
2/14/2012	3:49:06 AM	Bubbler valve closed
2/14/2012	3:49:06 AM	Bypass valve opened
2/14/2012	3:49:06 AM	Helium MFC set to  0.000000
2/14/2012	3:49:06 AM	H2 MFC set to  0.000000
2/14/2012	3:49:06 AM	BCl3 MFC set to  0.000000
2/14/2012	3:49:06 AM	PH3 MFC set to  0.000000
2/14/2012	3:49:06 AM	SiCl4 MFC set to  0.000000
2/14/2012	3:49:06 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:49:06 AM	Tube furnace set to 0
2/14/2012	3:50:06 AM	Helium valve closed
2/14/2012	3:50:06 AM	H2 valve closed
2/14/2012	3:50:06 AM	BCl3 valve closed
2/14/2012	3:50:06 AM	PH3 valve closed
2/14/2012	3:50:06 AM	SiCl4 pre valve closed
2/14/2012	3:50:06 AM	SiCl4 post valve closed
2/14/2012	3:50:06 AM	Bypass valve closed
2/14/2012	3:50:06 AM	Bubbler valve closed
2/14/2012	3:50:06 AM	Main Vac valve opened
2/14/2012	3:50:06 AM	Helium MFC set to  0.000000
2/14/2012	3:50:06 AM	H2 MFC set to  0.000000
2/14/2012	3:50:06 AM	BCl3 MFC set to  0.000000
2/14/2012	3:50:06 AM	PH3 MFC set to  0.000000
2/14/2012	3:50:06 AM	SiCl4 MFC set to  0.000000
2/14/2012	3:50:06 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:50:06 AM	Tube furnace set to 0
2/14/2012	4:50:06 AM	Run finished at 4:50 AM
2/14/2012	8:19:14 AM	Main Vac valve closed
2/14/2012	8:19:31 AM	Main Vac valve opened
2/14/2012	8:21:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2012	8:21:10 AM	Recipe started at 8:21 AM
2/14/2012	8:21:10 AM	Helium valve closed
2/14/2012	8:21:10 AM	H2 valve closed
2/14/2012	8:21:10 AM	BCl3 valve closed
2/14/2012	8:21:10 AM	PH3 valve closed
2/14/2012	8:21:10 AM	SiCl4 pre valve closed
2/14/2012	8:21:10 AM	SiCl4 post valve closed
2/14/2012	8:21:10 AM	Main Vac valve closed
2/14/2012	8:21:10 AM	Bypass valve closed
2/14/2012	8:21:10 AM	Bubbler valve closed
2/14/2012	8:21:10 AM	Helium MFC set to  0.000000
2/14/2012	8:21:10 AM	H2 MFC set to  0.000000
2/14/2012	8:21:10 AM	BCl3 MFC set to  0.000000
2/14/2012	8:21:10 AM	PH3 MFC set to  0.000000
2/14/2012	8:21:10 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:21:10 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:21:10 AM	Tube furnace set to 0
2/14/2012	8:21:13 AM	H2 valve closed
2/14/2012	8:21:13 AM	BCl3 valve closed
2/14/2012	8:21:13 AM	PH3 valve closed
2/14/2012	8:21:13 AM	SiCl4 pre valve closed
2/14/2012	8:21:13 AM	SiCl4 post valve closed
2/14/2012	8:21:13 AM	Main Vac valve closed
2/14/2012	8:21:13 AM	Bypass valve closed
2/14/2012	8:21:13 AM	Bubbler valve closed
2/14/2012	8:21:13 AM	Helium valve opened
2/14/2012	8:21:13 AM	Helium MFC set to  500.000000
2/14/2012	8:21:13 AM	H2 MFC set to  0.000000
2/14/2012	8:21:13 AM	BCl3 MFC set to  0.000000
2/14/2012	8:21:13 AM	PH3 MFC set to  0.000000
2/14/2012	8:21:13 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:21:13 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:21:13 AM	Tube furnace set to 0
2/14/2012	8:22:18 AM	Helium valve closed
2/14/2012	8:22:18 AM	H2 valve closed
2/14/2012	8:22:18 AM	BCl3 valve closed
2/14/2012	8:22:18 AM	PH3 valve closed
2/14/2012	8:22:18 AM	SiCl4 pre valve closed
2/14/2012	8:22:18 AM	SiCl4 post valve closed
2/14/2012	8:22:18 AM	Main Vac valve closed
2/14/2012	8:22:18 AM	Bypass valve closed
2/14/2012	8:22:18 AM	Bubbler valve closed
2/14/2012	8:22:18 AM	Helium MFC set to  0.000000
2/14/2012	8:22:18 AM	H2 MFC set to  0.000000
2/14/2012	8:22:18 AM	BCl3 MFC set to  0.000000
2/14/2012	8:22:18 AM	PH3 MFC set to  0.000000
2/14/2012	8:22:18 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:22:18 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:22:18 AM	Tube furnace set to 0
2/14/2012	8:22:19 AM	Run finished at 8:22 AM
2/14/2012	8:22:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2012	8:31:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2012	8:31:20 AM	Recipe started at 8:31 AM
2/14/2012	8:31:20 AM	Helium valve closed
2/14/2012	8:31:20 AM	H2 valve closed
2/14/2012	8:31:20 AM	BCl3 valve closed
2/14/2012	8:31:20 AM	PH3 valve closed
2/14/2012	8:31:20 AM	SiCl4 pre valve closed
2/14/2012	8:31:20 AM	SiCl4 post valve closed
2/14/2012	8:31:20 AM	Main Vac valve closed
2/14/2012	8:31:20 AM	Bubbler valve closed
2/14/2012	8:31:20 AM	Bypass valve opened
2/14/2012	8:31:20 AM	Helium MFC set to  0.000000
2/14/2012	8:31:20 AM	H2 MFC set to  0.000000
2/14/2012	8:31:20 AM	BCl3 MFC set to  0.000000
2/14/2012	8:31:20 AM	PH3 MFC set to  0.000000
2/14/2012	8:31:20 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:31:20 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:31:20 AM	Tube furnace set to 0
2/14/2012	8:32:24 AM	Helium valve closed
2/14/2012	8:32:24 AM	H2 valve closed
2/14/2012	8:32:24 AM	BCl3 valve closed
2/14/2012	8:32:24 AM	PH3 valve closed
2/14/2012	8:32:24 AM	SiCl4 pre valve closed
2/14/2012	8:32:24 AM	SiCl4 post valve closed
2/14/2012	8:32:24 AM	Main Vac valve closed
2/14/2012	8:32:24 AM	Bubbler valve closed
2/14/2012	8:32:24 AM	Bypass valve opened
2/14/2012	8:32:24 AM	Helium MFC set to  0.000000
2/14/2012	8:32:24 AM	H2 MFC set to  0.000000
2/14/2012	8:32:24 AM	BCl3 MFC set to  0.000000
2/14/2012	8:32:24 AM	PH3 MFC set to  0.000000
2/14/2012	8:32:24 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:32:24 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:32:24 AM	Tube furnace set to 0
2/14/2012	8:33:24 AM	Helium valve closed
2/14/2012	8:33:24 AM	H2 valve closed
2/14/2012	8:33:24 AM	BCl3 valve closed
2/14/2012	8:33:24 AM	PH3 valve closed
2/14/2012	8:33:24 AM	SiCl4 pre valve closed
2/14/2012	8:33:24 AM	SiCl4 post valve closed
2/14/2012	8:33:24 AM	Bypass valve closed
2/14/2012	8:33:24 AM	Bubbler valve closed
2/14/2012	8:33:24 AM	Main Vac valve opened
2/14/2012	8:33:24 AM	Helium MFC set to  0.000000
2/14/2012	8:33:24 AM	H2 MFC set to  0.000000
2/14/2012	8:33:24 AM	BCl3 MFC set to  0.000000
2/14/2012	8:33:24 AM	PH3 MFC set to  0.000000
2/14/2012	8:33:24 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:33:24 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:33:25 AM	Tube furnace set to 0
2/14/2012	8:33:26 AM	Run finished at 8:33 AM
2/14/2012	8:33:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2012	8:34:06 AM	Recipe started at 8:34 AM
2/14/2012	8:34:06 AM	Helium valve closed
2/14/2012	8:34:06 AM	H2 valve closed
2/14/2012	8:34:06 AM	BCl3 valve closed
2/14/2012	8:34:06 AM	PH3 valve closed
2/14/2012	8:34:06 AM	SiCl4 pre valve closed
2/14/2012	8:34:06 AM	SiCl4 post valve closed
2/14/2012	8:34:06 AM	Bypass valve closed
2/14/2012	8:34:06 AM	Bubbler valve closed
2/14/2012	8:34:06 AM	Main Vac valve opened
2/14/2012	8:34:06 AM	Helium MFC set to  0.000000
2/14/2012	8:34:06 AM	H2 MFC set to  0.000000
2/14/2012	8:34:06 AM	BCl3 MFC set to  0.000000
2/14/2012	8:34:06 AM	PH3 MFC set to  0.000000
2/14/2012	8:34:06 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:34:06 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:34:06 AM	Tube furnace set to 150
2/14/2012	8:34:36 AM	H2 valve closed
2/14/2012	8:34:36 AM	BCl3 valve closed
2/14/2012	8:34:36 AM	PH3 valve closed
2/14/2012	8:34:36 AM	SiCl4 pre valve closed
2/14/2012	8:34:36 AM	SiCl4 post valve closed
2/14/2012	8:34:36 AM	Bypass valve closed
2/14/2012	8:34:36 AM	Bubbler valve closed
2/14/2012	8:34:36 AM	Helium valve opened
2/14/2012	8:34:36 AM	Main Vac valve opened
2/14/2012	8:34:36 AM	Helium MFC set to  20.000000
2/14/2012	8:34:36 AM	H2 MFC set to  0.000000
2/14/2012	8:34:36 AM	BCl3 MFC set to  0.000000
2/14/2012	8:34:36 AM	PH3 MFC set to  0.000000
2/14/2012	8:34:36 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:34:36 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:34:36 AM	Tube furnace set to 150
2/14/2012	8:35:06 AM	Helium valve closed
2/14/2012	8:35:06 AM	H2 valve closed
2/14/2012	8:35:06 AM	BCl3 valve closed
2/14/2012	8:35:06 AM	PH3 valve closed
2/14/2012	8:35:06 AM	SiCl4 pre valve closed
2/14/2012	8:35:06 AM	SiCl4 post valve closed
2/14/2012	8:35:06 AM	Bypass valve closed
2/14/2012	8:35:06 AM	Bubbler valve closed
2/14/2012	8:35:06 AM	Main Vac valve opened
2/14/2012	8:35:06 AM	Helium MFC set to  0.000000
2/14/2012	8:35:06 AM	H2 MFC set to  0.000000
2/14/2012	8:35:06 AM	BCl3 MFC set to  0.000000
2/14/2012	8:35:06 AM	PH3 MFC set to  0.000000
2/14/2012	8:35:06 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:35:06 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:35:06 AM	Tube furnace set to 150
2/14/2012	8:35:36 AM	H2 valve closed
2/14/2012	8:35:36 AM	BCl3 valve closed
2/14/2012	8:35:36 AM	PH3 valve closed
2/14/2012	8:35:36 AM	SiCl4 pre valve closed
2/14/2012	8:35:36 AM	SiCl4 post valve closed
2/14/2012	8:35:36 AM	Bypass valve closed
2/14/2012	8:35:36 AM	Bubbler valve closed
2/14/2012	8:35:36 AM	Helium valve opened
2/14/2012	8:35:36 AM	Main Vac valve opened
2/14/2012	8:35:36 AM	Helium MFC set to  20.000000
2/14/2012	8:35:36 AM	H2 MFC set to  0.000000
2/14/2012	8:35:36 AM	BCl3 MFC set to  0.000000
2/14/2012	8:35:36 AM	PH3 MFC set to  0.000000
2/14/2012	8:35:36 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:35:36 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:35:37 AM	Tube furnace set to 150
2/14/2012	8:36:07 AM	Helium valve closed
2/14/2012	8:36:07 AM	H2 valve closed
2/14/2012	8:36:07 AM	BCl3 valve closed
2/14/2012	8:36:07 AM	PH3 valve closed
2/14/2012	8:36:07 AM	SiCl4 pre valve closed
2/14/2012	8:36:07 AM	SiCl4 post valve closed
2/14/2012	8:36:07 AM	Bypass valve closed
2/14/2012	8:36:07 AM	Bubbler valve closed
2/14/2012	8:36:07 AM	Main Vac valve opened
2/14/2012	8:36:07 AM	Helium MFC set to  0.000000
2/14/2012	8:36:07 AM	H2 MFC set to  0.000000
2/14/2012	8:36:07 AM	BCl3 MFC set to  0.000000
2/14/2012	8:36:07 AM	PH3 MFC set to  0.000000
2/14/2012	8:36:07 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:36:07 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:36:07 AM	Tube furnace set to 150
2/14/2012	8:36:37 AM	H2 valve closed
2/14/2012	8:36:37 AM	BCl3 valve closed
2/14/2012	8:36:37 AM	PH3 valve closed
2/14/2012	8:36:37 AM	SiCl4 pre valve closed
2/14/2012	8:36:37 AM	SiCl4 post valve closed
2/14/2012	8:36:37 AM	Bypass valve closed
2/14/2012	8:36:37 AM	Bubbler valve closed
2/14/2012	8:36:37 AM	Helium valve opened
2/14/2012	8:36:37 AM	Main Vac valve opened
2/14/2012	8:36:37 AM	Helium MFC set to  20.000000
2/14/2012	8:36:37 AM	H2 MFC set to  0.000000
2/14/2012	8:36:37 AM	BCl3 MFC set to  0.000000
2/14/2012	8:36:37 AM	PH3 MFC set to  0.000000
2/14/2012	8:36:37 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:36:37 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:36:37 AM	Tube furnace set to 150
2/14/2012	8:37:07 AM	Helium valve closed
2/14/2012	8:37:07 AM	H2 valve closed
2/14/2012	8:37:07 AM	BCl3 valve closed
2/14/2012	8:37:07 AM	PH3 valve closed
2/14/2012	8:37:07 AM	SiCl4 pre valve closed
2/14/2012	8:37:07 AM	SiCl4 post valve closed
2/14/2012	8:37:07 AM	Bypass valve closed
2/14/2012	8:37:07 AM	Bubbler valve closed
2/14/2012	8:37:07 AM	Main Vac valve opened
2/14/2012	8:37:07 AM	Helium MFC set to  0.000000
2/14/2012	8:37:07 AM	H2 MFC set to  0.000000
2/14/2012	8:37:07 AM	BCl3 MFC set to  0.000000
2/14/2012	8:37:07 AM	PH3 MFC set to  0.000000
2/14/2012	8:37:07 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:37:07 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:37:07 AM	Tube furnace set to 150
2/14/2012	8:37:37 AM	H2 valve closed
2/14/2012	8:37:37 AM	BCl3 valve closed
2/14/2012	8:37:37 AM	PH3 valve closed
2/14/2012	8:37:37 AM	SiCl4 pre valve closed
2/14/2012	8:37:37 AM	SiCl4 post valve closed
2/14/2012	8:37:37 AM	Bypass valve closed
2/14/2012	8:37:37 AM	Bubbler valve closed
2/14/2012	8:37:37 AM	Helium valve opened
2/14/2012	8:37:37 AM	Main Vac valve opened
2/14/2012	8:37:37 AM	Helium MFC set to  20.000000
2/14/2012	8:37:37 AM	H2 MFC set to  0.000000
2/14/2012	8:37:37 AM	BCl3 MFC set to  0.000000
2/14/2012	8:37:37 AM	PH3 MFC set to  0.000000
2/14/2012	8:37:37 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:37:37 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:37:37 AM	Tube furnace set to 150
2/14/2012	8:38:07 AM	Helium valve closed
2/14/2012	8:38:07 AM	H2 valve closed
2/14/2012	8:38:07 AM	BCl3 valve closed
2/14/2012	8:38:07 AM	PH3 valve closed
2/14/2012	8:38:07 AM	SiCl4 pre valve closed
2/14/2012	8:38:07 AM	SiCl4 post valve closed
2/14/2012	8:38:07 AM	Bypass valve closed
2/14/2012	8:38:07 AM	Bubbler valve closed
2/14/2012	8:38:07 AM	Main Vac valve opened
2/14/2012	8:38:07 AM	Helium MFC set to  0.000000
2/14/2012	8:38:07 AM	H2 MFC set to  0.000000
2/14/2012	8:38:08 AM	BCl3 MFC set to  0.000000
2/14/2012	8:38:08 AM	PH3 MFC set to  0.000000
2/14/2012	8:38:08 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:38:08 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:38:08 AM	Tube furnace set to 150
2/14/2012	8:38:38 AM	H2 valve closed
2/14/2012	8:38:38 AM	BCl3 valve closed
2/14/2012	8:38:38 AM	PH3 valve closed
2/14/2012	8:38:38 AM	SiCl4 pre valve closed
2/14/2012	8:38:38 AM	SiCl4 post valve closed
2/14/2012	8:38:38 AM	Bypass valve closed
2/14/2012	8:38:38 AM	Bubbler valve closed
2/14/2012	8:38:38 AM	Helium valve opened
2/14/2012	8:38:38 AM	Main Vac valve opened
2/14/2012	8:38:38 AM	Helium MFC set to  20.000000
2/14/2012	8:38:38 AM	H2 MFC set to  0.000000
2/14/2012	8:38:38 AM	BCl3 MFC set to  0.000000
2/14/2012	8:38:38 AM	PH3 MFC set to  0.000000
2/14/2012	8:38:38 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:38:38 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:38:38 AM	Tube furnace set to 150
2/14/2012	8:39:08 AM	Helium valve closed
2/14/2012	8:39:08 AM	H2 valve closed
2/14/2012	8:39:08 AM	BCl3 valve closed
2/14/2012	8:39:08 AM	PH3 valve closed
2/14/2012	8:39:08 AM	SiCl4 pre valve closed
2/14/2012	8:39:08 AM	SiCl4 post valve closed
2/14/2012	8:39:08 AM	Bypass valve closed
2/14/2012	8:39:08 AM	Bubbler valve closed
2/14/2012	8:39:08 AM	Main Vac valve opened
2/14/2012	8:39:08 AM	Helium MFC set to  0.000000
2/14/2012	8:39:08 AM	H2 MFC set to  0.000000
2/14/2012	8:39:08 AM	BCl3 MFC set to  0.000000
2/14/2012	8:39:08 AM	PH3 MFC set to  0.000000
2/14/2012	8:39:08 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:39:08 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:39:08 AM	Tube furnace set to 150
2/14/2012	8:39:38 AM	H2 valve closed
2/14/2012	8:39:38 AM	BCl3 valve closed
2/14/2012	8:39:38 AM	PH3 valve closed
2/14/2012	8:39:38 AM	SiCl4 pre valve closed
2/14/2012	8:39:38 AM	SiCl4 post valve closed
2/14/2012	8:39:38 AM	Bypass valve closed
2/14/2012	8:39:38 AM	Bubbler valve closed
2/14/2012	8:39:38 AM	Helium valve opened
2/14/2012	8:39:38 AM	Main Vac valve opened
2/14/2012	8:39:38 AM	Helium MFC set to  20.000000
2/14/2012	8:39:38 AM	H2 MFC set to  0.000000
2/14/2012	8:39:38 AM	BCl3 MFC set to  0.000000
2/14/2012	8:39:38 AM	PH3 MFC set to  0.000000
2/14/2012	8:39:38 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:39:38 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:39:38 AM	Tube furnace set to 150
2/14/2012	8:40:08 AM	Helium valve closed
2/14/2012	8:40:08 AM	H2 valve closed
2/14/2012	8:40:08 AM	BCl3 valve closed
2/14/2012	8:40:08 AM	PH3 valve closed
2/14/2012	8:40:08 AM	SiCl4 pre valve closed
2/14/2012	8:40:08 AM	SiCl4 post valve closed
2/14/2012	8:40:08 AM	Bypass valve closed
2/14/2012	8:40:08 AM	Bubbler valve closed
2/14/2012	8:40:08 AM	Main Vac valve opened
2/14/2012	8:40:08 AM	Helium MFC set to  0.000000
2/14/2012	8:40:08 AM	H2 MFC set to  0.000000
2/14/2012	8:40:08 AM	BCl3 MFC set to  0.000000
2/14/2012	8:40:08 AM	PH3 MFC set to  0.000000
2/14/2012	8:40:08 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:40:08 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:40:09 AM	Tube furnace set to 150
2/14/2012	8:40:39 AM	H2 valve closed
2/14/2012	8:40:39 AM	BCl3 valve closed
2/14/2012	8:40:39 AM	PH3 valve closed
2/14/2012	8:40:39 AM	SiCl4 pre valve closed
2/14/2012	8:40:39 AM	SiCl4 post valve closed
2/14/2012	8:40:39 AM	Bypass valve closed
2/14/2012	8:40:39 AM	Bubbler valve closed
2/14/2012	8:40:39 AM	Helium valve opened
2/14/2012	8:40:39 AM	Main Vac valve opened
2/14/2012	8:40:39 AM	Helium MFC set to  20.000000
2/14/2012	8:40:39 AM	H2 MFC set to  0.000000
2/14/2012	8:40:39 AM	BCl3 MFC set to  0.000000
2/14/2012	8:40:39 AM	PH3 MFC set to  0.000000
2/14/2012	8:40:39 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:40:39 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:40:39 AM	Tube furnace set to 150
2/14/2012	8:41:09 AM	Helium valve closed
2/14/2012	8:41:09 AM	H2 valve closed
2/14/2012	8:41:09 AM	BCl3 valve closed
2/14/2012	8:41:09 AM	PH3 valve closed
2/14/2012	8:41:09 AM	SiCl4 pre valve closed
2/14/2012	8:41:09 AM	SiCl4 post valve closed
2/14/2012	8:41:09 AM	Bypass valve closed
2/14/2012	8:41:09 AM	Bubbler valve closed
2/14/2012	8:41:09 AM	Main Vac valve opened
2/14/2012	8:41:09 AM	Helium MFC set to  0.000000
2/14/2012	8:41:09 AM	H2 MFC set to  0.000000
2/14/2012	8:41:09 AM	BCl3 MFC set to  0.000000
2/14/2012	8:41:09 AM	PH3 MFC set to  0.000000
2/14/2012	8:41:09 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:41:09 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:41:09 AM	Tube furnace set to 150
2/14/2012	8:41:39 AM	H2 valve closed
2/14/2012	8:41:39 AM	BCl3 valve closed
2/14/2012	8:41:39 AM	PH3 valve closed
2/14/2012	8:41:39 AM	SiCl4 pre valve closed
2/14/2012	8:41:39 AM	SiCl4 post valve closed
2/14/2012	8:41:39 AM	Bypass valve closed
2/14/2012	8:41:39 AM	Bubbler valve closed
2/14/2012	8:41:39 AM	Helium valve opened
2/14/2012	8:41:39 AM	Main Vac valve opened
2/14/2012	8:41:39 AM	Helium MFC set to  20.000000
2/14/2012	8:41:39 AM	H2 MFC set to  0.000000
2/14/2012	8:41:39 AM	BCl3 MFC set to  0.000000
2/14/2012	8:41:39 AM	PH3 MFC set to  0.000000
2/14/2012	8:41:39 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:41:39 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:41:39 AM	Tube furnace set to 150
2/14/2012	8:42:09 AM	Helium valve closed
2/14/2012	8:42:09 AM	H2 valve closed
2/14/2012	8:42:09 AM	BCl3 valve closed
2/14/2012	8:42:09 AM	PH3 valve closed
2/14/2012	8:42:09 AM	SiCl4 pre valve closed
2/14/2012	8:42:09 AM	SiCl4 post valve closed
2/14/2012	8:42:09 AM	Bypass valve closed
2/14/2012	8:42:09 AM	Bubbler valve closed
2/14/2012	8:42:09 AM	Main Vac valve opened
2/14/2012	8:42:09 AM	Helium MFC set to  0.000000
2/14/2012	8:42:09 AM	H2 MFC set to  0.000000
2/14/2012	8:42:09 AM	BCl3 MFC set to  0.000000
2/14/2012	8:42:09 AM	PH3 MFC set to  0.000000
2/14/2012	8:42:09 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:42:09 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:42:09 AM	Tube furnace set to 150
2/14/2012	8:42:39 AM	H2 valve closed
2/14/2012	8:42:39 AM	BCl3 valve closed
2/14/2012	8:42:39 AM	PH3 valve closed
2/14/2012	8:42:39 AM	SiCl4 pre valve closed
2/14/2012	8:42:39 AM	SiCl4 post valve closed
2/14/2012	8:42:39 AM	Bypass valve closed
2/14/2012	8:42:39 AM	Bubbler valve closed
2/14/2012	8:42:39 AM	Helium valve opened
2/14/2012	8:42:39 AM	Main Vac valve opened
2/14/2012	8:42:39 AM	Helium MFC set to  20.000000
2/14/2012	8:42:39 AM	H2 MFC set to  0.000000
2/14/2012	8:42:39 AM	BCl3 MFC set to  0.000000
2/14/2012	8:42:39 AM	PH3 MFC set to  0.000000
2/14/2012	8:42:39 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:42:39 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:42:40 AM	Tube furnace set to 150
2/14/2012	8:43:10 AM	Helium valve closed
2/14/2012	8:43:10 AM	H2 valve closed
2/14/2012	8:43:10 AM	BCl3 valve closed
2/14/2012	8:43:10 AM	PH3 valve closed
2/14/2012	8:43:10 AM	SiCl4 pre valve closed
2/14/2012	8:43:10 AM	SiCl4 post valve closed
2/14/2012	8:43:10 AM	Bypass valve closed
2/14/2012	8:43:10 AM	Bubbler valve closed
2/14/2012	8:43:10 AM	Main Vac valve opened
2/14/2012	8:43:10 AM	Helium MFC set to  0.000000
2/14/2012	8:43:10 AM	H2 MFC set to  0.000000
2/14/2012	8:43:10 AM	BCl3 MFC set to  0.000000
2/14/2012	8:43:10 AM	PH3 MFC set to  0.000000
2/14/2012	8:43:10 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:43:10 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:43:10 AM	Tube furnace set to 150
2/14/2012	8:43:40 AM	H2 valve closed
2/14/2012	8:43:40 AM	BCl3 valve closed
2/14/2012	8:43:40 AM	PH3 valve closed
2/14/2012	8:43:40 AM	SiCl4 pre valve closed
2/14/2012	8:43:40 AM	SiCl4 post valve closed
2/14/2012	8:43:40 AM	Bypass valve closed
2/14/2012	8:43:40 AM	Bubbler valve closed
2/14/2012	8:43:40 AM	Helium valve opened
2/14/2012	8:43:40 AM	Main Vac valve opened
2/14/2012	8:43:40 AM	Helium MFC set to  20.000000
2/14/2012	8:43:40 AM	H2 MFC set to  0.000000
2/14/2012	8:43:40 AM	BCl3 MFC set to  0.000000
2/14/2012	8:43:40 AM	PH3 MFC set to  0.000000
2/14/2012	8:43:40 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:43:40 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:43:40 AM	Tube furnace set to 150
2/14/2012	8:44:10 AM	Helium valve closed
2/14/2012	8:44:10 AM	H2 valve closed
2/14/2012	8:44:10 AM	BCl3 valve closed
2/14/2012	8:44:10 AM	PH3 valve closed
2/14/2012	8:44:10 AM	SiCl4 pre valve closed
2/14/2012	8:44:10 AM	SiCl4 post valve closed
2/14/2012	8:44:10 AM	Bypass valve closed
2/14/2012	8:44:10 AM	Bubbler valve closed
2/14/2012	8:44:10 AM	Main Vac valve opened
2/14/2012	8:44:10 AM	Helium MFC set to  0.000000
2/14/2012	8:44:10 AM	H2 MFC set to  0.000000
2/14/2012	8:44:10 AM	BCl3 MFC set to  0.000000
2/14/2012	8:44:10 AM	PH3 MFC set to  0.000000
2/14/2012	8:44:10 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:44:10 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:44:10 AM	Tube furnace set to 150
2/14/2012	8:44:11 AM	Run finished at 8:44 AM
2/14/2012	8:45:07 AM	Main Vac valve closed
2/14/2012	8:45:22 AM	Main Vac valve opened
2/14/2012	8:45:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/14/2012	8:46:04 AM	Recipe started at 8:45 AM
2/14/2012	8:46:04 AM	Helium valve closed
2/14/2012	8:46:04 AM	H2 valve closed
2/14/2012	8:46:04 AM	BCl3 valve closed
2/14/2012	8:46:04 AM	PH3 valve closed
2/14/2012	8:46:04 AM	SiCl4 pre valve closed
2/14/2012	8:46:04 AM	SiCl4 post valve closed
2/14/2012	8:46:04 AM	Main Vac valve closed
2/14/2012	8:46:04 AM	Bubbler valve closed
2/14/2012	8:46:04 AM	Bypass valve opened
2/14/2012	8:46:04 AM	Helium MFC set to  0.000000
2/14/2012	8:46:04 AM	H2 MFC set to  0.000000
2/14/2012	8:46:04 AM	BCl3 MFC set to  0.000000
2/14/2012	8:46:04 AM	PH3 MFC set to  0.000000
2/14/2012	8:46:04 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:46:04 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:46:04 AM	Tube furnace set to 0
2/14/2012	8:46:04 AM	Run aborted at 8:46 AM
2/14/2012	8:46:04 AM	Helium valve closed
2/14/2012	8:46:04 AM	H2 valve closed
2/14/2012	8:46:04 AM	BCl3 valve closed
2/14/2012	8:46:04 AM	PH3 valve closed
2/14/2012	8:46:04 AM	SiCl4 pre valve closed
2/14/2012	8:46:04 AM	SiCl4 post valve closed
2/14/2012	8:46:04 AM	Bypass valve closed
2/14/2012	8:46:04 AM	Main Vac valve closed
2/14/2012	8:46:04 AM	Bubbler valve closed
2/14/2012	8:46:04 AM	Helium MFC set to  0.000000
2/14/2012	8:46:04 AM	H2 MFC set to  0.000000
2/14/2012	8:46:04 AM	BCl3 MFC set to  0.000000
2/14/2012	8:46:04 AM	PH3 MFC set to  0.000000
2/14/2012	8:46:04 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:46:04 AM	Tube furnace set to 0
2/14/2012	8:46:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/14/2012	8:46:09 AM	Tube furnace set to 150
2/14/2012	8:46:11 AM	Main Vac valve opened
2/14/2012	8:46:25 AM	Recipe started at 8:46 AM
2/14/2012	8:46:25 AM	Helium valve closed
2/14/2012	8:46:25 AM	H2 valve closed
2/14/2012	8:46:25 AM	BCl3 valve closed
2/14/2012	8:46:25 AM	PH3 valve closed
2/14/2012	8:46:25 AM	SiCl4 pre valve closed
2/14/2012	8:46:25 AM	SiCl4 post valve closed
2/14/2012	8:46:25 AM	Bypass valve closed
2/14/2012	8:46:25 AM	Bubbler valve closed
2/14/2012	8:46:25 AM	Main Vac valve opened
2/14/2012	8:46:25 AM	Helium MFC set to  0.000000
2/14/2012	8:46:25 AM	H2 MFC set to  0.000000
2/14/2012	8:46:25 AM	BCl3 MFC set to  0.000000
2/14/2012	8:46:25 AM	PH3 MFC set to  0.000000
2/14/2012	8:46:25 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:46:25 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:46:25 AM	Tube furnace set to 150
2/14/2012	8:46:55 AM	H2 valve closed
2/14/2012	8:46:55 AM	BCl3 valve closed
2/14/2012	8:46:55 AM	PH3 valve closed
2/14/2012	8:46:55 AM	SiCl4 pre valve closed
2/14/2012	8:46:55 AM	SiCl4 post valve closed
2/14/2012	8:46:55 AM	Bypass valve closed
2/14/2012	8:46:55 AM	Bubbler valve closed
2/14/2012	8:46:55 AM	Helium valve opened
2/14/2012	8:46:55 AM	Main Vac valve opened
2/14/2012	8:46:55 AM	Helium MFC set to  20.000000
2/14/2012	8:46:55 AM	H2 MFC set to  0.000000
2/14/2012	8:46:55 AM	BCl3 MFC set to  0.000000
2/14/2012	8:46:55 AM	PH3 MFC set to  0.000000
2/14/2012	8:46:55 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:46:55 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:46:55 AM	Tube furnace set to 150
2/14/2012	8:47:25 AM	Helium valve closed
2/14/2012	8:47:25 AM	H2 valve closed
2/14/2012	8:47:25 AM	BCl3 valve closed
2/14/2012	8:47:25 AM	PH3 valve closed
2/14/2012	8:47:25 AM	SiCl4 pre valve closed
2/14/2012	8:47:25 AM	SiCl4 post valve closed
2/14/2012	8:47:25 AM	Bypass valve closed
2/14/2012	8:47:25 AM	Bubbler valve closed
2/14/2012	8:47:25 AM	Main Vac valve opened
2/14/2012	8:47:25 AM	Helium MFC set to  0.000000
2/14/2012	8:47:25 AM	H2 MFC set to  0.000000
2/14/2012	8:47:25 AM	BCl3 MFC set to  0.000000
2/14/2012	8:47:25 AM	PH3 MFC set to  0.000000
2/14/2012	8:47:25 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:47:25 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:47:25 AM	Tube furnace set to 150
2/14/2012	8:47:55 AM	H2 valve closed
2/14/2012	8:47:55 AM	BCl3 valve closed
2/14/2012	8:47:55 AM	PH3 valve closed
2/14/2012	8:47:55 AM	SiCl4 pre valve closed
2/14/2012	8:47:55 AM	SiCl4 post valve closed
2/14/2012	8:47:55 AM	Bypass valve closed
2/14/2012	8:47:55 AM	Bubbler valve closed
2/14/2012	8:47:55 AM	Helium valve opened
2/14/2012	8:47:55 AM	Main Vac valve opened
2/14/2012	8:47:55 AM	Helium MFC set to  20.000000
2/14/2012	8:47:55 AM	H2 MFC set to  0.000000
2/14/2012	8:47:55 AM	BCl3 MFC set to  0.000000
2/14/2012	8:47:55 AM	PH3 MFC set to  0.000000
2/14/2012	8:47:55 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:47:55 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:47:55 AM	Tube furnace set to 150
2/14/2012	8:48:25 AM	Helium valve closed
2/14/2012	8:48:25 AM	H2 valve closed
2/14/2012	8:48:25 AM	BCl3 valve closed
2/14/2012	8:48:25 AM	PH3 valve closed
2/14/2012	8:48:26 AM	SiCl4 pre valve closed
2/14/2012	8:48:26 AM	SiCl4 post valve closed
2/14/2012	8:48:26 AM	Bypass valve closed
2/14/2012	8:48:26 AM	Bubbler valve closed
2/14/2012	8:48:26 AM	Main Vac valve opened
2/14/2012	8:48:26 AM	Helium MFC set to  0.000000
2/14/2012	8:48:26 AM	H2 MFC set to  0.000000
2/14/2012	8:48:26 AM	BCl3 MFC set to  0.000000
2/14/2012	8:48:26 AM	PH3 MFC set to  0.000000
2/14/2012	8:48:26 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:48:26 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:48:26 AM	Tube furnace set to 150
2/14/2012	8:48:56 AM	H2 valve closed
2/14/2012	8:48:56 AM	BCl3 valve closed
2/14/2012	8:48:56 AM	PH3 valve closed
2/14/2012	8:48:56 AM	SiCl4 pre valve closed
2/14/2012	8:48:56 AM	SiCl4 post valve closed
2/14/2012	8:48:56 AM	Bypass valve closed
2/14/2012	8:48:56 AM	Bubbler valve closed
2/14/2012	8:48:56 AM	Helium valve opened
2/14/2012	8:48:56 AM	Main Vac valve opened
2/14/2012	8:48:56 AM	Helium MFC set to  20.000000
2/14/2012	8:48:56 AM	H2 MFC set to  0.000000
2/14/2012	8:48:56 AM	BCl3 MFC set to  0.000000
2/14/2012	8:48:56 AM	PH3 MFC set to  0.000000
2/14/2012	8:48:56 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:48:56 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:48:56 AM	Tube furnace set to 150
2/14/2012	8:49:26 AM	Helium valve closed
2/14/2012	8:49:26 AM	H2 valve closed
2/14/2012	8:49:26 AM	BCl3 valve closed
2/14/2012	8:49:26 AM	PH3 valve closed
2/14/2012	8:49:26 AM	SiCl4 pre valve closed
2/14/2012	8:49:26 AM	SiCl4 post valve closed
2/14/2012	8:49:26 AM	Bypass valve closed
2/14/2012	8:49:26 AM	Bubbler valve closed
2/14/2012	8:49:26 AM	Main Vac valve opened
2/14/2012	8:49:26 AM	Helium MFC set to  0.000000
2/14/2012	8:49:26 AM	H2 MFC set to  0.000000
2/14/2012	8:49:26 AM	BCl3 MFC set to  0.000000
2/14/2012	8:49:26 AM	PH3 MFC set to  0.000000
2/14/2012	8:49:26 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:49:26 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:49:26 AM	Tube furnace set to 150
2/14/2012	8:49:56 AM	H2 valve closed
2/14/2012	8:49:56 AM	BCl3 valve closed
2/14/2012	8:49:56 AM	PH3 valve closed
2/14/2012	8:49:56 AM	SiCl4 pre valve closed
2/14/2012	8:49:56 AM	SiCl4 post valve closed
2/14/2012	8:49:56 AM	Bypass valve closed
2/14/2012	8:49:56 AM	Bubbler valve closed
2/14/2012	8:49:56 AM	Helium valve opened
2/14/2012	8:49:56 AM	Main Vac valve opened
2/14/2012	8:49:56 AM	Helium MFC set to  20.000000
2/14/2012	8:49:56 AM	H2 MFC set to  0.000000
2/14/2012	8:49:56 AM	BCl3 MFC set to  0.000000
2/14/2012	8:49:56 AM	PH3 MFC set to  0.000000
2/14/2012	8:49:56 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:49:56 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:49:56 AM	Tube furnace set to 150
2/14/2012	8:50:26 AM	Helium valve closed
2/14/2012	8:50:26 AM	H2 valve closed
2/14/2012	8:50:26 AM	BCl3 valve closed
2/14/2012	8:50:26 AM	PH3 valve closed
2/14/2012	8:50:26 AM	SiCl4 pre valve closed
2/14/2012	8:50:26 AM	SiCl4 post valve closed
2/14/2012	8:50:26 AM	Bypass valve closed
2/14/2012	8:50:26 AM	Bubbler valve closed
2/14/2012	8:50:26 AM	Main Vac valve opened
2/14/2012	8:50:26 AM	Helium MFC set to  0.000000
2/14/2012	8:50:26 AM	H2 MFC set to  0.000000
2/14/2012	8:50:26 AM	BCl3 MFC set to  0.000000
2/14/2012	8:50:26 AM	PH3 MFC set to  0.000000
2/14/2012	8:50:26 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:50:26 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:50:26 AM	Tube furnace set to 150
2/14/2012	8:50:57 AM	H2 valve closed
2/14/2012	8:50:57 AM	BCl3 valve closed
2/14/2012	8:50:57 AM	PH3 valve closed
2/14/2012	8:50:57 AM	SiCl4 pre valve closed
2/14/2012	8:50:57 AM	SiCl4 post valve closed
2/14/2012	8:50:57 AM	Bypass valve closed
2/14/2012	8:50:57 AM	Bubbler valve closed
2/14/2012	8:50:57 AM	Helium valve opened
2/14/2012	8:50:57 AM	Main Vac valve opened
2/14/2012	8:50:57 AM	Helium MFC set to  20.000000
2/14/2012	8:50:57 AM	H2 MFC set to  0.000000
2/14/2012	8:50:57 AM	BCl3 MFC set to  0.000000
2/14/2012	8:50:57 AM	PH3 MFC set to  0.000000
2/14/2012	8:50:57 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:50:57 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:50:57 AM	Tube furnace set to 150
2/14/2012	8:51:27 AM	Helium valve closed
2/14/2012	8:51:27 AM	H2 valve closed
2/14/2012	8:51:27 AM	BCl3 valve closed
2/14/2012	8:51:27 AM	PH3 valve closed
2/14/2012	8:51:27 AM	SiCl4 pre valve closed
2/14/2012	8:51:27 AM	SiCl4 post valve closed
2/14/2012	8:51:27 AM	Bypass valve closed
2/14/2012	8:51:27 AM	Bubbler valve closed
2/14/2012	8:51:27 AM	Main Vac valve opened
2/14/2012	8:51:27 AM	Helium MFC set to  0.000000
2/14/2012	8:51:27 AM	H2 MFC set to  0.000000
2/14/2012	8:51:27 AM	BCl3 MFC set to  0.000000
2/14/2012	8:51:27 AM	PH3 MFC set to  0.000000
2/14/2012	8:51:27 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:51:27 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:51:27 AM	Tube furnace set to 150
2/14/2012	8:51:57 AM	H2 valve closed
2/14/2012	8:51:57 AM	BCl3 valve closed
2/14/2012	8:51:57 AM	PH3 valve closed
2/14/2012	8:51:57 AM	SiCl4 pre valve closed
2/14/2012	8:51:57 AM	SiCl4 post valve closed
2/14/2012	8:51:57 AM	Bypass valve closed
2/14/2012	8:51:57 AM	Bubbler valve closed
2/14/2012	8:51:57 AM	Helium valve opened
2/14/2012	8:51:57 AM	Main Vac valve opened
2/14/2012	8:51:57 AM	Helium MFC set to  20.000000
2/14/2012	8:51:57 AM	H2 MFC set to  0.000000
2/14/2012	8:51:57 AM	BCl3 MFC set to  0.000000
2/14/2012	8:51:57 AM	PH3 MFC set to  0.000000
2/14/2012	8:51:57 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:51:57 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:51:57 AM	Tube furnace set to 150
2/14/2012	8:52:27 AM	Helium valve closed
2/14/2012	8:52:27 AM	H2 valve closed
2/14/2012	8:52:27 AM	BCl3 valve closed
2/14/2012	8:52:27 AM	PH3 valve closed
2/14/2012	8:52:27 AM	SiCl4 pre valve closed
2/14/2012	8:52:27 AM	SiCl4 post valve closed
2/14/2012	8:52:27 AM	Bypass valve closed
2/14/2012	8:52:27 AM	Bubbler valve closed
2/14/2012	8:52:27 AM	Main Vac valve opened
2/14/2012	8:52:27 AM	Helium MFC set to  0.000000
2/14/2012	8:52:27 AM	H2 MFC set to  0.000000
2/14/2012	8:52:27 AM	BCl3 MFC set to  0.000000
2/14/2012	8:52:27 AM	PH3 MFC set to  0.000000
2/14/2012	8:52:27 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:52:27 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:52:27 AM	Tube furnace set to 150
2/14/2012	8:52:57 AM	H2 valve closed
2/14/2012	8:52:57 AM	BCl3 valve closed
2/14/2012	8:52:57 AM	PH3 valve closed
2/14/2012	8:52:57 AM	SiCl4 pre valve closed
2/14/2012	8:52:57 AM	SiCl4 post valve closed
2/14/2012	8:52:57 AM	Bypass valve closed
2/14/2012	8:52:57 AM	Bubbler valve closed
2/14/2012	8:52:57 AM	Helium valve opened
2/14/2012	8:52:57 AM	Main Vac valve opened
2/14/2012	8:52:57 AM	Helium MFC set to  20.000000
2/14/2012	8:52:57 AM	H2 MFC set to  0.000000
2/14/2012	8:52:57 AM	BCl3 MFC set to  0.000000
2/14/2012	8:52:57 AM	PH3 MFC set to  0.000000
2/14/2012	8:52:57 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:52:57 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:52:58 AM	Tube furnace set to 150
2/14/2012	8:53:28 AM	Helium valve closed
2/14/2012	8:53:28 AM	H2 valve closed
2/14/2012	8:53:28 AM	BCl3 valve closed
2/14/2012	8:53:28 AM	PH3 valve closed
2/14/2012	8:53:28 AM	SiCl4 pre valve closed
2/14/2012	8:53:28 AM	SiCl4 post valve closed
2/14/2012	8:53:28 AM	Bypass valve closed
2/14/2012	8:53:28 AM	Bubbler valve closed
2/14/2012	8:53:28 AM	Main Vac valve opened
2/14/2012	8:53:28 AM	Helium MFC set to  0.000000
2/14/2012	8:53:28 AM	H2 MFC set to  0.000000
2/14/2012	8:53:28 AM	BCl3 MFC set to  0.000000
2/14/2012	8:53:28 AM	PH3 MFC set to  0.000000
2/14/2012	8:53:28 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:53:28 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:53:28 AM	Tube furnace set to 150
2/14/2012	8:53:58 AM	H2 valve closed
2/14/2012	8:53:58 AM	BCl3 valve closed
2/14/2012	8:53:58 AM	PH3 valve closed
2/14/2012	8:53:58 AM	SiCl4 pre valve closed
2/14/2012	8:53:58 AM	SiCl4 post valve closed
2/14/2012	8:53:58 AM	Bypass valve closed
2/14/2012	8:53:58 AM	Bubbler valve closed
2/14/2012	8:53:58 AM	Helium valve opened
2/14/2012	8:53:58 AM	Main Vac valve opened
2/14/2012	8:53:58 AM	Helium MFC set to  20.000000
2/14/2012	8:53:58 AM	H2 MFC set to  0.000000
2/14/2012	8:53:58 AM	BCl3 MFC set to  0.000000
2/14/2012	8:53:58 AM	PH3 MFC set to  0.000000
2/14/2012	8:53:58 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:53:58 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:53:58 AM	Tube furnace set to 150
2/14/2012	8:54:28 AM	Helium valve closed
2/14/2012	8:54:28 AM	H2 valve closed
2/14/2012	8:54:28 AM	BCl3 valve closed
2/14/2012	8:54:28 AM	PH3 valve closed
2/14/2012	8:54:28 AM	SiCl4 pre valve closed
2/14/2012	8:54:28 AM	SiCl4 post valve closed
2/14/2012	8:54:28 AM	Bypass valve closed
2/14/2012	8:54:28 AM	Bubbler valve closed
2/14/2012	8:54:28 AM	Main Vac valve opened
2/14/2012	8:54:28 AM	Helium MFC set to  0.000000
2/14/2012	8:54:28 AM	H2 MFC set to  0.000000
2/14/2012	8:54:28 AM	BCl3 MFC set to  0.000000
2/14/2012	8:54:28 AM	PH3 MFC set to  0.000000
2/14/2012	8:54:28 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:54:28 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:54:28 AM	Tube furnace set to 150
2/14/2012	8:54:58 AM	H2 valve closed
2/14/2012	8:54:58 AM	BCl3 valve closed
2/14/2012	8:54:58 AM	PH3 valve closed
2/14/2012	8:54:58 AM	SiCl4 pre valve closed
2/14/2012	8:54:58 AM	SiCl4 post valve closed
2/14/2012	8:54:58 AM	Bypass valve closed
2/14/2012	8:54:58 AM	Bubbler valve closed
2/14/2012	8:54:58 AM	Helium valve opened
2/14/2012	8:54:58 AM	Main Vac valve opened
2/14/2012	8:54:58 AM	Helium MFC set to  20.000000
2/14/2012	8:54:58 AM	H2 MFC set to  0.000000
2/14/2012	8:54:58 AM	BCl3 MFC set to  0.000000
2/14/2012	8:54:58 AM	PH3 MFC set to  0.000000
2/14/2012	8:54:58 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:54:58 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:54:58 AM	Tube furnace set to 150
2/14/2012	8:55:28 AM	Helium valve closed
2/14/2012	8:55:28 AM	H2 valve closed
2/14/2012	8:55:28 AM	BCl3 valve closed
2/14/2012	8:55:28 AM	PH3 valve closed
2/14/2012	8:55:28 AM	SiCl4 pre valve closed
2/14/2012	8:55:28 AM	SiCl4 post valve closed
2/14/2012	8:55:28 AM	Bypass valve closed
2/14/2012	8:55:28 AM	Bubbler valve closed
2/14/2012	8:55:28 AM	Main Vac valve opened
2/14/2012	8:55:28 AM	Helium MFC set to  0.000000
2/14/2012	8:55:28 AM	H2 MFC set to  0.000000
2/14/2012	8:55:28 AM	BCl3 MFC set to  0.000000
2/14/2012	8:55:28 AM	PH3 MFC set to  0.000000
2/14/2012	8:55:28 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:55:28 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:55:29 AM	Tube furnace set to 150
2/14/2012	8:55:59 AM	H2 valve closed
2/14/2012	8:55:59 AM	BCl3 valve closed
2/14/2012	8:55:59 AM	PH3 valve closed
2/14/2012	8:55:59 AM	SiCl4 pre valve closed
2/14/2012	8:55:59 AM	SiCl4 post valve closed
2/14/2012	8:55:59 AM	Bypass valve closed
2/14/2012	8:55:59 AM	Bubbler valve closed
2/14/2012	8:55:59 AM	Helium valve opened
2/14/2012	8:55:59 AM	Main Vac valve opened
2/14/2012	8:55:59 AM	Helium MFC set to  20.000000
2/14/2012	8:55:59 AM	H2 MFC set to  0.000000
2/14/2012	8:55:59 AM	BCl3 MFC set to  0.000000
2/14/2012	8:55:59 AM	PH3 MFC set to  0.000000
2/14/2012	8:55:59 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:55:59 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:55:59 AM	Tube furnace set to 150
2/14/2012	8:56:29 AM	Helium valve closed
2/14/2012	8:56:29 AM	H2 valve closed
2/14/2012	8:56:29 AM	BCl3 valve closed
2/14/2012	8:56:29 AM	PH3 valve closed
2/14/2012	8:56:29 AM	SiCl4 pre valve closed
2/14/2012	8:56:29 AM	SiCl4 post valve closed
2/14/2012	8:56:29 AM	Bypass valve closed
2/14/2012	8:56:29 AM	Bubbler valve closed
2/14/2012	8:56:29 AM	Main Vac valve opened
2/14/2012	8:56:29 AM	Helium MFC set to  0.000000
2/14/2012	8:56:29 AM	H2 MFC set to  0.000000
2/14/2012	8:56:29 AM	BCl3 MFC set to  0.000000
2/14/2012	8:56:29 AM	PH3 MFC set to  0.000000
2/14/2012	8:56:29 AM	SiCl4 MFC set to  0.000000
2/14/2012	8:56:29 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	8:56:29 AM	Tube furnace set to 150
2/14/2012	8:56:30 AM	Run finished at 8:56 AM
2/14/2012	9:00:24 AM	Main Vac valve closed
2/14/2012	9:00:38 AM	Main Vac valve opened
2/14/2012	9:01:40 AM	Recipe started at 9:01 AM
2/14/2012	9:01:40 AM	Helium valve closed
2/14/2012	9:01:40 AM	H2 valve closed
2/14/2012	9:01:40 AM	BCl3 valve closed
2/14/2012	9:01:40 AM	PH3 valve closed
2/14/2012	9:01:40 AM	SiCl4 pre valve closed
2/14/2012	9:01:40 AM	SiCl4 post valve closed
2/14/2012	9:01:40 AM	Main Vac valve closed
2/14/2012	9:01:40 AM	Bypass valve closed
2/14/2012	9:01:40 AM	Bubbler valve closed
2/14/2012	9:01:40 AM	Helium MFC set to  0.000000
2/14/2012	9:01:40 AM	H2 MFC set to  0.000000
2/14/2012	9:01:40 AM	BCl3 MFC set to  0.000000
2/14/2012	9:01:40 AM	PH3 MFC set to  0.000000
2/14/2012	9:01:40 AM	SiCl4 MFC set to  0.000000
2/14/2012	9:01:40 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	9:01:41 AM	Tube furnace set to 0
2/14/2012	9:01:44 AM	Helium valve closed
2/14/2012	9:01:44 AM	BCl3 valve closed
2/14/2012	9:01:44 AM	PH3 valve closed
2/14/2012	9:01:44 AM	SiCl4 pre valve closed
2/14/2012	9:01:44 AM	SiCl4 post valve closed
2/14/2012	9:01:44 AM	Main Vac valve closed
2/14/2012	9:01:44 AM	Bypass valve closed
2/14/2012	9:01:44 AM	Bubbler valve closed
2/14/2012	9:01:44 AM	H2 valve opened
2/14/2012	9:01:44 AM	Helium MFC set to  0.000000
2/14/2012	9:01:44 AM	H2 MFC set to  500.000000
2/14/2012	9:01:44 AM	BCl3 MFC set to  0.000000
2/14/2012	9:01:44 AM	PH3 MFC set to  0.000000
2/14/2012	9:01:44 AM	SiCl4 MFC set to  0.000000
2/14/2012	9:01:44 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	9:01:44 AM	Tube furnace set to 0
2/14/2012	9:02:48 AM	Helium valve closed
2/14/2012	9:02:48 AM	BCl3 valve closed
2/14/2012	9:02:48 AM	PH3 valve closed
2/14/2012	9:02:48 AM	SiCl4 pre valve closed
2/14/2012	9:02:48 AM	SiCl4 post valve closed
2/14/2012	9:02:48 AM	Main Vac valve closed
2/14/2012	9:02:48 AM	Bypass valve closed
2/14/2012	9:02:48 AM	H2 valve opened
2/14/2012	9:02:48 AM	Bubbler valve opened
2/14/2012	9:02:48 AM	Helium MFC set to  0.000000
2/14/2012	9:02:48 AM	H2 MFC set to  500.000000
2/14/2012	9:02:48 AM	BCl3 MFC set to  0.000000
2/14/2012	9:02:48 AM	PH3 MFC set to  0.000000
2/14/2012	9:02:48 AM	SiCl4 MFC set to  0.000000
2/14/2012	9:02:48 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	9:02:48 AM	Tube furnace set to 0
2/14/2012	9:02:49 AM	Helium valve closed
2/14/2012	9:02:49 AM	BCl3 valve closed
2/14/2012	9:02:49 AM	PH3 valve closed
2/14/2012	9:02:49 AM	SiCl4 pre valve closed
2/14/2012	9:02:49 AM	SiCl4 post valve closed
2/14/2012	9:02:49 AM	Main Vac valve closed
2/14/2012	9:02:49 AM	Bypass valve closed
2/14/2012	9:02:49 AM	H2 valve opened
2/14/2012	9:02:49 AM	Bubbler valve opened
2/14/2012	9:02:49 AM	Helium MFC set to  0.000000
2/14/2012	9:02:49 AM	H2 MFC set to  500.000000
2/14/2012	9:02:49 AM	BCl3 MFC set to  0.000000
2/14/2012	9:02:49 AM	PH3 MFC set to  0.000000
2/14/2012	9:02:49 AM	SiCl4 MFC set to  0.000000
2/14/2012	9:02:49 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	9:02:49 AM	Tube furnace set to 1000
2/14/2012	9:22:49 AM	Helium valve closed
2/14/2012	9:22:49 AM	PH3 valve closed
2/14/2012	9:22:49 AM	Main Vac valve closed
2/14/2012	9:22:49 AM	Bypass valve closed
2/14/2012	9:22:49 AM	H2 valve opened
2/14/2012	9:22:49 AM	BCl3 valve opened
2/14/2012	9:22:49 AM	SiCl4 pre valve opened
2/14/2012	9:22:49 AM	SiCl4 post valve opened
2/14/2012	9:22:49 AM	Bubbler valve opened
2/14/2012	9:22:49 AM	Helium MFC set to  0.000000
2/14/2012	9:22:49 AM	H2 MFC set to  500.000000
2/14/2012	9:22:49 AM	BCl3 MFC set to  20.000000
2/14/2012	9:22:49 AM	PH3 MFC set to  0.000000
2/14/2012	9:22:49 AM	SiCl4 MFC set to  50.000000
2/14/2012	9:22:49 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	9:22:49 AM	Tube furnace set to 1000
2/14/2012	9:42:49 AM	Helium valve closed
2/14/2012	9:42:49 AM	BCl3 valve closed
2/14/2012	9:42:49 AM	PH3 valve closed
2/14/2012	9:42:49 AM	SiCl4 pre valve closed
2/14/2012	9:42:49 AM	SiCl4 post valve closed
2/14/2012	9:42:49 AM	Main Vac valve closed
2/14/2012	9:42:49 AM	Bypass valve closed
2/14/2012	9:42:49 AM	H2 valve opened
2/14/2012	9:42:49 AM	Bubbler valve opened
2/14/2012	9:42:49 AM	Helium MFC set to  0.000000
2/14/2012	9:42:49 AM	H2 MFC set to  500.000000
2/14/2012	9:42:49 AM	BCl3 MFC set to  0.000000
2/14/2012	9:42:49 AM	PH3 MFC set to  0.000000
2/14/2012	9:42:49 AM	SiCl4 MFC set to  0.000000
2/14/2012	9:42:49 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	9:42:49 AM	Tube furnace set to 750
2/14/2012	9:47:49 AM	H2 valve closed
2/14/2012	9:47:49 AM	BCl3 valve closed
2/14/2012	9:47:49 AM	PH3 valve closed
2/14/2012	9:47:49 AM	SiCl4 pre valve closed
2/14/2012	9:47:49 AM	SiCl4 post valve closed
2/14/2012	9:47:49 AM	Main Vac valve closed
2/14/2012	9:47:49 AM	Bypass valve closed
2/14/2012	9:47:49 AM	Helium valve opened
2/14/2012	9:47:49 AM	Bubbler valve opened
2/14/2012	9:47:49 AM	Helium MFC set to  500.000000
2/14/2012	9:47:49 AM	H2 MFC set to  0.000000
2/14/2012	9:47:49 AM	BCl3 MFC set to  0.000000
2/14/2012	9:47:49 AM	PH3 MFC set to  0.000000
2/14/2012	9:47:49 AM	SiCl4 MFC set to  0.000000
2/14/2012	9:47:49 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	9:47:50 AM	Tube furnace set to 0
2/14/2012	10:07:50 AM	Helium valve closed
2/14/2012	10:07:50 AM	H2 valve closed
2/14/2012	10:07:50 AM	BCl3 valve closed
2/14/2012	10:07:50 AM	PH3 valve closed
2/14/2012	10:07:50 AM	SiCl4 pre valve closed
2/14/2012	10:07:50 AM	SiCl4 post valve closed
2/14/2012	10:07:50 AM	Main Vac valve closed
2/14/2012	10:07:50 AM	Bypass valve closed
2/14/2012	10:07:50 AM	Bubbler valve closed
2/14/2012	10:07:50 AM	Helium MFC set to  0.000000
2/14/2012	10:07:50 AM	H2 MFC set to  0.000000
2/14/2012	10:07:50 AM	BCl3 MFC set to  0.000000
2/14/2012	10:07:50 AM	PH3 MFC set to  0.000000
2/14/2012	10:07:50 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:07:50 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:07:50 AM	Tube furnace set to 0
2/14/2012	10:07:51 AM	Run finished at 10:07 AM
2/14/2012	10:13:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2012	10:13:36 AM	Recipe started at 10:13 AM
2/14/2012	10:13:36 AM	Helium valve closed
2/14/2012	10:13:36 AM	H2 valve closed
2/14/2012	10:13:36 AM	BCl3 valve closed
2/14/2012	10:13:36 AM	PH3 valve closed
2/14/2012	10:13:36 AM	SiCl4 pre valve closed
2/14/2012	10:13:36 AM	SiCl4 post valve closed
2/14/2012	10:13:36 AM	Main Vac valve closed
2/14/2012	10:13:36 AM	Bubbler valve closed
2/14/2012	10:13:36 AM	Bypass valve opened
2/14/2012	10:13:36 AM	Helium MFC set to  0.000000
2/14/2012	10:13:36 AM	H2 MFC set to  0.000000
2/14/2012	10:13:36 AM	BCl3 MFC set to  0.000000
2/14/2012	10:13:36 AM	PH3 MFC set to  0.000000
2/14/2012	10:13:36 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:13:36 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:13:36 AM	Tube furnace set to 0
2/14/2012	10:14:37 AM	Helium valve closed
2/14/2012	10:14:37 AM	H2 valve closed
2/14/2012	10:14:37 AM	BCl3 valve closed
2/14/2012	10:14:37 AM	PH3 valve closed
2/14/2012	10:14:37 AM	SiCl4 pre valve closed
2/14/2012	10:14:37 AM	SiCl4 post valve closed
2/14/2012	10:14:37 AM	Main Vac valve closed
2/14/2012	10:14:37 AM	Bubbler valve closed
2/14/2012	10:14:37 AM	Bypass valve opened
2/14/2012	10:14:37 AM	Helium MFC set to  0.000000
2/14/2012	10:14:37 AM	H2 MFC set to  0.000000
2/14/2012	10:14:37 AM	BCl3 MFC set to  0.000000
2/14/2012	10:14:37 AM	PH3 MFC set to  0.000000
2/14/2012	10:14:37 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:14:37 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:14:37 AM	Tube furnace set to 0
2/14/2012	10:15:37 AM	Helium valve closed
2/14/2012	10:15:37 AM	H2 valve closed
2/14/2012	10:15:37 AM	BCl3 valve closed
2/14/2012	10:15:37 AM	PH3 valve closed
2/14/2012	10:15:37 AM	SiCl4 pre valve closed
2/14/2012	10:15:37 AM	SiCl4 post valve closed
2/14/2012	10:15:37 AM	Bypass valve closed
2/14/2012	10:15:37 AM	Bubbler valve closed
2/14/2012	10:15:37 AM	Main Vac valve opened
2/14/2012	10:15:37 AM	Helium MFC set to  0.000000
2/14/2012	10:15:37 AM	H2 MFC set to  0.000000
2/14/2012	10:15:37 AM	BCl3 MFC set to  0.000000
2/14/2012	10:15:37 AM	PH3 MFC set to  0.000000
2/14/2012	10:15:37 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:15:37 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:15:38 AM	Tube furnace set to 0
2/14/2012	10:15:39 AM	Run finished at 10:15 AM
2/14/2012	10:15:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2012	10:16:19 AM	Recipe started at 10:16 AM
2/14/2012	10:16:19 AM	Helium valve closed
2/14/2012	10:16:19 AM	H2 valve closed
2/14/2012	10:16:19 AM	BCl3 valve closed
2/14/2012	10:16:19 AM	PH3 valve closed
2/14/2012	10:16:19 AM	SiCl4 pre valve closed
2/14/2012	10:16:19 AM	SiCl4 post valve closed
2/14/2012	10:16:19 AM	Bypass valve closed
2/14/2012	10:16:19 AM	Bubbler valve closed
2/14/2012	10:16:19 AM	Main Vac valve opened
2/14/2012	10:16:19 AM	Helium MFC set to  0.000000
2/14/2012	10:16:19 AM	H2 MFC set to  0.000000
2/14/2012	10:16:19 AM	BCl3 MFC set to  0.000000
2/14/2012	10:16:19 AM	PH3 MFC set to  0.000000
2/14/2012	10:16:19 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:16:19 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:16:19 AM	Tube furnace set to 150
2/14/2012	10:16:49 AM	H2 valve closed
2/14/2012	10:16:49 AM	BCl3 valve closed
2/14/2012	10:16:49 AM	PH3 valve closed
2/14/2012	10:16:49 AM	SiCl4 pre valve closed
2/14/2012	10:16:49 AM	SiCl4 post valve closed
2/14/2012	10:16:49 AM	Bypass valve closed
2/14/2012	10:16:49 AM	Bubbler valve closed
2/14/2012	10:16:49 AM	Helium valve opened
2/14/2012	10:16:49 AM	Main Vac valve opened
2/14/2012	10:16:49 AM	Helium MFC set to  20.000000
2/14/2012	10:16:49 AM	H2 MFC set to  0.000000
2/14/2012	10:16:49 AM	BCl3 MFC set to  0.000000
2/14/2012	10:16:49 AM	PH3 MFC set to  0.000000
2/14/2012	10:16:49 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:16:49 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:16:50 AM	Tube furnace set to 150
2/14/2012	10:17:20 AM	Helium valve closed
2/14/2012	10:17:20 AM	H2 valve closed
2/14/2012	10:17:20 AM	BCl3 valve closed
2/14/2012	10:17:20 AM	PH3 valve closed
2/14/2012	10:17:20 AM	SiCl4 pre valve closed
2/14/2012	10:17:20 AM	SiCl4 post valve closed
2/14/2012	10:17:20 AM	Bypass valve closed
2/14/2012	10:17:20 AM	Bubbler valve closed
2/14/2012	10:17:20 AM	Main Vac valve opened
2/14/2012	10:17:20 AM	Helium MFC set to  0.000000
2/14/2012	10:17:20 AM	H2 MFC set to  0.000000
2/14/2012	10:17:20 AM	BCl3 MFC set to  0.000000
2/14/2012	10:17:20 AM	PH3 MFC set to  0.000000
2/14/2012	10:17:20 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:17:20 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:17:20 AM	Tube furnace set to 150
2/14/2012	10:17:50 AM	H2 valve closed
2/14/2012	10:17:50 AM	BCl3 valve closed
2/14/2012	10:17:50 AM	PH3 valve closed
2/14/2012	10:17:50 AM	SiCl4 pre valve closed
2/14/2012	10:17:50 AM	SiCl4 post valve closed
2/14/2012	10:17:50 AM	Bypass valve closed
2/14/2012	10:17:50 AM	Bubbler valve closed
2/14/2012	10:17:50 AM	Helium valve opened
2/14/2012	10:17:50 AM	Main Vac valve opened
2/14/2012	10:17:50 AM	Helium MFC set to  20.000000
2/14/2012	10:17:50 AM	H2 MFC set to  0.000000
2/14/2012	10:17:50 AM	BCl3 MFC set to  0.000000
2/14/2012	10:17:50 AM	PH3 MFC set to  0.000000
2/14/2012	10:17:50 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:17:50 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:17:50 AM	Tube furnace set to 150
2/14/2012	10:18:20 AM	Helium valve closed
2/14/2012	10:18:20 AM	H2 valve closed
2/14/2012	10:18:20 AM	BCl3 valve closed
2/14/2012	10:18:20 AM	PH3 valve closed
2/14/2012	10:18:20 AM	SiCl4 pre valve closed
2/14/2012	10:18:20 AM	SiCl4 post valve closed
2/14/2012	10:18:20 AM	Bypass valve closed
2/14/2012	10:18:20 AM	Bubbler valve closed
2/14/2012	10:18:20 AM	Main Vac valve opened
2/14/2012	10:18:20 AM	Helium MFC set to  0.000000
2/14/2012	10:18:20 AM	H2 MFC set to  0.000000
2/14/2012	10:18:20 AM	BCl3 MFC set to  0.000000
2/14/2012	10:18:20 AM	PH3 MFC set to  0.000000
2/14/2012	10:18:20 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:18:20 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:18:20 AM	Tube furnace set to 150
2/14/2012	10:18:50 AM	H2 valve closed
2/14/2012	10:18:50 AM	BCl3 valve closed
2/14/2012	10:18:50 AM	PH3 valve closed
2/14/2012	10:18:50 AM	SiCl4 pre valve closed
2/14/2012	10:18:50 AM	SiCl4 post valve closed
2/14/2012	10:18:50 AM	Bypass valve closed
2/14/2012	10:18:50 AM	Bubbler valve closed
2/14/2012	10:18:50 AM	Helium valve opened
2/14/2012	10:18:50 AM	Main Vac valve opened
2/14/2012	10:18:50 AM	Helium MFC set to  20.000000
2/14/2012	10:18:50 AM	H2 MFC set to  0.000000
2/14/2012	10:18:50 AM	BCl3 MFC set to  0.000000
2/14/2012	10:18:50 AM	PH3 MFC set to  0.000000
2/14/2012	10:18:50 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:18:50 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:18:50 AM	Tube furnace set to 150
2/14/2012	10:19:20 AM	Helium valve closed
2/14/2012	10:19:20 AM	H2 valve closed
2/14/2012	10:19:20 AM	BCl3 valve closed
2/14/2012	10:19:20 AM	PH3 valve closed
2/14/2012	10:19:20 AM	SiCl4 pre valve closed
2/14/2012	10:19:20 AM	SiCl4 post valve closed
2/14/2012	10:19:20 AM	Bypass valve closed
2/14/2012	10:19:20 AM	Bubbler valve closed
2/14/2012	10:19:20 AM	Main Vac valve opened
2/14/2012	10:19:20 AM	Helium MFC set to  0.000000
2/14/2012	10:19:20 AM	H2 MFC set to  0.000000
2/14/2012	10:19:20 AM	BCl3 MFC set to  0.000000
2/14/2012	10:19:20 AM	PH3 MFC set to  0.000000
2/14/2012	10:19:20 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:19:20 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:19:21 AM	Tube furnace set to 150
2/14/2012	10:19:51 AM	H2 valve closed
2/14/2012	10:19:51 AM	BCl3 valve closed
2/14/2012	10:19:51 AM	PH3 valve closed
2/14/2012	10:19:51 AM	SiCl4 pre valve closed
2/14/2012	10:19:51 AM	SiCl4 post valve closed
2/14/2012	10:19:51 AM	Bypass valve closed
2/14/2012	10:19:51 AM	Bubbler valve closed
2/14/2012	10:19:51 AM	Helium valve opened
2/14/2012	10:19:51 AM	Main Vac valve opened
2/14/2012	10:19:51 AM	Helium MFC set to  20.000000
2/14/2012	10:19:51 AM	H2 MFC set to  0.000000
2/14/2012	10:19:51 AM	BCl3 MFC set to  0.000000
2/14/2012	10:19:51 AM	PH3 MFC set to  0.000000
2/14/2012	10:19:51 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:19:51 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:19:51 AM	Tube furnace set to 150
2/14/2012	10:20:21 AM	Helium valve closed
2/14/2012	10:20:21 AM	H2 valve closed
2/14/2012	10:20:21 AM	BCl3 valve closed
2/14/2012	10:20:21 AM	PH3 valve closed
2/14/2012	10:20:21 AM	SiCl4 pre valve closed
2/14/2012	10:20:21 AM	SiCl4 post valve closed
2/14/2012	10:20:21 AM	Bypass valve closed
2/14/2012	10:20:21 AM	Bubbler valve closed
2/14/2012	10:20:21 AM	Main Vac valve opened
2/14/2012	10:20:21 AM	Helium MFC set to  0.000000
2/14/2012	10:20:21 AM	H2 MFC set to  0.000000
2/14/2012	10:20:21 AM	BCl3 MFC set to  0.000000
2/14/2012	10:20:21 AM	PH3 MFC set to  0.000000
2/14/2012	10:20:21 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:20:21 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:20:21 AM	Tube furnace set to 150
2/14/2012	10:20:51 AM	H2 valve closed
2/14/2012	10:20:51 AM	BCl3 valve closed
2/14/2012	10:20:51 AM	PH3 valve closed
2/14/2012	10:20:51 AM	SiCl4 pre valve closed
2/14/2012	10:20:51 AM	SiCl4 post valve closed
2/14/2012	10:20:51 AM	Bypass valve closed
2/14/2012	10:20:51 AM	Bubbler valve closed
2/14/2012	10:20:51 AM	Helium valve opened
2/14/2012	10:20:51 AM	Main Vac valve opened
2/14/2012	10:20:51 AM	Helium MFC set to  20.000000
2/14/2012	10:20:51 AM	H2 MFC set to  0.000000
2/14/2012	10:20:51 AM	BCl3 MFC set to  0.000000
2/14/2012	10:20:51 AM	PH3 MFC set to  0.000000
2/14/2012	10:20:51 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:20:51 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:20:51 AM	Tube furnace set to 150
2/14/2012	10:21:21 AM	Helium valve closed
2/14/2012	10:21:21 AM	H2 valve closed
2/14/2012	10:21:21 AM	BCl3 valve closed
2/14/2012	10:21:21 AM	PH3 valve closed
2/14/2012	10:21:21 AM	SiCl4 pre valve closed
2/14/2012	10:21:21 AM	SiCl4 post valve closed
2/14/2012	10:21:21 AM	Bypass valve closed
2/14/2012	10:21:21 AM	Bubbler valve closed
2/14/2012	10:21:21 AM	Main Vac valve opened
2/14/2012	10:21:21 AM	Helium MFC set to  0.000000
2/14/2012	10:21:21 AM	H2 MFC set to  0.000000
2/14/2012	10:21:21 AM	BCl3 MFC set to  0.000000
2/14/2012	10:21:21 AM	PH3 MFC set to  0.000000
2/14/2012	10:21:21 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:21:21 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:21:21 AM	Tube furnace set to 150
2/14/2012	10:21:51 AM	H2 valve closed
2/14/2012	10:21:51 AM	BCl3 valve closed
2/14/2012	10:21:51 AM	PH3 valve closed
2/14/2012	10:21:51 AM	SiCl4 pre valve closed
2/14/2012	10:21:51 AM	SiCl4 post valve closed
2/14/2012	10:21:51 AM	Bypass valve closed
2/14/2012	10:21:51 AM	Bubbler valve closed
2/14/2012	10:21:51 AM	Helium valve opened
2/14/2012	10:21:51 AM	Main Vac valve opened
2/14/2012	10:21:51 AM	Helium MFC set to  20.000000
2/14/2012	10:21:51 AM	H2 MFC set to  0.000000
2/14/2012	10:21:51 AM	BCl3 MFC set to  0.000000
2/14/2012	10:21:51 AM	PH3 MFC set to  0.000000
2/14/2012	10:21:51 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:21:51 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:21:52 AM	Tube furnace set to 150
2/14/2012	10:22:22 AM	Helium valve closed
2/14/2012	10:22:22 AM	H2 valve closed
2/14/2012	10:22:22 AM	BCl3 valve closed
2/14/2012	10:22:22 AM	PH3 valve closed
2/14/2012	10:22:22 AM	SiCl4 pre valve closed
2/14/2012	10:22:22 AM	SiCl4 post valve closed
2/14/2012	10:22:22 AM	Bypass valve closed
2/14/2012	10:22:22 AM	Bubbler valve closed
2/14/2012	10:22:22 AM	Main Vac valve opened
2/14/2012	10:22:22 AM	Helium MFC set to  0.000000
2/14/2012	10:22:22 AM	H2 MFC set to  0.000000
2/14/2012	10:22:22 AM	BCl3 MFC set to  0.000000
2/14/2012	10:22:22 AM	PH3 MFC set to  0.000000
2/14/2012	10:22:22 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:22:22 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:22:22 AM	Tube furnace set to 150
2/14/2012	10:22:52 AM	H2 valve closed
2/14/2012	10:22:52 AM	BCl3 valve closed
2/14/2012	10:22:52 AM	PH3 valve closed
2/14/2012	10:22:52 AM	SiCl4 pre valve closed
2/14/2012	10:22:52 AM	SiCl4 post valve closed
2/14/2012	10:22:52 AM	Bypass valve closed
2/14/2012	10:22:52 AM	Bubbler valve closed
2/14/2012	10:22:52 AM	Helium valve opened
2/14/2012	10:22:52 AM	Main Vac valve opened
2/14/2012	10:22:52 AM	Helium MFC set to  20.000000
2/14/2012	10:22:52 AM	H2 MFC set to  0.000000
2/14/2012	10:22:52 AM	BCl3 MFC set to  0.000000
2/14/2012	10:22:52 AM	PH3 MFC set to  0.000000
2/14/2012	10:22:52 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:22:52 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:22:52 AM	Tube furnace set to 150
2/14/2012	10:23:22 AM	Helium valve closed
2/14/2012	10:23:22 AM	H2 valve closed
2/14/2012	10:23:22 AM	BCl3 valve closed
2/14/2012	10:23:22 AM	PH3 valve closed
2/14/2012	10:23:22 AM	SiCl4 pre valve closed
2/14/2012	10:23:22 AM	SiCl4 post valve closed
2/14/2012	10:23:22 AM	Bypass valve closed
2/14/2012	10:23:22 AM	Bubbler valve closed
2/14/2012	10:23:22 AM	Main Vac valve opened
2/14/2012	10:23:22 AM	Helium MFC set to  0.000000
2/14/2012	10:23:22 AM	H2 MFC set to  0.000000
2/14/2012	10:23:22 AM	BCl3 MFC set to  0.000000
2/14/2012	10:23:22 AM	PH3 MFC set to  0.000000
2/14/2012	10:23:22 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:23:22 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:23:22 AM	Tube furnace set to 150
2/14/2012	10:23:52 AM	H2 valve closed
2/14/2012	10:23:52 AM	BCl3 valve closed
2/14/2012	10:23:52 AM	PH3 valve closed
2/14/2012	10:23:52 AM	SiCl4 pre valve closed
2/14/2012	10:23:52 AM	SiCl4 post valve closed
2/14/2012	10:23:52 AM	Bypass valve closed
2/14/2012	10:23:52 AM	Bubbler valve closed
2/14/2012	10:23:52 AM	Helium valve opened
2/14/2012	10:23:52 AM	Main Vac valve opened
2/14/2012	10:23:52 AM	Helium MFC set to  20.000000
2/14/2012	10:23:52 AM	H2 MFC set to  0.000000
2/14/2012	10:23:52 AM	BCl3 MFC set to  0.000000
2/14/2012	10:23:52 AM	PH3 MFC set to  0.000000
2/14/2012	10:23:52 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:23:52 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:23:52 AM	Tube furnace set to 150
2/14/2012	10:24:22 AM	Helium valve closed
2/14/2012	10:24:22 AM	H2 valve closed
2/14/2012	10:24:22 AM	BCl3 valve closed
2/14/2012	10:24:22 AM	PH3 valve closed
2/14/2012	10:24:22 AM	SiCl4 pre valve closed
2/14/2012	10:24:22 AM	SiCl4 post valve closed
2/14/2012	10:24:22 AM	Bypass valve closed
2/14/2012	10:24:22 AM	Bubbler valve closed
2/14/2012	10:24:22 AM	Main Vac valve opened
2/14/2012	10:24:22 AM	Helium MFC set to  0.000000
2/14/2012	10:24:22 AM	H2 MFC set to  0.000000
2/14/2012	10:24:22 AM	BCl3 MFC set to  0.000000
2/14/2012	10:24:23 AM	PH3 MFC set to  0.000000
2/14/2012	10:24:23 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:24:23 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:24:23 AM	Tube furnace set to 150
2/14/2012	10:24:53 AM	H2 valve closed
2/14/2012	10:24:53 AM	BCl3 valve closed
2/14/2012	10:24:53 AM	PH3 valve closed
2/14/2012	10:24:53 AM	SiCl4 pre valve closed
2/14/2012	10:24:53 AM	SiCl4 post valve closed
2/14/2012	10:24:53 AM	Bypass valve closed
2/14/2012	10:24:53 AM	Bubbler valve closed
2/14/2012	10:24:53 AM	Helium valve opened
2/14/2012	10:24:53 AM	Main Vac valve opened
2/14/2012	10:24:53 AM	Helium MFC set to  20.000000
2/14/2012	10:24:53 AM	H2 MFC set to  0.000000
2/14/2012	10:24:53 AM	BCl3 MFC set to  0.000000
2/14/2012	10:24:53 AM	PH3 MFC set to  0.000000
2/14/2012	10:24:53 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:24:53 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:24:53 AM	Tube furnace set to 150
2/14/2012	10:25:23 AM	Helium valve closed
2/14/2012	10:25:23 AM	H2 valve closed
2/14/2012	10:25:23 AM	BCl3 valve closed
2/14/2012	10:25:23 AM	PH3 valve closed
2/14/2012	10:25:23 AM	SiCl4 pre valve closed
2/14/2012	10:25:23 AM	SiCl4 post valve closed
2/14/2012	10:25:23 AM	Bypass valve closed
2/14/2012	10:25:23 AM	Bubbler valve closed
2/14/2012	10:25:23 AM	Main Vac valve opened
2/14/2012	10:25:23 AM	Helium MFC set to  0.000000
2/14/2012	10:25:23 AM	H2 MFC set to  0.000000
2/14/2012	10:25:23 AM	BCl3 MFC set to  0.000000
2/14/2012	10:25:23 AM	PH3 MFC set to  0.000000
2/14/2012	10:25:23 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:25:23 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:25:23 AM	Tube furnace set to 150
2/14/2012	10:25:53 AM	H2 valve closed
2/14/2012	10:25:53 AM	BCl3 valve closed
2/14/2012	10:25:53 AM	PH3 valve closed
2/14/2012	10:25:53 AM	SiCl4 pre valve closed
2/14/2012	10:25:53 AM	SiCl4 post valve closed
2/14/2012	10:25:53 AM	Bypass valve closed
2/14/2012	10:25:53 AM	Bubbler valve closed
2/14/2012	10:25:53 AM	Helium valve opened
2/14/2012	10:25:53 AM	Main Vac valve opened
2/14/2012	10:25:53 AM	Helium MFC set to  20.000000
2/14/2012	10:25:53 AM	H2 MFC set to  0.000000
2/14/2012	10:25:53 AM	BCl3 MFC set to  0.000000
2/14/2012	10:25:53 AM	PH3 MFC set to  0.000000
2/14/2012	10:25:53 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:25:53 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:25:53 AM	Tube furnace set to 150
2/14/2012	10:26:23 AM	Helium valve closed
2/14/2012	10:26:23 AM	H2 valve closed
2/14/2012	10:26:23 AM	BCl3 valve closed
2/14/2012	10:26:23 AM	PH3 valve closed
2/14/2012	10:26:23 AM	SiCl4 pre valve closed
2/14/2012	10:26:23 AM	SiCl4 post valve closed
2/14/2012	10:26:23 AM	Bypass valve closed
2/14/2012	10:26:23 AM	Bubbler valve closed
2/14/2012	10:26:23 AM	Main Vac valve opened
2/14/2012	10:26:23 AM	Helium MFC set to  0.000000
2/14/2012	10:26:23 AM	H2 MFC set to  0.000000
2/14/2012	10:26:23 AM	BCl3 MFC set to  0.000000
2/14/2012	10:26:23 AM	PH3 MFC set to  0.000000
2/14/2012	10:26:23 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:26:23 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:26:24 AM	Tube furnace set to 150
2/14/2012	10:26:25 AM	Run finished at 10:26 AM
2/14/2012	10:28:11 AM	Main Vac valve closed
2/14/2012	10:28:25 AM	Main Vac valve opened
2/14/2012	10:28:34 AM	Recipe started at 10:28 AM
2/14/2012	10:28:34 AM	Helium valve closed
2/14/2012	10:28:34 AM	H2 valve closed
2/14/2012	10:28:34 AM	BCl3 valve closed
2/14/2012	10:28:34 AM	PH3 valve closed
2/14/2012	10:28:34 AM	SiCl4 pre valve closed
2/14/2012	10:28:34 AM	SiCl4 post valve closed
2/14/2012	10:28:34 AM	Bypass valve closed
2/14/2012	10:28:34 AM	Bubbler valve closed
2/14/2012	10:28:34 AM	Main Vac valve opened
2/14/2012	10:28:34 AM	Helium MFC set to  0.000000
2/14/2012	10:28:34 AM	H2 MFC set to  0.000000
2/14/2012	10:28:34 AM	BCl3 MFC set to  0.000000
2/14/2012	10:28:34 AM	PH3 MFC set to  0.000000
2/14/2012	10:28:34 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:28:34 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:28:34 AM	Tube furnace set to 150
2/14/2012	10:28:57 AM	H2 valve closed
2/14/2012	10:28:57 AM	BCl3 valve closed
2/14/2012	10:28:57 AM	PH3 valve closed
2/14/2012	10:28:57 AM	SiCl4 pre valve closed
2/14/2012	10:28:57 AM	SiCl4 post valve closed
2/14/2012	10:28:57 AM	Bypass valve closed
2/14/2012	10:28:57 AM	Bubbler valve closed
2/14/2012	10:28:57 AM	Helium valve opened
2/14/2012	10:28:57 AM	Main Vac valve opened
2/14/2012	10:28:57 AM	Helium MFC set to  20.000000
2/14/2012	10:28:57 AM	H2 MFC set to  0.000000
2/14/2012	10:28:57 AM	BCl3 MFC set to  0.000000
2/14/2012	10:28:57 AM	PH3 MFC set to  0.000000
2/14/2012	10:28:57 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:28:57 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:28:57 AM	Tube furnace set to 150
2/14/2012	10:29:27 AM	Helium valve closed
2/14/2012	10:29:27 AM	H2 valve closed
2/14/2012	10:29:27 AM	BCl3 valve closed
2/14/2012	10:29:27 AM	PH3 valve closed
2/14/2012	10:29:27 AM	SiCl4 pre valve closed
2/14/2012	10:29:27 AM	SiCl4 post valve closed
2/14/2012	10:29:27 AM	Bypass valve closed
2/14/2012	10:29:27 AM	Bubbler valve closed
2/14/2012	10:29:27 AM	Main Vac valve opened
2/14/2012	10:29:27 AM	Helium MFC set to  0.000000
2/14/2012	10:29:27 AM	H2 MFC set to  0.000000
2/14/2012	10:29:27 AM	BCl3 MFC set to  0.000000
2/14/2012	10:29:27 AM	PH3 MFC set to  0.000000
2/14/2012	10:29:27 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:29:27 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:29:27 AM	Tube furnace set to 150
2/14/2012	10:29:57 AM	H2 valve closed
2/14/2012	10:29:57 AM	BCl3 valve closed
2/14/2012	10:29:57 AM	PH3 valve closed
2/14/2012	10:29:57 AM	SiCl4 pre valve closed
2/14/2012	10:29:57 AM	SiCl4 post valve closed
2/14/2012	10:29:57 AM	Bypass valve closed
2/14/2012	10:29:57 AM	Bubbler valve closed
2/14/2012	10:29:57 AM	Helium valve opened
2/14/2012	10:29:57 AM	Main Vac valve opened
2/14/2012	10:29:57 AM	Helium MFC set to  20.000000
2/14/2012	10:29:57 AM	H2 MFC set to  0.000000
2/14/2012	10:29:57 AM	BCl3 MFC set to  0.000000
2/14/2012	10:29:57 AM	PH3 MFC set to  0.000000
2/14/2012	10:29:57 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:29:57 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:29:57 AM	Tube furnace set to 150
2/14/2012	10:30:27 AM	Helium valve closed
2/14/2012	10:30:27 AM	H2 valve closed
2/14/2012	10:30:27 AM	BCl3 valve closed
2/14/2012	10:30:27 AM	PH3 valve closed
2/14/2012	10:30:27 AM	SiCl4 pre valve closed
2/14/2012	10:30:27 AM	SiCl4 post valve closed
2/14/2012	10:30:27 AM	Bypass valve closed
2/14/2012	10:30:27 AM	Bubbler valve closed
2/14/2012	10:30:27 AM	Main Vac valve opened
2/14/2012	10:30:27 AM	Helium MFC set to  0.000000
2/14/2012	10:30:27 AM	H2 MFC set to  0.000000
2/14/2012	10:30:27 AM	BCl3 MFC set to  0.000000
2/14/2012	10:30:27 AM	PH3 MFC set to  0.000000
2/14/2012	10:30:27 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:30:27 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:30:28 AM	Tube furnace set to 150
2/14/2012	10:30:58 AM	H2 valve closed
2/14/2012	10:30:58 AM	BCl3 valve closed
2/14/2012	10:30:58 AM	PH3 valve closed
2/14/2012	10:30:58 AM	SiCl4 pre valve closed
2/14/2012	10:30:58 AM	SiCl4 post valve closed
2/14/2012	10:30:58 AM	Bypass valve closed
2/14/2012	10:30:58 AM	Bubbler valve closed
2/14/2012	10:30:58 AM	Helium valve opened
2/14/2012	10:30:58 AM	Main Vac valve opened
2/14/2012	10:30:58 AM	Helium MFC set to  20.000000
2/14/2012	10:30:58 AM	H2 MFC set to  0.000000
2/14/2012	10:30:58 AM	BCl3 MFC set to  0.000000
2/14/2012	10:30:58 AM	PH3 MFC set to  0.000000
2/14/2012	10:30:58 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:30:58 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:30:58 AM	Tube furnace set to 150
2/14/2012	10:31:28 AM	Helium valve closed
2/14/2012	10:31:28 AM	H2 valve closed
2/14/2012	10:31:28 AM	BCl3 valve closed
2/14/2012	10:31:28 AM	PH3 valve closed
2/14/2012	10:31:28 AM	SiCl4 pre valve closed
2/14/2012	10:31:28 AM	SiCl4 post valve closed
2/14/2012	10:31:28 AM	Bypass valve closed
2/14/2012	10:31:28 AM	Bubbler valve closed
2/14/2012	10:31:28 AM	Main Vac valve opened
2/14/2012	10:31:28 AM	Helium MFC set to  0.000000
2/14/2012	10:31:28 AM	H2 MFC set to  0.000000
2/14/2012	10:31:28 AM	BCl3 MFC set to  0.000000
2/14/2012	10:31:28 AM	PH3 MFC set to  0.000000
2/14/2012	10:31:28 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:31:28 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:31:28 AM	Tube furnace set to 150
2/14/2012	10:31:58 AM	H2 valve closed
2/14/2012	10:31:58 AM	BCl3 valve closed
2/14/2012	10:31:58 AM	PH3 valve closed
2/14/2012	10:31:58 AM	SiCl4 pre valve closed
2/14/2012	10:31:58 AM	SiCl4 post valve closed
2/14/2012	10:31:58 AM	Bypass valve closed
2/14/2012	10:31:58 AM	Bubbler valve closed
2/14/2012	10:31:58 AM	Helium valve opened
2/14/2012	10:31:58 AM	Main Vac valve opened
2/14/2012	10:31:58 AM	Helium MFC set to  20.000000
2/14/2012	10:31:58 AM	H2 MFC set to  0.000000
2/14/2012	10:31:58 AM	BCl3 MFC set to  0.000000
2/14/2012	10:31:58 AM	PH3 MFC set to  0.000000
2/14/2012	10:31:58 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:31:58 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:31:58 AM	Tube furnace set to 150
2/14/2012	10:32:28 AM	Helium valve closed
2/14/2012	10:32:28 AM	H2 valve closed
2/14/2012	10:32:28 AM	BCl3 valve closed
2/14/2012	10:32:28 AM	PH3 valve closed
2/14/2012	10:32:28 AM	SiCl4 pre valve closed
2/14/2012	10:32:28 AM	SiCl4 post valve closed
2/14/2012	10:32:28 AM	Bypass valve closed
2/14/2012	10:32:28 AM	Bubbler valve closed
2/14/2012	10:32:28 AM	Main Vac valve opened
2/14/2012	10:32:28 AM	Helium MFC set to  0.000000
2/14/2012	10:32:28 AM	H2 MFC set to  0.000000
2/14/2012	10:32:28 AM	BCl3 MFC set to  0.000000
2/14/2012	10:32:28 AM	PH3 MFC set to  0.000000
2/14/2012	10:32:28 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:32:28 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:32:28 AM	Tube furnace set to 150
2/14/2012	10:32:58 AM	H2 valve closed
2/14/2012	10:32:58 AM	BCl3 valve closed
2/14/2012	10:32:58 AM	PH3 valve closed
2/14/2012	10:32:58 AM	SiCl4 pre valve closed
2/14/2012	10:32:58 AM	SiCl4 post valve closed
2/14/2012	10:32:58 AM	Bypass valve closed
2/14/2012	10:32:58 AM	Bubbler valve closed
2/14/2012	10:32:58 AM	Helium valve opened
2/14/2012	10:32:58 AM	Main Vac valve opened
2/14/2012	10:32:58 AM	Helium MFC set to  20.000000
2/14/2012	10:32:58 AM	H2 MFC set to  0.000000
2/14/2012	10:32:58 AM	BCl3 MFC set to  0.000000
2/14/2012	10:32:58 AM	PH3 MFC set to  0.000000
2/14/2012	10:32:58 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:32:58 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:32:59 AM	Tube furnace set to 150
2/14/2012	10:33:29 AM	Helium valve closed
2/14/2012	10:33:29 AM	H2 valve closed
2/14/2012	10:33:29 AM	BCl3 valve closed
2/14/2012	10:33:29 AM	PH3 valve closed
2/14/2012	10:33:29 AM	SiCl4 pre valve closed
2/14/2012	10:33:29 AM	SiCl4 post valve closed
2/14/2012	10:33:29 AM	Bypass valve closed
2/14/2012	10:33:29 AM	Bubbler valve closed
2/14/2012	10:33:29 AM	Main Vac valve opened
2/14/2012	10:33:29 AM	Helium MFC set to  0.000000
2/14/2012	10:33:29 AM	H2 MFC set to  0.000000
2/14/2012	10:33:29 AM	BCl3 MFC set to  0.000000
2/14/2012	10:33:29 AM	PH3 MFC set to  0.000000
2/14/2012	10:33:29 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:33:29 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:33:29 AM	Tube furnace set to 150
2/14/2012	10:33:59 AM	H2 valve closed
2/14/2012	10:33:59 AM	BCl3 valve closed
2/14/2012	10:33:59 AM	PH3 valve closed
2/14/2012	10:33:59 AM	SiCl4 pre valve closed
2/14/2012	10:33:59 AM	SiCl4 post valve closed
2/14/2012	10:33:59 AM	Bypass valve closed
2/14/2012	10:33:59 AM	Bubbler valve closed
2/14/2012	10:33:59 AM	Helium valve opened
2/14/2012	10:33:59 AM	Main Vac valve opened
2/14/2012	10:33:59 AM	Helium MFC set to  20.000000
2/14/2012	10:33:59 AM	H2 MFC set to  0.000000
2/14/2012	10:33:59 AM	BCl3 MFC set to  0.000000
2/14/2012	10:33:59 AM	PH3 MFC set to  0.000000
2/14/2012	10:33:59 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:33:59 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:33:59 AM	Tube furnace set to 150
2/14/2012	10:34:29 AM	Helium valve closed
2/14/2012	10:34:29 AM	H2 valve closed
2/14/2012	10:34:29 AM	BCl3 valve closed
2/14/2012	10:34:29 AM	PH3 valve closed
2/14/2012	10:34:29 AM	SiCl4 pre valve closed
2/14/2012	10:34:29 AM	SiCl4 post valve closed
2/14/2012	10:34:29 AM	Bypass valve closed
2/14/2012	10:34:29 AM	Bubbler valve closed
2/14/2012	10:34:29 AM	Main Vac valve opened
2/14/2012	10:34:29 AM	Helium MFC set to  0.000000
2/14/2012	10:34:29 AM	H2 MFC set to  0.000000
2/14/2012	10:34:29 AM	BCl3 MFC set to  0.000000
2/14/2012	10:34:29 AM	PH3 MFC set to  0.000000
2/14/2012	10:34:29 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:34:29 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:34:29 AM	Tube furnace set to 150
2/14/2012	10:34:59 AM	H2 valve closed
2/14/2012	10:34:59 AM	BCl3 valve closed
2/14/2012	10:34:59 AM	PH3 valve closed
2/14/2012	10:34:59 AM	SiCl4 pre valve closed
2/14/2012	10:34:59 AM	SiCl4 post valve closed
2/14/2012	10:34:59 AM	Bypass valve closed
2/14/2012	10:34:59 AM	Bubbler valve closed
2/14/2012	10:34:59 AM	Helium valve opened
2/14/2012	10:34:59 AM	Main Vac valve opened
2/14/2012	10:34:59 AM	Helium MFC set to  20.000000
2/14/2012	10:34:59 AM	H2 MFC set to  0.000000
2/14/2012	10:34:59 AM	BCl3 MFC set to  0.000000
2/14/2012	10:34:59 AM	PH3 MFC set to  0.000000
2/14/2012	10:34:59 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:34:59 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:34:59 AM	Tube furnace set to 150
2/14/2012	10:35:29 AM	Helium valve closed
2/14/2012	10:35:29 AM	H2 valve closed
2/14/2012	10:35:29 AM	BCl3 valve closed
2/14/2012	10:35:29 AM	PH3 valve closed
2/14/2012	10:35:29 AM	SiCl4 pre valve closed
2/14/2012	10:35:29 AM	SiCl4 post valve closed
2/14/2012	10:35:29 AM	Bypass valve closed
2/14/2012	10:35:29 AM	Bubbler valve closed
2/14/2012	10:35:29 AM	Main Vac valve opened
2/14/2012	10:35:29 AM	Helium MFC set to  0.000000
2/14/2012	10:35:29 AM	H2 MFC set to  0.000000
2/14/2012	10:35:29 AM	BCl3 MFC set to  0.000000
2/14/2012	10:35:29 AM	PH3 MFC set to  0.000000
2/14/2012	10:35:29 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:35:29 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:35:30 AM	Tube furnace set to 150
2/14/2012	10:36:00 AM	H2 valve closed
2/14/2012	10:36:00 AM	BCl3 valve closed
2/14/2012	10:36:00 AM	PH3 valve closed
2/14/2012	10:36:00 AM	SiCl4 pre valve closed
2/14/2012	10:36:00 AM	SiCl4 post valve closed
2/14/2012	10:36:00 AM	Bypass valve closed
2/14/2012	10:36:00 AM	Bubbler valve closed
2/14/2012	10:36:00 AM	Helium valve opened
2/14/2012	10:36:00 AM	Main Vac valve opened
2/14/2012	10:36:00 AM	Helium MFC set to  20.000000
2/14/2012	10:36:00 AM	H2 MFC set to  0.000000
2/14/2012	10:36:00 AM	BCl3 MFC set to  0.000000
2/14/2012	10:36:00 AM	PH3 MFC set to  0.000000
2/14/2012	10:36:00 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:36:00 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:36:00 AM	Tube furnace set to 150
2/14/2012	10:36:30 AM	Helium valve closed
2/14/2012	10:36:30 AM	H2 valve closed
2/14/2012	10:36:30 AM	BCl3 valve closed
2/14/2012	10:36:30 AM	PH3 valve closed
2/14/2012	10:36:30 AM	SiCl4 pre valve closed
2/14/2012	10:36:30 AM	SiCl4 post valve closed
2/14/2012	10:36:30 AM	Bypass valve closed
2/14/2012	10:36:30 AM	Bubbler valve closed
2/14/2012	10:36:30 AM	Main Vac valve opened
2/14/2012	10:36:30 AM	Helium MFC set to  0.000000
2/14/2012	10:36:30 AM	H2 MFC set to  0.000000
2/14/2012	10:36:30 AM	BCl3 MFC set to  0.000000
2/14/2012	10:36:30 AM	PH3 MFC set to  0.000000
2/14/2012	10:36:30 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:36:30 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:36:30 AM	Tube furnace set to 150
2/14/2012	10:37:00 AM	H2 valve closed
2/14/2012	10:37:00 AM	BCl3 valve closed
2/14/2012	10:37:00 AM	PH3 valve closed
2/14/2012	10:37:00 AM	SiCl4 pre valve closed
2/14/2012	10:37:00 AM	SiCl4 post valve closed
2/14/2012	10:37:00 AM	Bypass valve closed
2/14/2012	10:37:00 AM	Bubbler valve closed
2/14/2012	10:37:00 AM	Helium valve opened
2/14/2012	10:37:00 AM	Main Vac valve opened
2/14/2012	10:37:00 AM	Helium MFC set to  20.000000
2/14/2012	10:37:00 AM	H2 MFC set to  0.000000
2/14/2012	10:37:00 AM	BCl3 MFC set to  0.000000
2/14/2012	10:37:00 AM	PH3 MFC set to  0.000000
2/14/2012	10:37:00 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:37:00 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:37:00 AM	Tube furnace set to 150
2/14/2012	10:37:30 AM	Helium valve closed
2/14/2012	10:37:30 AM	H2 valve closed
2/14/2012	10:37:30 AM	BCl3 valve closed
2/14/2012	10:37:30 AM	PH3 valve closed
2/14/2012	10:37:30 AM	SiCl4 pre valve closed
2/14/2012	10:37:30 AM	SiCl4 post valve closed
2/14/2012	10:37:30 AM	Bypass valve closed
2/14/2012	10:37:30 AM	Bubbler valve closed
2/14/2012	10:37:30 AM	Main Vac valve opened
2/14/2012	10:37:30 AM	Helium MFC set to  0.000000
2/14/2012	10:37:30 AM	H2 MFC set to  0.000000
2/14/2012	10:37:30 AM	BCl3 MFC set to  0.000000
2/14/2012	10:37:30 AM	PH3 MFC set to  0.000000
2/14/2012	10:37:30 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:37:30 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:37:30 AM	Tube furnace set to 150
2/14/2012	10:38:00 AM	H2 valve closed
2/14/2012	10:38:00 AM	BCl3 valve closed
2/14/2012	10:38:00 AM	PH3 valve closed
2/14/2012	10:38:00 AM	SiCl4 pre valve closed
2/14/2012	10:38:00 AM	SiCl4 post valve closed
2/14/2012	10:38:00 AM	Bypass valve closed
2/14/2012	10:38:00 AM	Bubbler valve closed
2/14/2012	10:38:00 AM	Helium valve opened
2/14/2012	10:38:00 AM	Main Vac valve opened
2/14/2012	10:38:00 AM	Helium MFC set to  20.000000
2/14/2012	10:38:00 AM	H2 MFC set to  0.000000
2/14/2012	10:38:00 AM	BCl3 MFC set to  0.000000
2/14/2012	10:38:00 AM	PH3 MFC set to  0.000000
2/14/2012	10:38:00 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:38:00 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:38:01 AM	Tube furnace set to 150
2/14/2012	10:38:31 AM	Helium valve closed
2/14/2012	10:38:31 AM	H2 valve closed
2/14/2012	10:38:31 AM	BCl3 valve closed
2/14/2012	10:38:31 AM	PH3 valve closed
2/14/2012	10:38:31 AM	SiCl4 pre valve closed
2/14/2012	10:38:31 AM	SiCl4 post valve closed
2/14/2012	10:38:31 AM	Bypass valve closed
2/14/2012	10:38:31 AM	Bubbler valve closed
2/14/2012	10:38:31 AM	Main Vac valve opened
2/14/2012	10:38:31 AM	Helium MFC set to  0.000000
2/14/2012	10:38:31 AM	H2 MFC set to  0.000000
2/14/2012	10:38:31 AM	BCl3 MFC set to  0.000000
2/14/2012	10:38:31 AM	PH3 MFC set to  0.000000
2/14/2012	10:38:31 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:38:31 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:38:31 AM	Tube furnace set to 150
2/14/2012	10:38:32 AM	Run finished at 10:38 AM
2/14/2012	10:39:12 AM	Main Vac valve closed
2/14/2012	10:39:26 AM	Main Vac valve opened
2/14/2012	10:40:46 AM	Recipe started at 10:40 AM
2/14/2012	10:40:46 AM	Helium valve closed
2/14/2012	10:40:46 AM	H2 valve closed
2/14/2012	10:40:46 AM	BCl3 valve closed
2/14/2012	10:40:46 AM	PH3 valve closed
2/14/2012	10:40:46 AM	SiCl4 pre valve closed
2/14/2012	10:40:46 AM	SiCl4 post valve closed
2/14/2012	10:40:46 AM	Main Vac valve closed
2/14/2012	10:40:46 AM	Bypass valve closed
2/14/2012	10:40:46 AM	Bubbler valve closed
2/14/2012	10:40:46 AM	Helium MFC set to  0.000000
2/14/2012	10:40:46 AM	H2 MFC set to  0.000000
2/14/2012	10:40:46 AM	BCl3 MFC set to  0.000000
2/14/2012	10:40:46 AM	PH3 MFC set to  0.000000
2/14/2012	10:40:46 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:40:46 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:40:46 AM	Tube furnace set to 0
2/14/2012	10:40:49 AM	Helium valve closed
2/14/2012	10:40:49 AM	BCl3 valve closed
2/14/2012	10:40:49 AM	PH3 valve closed
2/14/2012	10:40:49 AM	SiCl4 pre valve closed
2/14/2012	10:40:49 AM	SiCl4 post valve closed
2/14/2012	10:40:49 AM	Main Vac valve closed
2/14/2012	10:40:49 AM	Bypass valve closed
2/14/2012	10:40:49 AM	Bubbler valve closed
2/14/2012	10:40:49 AM	H2 valve opened
2/14/2012	10:40:49 AM	Helium MFC set to  0.000000
2/14/2012	10:40:49 AM	H2 MFC set to  500.000000
2/14/2012	10:40:49 AM	BCl3 MFC set to  0.000000
2/14/2012	10:40:49 AM	PH3 MFC set to  0.000000
2/14/2012	10:40:49 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:40:49 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:40:49 AM	Tube furnace set to 0
2/14/2012	10:41:52 AM	Helium valve closed
2/14/2012	10:41:52 AM	BCl3 valve closed
2/14/2012	10:41:52 AM	PH3 valve closed
2/14/2012	10:41:52 AM	SiCl4 pre valve closed
2/14/2012	10:41:52 AM	SiCl4 post valve closed
2/14/2012	10:41:52 AM	Main Vac valve closed
2/14/2012	10:41:52 AM	Bypass valve closed
2/14/2012	10:41:52 AM	H2 valve opened
2/14/2012	10:41:52 AM	Bubbler valve opened
2/14/2012	10:41:52 AM	Helium MFC set to  0.000000
2/14/2012	10:41:52 AM	H2 MFC set to  500.000000
2/14/2012	10:41:52 AM	BCl3 MFC set to  0.000000
2/14/2012	10:41:52 AM	PH3 MFC set to  0.000000
2/14/2012	10:41:52 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:41:52 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:41:52 AM	Tube furnace set to 0
2/14/2012	10:41:53 AM	Helium valve closed
2/14/2012	10:41:53 AM	BCl3 valve closed
2/14/2012	10:41:53 AM	PH3 valve closed
2/14/2012	10:41:53 AM	SiCl4 pre valve closed
2/14/2012	10:41:53 AM	SiCl4 post valve closed
2/14/2012	10:41:53 AM	Main Vac valve closed
2/14/2012	10:41:53 AM	Bypass valve closed
2/14/2012	10:41:53 AM	H2 valve opened
2/14/2012	10:41:53 AM	Bubbler valve opened
2/14/2012	10:41:53 AM	Helium MFC set to  0.000000
2/14/2012	10:41:53 AM	H2 MFC set to  500.000000
2/14/2012	10:41:53 AM	BCl3 MFC set to  0.000000
2/14/2012	10:41:53 AM	PH3 MFC set to  0.000000
2/14/2012	10:41:53 AM	SiCl4 MFC set to  0.000000
2/14/2012	10:41:53 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:41:54 AM	Tube furnace set to 1000
2/14/2012	11:01:54 AM	Helium valve closed
2/14/2012	11:01:54 AM	PH3 valve closed
2/14/2012	11:01:54 AM	Main Vac valve closed
2/14/2012	11:01:54 AM	Bypass valve closed
2/14/2012	11:01:54 AM	H2 valve opened
2/14/2012	11:01:54 AM	BCl3 valve opened
2/14/2012	11:01:54 AM	SiCl4 pre valve opened
2/14/2012	11:01:54 AM	SiCl4 post valve opened
2/14/2012	11:01:54 AM	Bubbler valve opened
2/14/2012	11:01:54 AM	Helium MFC set to  0.000000
2/14/2012	11:01:54 AM	H2 MFC set to  500.000000
2/14/2012	11:01:54 AM	BCl3 MFC set to  20.000000
2/14/2012	11:01:54 AM	PH3 MFC set to  0.000000
2/14/2012	11:01:54 AM	SiCl4 MFC set to  50.000000
2/14/2012	11:01:54 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:01:54 AM	Tube furnace set to 1000
2/14/2012	11:11:54 AM	Helium valve closed
2/14/2012	11:11:54 AM	BCl3 valve closed
2/14/2012	11:11:54 AM	PH3 valve closed
2/14/2012	11:11:54 AM	SiCl4 pre valve closed
2/14/2012	11:11:54 AM	SiCl4 post valve closed
2/14/2012	11:11:54 AM	Main Vac valve closed
2/14/2012	11:11:54 AM	Bypass valve closed
2/14/2012	11:11:54 AM	H2 valve opened
2/14/2012	11:11:54 AM	Bubbler valve opened
2/14/2012	11:11:54 AM	Helium MFC set to  0.000000
2/14/2012	11:11:54 AM	H2 MFC set to  500.000000
2/14/2012	11:11:54 AM	BCl3 MFC set to  0.000000
2/14/2012	11:11:54 AM	PH3 MFC set to  0.000000
2/14/2012	11:11:54 AM	SiCl4 MFC set to  0.000000
2/14/2012	11:11:54 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:11:54 AM	Tube furnace set to 750
2/14/2012	11:16:54 AM	H2 valve closed
2/14/2012	11:16:54 AM	BCl3 valve closed
2/14/2012	11:16:54 AM	PH3 valve closed
2/14/2012	11:16:54 AM	SiCl4 pre valve closed
2/14/2012	11:16:54 AM	SiCl4 post valve closed
2/14/2012	11:16:54 AM	Main Vac valve closed
2/14/2012	11:16:54 AM	Bypass valve closed
2/14/2012	11:16:54 AM	Helium valve opened
2/14/2012	11:16:54 AM	Bubbler valve opened
2/14/2012	11:16:54 AM	Helium MFC set to  500.000000
2/14/2012	11:16:54 AM	H2 MFC set to  0.000000
2/14/2012	11:16:54 AM	BCl3 MFC set to  0.000000
2/14/2012	11:16:54 AM	PH3 MFC set to  0.000000
2/14/2012	11:16:54 AM	SiCl4 MFC set to  0.000000
2/14/2012	11:16:54 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:16:54 AM	Tube furnace set to 0
2/14/2012	11:36:54 AM	Helium valve closed
2/14/2012	11:36:54 AM	H2 valve closed
2/14/2012	11:36:54 AM	BCl3 valve closed
2/14/2012	11:36:54 AM	PH3 valve closed
2/14/2012	11:36:54 AM	SiCl4 pre valve closed
2/14/2012	11:36:54 AM	SiCl4 post valve closed
2/14/2012	11:36:54 AM	Main Vac valve closed
2/14/2012	11:36:54 AM	Bypass valve closed
2/14/2012	11:36:54 AM	Bubbler valve closed
2/14/2012	11:36:54 AM	Helium MFC set to  0.000000
2/14/2012	11:36:54 AM	H2 MFC set to  0.000000
2/14/2012	11:36:54 AM	BCl3 MFC set to  0.000000
2/14/2012	11:36:54 AM	PH3 MFC set to  0.000000
2/14/2012	11:36:54 AM	SiCl4 MFC set to  0.000000
2/14/2012	11:36:54 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:36:54 AM	Tube furnace set to 0
2/14/2012	11:36:55 AM	Run finished at 11:36 AM
2/14/2012	11:41:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2012	11:41:24 AM	Recipe started at 11:41 AM
2/14/2012	11:41:25 AM	Helium valve closed
2/14/2012	11:41:25 AM	H2 valve closed
2/14/2012	11:41:25 AM	BCl3 valve closed
2/14/2012	11:41:25 AM	PH3 valve closed
2/14/2012	11:41:25 AM	SiCl4 pre valve closed
2/14/2012	11:41:25 AM	SiCl4 post valve closed
2/14/2012	11:41:25 AM	Main Vac valve closed
2/14/2012	11:41:25 AM	Bubbler valve closed
2/14/2012	11:41:25 AM	Bypass valve opened
2/14/2012	11:41:25 AM	Helium MFC set to  0.000000
2/14/2012	11:41:25 AM	H2 MFC set to  0.000000
2/14/2012	11:41:25 AM	BCl3 MFC set to  0.000000
2/14/2012	11:41:25 AM	PH3 MFC set to  0.000000
2/14/2012	11:41:25 AM	SiCl4 MFC set to  0.000000
2/14/2012	11:41:25 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:41:25 AM	Tube furnace set to 0
2/14/2012	11:42:24 AM	Helium valve closed
2/14/2012	11:42:24 AM	H2 valve closed
2/14/2012	11:42:24 AM	BCl3 valve closed
2/14/2012	11:42:24 AM	PH3 valve closed
2/14/2012	11:42:24 AM	SiCl4 pre valve closed
2/14/2012	11:42:24 AM	SiCl4 post valve closed
2/14/2012	11:42:24 AM	Main Vac valve closed
2/14/2012	11:42:24 AM	Bubbler valve closed
2/14/2012	11:42:24 AM	Bypass valve opened
2/14/2012	11:42:24 AM	Helium MFC set to  0.000000
2/14/2012	11:42:24 AM	H2 MFC set to  0.000000
2/14/2012	11:42:24 AM	BCl3 MFC set to  0.000000
2/14/2012	11:42:24 AM	PH3 MFC set to  0.000000
2/14/2012	11:42:24 AM	SiCl4 MFC set to  0.000000
2/14/2012	11:42:24 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:42:25 AM	Tube furnace set to 0
2/14/2012	11:43:25 AM	Helium valve closed
2/14/2012	11:43:25 AM	H2 valve closed
2/14/2012	11:43:25 AM	BCl3 valve closed
2/14/2012	11:43:25 AM	PH3 valve closed
2/14/2012	11:43:25 AM	SiCl4 pre valve closed
2/14/2012	11:43:25 AM	SiCl4 post valve closed
2/14/2012	11:43:25 AM	Bypass valve closed
2/14/2012	11:43:25 AM	Bubbler valve closed
2/14/2012	11:43:25 AM	Main Vac valve opened
2/14/2012	11:43:25 AM	Helium MFC set to  0.000000
2/14/2012	11:43:25 AM	H2 MFC set to  0.000000
2/14/2012	11:43:25 AM	BCl3 MFC set to  0.000000
2/14/2012	11:43:25 AM	PH3 MFC set to  0.000000
2/14/2012	11:43:25 AM	SiCl4 MFC set to  0.000000
2/14/2012	11:43:25 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:43:25 AM	Tube furnace set to 0
2/14/2012	11:43:26 AM	Run finished at 11:43 AM
2/14/2012	11:43:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2012	11:51:52 AM	Recipe started at 11:51 AM
2/14/2012	11:51:52 AM	Helium valve closed
2/14/2012	11:51:52 AM	H2 valve closed
2/14/2012	11:51:52 AM	BCl3 valve closed
2/14/2012	11:51:52 AM	PH3 valve closed
2/14/2012	11:51:52 AM	SiCl4 pre valve closed
2/14/2012	11:51:52 AM	SiCl4 post valve closed
2/14/2012	11:51:52 AM	Bypass valve closed
2/14/2012	11:51:52 AM	Bubbler valve closed
2/14/2012	11:51:52 AM	Main Vac valve opened
2/14/2012	11:51:52 AM	Helium MFC set to  0.000000
2/14/2012	11:51:52 AM	H2 MFC set to  0.000000
2/14/2012	11:51:52 AM	BCl3 MFC set to  0.000000
2/14/2012	11:51:52 AM	PH3 MFC set to  0.000000
2/14/2012	11:51:52 AM	SiCl4 MFC set to  0.000000
2/14/2012	11:51:52 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:51:52 AM	Tube furnace set to 150
2/14/2012	11:52:22 AM	H2 valve closed
2/14/2012	11:52:22 AM	BCl3 valve closed
2/14/2012	11:52:22 AM	PH3 valve closed
2/14/2012	11:52:22 AM	SiCl4 pre valve closed
2/14/2012	11:52:22 AM	SiCl4 post valve closed
2/14/2012	11:52:22 AM	Bypass valve closed
2/14/2012	11:52:22 AM	Bubbler valve closed
2/14/2012	11:52:22 AM	Helium valve opened
2/14/2012	11:52:22 AM	Main Vac valve opened
2/14/2012	11:52:22 AM	Helium MFC set to  20.000000
2/14/2012	11:52:22 AM	H2 MFC set to  0.000000
2/14/2012	11:52:22 AM	BCl3 MFC set to  0.000000
2/14/2012	11:52:22 AM	PH3 MFC set to  0.000000
2/14/2012	11:52:22 AM	SiCl4 MFC set to  0.000000
2/14/2012	11:52:22 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:52:22 AM	Tube furnace set to 150
2/14/2012	11:52:52 AM	Helium valve closed
2/14/2012	11:52:52 AM	H2 valve closed
2/14/2012	11:52:52 AM	BCl3 valve closed
2/14/2012	11:52:52 AM	PH3 valve closed
2/14/2012	11:52:52 AM	SiCl4 pre valve closed
2/14/2012	11:52:52 AM	SiCl4 post valve closed
2/14/2012	11:52:52 AM	Bypass valve closed
2/14/2012	11:52:52 AM	Bubbler valve closed
2/14/2012	11:52:52 AM	Main Vac valve opened
2/14/2012	11:52:52 AM	Helium MFC set to  0.000000
2/14/2012	11:52:52 AM	H2 MFC set to  0.000000
2/14/2012	11:52:52 AM	BCl3 MFC set to  0.000000
2/14/2012	11:52:52 AM	PH3 MFC set to  0.000000
2/14/2012	11:52:52 AM	SiCl4 MFC set to  0.000000
2/14/2012	11:52:52 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:52:52 AM	Tube furnace set to 150
2/14/2012	11:53:22 AM	H2 valve closed
2/14/2012	11:53:22 AM	BCl3 valve closed
2/14/2012	11:53:22 AM	PH3 valve closed
2/14/2012	11:53:22 AM	SiCl4 pre valve closed
2/14/2012	11:53:22 AM	SiCl4 post valve closed
2/14/2012	11:53:22 AM	Bypass valve closed
2/14/2012	11:53:22 AM	Bubbler valve closed
2/14/2012	11:53:22 AM	Helium valve opened
2/14/2012	11:53:22 AM	Main Vac valve opened
2/14/2012	11:53:22 AM	Helium MFC set to  20.000000
2/14/2012	11:53:22 AM	H2 MFC set to  0.000000
2/14/2012	11:53:22 AM	BCl3 MFC set to  0.000000
2/14/2012	11:53:22 AM	PH3 MFC set to  0.000000
2/14/2012	11:53:22 AM	SiCl4 MFC set to  0.000000
2/14/2012	11:53:22 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:53:22 AM	Tube furnace set to 150
2/14/2012	11:53:52 AM	Helium valve closed
2/14/2012	11:53:52 AM	H2 valve closed
2/14/2012	11:53:52 AM	BCl3 valve closed
2/14/2012	11:53:52 AM	PH3 valve closed
2/14/2012	11:53:52 AM	SiCl4 pre valve closed
2/14/2012	11:53:52 AM	SiCl4 post valve closed
2/14/2012	11:53:52 AM	Bypass valve closed
2/14/2012	11:53:52 AM	Bubbler valve closed
2/14/2012	11:53:52 AM	Main Vac valve opened
2/14/2012	11:53:52 AM	Helium MFC set to  0.000000
2/14/2012	11:53:52 AM	H2 MFC set to  0.000000
2/14/2012	11:53:52 AM	BCl3 MFC set to  0.000000
2/14/2012	11:53:52 AM	PH3 MFC set to  0.000000
2/14/2012	11:53:52 AM	SiCl4 MFC set to  0.000000
2/14/2012	11:53:52 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:53:53 AM	Tube furnace set to 150
2/14/2012	11:54:23 AM	H2 valve closed
2/14/2012	11:54:23 AM	BCl3 valve closed
2/14/2012	11:54:23 AM	PH3 valve closed
2/14/2012	11:54:23 AM	SiCl4 pre valve closed
2/14/2012	11:54:23 AM	SiCl4 post valve closed
2/14/2012	11:54:23 AM	Bypass valve closed
2/14/2012	11:54:23 AM	Bubbler valve closed
2/14/2012	11:54:23 AM	Helium valve opened
2/14/2012	11:54:23 AM	Main Vac valve opened
2/14/2012	11:54:23 AM	Helium MFC set to  20.000000
2/14/2012	11:54:23 AM	H2 MFC set to  0.000000
2/14/2012	11:54:23 AM	BCl3 MFC set to  0.000000
2/14/2012	11:54:23 AM	PH3 MFC set to  0.000000
2/14/2012	11:54:23 AM	SiCl4 MFC set to  0.000000
2/14/2012	11:54:23 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:54:23 AM	Tube furnace set to 150
2/14/2012	11:54:53 AM	Helium valve closed
2/14/2012	11:54:53 AM	H2 valve closed
2/14/2012	11:54:53 AM	BCl3 valve closed
2/14/2012	11:54:53 AM	PH3 valve closed
2/14/2012	11:54:53 AM	SiCl4 pre valve closed
2/14/2012	11:54:53 AM	SiCl4 post valve closed
2/14/2012	11:54:53 AM	Bypass valve closed
2/14/2012	11:54:53 AM	Bubbler valve closed
2/14/2012	11:54:53 AM	Main Vac valve opened
2/14/2012	11:54:53 AM	Helium MFC set to  0.000000
2/14/2012	11:54:53 AM	H2 MFC set to  0.000000
2/14/2012	11:54:53 AM	BCl3 MFC set to  0.000000
2/14/2012	11:54:53 AM	PH3 MFC set to  0.000000
2/14/2012	11:54:53 AM	SiCl4 MFC set to  0.000000
2/14/2012	11:54:53 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:54:53 AM	Tube furnace set to 150
2/14/2012	11:55:23 AM	H2 valve closed
2/14/2012	11:55:23 AM	BCl3 valve closed
2/14/2012	11:55:23 AM	PH3 valve closed
2/14/2012	11:55:23 AM	SiCl4 pre valve closed
2/14/2012	11:55:23 AM	SiCl4 post valve closed
2/14/2012	11:55:23 AM	Bypass valve closed
2/14/2012	11:55:23 AM	Bubbler valve closed
2/14/2012	11:55:23 AM	Helium valve opened
2/14/2012	11:55:23 AM	Main Vac valve opened
2/14/2012	11:55:23 AM	Helium MFC set to  20.000000
2/14/2012	11:55:23 AM	H2 MFC set to  0.000000
2/14/2012	11:55:23 AM	BCl3 MFC set to  0.000000
2/14/2012	11:55:23 AM	PH3 MFC set to  0.000000
2/14/2012	11:55:23 AM	SiCl4 MFC set to  0.000000
2/14/2012	11:55:23 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:55:23 AM	Tube furnace set to 150
2/14/2012	11:55:53 AM	Helium valve closed
2/14/2012	11:55:53 AM	H2 valve closed
2/14/2012	11:55:53 AM	BCl3 valve closed
2/14/2012	11:55:53 AM	PH3 valve closed
2/14/2012	11:55:53 AM	SiCl4 pre valve closed
2/14/2012	11:55:53 AM	SiCl4 post valve closed
2/14/2012	11:55:53 AM	Bypass valve closed
2/14/2012	11:55:53 AM	Bubbler valve closed
2/14/2012	11:55:53 AM	Main Vac valve opened
2/14/2012	11:55:53 AM	Helium MFC set to  0.000000
2/14/2012	11:55:53 AM	H2 MFC set to  0.000000
2/14/2012	11:55:53 AM	BCl3 MFC set to  0.000000
2/14/2012	11:55:53 AM	PH3 MFC set to  0.000000
2/14/2012	11:55:53 AM	SiCl4 MFC set to  0.000000
2/14/2012	11:55:53 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:55:53 AM	Tube furnace set to 150
2/14/2012	11:56:23 AM	H2 valve closed
2/14/2012	11:56:23 AM	BCl3 valve closed
2/14/2012	11:56:23 AM	PH3 valve closed
2/14/2012	11:56:23 AM	SiCl4 pre valve closed
2/14/2012	11:56:23 AM	SiCl4 post valve closed
2/14/2012	11:56:23 AM	Bypass valve closed
2/14/2012	11:56:23 AM	Bubbler valve closed
2/14/2012	11:56:23 AM	Helium valve opened
2/14/2012	11:56:23 AM	Main Vac valve opened
2/14/2012	11:56:23 AM	Helium MFC set to  20.000000
2/14/2012	11:56:23 AM	H2 MFC set to  0.000000
2/14/2012	11:56:23 AM	BCl3 MFC set to  0.000000
2/14/2012	11:56:23 AM	PH3 MFC set to  0.000000
2/14/2012	11:56:23 AM	SiCl4 MFC set to  0.000000
2/14/2012	11:56:23 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:56:24 AM	Tube furnace set to 150
2/14/2012	11:56:54 AM	Helium valve closed
2/14/2012	11:56:54 AM	H2 valve closed
2/14/2012	11:56:54 AM	BCl3 valve closed
2/14/2012	11:56:54 AM	PH3 valve closed
2/14/2012	11:56:54 AM	SiCl4 pre valve closed
2/14/2012	11:56:54 AM	SiCl4 post valve closed
2/14/2012	11:56:54 AM	Bypass valve closed
2/14/2012	11:56:54 AM	Bubbler valve closed
2/14/2012	11:56:54 AM	Main Vac valve opened
2/14/2012	11:56:54 AM	Helium MFC set to  0.000000
2/14/2012	11:56:54 AM	H2 MFC set to  0.000000
2/14/2012	11:56:54 AM	BCl3 MFC set to  0.000000
2/14/2012	11:56:54 AM	PH3 MFC set to  0.000000
2/14/2012	11:56:54 AM	SiCl4 MFC set to  0.000000
2/14/2012	11:56:54 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:56:54 AM	Tube furnace set to 150
2/14/2012	11:57:24 AM	H2 valve closed
2/14/2012	11:57:24 AM	BCl3 valve closed
2/14/2012	11:57:24 AM	PH3 valve closed
2/14/2012	11:57:24 AM	SiCl4 pre valve closed
2/14/2012	11:57:24 AM	SiCl4 post valve closed
2/14/2012	11:57:24 AM	Bypass valve closed
2/14/2012	11:57:24 AM	Bubbler valve closed
2/14/2012	11:57:24 AM	Helium valve opened
2/14/2012	11:57:24 AM	Main Vac valve opened
2/14/2012	11:57:24 AM	Helium MFC set to  20.000000
2/14/2012	11:57:24 AM	H2 MFC set to  0.000000
2/14/2012	11:57:24 AM	BCl3 MFC set to  0.000000
2/14/2012	11:57:24 AM	PH3 MFC set to  0.000000
2/14/2012	11:57:24 AM	SiCl4 MFC set to  0.000000
2/14/2012	11:57:24 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:57:24 AM	Tube furnace set to 150
2/14/2012	11:57:54 AM	Helium valve closed
2/14/2012	11:57:54 AM	H2 valve closed
2/14/2012	11:57:54 AM	BCl3 valve closed
2/14/2012	11:57:54 AM	PH3 valve closed
2/14/2012	11:57:54 AM	SiCl4 pre valve closed
2/14/2012	11:57:54 AM	SiCl4 post valve closed
2/14/2012	11:57:54 AM	Bypass valve closed
2/14/2012	11:57:54 AM	Bubbler valve closed
2/14/2012	11:57:54 AM	Main Vac valve opened
2/14/2012	11:57:54 AM	Helium MFC set to  0.000000
2/14/2012	11:57:54 AM	H2 MFC set to  0.000000
2/14/2012	11:57:54 AM	BCl3 MFC set to  0.000000
2/14/2012	11:57:54 AM	PH3 MFC set to  0.000000
2/14/2012	11:57:54 AM	SiCl4 MFC set to  0.000000
2/14/2012	11:57:54 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:57:54 AM	Tube furnace set to 150
2/14/2012	11:58:24 AM	H2 valve closed
2/14/2012	11:58:24 AM	BCl3 valve closed
2/14/2012	11:58:24 AM	PH3 valve closed
2/14/2012	11:58:24 AM	SiCl4 pre valve closed
2/14/2012	11:58:24 AM	SiCl4 post valve closed
2/14/2012	11:58:24 AM	Bypass valve closed
2/14/2012	11:58:24 AM	Bubbler valve closed
2/14/2012	11:58:24 AM	Helium valve opened
2/14/2012	11:58:24 AM	Main Vac valve opened
2/14/2012	11:58:24 AM	Helium MFC set to  20.000000
2/14/2012	11:58:24 AM	H2 MFC set to  0.000000
2/14/2012	11:58:24 AM	BCl3 MFC set to  0.000000
2/14/2012	11:58:24 AM	PH3 MFC set to  0.000000
2/14/2012	11:58:24 AM	SiCl4 MFC set to  0.000000
2/14/2012	11:58:24 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:58:24 AM	Tube furnace set to 150
2/14/2012	11:58:54 AM	Helium valve closed
2/14/2012	11:58:54 AM	H2 valve closed
2/14/2012	11:58:54 AM	BCl3 valve closed
2/14/2012	11:58:54 AM	PH3 valve closed
2/14/2012	11:58:54 AM	SiCl4 pre valve closed
2/14/2012	11:58:54 AM	SiCl4 post valve closed
2/14/2012	11:58:54 AM	Bypass valve closed
2/14/2012	11:58:54 AM	Bubbler valve closed
2/14/2012	11:58:54 AM	Main Vac valve opened
2/14/2012	11:58:54 AM	Helium MFC set to  0.000000
2/14/2012	11:58:54 AM	H2 MFC set to  0.000000
2/14/2012	11:58:54 AM	BCl3 MFC set to  0.000000
2/14/2012	11:58:54 AM	PH3 MFC set to  0.000000
2/14/2012	11:58:54 AM	SiCl4 MFC set to  0.000000
2/14/2012	11:58:54 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:58:55 AM	Tube furnace set to 150
2/14/2012	11:59:25 AM	H2 valve closed
2/14/2012	11:59:25 AM	BCl3 valve closed
2/14/2012	11:59:25 AM	PH3 valve closed
2/14/2012	11:59:25 AM	SiCl4 pre valve closed
2/14/2012	11:59:25 AM	SiCl4 post valve closed
2/14/2012	11:59:25 AM	Bypass valve closed
2/14/2012	11:59:25 AM	Bubbler valve closed
2/14/2012	11:59:25 AM	Helium valve opened
2/14/2012	11:59:25 AM	Main Vac valve opened
2/14/2012	11:59:25 AM	Helium MFC set to  20.000000
2/14/2012	11:59:25 AM	H2 MFC set to  0.000000
2/14/2012	11:59:25 AM	BCl3 MFC set to  0.000000
2/14/2012	11:59:25 AM	PH3 MFC set to  0.000000
2/14/2012	11:59:25 AM	SiCl4 MFC set to  0.000000
2/14/2012	11:59:25 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:59:25 AM	Tube furnace set to 150
2/14/2012	11:59:55 AM	Helium valve closed
2/14/2012	11:59:55 AM	H2 valve closed
2/14/2012	11:59:55 AM	BCl3 valve closed
2/14/2012	11:59:55 AM	PH3 valve closed
2/14/2012	11:59:55 AM	SiCl4 pre valve closed
2/14/2012	11:59:55 AM	SiCl4 post valve closed
2/14/2012	11:59:55 AM	Bypass valve closed
2/14/2012	11:59:55 AM	Bubbler valve closed
2/14/2012	11:59:55 AM	Main Vac valve opened
2/14/2012	11:59:55 AM	Helium MFC set to  0.000000
2/14/2012	11:59:55 AM	H2 MFC set to  0.000000
2/14/2012	11:59:55 AM	BCl3 MFC set to  0.000000
2/14/2012	11:59:55 AM	PH3 MFC set to  0.000000
2/14/2012	11:59:55 AM	SiCl4 MFC set to  0.000000
2/14/2012	11:59:55 AM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:59:55 AM	Tube furnace set to 150
2/14/2012	12:00:25 PM	H2 valve closed
2/14/2012	12:00:25 PM	BCl3 valve closed
2/14/2012	12:00:25 PM	PH3 valve closed
2/14/2012	12:00:25 PM	SiCl4 pre valve closed
2/14/2012	12:00:25 PM	SiCl4 post valve closed
2/14/2012	12:00:25 PM	Bypass valve closed
2/14/2012	12:00:25 PM	Bubbler valve closed
2/14/2012	12:00:25 PM	Helium valve opened
2/14/2012	12:00:25 PM	Main Vac valve opened
2/14/2012	12:00:25 PM	Helium MFC set to  20.000000
2/14/2012	12:00:25 PM	H2 MFC set to  0.000000
2/14/2012	12:00:25 PM	BCl3 MFC set to  0.000000
2/14/2012	12:00:25 PM	PH3 MFC set to  0.000000
2/14/2012	12:00:25 PM	SiCl4 MFC set to  0.000000
2/14/2012	12:00:25 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	12:00:25 PM	Tube furnace set to 150
2/14/2012	12:00:55 PM	Helium valve closed
2/14/2012	12:00:55 PM	H2 valve closed
2/14/2012	12:00:55 PM	BCl3 valve closed
2/14/2012	12:00:55 PM	PH3 valve closed
2/14/2012	12:00:55 PM	SiCl4 pre valve closed
2/14/2012	12:00:55 PM	SiCl4 post valve closed
2/14/2012	12:00:55 PM	Bypass valve closed
2/14/2012	12:00:55 PM	Bubbler valve closed
2/14/2012	12:00:55 PM	Main Vac valve opened
2/14/2012	12:00:55 PM	Helium MFC set to  0.000000
2/14/2012	12:00:55 PM	H2 MFC set to  0.000000
2/14/2012	12:00:55 PM	BCl3 MFC set to  0.000000
2/14/2012	12:00:55 PM	PH3 MFC set to  0.000000
2/14/2012	12:00:55 PM	SiCl4 MFC set to  0.000000
2/14/2012	12:00:55 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	12:00:55 PM	Tube furnace set to 150
2/14/2012	12:01:25 PM	H2 valve closed
2/14/2012	12:01:25 PM	BCl3 valve closed
2/14/2012	12:01:25 PM	PH3 valve closed
2/14/2012	12:01:25 PM	SiCl4 pre valve closed
2/14/2012	12:01:25 PM	SiCl4 post valve closed
2/14/2012	12:01:25 PM	Bypass valve closed
2/14/2012	12:01:25 PM	Bubbler valve closed
2/14/2012	12:01:25 PM	Helium valve opened
2/14/2012	12:01:26 PM	Main Vac valve opened
2/14/2012	12:01:26 PM	Helium MFC set to  20.000000
2/14/2012	12:01:26 PM	H2 MFC set to  0.000000
2/14/2012	12:01:26 PM	BCl3 MFC set to  0.000000
2/14/2012	12:01:26 PM	PH3 MFC set to  0.000000
2/14/2012	12:01:26 PM	SiCl4 MFC set to  0.000000
2/14/2012	12:01:26 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	12:01:26 PM	Tube furnace set to 150
2/14/2012	12:01:56 PM	Helium valve closed
2/14/2012	12:01:56 PM	H2 valve closed
2/14/2012	12:01:56 PM	BCl3 valve closed
2/14/2012	12:01:56 PM	PH3 valve closed
2/14/2012	12:01:56 PM	SiCl4 pre valve closed
2/14/2012	12:01:56 PM	SiCl4 post valve closed
2/14/2012	12:01:56 PM	Bypass valve closed
2/14/2012	12:01:56 PM	Bubbler valve closed
2/14/2012	12:01:56 PM	Main Vac valve opened
2/14/2012	12:01:56 PM	Helium MFC set to  0.000000
2/14/2012	12:01:56 PM	H2 MFC set to  0.000000
2/14/2012	12:01:56 PM	BCl3 MFC set to  0.000000
2/14/2012	12:01:56 PM	PH3 MFC set to  0.000000
2/14/2012	12:01:56 PM	SiCl4 MFC set to  0.000000
2/14/2012	12:01:56 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	12:01:56 PM	Tube furnace set to 150
2/14/2012	12:01:57 PM	Run finished at 12:01 PM
2/14/2012	12:08:05 PM	Main Vac valve closed
2/14/2012	12:08:21 PM	Main Vac valve opened
2/14/2012	12:10:00 PM	Recipe started at 12:09 PM
2/14/2012	12:10:00 PM	Helium valve closed
2/14/2012	12:10:00 PM	H2 valve closed
2/14/2012	12:10:00 PM	BCl3 valve closed
2/14/2012	12:10:00 PM	PH3 valve closed
2/14/2012	12:10:00 PM	SiCl4 pre valve closed
2/14/2012	12:10:00 PM	SiCl4 post valve closed
2/14/2012	12:10:00 PM	Main Vac valve closed
2/14/2012	12:10:00 PM	Bypass valve closed
2/14/2012	12:10:00 PM	Bubbler valve closed
2/14/2012	12:10:00 PM	Helium MFC set to  0.000000
2/14/2012	12:10:00 PM	H2 MFC set to  0.000000
2/14/2012	12:10:00 PM	BCl3 MFC set to  0.000000
2/14/2012	12:10:00 PM	PH3 MFC set to  0.000000
2/14/2012	12:10:00 PM	SiCl4 MFC set to  0.000000
2/14/2012	12:10:00 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	12:10:00 PM	Tube furnace set to 0
2/14/2012	12:10:03 PM	Helium valve closed
2/14/2012	12:10:03 PM	BCl3 valve closed
2/14/2012	12:10:03 PM	PH3 valve closed
2/14/2012	12:10:03 PM	SiCl4 pre valve closed
2/14/2012	12:10:03 PM	SiCl4 post valve closed
2/14/2012	12:10:03 PM	Main Vac valve closed
2/14/2012	12:10:03 PM	Bypass valve closed
2/14/2012	12:10:03 PM	Bubbler valve closed
2/14/2012	12:10:03 PM	H2 valve opened
2/14/2012	12:10:03 PM	Helium MFC set to  0.000000
2/14/2012	12:10:03 PM	H2 MFC set to  500.000000
2/14/2012	12:10:03 PM	BCl3 MFC set to  0.000000
2/14/2012	12:10:03 PM	PH3 MFC set to  0.000000
2/14/2012	12:10:03 PM	SiCl4 MFC set to  0.000000
2/14/2012	12:10:03 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	12:10:03 PM	Tube furnace set to 0
2/14/2012	12:11:06 PM	Helium valve closed
2/14/2012	12:11:06 PM	BCl3 valve closed
2/14/2012	12:11:06 PM	PH3 valve closed
2/14/2012	12:11:06 PM	SiCl4 pre valve closed
2/14/2012	12:11:06 PM	SiCl4 post valve closed
2/14/2012	12:11:06 PM	Main Vac valve closed
2/14/2012	12:11:06 PM	Bypass valve closed
2/14/2012	12:11:06 PM	H2 valve opened
2/14/2012	12:11:06 PM	Bubbler valve opened
2/14/2012	12:11:06 PM	Helium MFC set to  0.000000
2/14/2012	12:11:06 PM	H2 MFC set to  500.000000
2/14/2012	12:11:06 PM	BCl3 MFC set to  0.000000
2/14/2012	12:11:06 PM	PH3 MFC set to  0.000000
2/14/2012	12:11:07 PM	SiCl4 MFC set to  0.000000
2/14/2012	12:11:07 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	12:11:07 PM	Tube furnace set to 0
2/14/2012	12:11:08 PM	Helium valve closed
2/14/2012	12:11:08 PM	BCl3 valve closed
2/14/2012	12:11:08 PM	PH3 valve closed
2/14/2012	12:11:08 PM	SiCl4 pre valve closed
2/14/2012	12:11:08 PM	SiCl4 post valve closed
2/14/2012	12:11:08 PM	Main Vac valve closed
2/14/2012	12:11:08 PM	Bypass valve closed
2/14/2012	12:11:08 PM	H2 valve opened
2/14/2012	12:11:08 PM	Bubbler valve opened
2/14/2012	12:11:08 PM	Helium MFC set to  0.000000
2/14/2012	12:11:08 PM	H2 MFC set to  500.000000
2/14/2012	12:11:08 PM	BCl3 MFC set to  0.000000
2/14/2012	12:11:08 PM	PH3 MFC set to  0.000000
2/14/2012	12:11:08 PM	SiCl4 MFC set to  0.000000
2/14/2012	12:11:08 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	12:11:08 PM	Tube furnace set to 1000
2/14/2012	12:31:08 PM	Helium valve closed
2/14/2012	12:31:08 PM	PH3 valve closed
2/14/2012	12:31:08 PM	Main Vac valve closed
2/14/2012	12:31:08 PM	Bypass valve closed
2/14/2012	12:31:08 PM	H2 valve opened
2/14/2012	12:31:08 PM	BCl3 valve opened
2/14/2012	12:31:08 PM	SiCl4 pre valve opened
2/14/2012	12:31:08 PM	SiCl4 post valve opened
2/14/2012	12:31:08 PM	Bubbler valve opened
2/14/2012	12:31:08 PM	Helium MFC set to  0.000000
2/14/2012	12:31:08 PM	H2 MFC set to  500.000000
2/14/2012	12:31:08 PM	BCl3 MFC set to  20.000000
2/14/2012	12:31:08 PM	PH3 MFC set to  0.000000
2/14/2012	12:31:08 PM	SiCl4 MFC set to  50.000000
2/14/2012	12:31:08 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	12:31:08 PM	Tube furnace set to 1000
2/14/2012	12:41:08 PM	Helium valve closed
2/14/2012	12:41:08 PM	BCl3 valve closed
2/14/2012	12:41:08 PM	PH3 valve closed
2/14/2012	12:41:08 PM	SiCl4 pre valve closed
2/14/2012	12:41:08 PM	SiCl4 post valve closed
2/14/2012	12:41:08 PM	Main Vac valve closed
2/14/2012	12:41:08 PM	Bypass valve closed
2/14/2012	12:41:08 PM	H2 valve opened
2/14/2012	12:41:08 PM	Bubbler valve opened
2/14/2012	12:41:08 PM	Helium MFC set to  0.000000
2/14/2012	12:41:08 PM	H2 MFC set to  500.000000
2/14/2012	12:41:08 PM	BCl3 MFC set to  0.000000
2/14/2012	12:41:08 PM	PH3 MFC set to  0.000000
2/14/2012	12:41:08 PM	SiCl4 MFC set to  0.000000
2/14/2012	12:41:08 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	12:41:08 PM	Tube furnace set to 750
2/14/2012	12:46:08 PM	H2 valve closed
2/14/2012	12:46:08 PM	BCl3 valve closed
2/14/2012	12:46:08 PM	PH3 valve closed
2/14/2012	12:46:08 PM	SiCl4 pre valve closed
2/14/2012	12:46:08 PM	SiCl4 post valve closed
2/14/2012	12:46:08 PM	Main Vac valve closed
2/14/2012	12:46:08 PM	Bypass valve closed
2/14/2012	12:46:08 PM	Helium valve opened
2/14/2012	12:46:08 PM	Bubbler valve opened
2/14/2012	12:46:08 PM	Helium MFC set to  500.000000
2/14/2012	12:46:08 PM	H2 MFC set to  0.000000
2/14/2012	12:46:08 PM	BCl3 MFC set to  0.000000
2/14/2012	12:46:08 PM	PH3 MFC set to  0.000000
2/14/2012	12:46:08 PM	SiCl4 MFC set to  0.000000
2/14/2012	12:46:08 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	12:46:09 PM	Tube furnace set to 0
2/14/2012	1:06:09 PM	Helium valve closed
2/14/2012	1:06:09 PM	H2 valve closed
2/14/2012	1:06:09 PM	BCl3 valve closed
2/14/2012	1:06:09 PM	PH3 valve closed
2/14/2012	1:06:09 PM	SiCl4 pre valve closed
2/14/2012	1:06:09 PM	SiCl4 post valve closed
2/14/2012	1:06:09 PM	Main Vac valve closed
2/14/2012	1:06:09 PM	Bypass valve closed
2/14/2012	1:06:09 PM	Bubbler valve closed
2/14/2012	1:06:09 PM	Helium MFC set to  0.000000
2/14/2012	1:06:09 PM	H2 MFC set to  0.000000
2/14/2012	1:06:09 PM	BCl3 MFC set to  0.000000
2/14/2012	1:06:09 PM	PH3 MFC set to  0.000000
2/14/2012	1:06:09 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:06:09 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:06:09 PM	Tube furnace set to 0
2/14/2012	1:06:10 PM	Run finished at 1:06 PM
2/14/2012	1:17:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2012	1:17:36 PM	Recipe started at 1:17 PM
2/14/2012	1:17:36 PM	Helium valve closed
2/14/2012	1:17:36 PM	H2 valve closed
2/14/2012	1:17:36 PM	BCl3 valve closed
2/14/2012	1:17:36 PM	PH3 valve closed
2/14/2012	1:17:36 PM	SiCl4 pre valve closed
2/14/2012	1:17:36 PM	SiCl4 post valve closed
2/14/2012	1:17:36 PM	Main Vac valve closed
2/14/2012	1:17:36 PM	Bubbler valve closed
2/14/2012	1:17:36 PM	Bypass valve opened
2/14/2012	1:17:36 PM	Helium MFC set to  0.000000
2/14/2012	1:17:36 PM	H2 MFC set to  0.000000
2/14/2012	1:17:36 PM	BCl3 MFC set to  0.000000
2/14/2012	1:17:36 PM	PH3 MFC set to  0.000000
2/14/2012	1:17:36 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:17:36 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:17:36 PM	Tube furnace set to 0
2/14/2012	1:18:38 PM	Helium valve closed
2/14/2012	1:18:38 PM	H2 valve closed
2/14/2012	1:18:38 PM	BCl3 valve closed
2/14/2012	1:18:38 PM	PH3 valve closed
2/14/2012	1:18:38 PM	SiCl4 pre valve closed
2/14/2012	1:18:38 PM	SiCl4 post valve closed
2/14/2012	1:18:38 PM	Main Vac valve closed
2/14/2012	1:18:39 PM	Bubbler valve closed
2/14/2012	1:18:39 PM	Bypass valve opened
2/14/2012	1:18:39 PM	Helium MFC set to  0.000000
2/14/2012	1:18:39 PM	H2 MFC set to  0.000000
2/14/2012	1:18:39 PM	BCl3 MFC set to  0.000000
2/14/2012	1:18:39 PM	PH3 MFC set to  0.000000
2/14/2012	1:18:39 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:18:39 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:18:39 PM	Tube furnace set to 0
2/14/2012	1:19:39 PM	Helium valve closed
2/14/2012	1:19:39 PM	H2 valve closed
2/14/2012	1:19:39 PM	BCl3 valve closed
2/14/2012	1:19:39 PM	PH3 valve closed
2/14/2012	1:19:39 PM	SiCl4 pre valve closed
2/14/2012	1:19:39 PM	SiCl4 post valve closed
2/14/2012	1:19:39 PM	Bypass valve closed
2/14/2012	1:19:39 PM	Bubbler valve closed
2/14/2012	1:19:39 PM	Main Vac valve opened
2/14/2012	1:19:39 PM	Helium MFC set to  0.000000
2/14/2012	1:19:39 PM	H2 MFC set to  0.000000
2/14/2012	1:19:39 PM	BCl3 MFC set to  0.000000
2/14/2012	1:19:39 PM	PH3 MFC set to  0.000000
2/14/2012	1:19:39 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:19:39 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:19:39 PM	Tube furnace set to 0
2/14/2012	1:19:40 PM	Run finished at 1:19 PM
2/14/2012	1:19:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2012	1:20:10 PM	Recipe started at 1:20 PM
2/14/2012	1:20:10 PM	Helium valve closed
2/14/2012	1:20:10 PM	H2 valve closed
2/14/2012	1:20:10 PM	BCl3 valve closed
2/14/2012	1:20:10 PM	PH3 valve closed
2/14/2012	1:20:10 PM	SiCl4 pre valve closed
2/14/2012	1:20:10 PM	SiCl4 post valve closed
2/14/2012	1:20:10 PM	Bypass valve closed
2/14/2012	1:20:10 PM	Bubbler valve closed
2/14/2012	1:20:10 PM	Main Vac valve opened
2/14/2012	1:20:10 PM	Helium MFC set to  0.000000
2/14/2012	1:20:10 PM	H2 MFC set to  0.000000
2/14/2012	1:20:10 PM	BCl3 MFC set to  0.000000
2/14/2012	1:20:10 PM	PH3 MFC set to  0.000000
2/14/2012	1:20:10 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:20:10 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:20:11 PM	Tube furnace set to 150
2/14/2012	1:20:41 PM	H2 valve closed
2/14/2012	1:20:41 PM	BCl3 valve closed
2/14/2012	1:20:41 PM	PH3 valve closed
2/14/2012	1:20:41 PM	SiCl4 pre valve closed
2/14/2012	1:20:41 PM	SiCl4 post valve closed
2/14/2012	1:20:41 PM	Bypass valve closed
2/14/2012	1:20:41 PM	Bubbler valve closed
2/14/2012	1:20:41 PM	Helium valve opened
2/14/2012	1:20:41 PM	Main Vac valve opened
2/14/2012	1:20:41 PM	Helium MFC set to  20.000000
2/14/2012	1:20:41 PM	H2 MFC set to  0.000000
2/14/2012	1:20:41 PM	BCl3 MFC set to  0.000000
2/14/2012	1:20:41 PM	PH3 MFC set to  0.000000
2/14/2012	1:20:41 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:20:41 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:20:41 PM	Tube furnace set to 150
2/14/2012	1:21:11 PM	Helium valve closed
2/14/2012	1:21:11 PM	H2 valve closed
2/14/2012	1:21:11 PM	BCl3 valve closed
2/14/2012	1:21:11 PM	PH3 valve closed
2/14/2012	1:21:11 PM	SiCl4 pre valve closed
2/14/2012	1:21:11 PM	SiCl4 post valve closed
2/14/2012	1:21:11 PM	Bypass valve closed
2/14/2012	1:21:11 PM	Bubbler valve closed
2/14/2012	1:21:11 PM	Main Vac valve opened
2/14/2012	1:21:11 PM	Helium MFC set to  0.000000
2/14/2012	1:21:11 PM	H2 MFC set to  0.000000
2/14/2012	1:21:11 PM	BCl3 MFC set to  0.000000
2/14/2012	1:21:11 PM	PH3 MFC set to  0.000000
2/14/2012	1:21:11 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:21:11 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:21:11 PM	Tube furnace set to 150
2/14/2012	1:21:41 PM	H2 valve closed
2/14/2012	1:21:41 PM	BCl3 valve closed
2/14/2012	1:21:41 PM	PH3 valve closed
2/14/2012	1:21:41 PM	SiCl4 pre valve closed
2/14/2012	1:21:41 PM	SiCl4 post valve closed
2/14/2012	1:21:41 PM	Bypass valve closed
2/14/2012	1:21:41 PM	Bubbler valve closed
2/14/2012	1:21:41 PM	Helium valve opened
2/14/2012	1:21:41 PM	Main Vac valve opened
2/14/2012	1:21:41 PM	Helium MFC set to  20.000000
2/14/2012	1:21:41 PM	H2 MFC set to  0.000000
2/14/2012	1:21:41 PM	BCl3 MFC set to  0.000000
2/14/2012	1:21:41 PM	PH3 MFC set to  0.000000
2/14/2012	1:21:41 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:21:41 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:21:41 PM	Tube furnace set to 150
2/14/2012	1:22:11 PM	Helium valve closed
2/14/2012	1:22:11 PM	H2 valve closed
2/14/2012	1:22:11 PM	BCl3 valve closed
2/14/2012	1:22:11 PM	PH3 valve closed
2/14/2012	1:22:11 PM	SiCl4 pre valve closed
2/14/2012	1:22:11 PM	SiCl4 post valve closed
2/14/2012	1:22:11 PM	Bypass valve closed
2/14/2012	1:22:11 PM	Bubbler valve closed
2/14/2012	1:22:11 PM	Main Vac valve opened
2/14/2012	1:22:11 PM	Helium MFC set to  0.000000
2/14/2012	1:22:11 PM	H2 MFC set to  0.000000
2/14/2012	1:22:11 PM	BCl3 MFC set to  0.000000
2/14/2012	1:22:11 PM	PH3 MFC set to  0.000000
2/14/2012	1:22:11 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:22:11 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:22:11 PM	Tube furnace set to 150
2/14/2012	1:22:41 PM	H2 valve closed
2/14/2012	1:22:41 PM	BCl3 valve closed
2/14/2012	1:22:41 PM	PH3 valve closed
2/14/2012	1:22:41 PM	SiCl4 pre valve closed
2/14/2012	1:22:41 PM	SiCl4 post valve closed
2/14/2012	1:22:41 PM	Bypass valve closed
2/14/2012	1:22:41 PM	Bubbler valve closed
2/14/2012	1:22:41 PM	Helium valve opened
2/14/2012	1:22:41 PM	Main Vac valve opened
2/14/2012	1:22:41 PM	Helium MFC set to  20.000000
2/14/2012	1:22:41 PM	H2 MFC set to  0.000000
2/14/2012	1:22:41 PM	BCl3 MFC set to  0.000000
2/14/2012	1:22:41 PM	PH3 MFC set to  0.000000
2/14/2012	1:22:41 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:22:41 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:22:42 PM	Tube furnace set to 150
2/14/2012	1:23:12 PM	Helium valve closed
2/14/2012	1:23:12 PM	H2 valve closed
2/14/2012	1:23:12 PM	BCl3 valve closed
2/14/2012	1:23:12 PM	PH3 valve closed
2/14/2012	1:23:12 PM	SiCl4 pre valve closed
2/14/2012	1:23:12 PM	SiCl4 post valve closed
2/14/2012	1:23:12 PM	Bypass valve closed
2/14/2012	1:23:12 PM	Bubbler valve closed
2/14/2012	1:23:12 PM	Main Vac valve opened
2/14/2012	1:23:12 PM	Helium MFC set to  0.000000
2/14/2012	1:23:12 PM	H2 MFC set to  0.000000
2/14/2012	1:23:12 PM	BCl3 MFC set to  0.000000
2/14/2012	1:23:12 PM	PH3 MFC set to  0.000000
2/14/2012	1:23:12 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:23:12 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:23:12 PM	Tube furnace set to 150
2/14/2012	1:23:42 PM	H2 valve closed
2/14/2012	1:23:42 PM	BCl3 valve closed
2/14/2012	1:23:42 PM	PH3 valve closed
2/14/2012	1:23:42 PM	SiCl4 pre valve closed
2/14/2012	1:23:42 PM	SiCl4 post valve closed
2/14/2012	1:23:42 PM	Bypass valve closed
2/14/2012	1:23:42 PM	Bubbler valve closed
2/14/2012	1:23:42 PM	Helium valve opened
2/14/2012	1:23:42 PM	Main Vac valve opened
2/14/2012	1:23:42 PM	Helium MFC set to  20.000000
2/14/2012	1:23:42 PM	H2 MFC set to  0.000000
2/14/2012	1:23:42 PM	BCl3 MFC set to  0.000000
2/14/2012	1:23:42 PM	PH3 MFC set to  0.000000
2/14/2012	1:23:42 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:23:42 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:23:42 PM	Tube furnace set to 150
2/14/2012	1:24:12 PM	Helium valve closed
2/14/2012	1:24:12 PM	H2 valve closed
2/14/2012	1:24:12 PM	BCl3 valve closed
2/14/2012	1:24:12 PM	PH3 valve closed
2/14/2012	1:24:12 PM	SiCl4 pre valve closed
2/14/2012	1:24:12 PM	SiCl4 post valve closed
2/14/2012	1:24:12 PM	Bypass valve closed
2/14/2012	1:24:12 PM	Bubbler valve closed
2/14/2012	1:24:12 PM	Main Vac valve opened
2/14/2012	1:24:12 PM	Helium MFC set to  0.000000
2/14/2012	1:24:12 PM	H2 MFC set to  0.000000
2/14/2012	1:24:12 PM	BCl3 MFC set to  0.000000
2/14/2012	1:24:12 PM	PH3 MFC set to  0.000000
2/14/2012	1:24:12 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:24:12 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:24:12 PM	Tube furnace set to 150
2/14/2012	1:24:42 PM	H2 valve closed
2/14/2012	1:24:42 PM	BCl3 valve closed
2/14/2012	1:24:42 PM	PH3 valve closed
2/14/2012	1:24:42 PM	SiCl4 pre valve closed
2/14/2012	1:24:42 PM	SiCl4 post valve closed
2/14/2012	1:24:42 PM	Bypass valve closed
2/14/2012	1:24:42 PM	Bubbler valve closed
2/14/2012	1:24:42 PM	Helium valve opened
2/14/2012	1:24:42 PM	Main Vac valve opened
2/14/2012	1:24:42 PM	Helium MFC set to  20.000000
2/14/2012	1:24:42 PM	H2 MFC set to  0.000000
2/14/2012	1:24:42 PM	BCl3 MFC set to  0.000000
2/14/2012	1:24:42 PM	PH3 MFC set to  0.000000
2/14/2012	1:24:42 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:24:42 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:24:42 PM	Tube furnace set to 150
2/14/2012	1:25:12 PM	Helium valve closed
2/14/2012	1:25:12 PM	H2 valve closed
2/14/2012	1:25:12 PM	BCl3 valve closed
2/14/2012	1:25:12 PM	PH3 valve closed
2/14/2012	1:25:12 PM	SiCl4 pre valve closed
2/14/2012	1:25:13 PM	SiCl4 post valve closed
2/14/2012	1:25:13 PM	Bypass valve closed
2/14/2012	1:25:13 PM	Bubbler valve closed
2/14/2012	1:25:13 PM	Main Vac valve opened
2/14/2012	1:25:13 PM	Helium MFC set to  0.000000
2/14/2012	1:25:13 PM	H2 MFC set to  0.000000
2/14/2012	1:25:13 PM	BCl3 MFC set to  0.000000
2/14/2012	1:25:13 PM	PH3 MFC set to  0.000000
2/14/2012	1:25:13 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:25:13 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:25:13 PM	Tube furnace set to 150
2/14/2012	1:25:43 PM	H2 valve closed
2/14/2012	1:25:43 PM	BCl3 valve closed
2/14/2012	1:25:43 PM	PH3 valve closed
2/14/2012	1:25:43 PM	SiCl4 pre valve closed
2/14/2012	1:25:43 PM	SiCl4 post valve closed
2/14/2012	1:25:43 PM	Bypass valve closed
2/14/2012	1:25:43 PM	Bubbler valve closed
2/14/2012	1:25:43 PM	Helium valve opened
2/14/2012	1:25:43 PM	Main Vac valve opened
2/14/2012	1:25:43 PM	Helium MFC set to  20.000000
2/14/2012	1:25:43 PM	H2 MFC set to  0.000000
2/14/2012	1:25:43 PM	BCl3 MFC set to  0.000000
2/14/2012	1:25:43 PM	PH3 MFC set to  0.000000
2/14/2012	1:25:43 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:25:43 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:25:43 PM	Tube furnace set to 150
2/14/2012	1:26:13 PM	Helium valve closed
2/14/2012	1:26:13 PM	H2 valve closed
2/14/2012	1:26:13 PM	BCl3 valve closed
2/14/2012	1:26:13 PM	PH3 valve closed
2/14/2012	1:26:13 PM	SiCl4 pre valve closed
2/14/2012	1:26:13 PM	SiCl4 post valve closed
2/14/2012	1:26:13 PM	Bypass valve closed
2/14/2012	1:26:13 PM	Bubbler valve closed
2/14/2012	1:26:13 PM	Main Vac valve opened
2/14/2012	1:26:13 PM	Helium MFC set to  0.000000
2/14/2012	1:26:13 PM	H2 MFC set to  0.000000
2/14/2012	1:26:13 PM	BCl3 MFC set to  0.000000
2/14/2012	1:26:13 PM	PH3 MFC set to  0.000000
2/14/2012	1:26:13 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:26:13 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:26:13 PM	Tube furnace set to 150
2/14/2012	1:26:43 PM	H2 valve closed
2/14/2012	1:26:43 PM	BCl3 valve closed
2/14/2012	1:26:43 PM	PH3 valve closed
2/14/2012	1:26:43 PM	SiCl4 pre valve closed
2/14/2012	1:26:43 PM	SiCl4 post valve closed
2/14/2012	1:26:43 PM	Bypass valve closed
2/14/2012	1:26:43 PM	Bubbler valve closed
2/14/2012	1:26:43 PM	Helium valve opened
2/14/2012	1:26:43 PM	Main Vac valve opened
2/14/2012	1:26:43 PM	Helium MFC set to  20.000000
2/14/2012	1:26:43 PM	H2 MFC set to  0.000000
2/14/2012	1:26:43 PM	BCl3 MFC set to  0.000000
2/14/2012	1:26:43 PM	PH3 MFC set to  0.000000
2/14/2012	1:26:43 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:26:43 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:26:43 PM	Tube furnace set to 150
2/14/2012	1:27:13 PM	Helium valve closed
2/14/2012	1:27:13 PM	H2 valve closed
2/14/2012	1:27:13 PM	BCl3 valve closed
2/14/2012	1:27:13 PM	PH3 valve closed
2/14/2012	1:27:13 PM	SiCl4 pre valve closed
2/14/2012	1:27:13 PM	SiCl4 post valve closed
2/14/2012	1:27:13 PM	Bypass valve closed
2/14/2012	1:27:13 PM	Bubbler valve closed
2/14/2012	1:27:13 PM	Main Vac valve opened
2/14/2012	1:27:13 PM	Helium MFC set to  0.000000
2/14/2012	1:27:13 PM	H2 MFC set to  0.000000
2/14/2012	1:27:13 PM	BCl3 MFC set to  0.000000
2/14/2012	1:27:13 PM	PH3 MFC set to  0.000000
2/14/2012	1:27:13 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:27:13 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:27:13 PM	Tube furnace set to 150
2/14/2012	1:27:44 PM	H2 valve closed
2/14/2012	1:27:44 PM	BCl3 valve closed
2/14/2012	1:27:44 PM	PH3 valve closed
2/14/2012	1:27:44 PM	SiCl4 pre valve closed
2/14/2012	1:27:44 PM	SiCl4 post valve closed
2/14/2012	1:27:44 PM	Bypass valve closed
2/14/2012	1:27:44 PM	Bubbler valve closed
2/14/2012	1:27:44 PM	Helium valve opened
2/14/2012	1:27:44 PM	Main Vac valve opened
2/14/2012	1:27:44 PM	Helium MFC set to  20.000000
2/14/2012	1:27:44 PM	H2 MFC set to  0.000000
2/14/2012	1:27:44 PM	BCl3 MFC set to  0.000000
2/14/2012	1:27:44 PM	PH3 MFC set to  0.000000
2/14/2012	1:27:44 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:27:44 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:27:44 PM	Tube furnace set to 150
2/14/2012	1:28:14 PM	Helium valve closed
2/14/2012	1:28:14 PM	H2 valve closed
2/14/2012	1:28:14 PM	BCl3 valve closed
2/14/2012	1:28:14 PM	PH3 valve closed
2/14/2012	1:28:14 PM	SiCl4 pre valve closed
2/14/2012	1:28:14 PM	SiCl4 post valve closed
2/14/2012	1:28:14 PM	Bypass valve closed
2/14/2012	1:28:14 PM	Bubbler valve closed
2/14/2012	1:28:14 PM	Main Vac valve opened
2/14/2012	1:28:14 PM	Helium MFC set to  0.000000
2/14/2012	1:28:14 PM	H2 MFC set to  0.000000
2/14/2012	1:28:14 PM	BCl3 MFC set to  0.000000
2/14/2012	1:28:14 PM	PH3 MFC set to  0.000000
2/14/2012	1:28:14 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:28:14 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:28:14 PM	Tube furnace set to 150
2/14/2012	1:28:44 PM	H2 valve closed
2/14/2012	1:28:44 PM	BCl3 valve closed
2/14/2012	1:28:44 PM	PH3 valve closed
2/14/2012	1:28:44 PM	SiCl4 pre valve closed
2/14/2012	1:28:44 PM	SiCl4 post valve closed
2/14/2012	1:28:44 PM	Bypass valve closed
2/14/2012	1:28:44 PM	Bubbler valve closed
2/14/2012	1:28:44 PM	Helium valve opened
2/14/2012	1:28:44 PM	Main Vac valve opened
2/14/2012	1:28:44 PM	Helium MFC set to  20.000000
2/14/2012	1:28:44 PM	H2 MFC set to  0.000000
2/14/2012	1:28:44 PM	BCl3 MFC set to  0.000000
2/14/2012	1:28:44 PM	PH3 MFC set to  0.000000
2/14/2012	1:28:44 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:28:44 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:28:44 PM	Tube furnace set to 150
2/14/2012	1:29:14 PM	Helium valve closed
2/14/2012	1:29:14 PM	H2 valve closed
2/14/2012	1:29:14 PM	BCl3 valve closed
2/14/2012	1:29:14 PM	PH3 valve closed
2/14/2012	1:29:14 PM	SiCl4 pre valve closed
2/14/2012	1:29:14 PM	SiCl4 post valve closed
2/14/2012	1:29:14 PM	Bypass valve closed
2/14/2012	1:29:14 PM	Bubbler valve closed
2/14/2012	1:29:14 PM	Main Vac valve opened
2/14/2012	1:29:14 PM	Helium MFC set to  0.000000
2/14/2012	1:29:14 PM	H2 MFC set to  0.000000
2/14/2012	1:29:14 PM	BCl3 MFC set to  0.000000
2/14/2012	1:29:14 PM	PH3 MFC set to  0.000000
2/14/2012	1:29:14 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:29:14 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:29:14 PM	Tube furnace set to 150
2/14/2012	1:29:44 PM	H2 valve closed
2/14/2012	1:29:44 PM	BCl3 valve closed
2/14/2012	1:29:44 PM	PH3 valve closed
2/14/2012	1:29:44 PM	SiCl4 pre valve closed
2/14/2012	1:29:44 PM	SiCl4 post valve closed
2/14/2012	1:29:44 PM	Bypass valve closed
2/14/2012	1:29:44 PM	Bubbler valve closed
2/14/2012	1:29:44 PM	Helium valve opened
2/14/2012	1:29:44 PM	Main Vac valve opened
2/14/2012	1:29:44 PM	Helium MFC set to  20.000000
2/14/2012	1:29:44 PM	H2 MFC set to  0.000000
2/14/2012	1:29:44 PM	BCl3 MFC set to  0.000000
2/14/2012	1:29:44 PM	PH3 MFC set to  0.000000
2/14/2012	1:29:44 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:29:44 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:29:45 PM	Tube furnace set to 150
2/14/2012	1:30:15 PM	Helium valve closed
2/14/2012	1:30:15 PM	H2 valve closed
2/14/2012	1:30:15 PM	BCl3 valve closed
2/14/2012	1:30:15 PM	PH3 valve closed
2/14/2012	1:30:15 PM	SiCl4 pre valve closed
2/14/2012	1:30:15 PM	SiCl4 post valve closed
2/14/2012	1:30:15 PM	Bypass valve closed
2/14/2012	1:30:15 PM	Bubbler valve closed
2/14/2012	1:30:15 PM	Main Vac valve opened
2/14/2012	1:30:15 PM	Helium MFC set to  0.000000
2/14/2012	1:30:15 PM	H2 MFC set to  0.000000
2/14/2012	1:30:15 PM	BCl3 MFC set to  0.000000
2/14/2012	1:30:15 PM	PH3 MFC set to  0.000000
2/14/2012	1:30:15 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:30:15 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:30:15 PM	Tube furnace set to 150
2/14/2012	1:30:16 PM	Run finished at 1:30 PM
2/14/2012	1:31:49 PM	Main Vac valve closed
2/14/2012	1:32:03 PM	Main Vac valve opened
2/14/2012	1:32:32 PM	Recipe started at 1:32 PM
2/14/2012	1:32:32 PM	Helium valve closed
2/14/2012	1:32:32 PM	H2 valve closed
2/14/2012	1:32:32 PM	BCl3 valve closed
2/14/2012	1:32:32 PM	PH3 valve closed
2/14/2012	1:32:32 PM	SiCl4 pre valve closed
2/14/2012	1:32:32 PM	SiCl4 post valve closed
2/14/2012	1:32:32 PM	Bypass valve closed
2/14/2012	1:32:32 PM	Bubbler valve closed
2/14/2012	1:32:32 PM	Main Vac valve opened
2/14/2012	1:32:32 PM	Helium MFC set to  0.000000
2/14/2012	1:32:32 PM	H2 MFC set to  0.000000
2/14/2012	1:32:32 PM	BCl3 MFC set to  0.000000
2/14/2012	1:32:32 PM	PH3 MFC set to  0.000000
2/14/2012	1:32:32 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:32:32 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:32:32 PM	Tube furnace set to 150
2/14/2012	1:33:02 PM	H2 valve closed
2/14/2012	1:33:02 PM	BCl3 valve closed
2/14/2012	1:33:02 PM	PH3 valve closed
2/14/2012	1:33:02 PM	SiCl4 pre valve closed
2/14/2012	1:33:02 PM	SiCl4 post valve closed
2/14/2012	1:33:02 PM	Bypass valve closed
2/14/2012	1:33:02 PM	Bubbler valve closed
2/14/2012	1:33:02 PM	Helium valve opened
2/14/2012	1:33:02 PM	Main Vac valve opened
2/14/2012	1:33:02 PM	Helium MFC set to  20.000000
2/14/2012	1:33:02 PM	H2 MFC set to  0.000000
2/14/2012	1:33:02 PM	BCl3 MFC set to  0.000000
2/14/2012	1:33:02 PM	PH3 MFC set to  0.000000
2/14/2012	1:33:02 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:33:02 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:33:03 PM	Tube furnace set to 150
2/14/2012	1:33:33 PM	Helium valve closed
2/14/2012	1:33:33 PM	H2 valve closed
2/14/2012	1:33:33 PM	BCl3 valve closed
2/14/2012	1:33:33 PM	PH3 valve closed
2/14/2012	1:33:33 PM	SiCl4 pre valve closed
2/14/2012	1:33:33 PM	SiCl4 post valve closed
2/14/2012	1:33:33 PM	Bypass valve closed
2/14/2012	1:33:33 PM	Bubbler valve closed
2/14/2012	1:33:33 PM	Main Vac valve opened
2/14/2012	1:33:33 PM	Helium MFC set to  0.000000
2/14/2012	1:33:33 PM	H2 MFC set to  0.000000
2/14/2012	1:33:33 PM	BCl3 MFC set to  0.000000
2/14/2012	1:33:33 PM	PH3 MFC set to  0.000000
2/14/2012	1:33:33 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:33:33 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:33:33 PM	Tube furnace set to 150
2/14/2012	1:34:03 PM	H2 valve closed
2/14/2012	1:34:03 PM	BCl3 valve closed
2/14/2012	1:34:03 PM	PH3 valve closed
2/14/2012	1:34:03 PM	SiCl4 pre valve closed
2/14/2012	1:34:03 PM	SiCl4 post valve closed
2/14/2012	1:34:03 PM	Bypass valve closed
2/14/2012	1:34:03 PM	Bubbler valve closed
2/14/2012	1:34:03 PM	Helium valve opened
2/14/2012	1:34:03 PM	Main Vac valve opened
2/14/2012	1:34:03 PM	Helium MFC set to  20.000000
2/14/2012	1:34:03 PM	H2 MFC set to  0.000000
2/14/2012	1:34:03 PM	BCl3 MFC set to  0.000000
2/14/2012	1:34:03 PM	PH3 MFC set to  0.000000
2/14/2012	1:34:03 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:34:03 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:34:03 PM	Tube furnace set to 150
2/14/2012	1:34:33 PM	Helium valve closed
2/14/2012	1:34:33 PM	H2 valve closed
2/14/2012	1:34:33 PM	BCl3 valve closed
2/14/2012	1:34:33 PM	PH3 valve closed
2/14/2012	1:34:33 PM	SiCl4 pre valve closed
2/14/2012	1:34:33 PM	SiCl4 post valve closed
2/14/2012	1:34:33 PM	Bypass valve closed
2/14/2012	1:34:33 PM	Bubbler valve closed
2/14/2012	1:34:33 PM	Main Vac valve opened
2/14/2012	1:34:33 PM	Helium MFC set to  0.000000
2/14/2012	1:34:33 PM	H2 MFC set to  0.000000
2/14/2012	1:34:33 PM	BCl3 MFC set to  0.000000
2/14/2012	1:34:33 PM	PH3 MFC set to  0.000000
2/14/2012	1:34:33 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:34:33 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:34:33 PM	Tube furnace set to 150
2/14/2012	1:35:03 PM	H2 valve closed
2/14/2012	1:35:03 PM	BCl3 valve closed
2/14/2012	1:35:03 PM	PH3 valve closed
2/14/2012	1:35:03 PM	SiCl4 pre valve closed
2/14/2012	1:35:03 PM	SiCl4 post valve closed
2/14/2012	1:35:03 PM	Bypass valve closed
2/14/2012	1:35:03 PM	Bubbler valve closed
2/14/2012	1:35:03 PM	Helium valve opened
2/14/2012	1:35:03 PM	Main Vac valve opened
2/14/2012	1:35:03 PM	Helium MFC set to  20.000000
2/14/2012	1:35:03 PM	H2 MFC set to  0.000000
2/14/2012	1:35:03 PM	BCl3 MFC set to  0.000000
2/14/2012	1:35:03 PM	PH3 MFC set to  0.000000
2/14/2012	1:35:03 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:35:03 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:35:03 PM	Tube furnace set to 150
2/14/2012	1:35:33 PM	Helium valve closed
2/14/2012	1:35:33 PM	H2 valve closed
2/14/2012	1:35:33 PM	BCl3 valve closed
2/14/2012	1:35:33 PM	PH3 valve closed
2/14/2012	1:35:33 PM	SiCl4 pre valve closed
2/14/2012	1:35:33 PM	SiCl4 post valve closed
2/14/2012	1:35:33 PM	Bypass valve closed
2/14/2012	1:35:33 PM	Bubbler valve closed
2/14/2012	1:35:33 PM	Main Vac valve opened
2/14/2012	1:35:33 PM	Helium MFC set to  0.000000
2/14/2012	1:35:33 PM	H2 MFC set to  0.000000
2/14/2012	1:35:33 PM	BCl3 MFC set to  0.000000
2/14/2012	1:35:33 PM	PH3 MFC set to  0.000000
2/14/2012	1:35:33 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:35:33 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:35:34 PM	Tube furnace set to 150
2/14/2012	1:36:04 PM	H2 valve closed
2/14/2012	1:36:04 PM	BCl3 valve closed
2/14/2012	1:36:04 PM	PH3 valve closed
2/14/2012	1:36:04 PM	SiCl4 pre valve closed
2/14/2012	1:36:04 PM	SiCl4 post valve closed
2/14/2012	1:36:04 PM	Bypass valve closed
2/14/2012	1:36:04 PM	Bubbler valve closed
2/14/2012	1:36:04 PM	Helium valve opened
2/14/2012	1:36:04 PM	Main Vac valve opened
2/14/2012	1:36:04 PM	Helium MFC set to  20.000000
2/14/2012	1:36:04 PM	H2 MFC set to  0.000000
2/14/2012	1:36:04 PM	BCl3 MFC set to  0.000000
2/14/2012	1:36:04 PM	PH3 MFC set to  0.000000
2/14/2012	1:36:04 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:36:04 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:36:04 PM	Tube furnace set to 150
2/14/2012	1:36:34 PM	Helium valve closed
2/14/2012	1:36:34 PM	H2 valve closed
2/14/2012	1:36:34 PM	BCl3 valve closed
2/14/2012	1:36:34 PM	PH3 valve closed
2/14/2012	1:36:34 PM	SiCl4 pre valve closed
2/14/2012	1:36:34 PM	SiCl4 post valve closed
2/14/2012	1:36:34 PM	Bypass valve closed
2/14/2012	1:36:34 PM	Bubbler valve closed
2/14/2012	1:36:34 PM	Main Vac valve opened
2/14/2012	1:36:34 PM	Helium MFC set to  0.000000
2/14/2012	1:36:34 PM	H2 MFC set to  0.000000
2/14/2012	1:36:34 PM	BCl3 MFC set to  0.000000
2/14/2012	1:36:34 PM	PH3 MFC set to  0.000000
2/14/2012	1:36:34 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:36:34 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:36:34 PM	Tube furnace set to 150
2/14/2012	1:37:04 PM	H2 valve closed
2/14/2012	1:37:04 PM	BCl3 valve closed
2/14/2012	1:37:04 PM	PH3 valve closed
2/14/2012	1:37:04 PM	SiCl4 pre valve closed
2/14/2012	1:37:04 PM	SiCl4 post valve closed
2/14/2012	1:37:04 PM	Bypass valve closed
2/14/2012	1:37:04 PM	Bubbler valve closed
2/14/2012	1:37:04 PM	Helium valve opened
2/14/2012	1:37:04 PM	Main Vac valve opened
2/14/2012	1:37:04 PM	Helium MFC set to  20.000000
2/14/2012	1:37:04 PM	H2 MFC set to  0.000000
2/14/2012	1:37:04 PM	BCl3 MFC set to  0.000000
2/14/2012	1:37:04 PM	PH3 MFC set to  0.000000
2/14/2012	1:37:04 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:37:04 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:37:04 PM	Tube furnace set to 150
2/14/2012	1:37:34 PM	Helium valve closed
2/14/2012	1:37:34 PM	H2 valve closed
2/14/2012	1:37:34 PM	BCl3 valve closed
2/14/2012	1:37:34 PM	PH3 valve closed
2/14/2012	1:37:34 PM	SiCl4 pre valve closed
2/14/2012	1:37:34 PM	SiCl4 post valve closed
2/14/2012	1:37:34 PM	Bypass valve closed
2/14/2012	1:37:34 PM	Bubbler valve closed
2/14/2012	1:37:34 PM	Main Vac valve opened
2/14/2012	1:37:34 PM	Helium MFC set to  0.000000
2/14/2012	1:37:34 PM	H2 MFC set to  0.000000
2/14/2012	1:37:34 PM	BCl3 MFC set to  0.000000
2/14/2012	1:37:34 PM	PH3 MFC set to  0.000000
2/14/2012	1:37:34 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:37:34 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:37:34 PM	Tube furnace set to 150
2/14/2012	1:38:04 PM	H2 valve closed
2/14/2012	1:38:04 PM	BCl3 valve closed
2/14/2012	1:38:04 PM	PH3 valve closed
2/14/2012	1:38:04 PM	SiCl4 pre valve closed
2/14/2012	1:38:04 PM	SiCl4 post valve closed
2/14/2012	1:38:04 PM	Bypass valve closed
2/14/2012	1:38:04 PM	Bubbler valve closed
2/14/2012	1:38:04 PM	Helium valve opened
2/14/2012	1:38:04 PM	Main Vac valve opened
2/14/2012	1:38:04 PM	Helium MFC set to  20.000000
2/14/2012	1:38:04 PM	H2 MFC set to  0.000000
2/14/2012	1:38:04 PM	BCl3 MFC set to  0.000000
2/14/2012	1:38:04 PM	PH3 MFC set to  0.000000
2/14/2012	1:38:04 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:38:04 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:38:05 PM	Tube furnace set to 150
2/14/2012	1:38:35 PM	Helium valve closed
2/14/2012	1:38:35 PM	H2 valve closed
2/14/2012	1:38:35 PM	BCl3 valve closed
2/14/2012	1:38:35 PM	PH3 valve closed
2/14/2012	1:38:35 PM	SiCl4 pre valve closed
2/14/2012	1:38:35 PM	SiCl4 post valve closed
2/14/2012	1:38:35 PM	Bypass valve closed
2/14/2012	1:38:35 PM	Bubbler valve closed
2/14/2012	1:38:35 PM	Main Vac valve opened
2/14/2012	1:38:35 PM	Helium MFC set to  0.000000
2/14/2012	1:38:35 PM	H2 MFC set to  0.000000
2/14/2012	1:38:35 PM	BCl3 MFC set to  0.000000
2/14/2012	1:38:35 PM	PH3 MFC set to  0.000000
2/14/2012	1:38:35 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:38:35 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:38:35 PM	Tube furnace set to 150
2/14/2012	1:39:05 PM	H2 valve closed
2/14/2012	1:39:05 PM	BCl3 valve closed
2/14/2012	1:39:05 PM	PH3 valve closed
2/14/2012	1:39:05 PM	SiCl4 pre valve closed
2/14/2012	1:39:05 PM	SiCl4 post valve closed
2/14/2012	1:39:05 PM	Bypass valve closed
2/14/2012	1:39:05 PM	Bubbler valve closed
2/14/2012	1:39:05 PM	Helium valve opened
2/14/2012	1:39:05 PM	Main Vac valve opened
2/14/2012	1:39:05 PM	Helium MFC set to  20.000000
2/14/2012	1:39:05 PM	H2 MFC set to  0.000000
2/14/2012	1:39:05 PM	BCl3 MFC set to  0.000000
2/14/2012	1:39:05 PM	PH3 MFC set to  0.000000
2/14/2012	1:39:05 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:39:05 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:39:05 PM	Tube furnace set to 150
2/14/2012	1:39:35 PM	Helium valve closed
2/14/2012	1:39:35 PM	H2 valve closed
2/14/2012	1:39:35 PM	BCl3 valve closed
2/14/2012	1:39:35 PM	PH3 valve closed
2/14/2012	1:39:35 PM	SiCl4 pre valve closed
2/14/2012	1:39:35 PM	SiCl4 post valve closed
2/14/2012	1:39:35 PM	Bypass valve closed
2/14/2012	1:39:35 PM	Bubbler valve closed
2/14/2012	1:39:35 PM	Main Vac valve opened
2/14/2012	1:39:35 PM	Helium MFC set to  0.000000
2/14/2012	1:39:35 PM	H2 MFC set to  0.000000
2/14/2012	1:39:35 PM	BCl3 MFC set to  0.000000
2/14/2012	1:39:35 PM	PH3 MFC set to  0.000000
2/14/2012	1:39:35 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:39:35 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:39:35 PM	Tube furnace set to 150
2/14/2012	1:40:05 PM	H2 valve closed
2/14/2012	1:40:05 PM	BCl3 valve closed
2/14/2012	1:40:05 PM	PH3 valve closed
2/14/2012	1:40:05 PM	SiCl4 pre valve closed
2/14/2012	1:40:05 PM	SiCl4 post valve closed
2/14/2012	1:40:05 PM	Bypass valve closed
2/14/2012	1:40:05 PM	Bubbler valve closed
2/14/2012	1:40:05 PM	Helium valve opened
2/14/2012	1:40:05 PM	Main Vac valve opened
2/14/2012	1:40:05 PM	Helium MFC set to  20.000000
2/14/2012	1:40:05 PM	H2 MFC set to  0.000000
2/14/2012	1:40:05 PM	BCl3 MFC set to  0.000000
2/14/2012	1:40:05 PM	PH3 MFC set to  0.000000
2/14/2012	1:40:05 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:40:05 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:40:05 PM	Tube furnace set to 150
2/14/2012	1:40:35 PM	Helium valve closed
2/14/2012	1:40:35 PM	H2 valve closed
2/14/2012	1:40:35 PM	BCl3 valve closed
2/14/2012	1:40:35 PM	PH3 valve closed
2/14/2012	1:40:35 PM	SiCl4 pre valve closed
2/14/2012	1:40:35 PM	SiCl4 post valve closed
2/14/2012	1:40:35 PM	Bypass valve closed
2/14/2012	1:40:35 PM	Bubbler valve closed
2/14/2012	1:40:35 PM	Main Vac valve opened
2/14/2012	1:40:35 PM	Helium MFC set to  0.000000
2/14/2012	1:40:35 PM	H2 MFC set to  0.000000
2/14/2012	1:40:35 PM	BCl3 MFC set to  0.000000
2/14/2012	1:40:35 PM	PH3 MFC set to  0.000000
2/14/2012	1:40:35 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:40:35 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:40:36 PM	Tube furnace set to 150
2/14/2012	1:41:06 PM	H2 valve closed
2/14/2012	1:41:06 PM	BCl3 valve closed
2/14/2012	1:41:06 PM	PH3 valve closed
2/14/2012	1:41:06 PM	SiCl4 pre valve closed
2/14/2012	1:41:06 PM	SiCl4 post valve closed
2/14/2012	1:41:06 PM	Bypass valve closed
2/14/2012	1:41:06 PM	Bubbler valve closed
2/14/2012	1:41:06 PM	Helium valve opened
2/14/2012	1:41:06 PM	Main Vac valve opened
2/14/2012	1:41:06 PM	Helium MFC set to  20.000000
2/14/2012	1:41:06 PM	H2 MFC set to  0.000000
2/14/2012	1:41:06 PM	BCl3 MFC set to  0.000000
2/14/2012	1:41:06 PM	PH3 MFC set to  0.000000
2/14/2012	1:41:06 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:41:06 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:41:06 PM	Tube furnace set to 150
2/14/2012	1:41:36 PM	Helium valve closed
2/14/2012	1:41:36 PM	H2 valve closed
2/14/2012	1:41:36 PM	BCl3 valve closed
2/14/2012	1:41:36 PM	PH3 valve closed
2/14/2012	1:41:36 PM	SiCl4 pre valve closed
2/14/2012	1:41:36 PM	SiCl4 post valve closed
2/14/2012	1:41:36 PM	Bypass valve closed
2/14/2012	1:41:36 PM	Bubbler valve closed
2/14/2012	1:41:36 PM	Main Vac valve opened
2/14/2012	1:41:36 PM	Helium MFC set to  0.000000
2/14/2012	1:41:36 PM	H2 MFC set to  0.000000
2/14/2012	1:41:36 PM	BCl3 MFC set to  0.000000
2/14/2012	1:41:36 PM	PH3 MFC set to  0.000000
2/14/2012	1:41:36 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:41:36 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:41:36 PM	Tube furnace set to 150
2/14/2012	1:42:06 PM	H2 valve closed
2/14/2012	1:42:06 PM	BCl3 valve closed
2/14/2012	1:42:06 PM	PH3 valve closed
2/14/2012	1:42:06 PM	SiCl4 pre valve closed
2/14/2012	1:42:06 PM	SiCl4 post valve closed
2/14/2012	1:42:06 PM	Bypass valve closed
2/14/2012	1:42:06 PM	Bubbler valve closed
2/14/2012	1:42:06 PM	Helium valve opened
2/14/2012	1:42:06 PM	Main Vac valve opened
2/14/2012	1:42:06 PM	Helium MFC set to  20.000000
2/14/2012	1:42:06 PM	H2 MFC set to  0.000000
2/14/2012	1:42:06 PM	BCl3 MFC set to  0.000000
2/14/2012	1:42:06 PM	PH3 MFC set to  0.000000
2/14/2012	1:42:06 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:42:06 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:42:06 PM	Tube furnace set to 150
2/14/2012	1:42:36 PM	Helium valve closed
2/14/2012	1:42:36 PM	H2 valve closed
2/14/2012	1:42:36 PM	BCl3 valve closed
2/14/2012	1:42:36 PM	PH3 valve closed
2/14/2012	1:42:36 PM	SiCl4 pre valve closed
2/14/2012	1:42:36 PM	SiCl4 post valve closed
2/14/2012	1:42:36 PM	Bypass valve closed
2/14/2012	1:42:36 PM	Bubbler valve closed
2/14/2012	1:42:36 PM	Main Vac valve opened
2/14/2012	1:42:36 PM	Helium MFC set to  0.000000
2/14/2012	1:42:36 PM	H2 MFC set to  0.000000
2/14/2012	1:42:36 PM	BCl3 MFC set to  0.000000
2/14/2012	1:42:36 PM	PH3 MFC set to  0.000000
2/14/2012	1:42:36 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:42:36 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:42:36 PM	Tube furnace set to 150
2/14/2012	1:42:37 PM	Run finished at 1:42 PM
2/14/2012	1:44:30 PM	Main Vac valve closed
2/14/2012	1:44:43 PM	Main Vac valve opened
2/14/2012	1:45:21 PM	Recipe started at 1:45 PM
2/14/2012	1:45:21 PM	Helium valve closed
2/14/2012	1:45:21 PM	H2 valve closed
2/14/2012	1:45:21 PM	BCl3 valve closed
2/14/2012	1:45:21 PM	PH3 valve closed
2/14/2012	1:45:21 PM	SiCl4 pre valve closed
2/14/2012	1:45:21 PM	SiCl4 post valve closed
2/14/2012	1:45:21 PM	Main Vac valve closed
2/14/2012	1:45:21 PM	Bypass valve closed
2/14/2012	1:45:21 PM	Bubbler valve closed
2/14/2012	1:45:21 PM	Helium MFC set to  0.000000
2/14/2012	1:45:21 PM	H2 MFC set to  0.000000
2/14/2012	1:45:21 PM	BCl3 MFC set to  0.000000
2/14/2012	1:45:21 PM	PH3 MFC set to  0.000000
2/14/2012	1:45:21 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:45:21 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:45:22 PM	Tube furnace set to 0
2/14/2012	1:45:25 PM	Helium valve closed
2/14/2012	1:45:25 PM	BCl3 valve closed
2/14/2012	1:45:25 PM	PH3 valve closed
2/14/2012	1:45:25 PM	SiCl4 pre valve closed
2/14/2012	1:45:25 PM	SiCl4 post valve closed
2/14/2012	1:45:25 PM	Main Vac valve closed
2/14/2012	1:45:25 PM	Bypass valve closed
2/14/2012	1:45:25 PM	Bubbler valve closed
2/14/2012	1:45:25 PM	H2 valve opened
2/14/2012	1:45:25 PM	Helium MFC set to  0.000000
2/14/2012	1:45:25 PM	H2 MFC set to  500.000000
2/14/2012	1:45:25 PM	BCl3 MFC set to  0.000000
2/14/2012	1:45:25 PM	PH3 MFC set to  0.000000
2/14/2012	1:45:25 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:45:25 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:45:25 PM	Tube furnace set to 0
2/14/2012	1:46:29 PM	Helium valve closed
2/14/2012	1:46:29 PM	BCl3 valve closed
2/14/2012	1:46:29 PM	PH3 valve closed
2/14/2012	1:46:29 PM	SiCl4 pre valve closed
2/14/2012	1:46:29 PM	SiCl4 post valve closed
2/14/2012	1:46:29 PM	Main Vac valve closed
2/14/2012	1:46:29 PM	Bypass valve closed
2/14/2012	1:46:29 PM	H2 valve opened
2/14/2012	1:46:29 PM	Bubbler valve opened
2/14/2012	1:46:29 PM	Helium MFC set to  0.000000
2/14/2012	1:46:29 PM	H2 MFC set to  500.000000
2/14/2012	1:46:29 PM	BCl3 MFC set to  0.000000
2/14/2012	1:46:29 PM	PH3 MFC set to  0.000000
2/14/2012	1:46:29 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:46:29 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:46:30 PM	Tube furnace set to 0
2/14/2012	1:46:31 PM	Helium valve closed
2/14/2012	1:46:31 PM	BCl3 valve closed
2/14/2012	1:46:31 PM	PH3 valve closed
2/14/2012	1:46:31 PM	SiCl4 pre valve closed
2/14/2012	1:46:31 PM	SiCl4 post valve closed
2/14/2012	1:46:31 PM	Main Vac valve closed
2/14/2012	1:46:31 PM	Bypass valve closed
2/14/2012	1:46:31 PM	H2 valve opened
2/14/2012	1:46:31 PM	Bubbler valve opened
2/14/2012	1:46:31 PM	Helium MFC set to  0.000000
2/14/2012	1:46:31 PM	H2 MFC set to  500.000000
2/14/2012	1:46:31 PM	BCl3 MFC set to  0.000000
2/14/2012	1:46:31 PM	PH3 MFC set to  0.000000
2/14/2012	1:46:31 PM	SiCl4 MFC set to  0.000000
2/14/2012	1:46:31 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	1:46:31 PM	Tube furnace set to 1000
2/14/2012	2:06:31 PM	Helium valve closed
2/14/2012	2:06:31 PM	PH3 valve closed
2/14/2012	2:06:31 PM	Main Vac valve closed
2/14/2012	2:06:31 PM	Bypass valve closed
2/14/2012	2:06:31 PM	H2 valve opened
2/14/2012	2:06:31 PM	BCl3 valve opened
2/14/2012	2:06:31 PM	SiCl4 pre valve opened
2/14/2012	2:06:31 PM	SiCl4 post valve opened
2/14/2012	2:06:31 PM	Bubbler valve opened
2/14/2012	2:06:31 PM	Helium MFC set to  0.000000
2/14/2012	2:06:31 PM	H2 MFC set to  500.000000
2/14/2012	2:06:31 PM	BCl3 MFC set to  20.000000
2/14/2012	2:06:31 PM	PH3 MFC set to  0.000000
2/14/2012	2:06:31 PM	SiCl4 MFC set to  50.000000
2/14/2012	2:06:31 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:06:31 PM	Tube furnace set to 1000
2/14/2012	2:16:31 PM	Helium valve closed
2/14/2012	2:16:31 PM	BCl3 valve closed
2/14/2012	2:16:31 PM	PH3 valve closed
2/14/2012	2:16:31 PM	SiCl4 pre valve closed
2/14/2012	2:16:31 PM	SiCl4 post valve closed
2/14/2012	2:16:31 PM	Main Vac valve closed
2/14/2012	2:16:31 PM	Bypass valve closed
2/14/2012	2:16:31 PM	H2 valve opened
2/14/2012	2:16:31 PM	Bubbler valve opened
2/14/2012	2:16:31 PM	Helium MFC set to  0.000000
2/14/2012	2:16:31 PM	H2 MFC set to  500.000000
2/14/2012	2:16:31 PM	BCl3 MFC set to  0.000000
2/14/2012	2:16:31 PM	PH3 MFC set to  0.000000
2/14/2012	2:16:31 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:16:31 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:16:31 PM	Tube furnace set to 750
2/14/2012	2:21:31 PM	H2 valve closed
2/14/2012	2:21:31 PM	BCl3 valve closed
2/14/2012	2:21:31 PM	PH3 valve closed
2/14/2012	2:21:31 PM	SiCl4 pre valve closed
2/14/2012	2:21:31 PM	SiCl4 post valve closed
2/14/2012	2:21:31 PM	Main Vac valve closed
2/14/2012	2:21:31 PM	Bypass valve closed
2/14/2012	2:21:31 PM	Helium valve opened
2/14/2012	2:21:31 PM	Bubbler valve opened
2/14/2012	2:21:31 PM	Helium MFC set to  500.000000
2/14/2012	2:21:31 PM	H2 MFC set to  0.000000
2/14/2012	2:21:31 PM	BCl3 MFC set to  0.000000
2/14/2012	2:21:31 PM	PH3 MFC set to  0.000000
2/14/2012	2:21:31 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:21:31 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:21:31 PM	Tube furnace set to 0
2/14/2012	2:37:57 PM	Helium valve closed
2/14/2012	2:37:57 PM	H2 valve closed
2/14/2012	2:37:57 PM	BCl3 valve closed
2/14/2012	2:37:57 PM	PH3 valve closed
2/14/2012	2:37:57 PM	SiCl4 pre valve closed
2/14/2012	2:37:57 PM	SiCl4 post valve closed
2/14/2012	2:37:57 PM	Main Vac valve closed
2/14/2012	2:37:57 PM	Bubbler valve closed
2/14/2012	2:37:57 PM	Bypass valve closed
2/14/2012	2:37:57 PM	Helium MFC set to  0.000000
2/14/2012	2:37:57 PM	H2 MFC set to  0.000000
2/14/2012	2:37:57 PM	BCl3 MFC set to  0.000000
2/14/2012	2:37:57 PM	PH3 MFC set to  0.000000
2/14/2012	2:37:57 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:37:57 PM	Bypass solenoid MFC set to  760.000000
2/14/2012	2:37:57 PM	Tube furnace set to 0
2/14/2012	2:37:57 PM	Baratron reads 739.276665 Torr and NaOH valve is open.  Emergency exit.
2/14/2012	2:38:27 PM	Run aborted at 2:38 PM
2/14/2012	2:42:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2012	2:42:30 PM	Recipe started at 2:42 PM
2/14/2012	2:42:30 PM	Helium valve closed
2/14/2012	2:42:30 PM	H2 valve closed
2/14/2012	2:42:30 PM	BCl3 valve closed
2/14/2012	2:42:30 PM	PH3 valve closed
2/14/2012	2:42:30 PM	SiCl4 pre valve closed
2/14/2012	2:42:30 PM	SiCl4 post valve closed
2/14/2012	2:42:30 PM	Main Vac valve closed
2/14/2012	2:42:30 PM	Bubbler valve closed
2/14/2012	2:42:30 PM	Bypass valve opened
2/14/2012	2:42:30 PM	Helium MFC set to  0.000000
2/14/2012	2:42:30 PM	H2 MFC set to  0.000000
2/14/2012	2:42:30 PM	BCl3 MFC set to  0.000000
2/14/2012	2:42:30 PM	PH3 MFC set to  0.000000
2/14/2012	2:42:30 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:42:30 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:42:30 PM	Tube furnace set to 0
2/14/2012	2:43:30 PM	Helium valve closed
2/14/2012	2:43:30 PM	H2 valve closed
2/14/2012	2:43:30 PM	BCl3 valve closed
2/14/2012	2:43:30 PM	PH3 valve closed
2/14/2012	2:43:30 PM	SiCl4 pre valve closed
2/14/2012	2:43:30 PM	SiCl4 post valve closed
2/14/2012	2:43:30 PM	Main Vac valve closed
2/14/2012	2:43:30 PM	Bubbler valve closed
2/14/2012	2:43:30 PM	Bypass valve opened
2/14/2012	2:43:30 PM	Helium MFC set to  0.000000
2/14/2012	2:43:30 PM	H2 MFC set to  0.000000
2/14/2012	2:43:30 PM	BCl3 MFC set to  0.000000
2/14/2012	2:43:30 PM	PH3 MFC set to  0.000000
2/14/2012	2:43:30 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:43:30 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:43:30 PM	Tube furnace set to 0
2/14/2012	2:44:30 PM	Helium valve closed
2/14/2012	2:44:30 PM	H2 valve closed
2/14/2012	2:44:30 PM	BCl3 valve closed
2/14/2012	2:44:30 PM	PH3 valve closed
2/14/2012	2:44:30 PM	SiCl4 pre valve closed
2/14/2012	2:44:30 PM	SiCl4 post valve closed
2/14/2012	2:44:30 PM	Bypass valve closed
2/14/2012	2:44:30 PM	Bubbler valve closed
2/14/2012	2:44:30 PM	Main Vac valve opened
2/14/2012	2:44:30 PM	Helium MFC set to  0.000000
2/14/2012	2:44:30 PM	H2 MFC set to  0.000000
2/14/2012	2:44:30 PM	BCl3 MFC set to  0.000000
2/14/2012	2:44:30 PM	PH3 MFC set to  0.000000
2/14/2012	2:44:30 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:44:30 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:44:30 PM	Tube furnace set to 0
2/14/2012	2:44:31 PM	Run finished at 2:44 PM
2/14/2012	2:44:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2012	2:45:03 PM	Recipe started at 2:44 PM
2/14/2012	2:45:03 PM	Helium valve closed
2/14/2012	2:45:03 PM	H2 valve closed
2/14/2012	2:45:03 PM	BCl3 valve closed
2/14/2012	2:45:03 PM	PH3 valve closed
2/14/2012	2:45:03 PM	SiCl4 pre valve closed
2/14/2012	2:45:03 PM	SiCl4 post valve closed
2/14/2012	2:45:03 PM	Bypass valve closed
2/14/2012	2:45:03 PM	Bubbler valve closed
2/14/2012	2:45:03 PM	Main Vac valve opened
2/14/2012	2:45:03 PM	Helium MFC set to  0.000000
2/14/2012	2:45:03 PM	H2 MFC set to  0.000000
2/14/2012	2:45:03 PM	BCl3 MFC set to  0.000000
2/14/2012	2:45:03 PM	PH3 MFC set to  0.000000
2/14/2012	2:45:03 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:45:03 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:45:03 PM	Tube furnace set to 150
2/14/2012	2:45:33 PM	H2 valve closed
2/14/2012	2:45:33 PM	BCl3 valve closed
2/14/2012	2:45:33 PM	PH3 valve closed
2/14/2012	2:45:33 PM	SiCl4 pre valve closed
2/14/2012	2:45:33 PM	SiCl4 post valve closed
2/14/2012	2:45:33 PM	Bypass valve closed
2/14/2012	2:45:33 PM	Bubbler valve closed
2/14/2012	2:45:33 PM	Helium valve opened
2/14/2012	2:45:33 PM	Main Vac valve opened
2/14/2012	2:45:33 PM	Helium MFC set to  20.000000
2/14/2012	2:45:33 PM	H2 MFC set to  0.000000
2/14/2012	2:45:33 PM	BCl3 MFC set to  0.000000
2/14/2012	2:45:33 PM	PH3 MFC set to  0.000000
2/14/2012	2:45:33 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:45:33 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:45:34 PM	Tube furnace set to 150
2/14/2012	2:46:04 PM	Helium valve closed
2/14/2012	2:46:04 PM	H2 valve closed
2/14/2012	2:46:04 PM	BCl3 valve closed
2/14/2012	2:46:04 PM	PH3 valve closed
2/14/2012	2:46:04 PM	SiCl4 pre valve closed
2/14/2012	2:46:04 PM	SiCl4 post valve closed
2/14/2012	2:46:04 PM	Bypass valve closed
2/14/2012	2:46:04 PM	Bubbler valve closed
2/14/2012	2:46:04 PM	Main Vac valve opened
2/14/2012	2:46:04 PM	Helium MFC set to  0.000000
2/14/2012	2:46:04 PM	H2 MFC set to  0.000000
2/14/2012	2:46:04 PM	BCl3 MFC set to  0.000000
2/14/2012	2:46:04 PM	PH3 MFC set to  0.000000
2/14/2012	2:46:04 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:46:04 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:46:04 PM	Tube furnace set to 150
2/14/2012	2:46:34 PM	H2 valve closed
2/14/2012	2:46:34 PM	BCl3 valve closed
2/14/2012	2:46:34 PM	PH3 valve closed
2/14/2012	2:46:34 PM	SiCl4 pre valve closed
2/14/2012	2:46:34 PM	SiCl4 post valve closed
2/14/2012	2:46:34 PM	Bypass valve closed
2/14/2012	2:46:34 PM	Bubbler valve closed
2/14/2012	2:46:34 PM	Helium valve opened
2/14/2012	2:46:34 PM	Main Vac valve opened
2/14/2012	2:46:34 PM	Helium MFC set to  20.000000
2/14/2012	2:46:34 PM	H2 MFC set to  0.000000
2/14/2012	2:46:34 PM	BCl3 MFC set to  0.000000
2/14/2012	2:46:34 PM	PH3 MFC set to  0.000000
2/14/2012	2:46:34 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:46:34 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:46:34 PM	Tube furnace set to 150
2/14/2012	2:47:04 PM	Helium valve closed
2/14/2012	2:47:04 PM	H2 valve closed
2/14/2012	2:47:04 PM	BCl3 valve closed
2/14/2012	2:47:04 PM	PH3 valve closed
2/14/2012	2:47:04 PM	SiCl4 pre valve closed
2/14/2012	2:47:04 PM	SiCl4 post valve closed
2/14/2012	2:47:04 PM	Bypass valve closed
2/14/2012	2:47:04 PM	Bubbler valve closed
2/14/2012	2:47:04 PM	Main Vac valve opened
2/14/2012	2:47:04 PM	Helium MFC set to  0.000000
2/14/2012	2:47:04 PM	H2 MFC set to  0.000000
2/14/2012	2:47:04 PM	BCl3 MFC set to  0.000000
2/14/2012	2:47:04 PM	PH3 MFC set to  0.000000
2/14/2012	2:47:04 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:47:04 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:47:04 PM	Tube furnace set to 150
2/14/2012	2:47:34 PM	H2 valve closed
2/14/2012	2:47:34 PM	BCl3 valve closed
2/14/2012	2:47:34 PM	PH3 valve closed
2/14/2012	2:47:34 PM	SiCl4 pre valve closed
2/14/2012	2:47:34 PM	SiCl4 post valve closed
2/14/2012	2:47:34 PM	Bypass valve closed
2/14/2012	2:47:34 PM	Bubbler valve closed
2/14/2012	2:47:34 PM	Helium valve opened
2/14/2012	2:47:34 PM	Main Vac valve opened
2/14/2012	2:47:34 PM	Helium MFC set to  20.000000
2/14/2012	2:47:34 PM	H2 MFC set to  0.000000
2/14/2012	2:47:34 PM	BCl3 MFC set to  0.000000
2/14/2012	2:47:34 PM	PH3 MFC set to  0.000000
2/14/2012	2:47:34 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:47:34 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:47:34 PM	Tube furnace set to 150
2/14/2012	2:48:04 PM	Helium valve closed
2/14/2012	2:48:04 PM	H2 valve closed
2/14/2012	2:48:04 PM	BCl3 valve closed
2/14/2012	2:48:04 PM	PH3 valve closed
2/14/2012	2:48:05 PM	SiCl4 pre valve closed
2/14/2012	2:48:05 PM	SiCl4 post valve closed
2/14/2012	2:48:05 PM	Bypass valve closed
2/14/2012	2:48:05 PM	Bubbler valve closed
2/14/2012	2:48:05 PM	Main Vac valve opened
2/14/2012	2:48:05 PM	Helium MFC set to  0.000000
2/14/2012	2:48:05 PM	H2 MFC set to  0.000000
2/14/2012	2:48:05 PM	BCl3 MFC set to  0.000000
2/14/2012	2:48:05 PM	PH3 MFC set to  0.000000
2/14/2012	2:48:05 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:48:05 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:48:05 PM	Tube furnace set to 150
2/14/2012	2:48:35 PM	H2 valve closed
2/14/2012	2:48:35 PM	BCl3 valve closed
2/14/2012	2:48:35 PM	PH3 valve closed
2/14/2012	2:48:35 PM	SiCl4 pre valve closed
2/14/2012	2:48:35 PM	SiCl4 post valve closed
2/14/2012	2:48:35 PM	Bypass valve closed
2/14/2012	2:48:35 PM	Bubbler valve closed
2/14/2012	2:48:35 PM	Helium valve opened
2/14/2012	2:48:35 PM	Main Vac valve opened
2/14/2012	2:48:35 PM	Helium MFC set to  20.000000
2/14/2012	2:48:35 PM	H2 MFC set to  0.000000
2/14/2012	2:48:35 PM	BCl3 MFC set to  0.000000
2/14/2012	2:48:35 PM	PH3 MFC set to  0.000000
2/14/2012	2:48:35 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:48:35 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:48:35 PM	Tube furnace set to 150
2/14/2012	2:49:05 PM	Helium valve closed
2/14/2012	2:49:05 PM	H2 valve closed
2/14/2012	2:49:05 PM	BCl3 valve closed
2/14/2012	2:49:05 PM	PH3 valve closed
2/14/2012	2:49:05 PM	SiCl4 pre valve closed
2/14/2012	2:49:05 PM	SiCl4 post valve closed
2/14/2012	2:49:05 PM	Bypass valve closed
2/14/2012	2:49:05 PM	Bubbler valve closed
2/14/2012	2:49:05 PM	Main Vac valve opened
2/14/2012	2:49:05 PM	Helium MFC set to  0.000000
2/14/2012	2:49:05 PM	H2 MFC set to  0.000000
2/14/2012	2:49:05 PM	BCl3 MFC set to  0.000000
2/14/2012	2:49:05 PM	PH3 MFC set to  0.000000
2/14/2012	2:49:05 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:49:05 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:49:05 PM	Tube furnace set to 150
2/14/2012	2:49:35 PM	H2 valve closed
2/14/2012	2:49:35 PM	BCl3 valve closed
2/14/2012	2:49:35 PM	PH3 valve closed
2/14/2012	2:49:35 PM	SiCl4 pre valve closed
2/14/2012	2:49:35 PM	SiCl4 post valve closed
2/14/2012	2:49:35 PM	Bypass valve closed
2/14/2012	2:49:35 PM	Bubbler valve closed
2/14/2012	2:49:35 PM	Helium valve opened
2/14/2012	2:49:35 PM	Main Vac valve opened
2/14/2012	2:49:35 PM	Helium MFC set to  20.000000
2/14/2012	2:49:35 PM	H2 MFC set to  0.000000
2/14/2012	2:49:35 PM	BCl3 MFC set to  0.000000
2/14/2012	2:49:35 PM	PH3 MFC set to  0.000000
2/14/2012	2:49:35 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:49:35 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:49:35 PM	Tube furnace set to 150
2/14/2012	2:50:05 PM	Helium valve closed
2/14/2012	2:50:05 PM	H2 valve closed
2/14/2012	2:50:05 PM	BCl3 valve closed
2/14/2012	2:50:05 PM	PH3 valve closed
2/14/2012	2:50:05 PM	SiCl4 pre valve closed
2/14/2012	2:50:05 PM	SiCl4 post valve closed
2/14/2012	2:50:05 PM	Bypass valve closed
2/14/2012	2:50:05 PM	Bubbler valve closed
2/14/2012	2:50:05 PM	Main Vac valve opened
2/14/2012	2:50:05 PM	Helium MFC set to  0.000000
2/14/2012	2:50:05 PM	H2 MFC set to  0.000000
2/14/2012	2:50:05 PM	BCl3 MFC set to  0.000000
2/14/2012	2:50:05 PM	PH3 MFC set to  0.000000
2/14/2012	2:50:05 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:50:05 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:50:06 PM	Tube furnace set to 150
2/14/2012	2:50:36 PM	H2 valve closed
2/14/2012	2:50:36 PM	BCl3 valve closed
2/14/2012	2:50:36 PM	PH3 valve closed
2/14/2012	2:50:36 PM	SiCl4 pre valve closed
2/14/2012	2:50:36 PM	SiCl4 post valve closed
2/14/2012	2:50:36 PM	Bypass valve closed
2/14/2012	2:50:36 PM	Bubbler valve closed
2/14/2012	2:50:36 PM	Helium valve opened
2/14/2012	2:50:36 PM	Main Vac valve opened
2/14/2012	2:50:36 PM	Helium MFC set to  20.000000
2/14/2012	2:50:36 PM	H2 MFC set to  0.000000
2/14/2012	2:50:36 PM	BCl3 MFC set to  0.000000
2/14/2012	2:50:36 PM	PH3 MFC set to  0.000000
2/14/2012	2:50:36 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:50:36 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:50:36 PM	Tube furnace set to 150
2/14/2012	2:51:06 PM	Helium valve closed
2/14/2012	2:51:06 PM	H2 valve closed
2/14/2012	2:51:06 PM	BCl3 valve closed
2/14/2012	2:51:06 PM	PH3 valve closed
2/14/2012	2:51:06 PM	SiCl4 pre valve closed
2/14/2012	2:51:06 PM	SiCl4 post valve closed
2/14/2012	2:51:06 PM	Bypass valve closed
2/14/2012	2:51:06 PM	Bubbler valve closed
2/14/2012	2:51:06 PM	Main Vac valve opened
2/14/2012	2:51:06 PM	Helium MFC set to  0.000000
2/14/2012	2:51:06 PM	H2 MFC set to  0.000000
2/14/2012	2:51:06 PM	BCl3 MFC set to  0.000000
2/14/2012	2:51:06 PM	PH3 MFC set to  0.000000
2/14/2012	2:51:06 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:51:06 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:51:06 PM	Tube furnace set to 150
2/14/2012	2:51:36 PM	H2 valve closed
2/14/2012	2:51:36 PM	BCl3 valve closed
2/14/2012	2:51:36 PM	PH3 valve closed
2/14/2012	2:51:36 PM	SiCl4 pre valve closed
2/14/2012	2:51:36 PM	SiCl4 post valve closed
2/14/2012	2:51:36 PM	Bypass valve closed
2/14/2012	2:51:36 PM	Bubbler valve closed
2/14/2012	2:51:36 PM	Helium valve opened
2/14/2012	2:51:36 PM	Main Vac valve opened
2/14/2012	2:51:36 PM	Helium MFC set to  20.000000
2/14/2012	2:51:36 PM	H2 MFC set to  0.000000
2/14/2012	2:51:36 PM	BCl3 MFC set to  0.000000
2/14/2012	2:51:36 PM	PH3 MFC set to  0.000000
2/14/2012	2:51:36 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:51:36 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:51:36 PM	Tube furnace set to 150
2/14/2012	2:52:06 PM	Helium valve closed
2/14/2012	2:52:06 PM	H2 valve closed
2/14/2012	2:52:06 PM	BCl3 valve closed
2/14/2012	2:52:06 PM	PH3 valve closed
2/14/2012	2:52:06 PM	SiCl4 pre valve closed
2/14/2012	2:52:06 PM	SiCl4 post valve closed
2/14/2012	2:52:06 PM	Bypass valve closed
2/14/2012	2:52:06 PM	Bubbler valve closed
2/14/2012	2:52:06 PM	Main Vac valve opened
2/14/2012	2:52:06 PM	Helium MFC set to  0.000000
2/14/2012	2:52:06 PM	H2 MFC set to  0.000000
2/14/2012	2:52:06 PM	BCl3 MFC set to  0.000000
2/14/2012	2:52:06 PM	PH3 MFC set to  0.000000
2/14/2012	2:52:06 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:52:06 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:52:06 PM	Tube furnace set to 150
2/14/2012	2:52:36 PM	H2 valve closed
2/14/2012	2:52:36 PM	BCl3 valve closed
2/14/2012	2:52:36 PM	PH3 valve closed
2/14/2012	2:52:36 PM	SiCl4 pre valve closed
2/14/2012	2:52:36 PM	SiCl4 post valve closed
2/14/2012	2:52:36 PM	Bypass valve closed
2/14/2012	2:52:36 PM	Bubbler valve closed
2/14/2012	2:52:36 PM	Helium valve opened
2/14/2012	2:52:36 PM	Main Vac valve opened
2/14/2012	2:52:36 PM	Helium MFC set to  20.000000
2/14/2012	2:52:36 PM	H2 MFC set to  0.000000
2/14/2012	2:52:36 PM	BCl3 MFC set to  0.000000
2/14/2012	2:52:36 PM	PH3 MFC set to  0.000000
2/14/2012	2:52:36 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:52:36 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:52:37 PM	Tube furnace set to 150
2/14/2012	2:53:07 PM	Helium valve closed
2/14/2012	2:53:07 PM	H2 valve closed
2/14/2012	2:53:07 PM	BCl3 valve closed
2/14/2012	2:53:07 PM	PH3 valve closed
2/14/2012	2:53:07 PM	SiCl4 pre valve closed
2/14/2012	2:53:07 PM	SiCl4 post valve closed
2/14/2012	2:53:07 PM	Bypass valve closed
2/14/2012	2:53:07 PM	Bubbler valve closed
2/14/2012	2:53:07 PM	Main Vac valve opened
2/14/2012	2:53:07 PM	Helium MFC set to  0.000000
2/14/2012	2:53:07 PM	H2 MFC set to  0.000000
2/14/2012	2:53:07 PM	BCl3 MFC set to  0.000000
2/14/2012	2:53:07 PM	PH3 MFC set to  0.000000
2/14/2012	2:53:07 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:53:07 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:53:07 PM	Tube furnace set to 150
2/14/2012	2:53:37 PM	H2 valve closed
2/14/2012	2:53:37 PM	BCl3 valve closed
2/14/2012	2:53:37 PM	PH3 valve closed
2/14/2012	2:53:37 PM	SiCl4 pre valve closed
2/14/2012	2:53:37 PM	SiCl4 post valve closed
2/14/2012	2:53:37 PM	Bypass valve closed
2/14/2012	2:53:37 PM	Bubbler valve closed
2/14/2012	2:53:37 PM	Helium valve opened
2/14/2012	2:53:37 PM	Main Vac valve opened
2/14/2012	2:53:37 PM	Helium MFC set to  20.000000
2/14/2012	2:53:37 PM	H2 MFC set to  0.000000
2/14/2012	2:53:37 PM	BCl3 MFC set to  0.000000
2/14/2012	2:53:37 PM	PH3 MFC set to  0.000000
2/14/2012	2:53:37 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:53:37 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:53:37 PM	Tube furnace set to 150
2/14/2012	2:54:07 PM	Helium valve closed
2/14/2012	2:54:07 PM	H2 valve closed
2/14/2012	2:54:07 PM	BCl3 valve closed
2/14/2012	2:54:07 PM	PH3 valve closed
2/14/2012	2:54:07 PM	SiCl4 pre valve closed
2/14/2012	2:54:07 PM	SiCl4 post valve closed
2/14/2012	2:54:07 PM	Bypass valve closed
2/14/2012	2:54:07 PM	Bubbler valve closed
2/14/2012	2:54:07 PM	Main Vac valve opened
2/14/2012	2:54:07 PM	Helium MFC set to  0.000000
2/14/2012	2:54:07 PM	H2 MFC set to  0.000000
2/14/2012	2:54:07 PM	BCl3 MFC set to  0.000000
2/14/2012	2:54:07 PM	PH3 MFC set to  0.000000
2/14/2012	2:54:07 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:54:07 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:54:07 PM	Tube furnace set to 150
2/14/2012	2:54:37 PM	H2 valve closed
2/14/2012	2:54:37 PM	BCl3 valve closed
2/14/2012	2:54:37 PM	PH3 valve closed
2/14/2012	2:54:37 PM	SiCl4 pre valve closed
2/14/2012	2:54:37 PM	SiCl4 post valve closed
2/14/2012	2:54:37 PM	Bypass valve closed
2/14/2012	2:54:37 PM	Bubbler valve closed
2/14/2012	2:54:37 PM	Helium valve opened
2/14/2012	2:54:37 PM	Main Vac valve opened
2/14/2012	2:54:37 PM	Helium MFC set to  20.000000
2/14/2012	2:54:37 PM	H2 MFC set to  0.000000
2/14/2012	2:54:37 PM	BCl3 MFC set to  0.000000
2/14/2012	2:54:37 PM	PH3 MFC set to  0.000000
2/14/2012	2:54:37 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:54:37 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:54:37 PM	Tube furnace set to 150
2/14/2012	2:55:07 PM	Helium valve closed
2/14/2012	2:55:07 PM	H2 valve closed
2/14/2012	2:55:07 PM	BCl3 valve closed
2/14/2012	2:55:07 PM	PH3 valve closed
2/14/2012	2:55:07 PM	SiCl4 pre valve closed
2/14/2012	2:55:07 PM	SiCl4 post valve closed
2/14/2012	2:55:07 PM	Bypass valve closed
2/14/2012	2:55:07 PM	Bubbler valve closed
2/14/2012	2:55:07 PM	Main Vac valve opened
2/14/2012	2:55:07 PM	Helium MFC set to  0.000000
2/14/2012	2:55:07 PM	H2 MFC set to  0.000000
2/14/2012	2:55:07 PM	BCl3 MFC set to  0.000000
2/14/2012	2:55:07 PM	PH3 MFC set to  0.000000
2/14/2012	2:55:07 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:55:07 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:55:08 PM	Tube furnace set to 150
2/14/2012	2:55:09 PM	Run finished at 2:55 PM
2/14/2012	2:55:46 PM	Main Vac valve closed
2/14/2012	2:56:03 PM	Main Vac valve opened
2/14/2012	2:56:20 PM	Recipe started at 2:56 PM
2/14/2012	2:56:20 PM	Helium valve closed
2/14/2012	2:56:20 PM	H2 valve closed
2/14/2012	2:56:20 PM	BCl3 valve closed
2/14/2012	2:56:20 PM	PH3 valve closed
2/14/2012	2:56:20 PM	SiCl4 pre valve closed
2/14/2012	2:56:20 PM	SiCl4 post valve closed
2/14/2012	2:56:20 PM	Bypass valve closed
2/14/2012	2:56:20 PM	Bubbler valve closed
2/14/2012	2:56:20 PM	Main Vac valve opened
2/14/2012	2:56:20 PM	Helium MFC set to  0.000000
2/14/2012	2:56:20 PM	H2 MFC set to  0.000000
2/14/2012	2:56:20 PM	BCl3 MFC set to  0.000000
2/14/2012	2:56:20 PM	PH3 MFC set to  0.000000
2/14/2012	2:56:20 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:56:20 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:56:20 PM	Tube furnace set to 150
2/14/2012	2:56:50 PM	H2 valve closed
2/14/2012	2:56:50 PM	BCl3 valve closed
2/14/2012	2:56:50 PM	PH3 valve closed
2/14/2012	2:56:50 PM	SiCl4 pre valve closed
2/14/2012	2:56:50 PM	SiCl4 post valve closed
2/14/2012	2:56:50 PM	Bypass valve closed
2/14/2012	2:56:50 PM	Bubbler valve closed
2/14/2012	2:56:50 PM	Helium valve opened
2/14/2012	2:56:50 PM	Main Vac valve opened
2/14/2012	2:56:50 PM	Helium MFC set to  20.000000
2/14/2012	2:56:50 PM	H2 MFC set to  0.000000
2/14/2012	2:56:50 PM	BCl3 MFC set to  0.000000
2/14/2012	2:56:50 PM	PH3 MFC set to  0.000000
2/14/2012	2:56:50 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:56:50 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:56:50 PM	Tube furnace set to 150
2/14/2012	2:57:20 PM	Helium valve closed
2/14/2012	2:57:20 PM	H2 valve closed
2/14/2012	2:57:20 PM	BCl3 valve closed
2/14/2012	2:57:20 PM	PH3 valve closed
2/14/2012	2:57:20 PM	SiCl4 pre valve closed
2/14/2012	2:57:20 PM	SiCl4 post valve closed
2/14/2012	2:57:20 PM	Bypass valve closed
2/14/2012	2:57:20 PM	Bubbler valve closed
2/14/2012	2:57:20 PM	Main Vac valve opened
2/14/2012	2:57:20 PM	Helium MFC set to  0.000000
2/14/2012	2:57:20 PM	H2 MFC set to  0.000000
2/14/2012	2:57:20 PM	BCl3 MFC set to  0.000000
2/14/2012	2:57:20 PM	PH3 MFC set to  0.000000
2/14/2012	2:57:20 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:57:20 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:57:20 PM	Tube furnace set to 150
2/14/2012	2:57:50 PM	H2 valve closed
2/14/2012	2:57:50 PM	BCl3 valve closed
2/14/2012	2:57:50 PM	PH3 valve closed
2/14/2012	2:57:50 PM	SiCl4 pre valve closed
2/14/2012	2:57:50 PM	SiCl4 post valve closed
2/14/2012	2:57:50 PM	Bypass valve closed
2/14/2012	2:57:50 PM	Bubbler valve closed
2/14/2012	2:57:50 PM	Helium valve opened
2/14/2012	2:57:50 PM	Main Vac valve opened
2/14/2012	2:57:50 PM	Helium MFC set to  20.000000
2/14/2012	2:57:50 PM	H2 MFC set to  0.000000
2/14/2012	2:57:50 PM	BCl3 MFC set to  0.000000
2/14/2012	2:57:50 PM	PH3 MFC set to  0.000000
2/14/2012	2:57:50 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:57:50 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:57:51 PM	Tube furnace set to 150
2/14/2012	2:58:21 PM	Helium valve closed
2/14/2012	2:58:21 PM	H2 valve closed
2/14/2012	2:58:21 PM	BCl3 valve closed
2/14/2012	2:58:21 PM	PH3 valve closed
2/14/2012	2:58:21 PM	SiCl4 pre valve closed
2/14/2012	2:58:21 PM	SiCl4 post valve closed
2/14/2012	2:58:21 PM	Bypass valve closed
2/14/2012	2:58:21 PM	Bubbler valve closed
2/14/2012	2:58:21 PM	Main Vac valve opened
2/14/2012	2:58:21 PM	Helium MFC set to  0.000000
2/14/2012	2:58:21 PM	H2 MFC set to  0.000000
2/14/2012	2:58:21 PM	BCl3 MFC set to  0.000000
2/14/2012	2:58:21 PM	PH3 MFC set to  0.000000
2/14/2012	2:58:21 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:58:21 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:58:21 PM	Tube furnace set to 150
2/14/2012	2:58:51 PM	H2 valve closed
2/14/2012	2:58:51 PM	BCl3 valve closed
2/14/2012	2:58:51 PM	PH3 valve closed
2/14/2012	2:58:51 PM	SiCl4 pre valve closed
2/14/2012	2:58:51 PM	SiCl4 post valve closed
2/14/2012	2:58:51 PM	Bypass valve closed
2/14/2012	2:58:51 PM	Bubbler valve closed
2/14/2012	2:58:51 PM	Helium valve opened
2/14/2012	2:58:51 PM	Main Vac valve opened
2/14/2012	2:58:51 PM	Helium MFC set to  20.000000
2/14/2012	2:58:51 PM	H2 MFC set to  0.000000
2/14/2012	2:58:51 PM	BCl3 MFC set to  0.000000
2/14/2012	2:58:51 PM	PH3 MFC set to  0.000000
2/14/2012	2:58:51 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:58:51 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:58:51 PM	Tube furnace set to 150
2/14/2012	2:59:21 PM	Helium valve closed
2/14/2012	2:59:21 PM	H2 valve closed
2/14/2012	2:59:21 PM	BCl3 valve closed
2/14/2012	2:59:21 PM	PH3 valve closed
2/14/2012	2:59:21 PM	SiCl4 pre valve closed
2/14/2012	2:59:21 PM	SiCl4 post valve closed
2/14/2012	2:59:21 PM	Bypass valve closed
2/14/2012	2:59:21 PM	Bubbler valve closed
2/14/2012	2:59:21 PM	Main Vac valve opened
2/14/2012	2:59:21 PM	Helium MFC set to  0.000000
2/14/2012	2:59:21 PM	H2 MFC set to  0.000000
2/14/2012	2:59:21 PM	BCl3 MFC set to  0.000000
2/14/2012	2:59:21 PM	PH3 MFC set to  0.000000
2/14/2012	2:59:21 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:59:21 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:59:21 PM	Tube furnace set to 150
2/14/2012	2:59:51 PM	H2 valve closed
2/14/2012	2:59:51 PM	BCl3 valve closed
2/14/2012	2:59:51 PM	PH3 valve closed
2/14/2012	2:59:51 PM	SiCl4 pre valve closed
2/14/2012	2:59:51 PM	SiCl4 post valve closed
2/14/2012	2:59:51 PM	Bypass valve closed
2/14/2012	2:59:51 PM	Bubbler valve closed
2/14/2012	2:59:51 PM	Helium valve opened
2/14/2012	2:59:51 PM	Main Vac valve opened
2/14/2012	2:59:51 PM	Helium MFC set to  20.000000
2/14/2012	2:59:51 PM	H2 MFC set to  0.000000
2/14/2012	2:59:51 PM	BCl3 MFC set to  0.000000
2/14/2012	2:59:51 PM	PH3 MFC set to  0.000000
2/14/2012	2:59:51 PM	SiCl4 MFC set to  0.000000
2/14/2012	2:59:51 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	2:59:51 PM	Tube furnace set to 150
2/14/2012	3:00:21 PM	Helium valve closed
2/14/2012	3:00:21 PM	H2 valve closed
2/14/2012	3:00:21 PM	BCl3 valve closed
2/14/2012	3:00:21 PM	PH3 valve closed
2/14/2012	3:00:21 PM	SiCl4 pre valve closed
2/14/2012	3:00:21 PM	SiCl4 post valve closed
2/14/2012	3:00:21 PM	Bypass valve closed
2/14/2012	3:00:21 PM	Bubbler valve closed
2/14/2012	3:00:21 PM	Main Vac valve opened
2/14/2012	3:00:21 PM	Helium MFC set to  0.000000
2/14/2012	3:00:21 PM	H2 MFC set to  0.000000
2/14/2012	3:00:21 PM	BCl3 MFC set to  0.000000
2/14/2012	3:00:21 PM	PH3 MFC set to  0.000000
2/14/2012	3:00:21 PM	SiCl4 MFC set to  0.000000
2/14/2012	3:00:21 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:00:22 PM	Tube furnace set to 150
2/14/2012	3:00:52 PM	H2 valve closed
2/14/2012	3:00:52 PM	BCl3 valve closed
2/14/2012	3:00:52 PM	PH3 valve closed
2/14/2012	3:00:52 PM	SiCl4 pre valve closed
2/14/2012	3:00:52 PM	SiCl4 post valve closed
2/14/2012	3:00:52 PM	Bypass valve closed
2/14/2012	3:00:52 PM	Bubbler valve closed
2/14/2012	3:00:52 PM	Helium valve opened
2/14/2012	3:00:52 PM	Main Vac valve opened
2/14/2012	3:00:52 PM	Helium MFC set to  20.000000
2/14/2012	3:00:52 PM	H2 MFC set to  0.000000
2/14/2012	3:00:52 PM	BCl3 MFC set to  0.000000
2/14/2012	3:00:52 PM	PH3 MFC set to  0.000000
2/14/2012	3:00:52 PM	SiCl4 MFC set to  0.000000
2/14/2012	3:00:52 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:00:52 PM	Tube furnace set to 150
2/14/2012	3:01:22 PM	Helium valve closed
2/14/2012	3:01:22 PM	H2 valve closed
2/14/2012	3:01:22 PM	BCl3 valve closed
2/14/2012	3:01:22 PM	PH3 valve closed
2/14/2012	3:01:22 PM	SiCl4 pre valve closed
2/14/2012	3:01:22 PM	SiCl4 post valve closed
2/14/2012	3:01:22 PM	Bypass valve closed
2/14/2012	3:01:22 PM	Bubbler valve closed
2/14/2012	3:01:22 PM	Main Vac valve opened
2/14/2012	3:01:22 PM	Helium MFC set to  0.000000
2/14/2012	3:01:22 PM	H2 MFC set to  0.000000
2/14/2012	3:01:22 PM	BCl3 MFC set to  0.000000
2/14/2012	3:01:22 PM	PH3 MFC set to  0.000000
2/14/2012	3:01:22 PM	SiCl4 MFC set to  0.000000
2/14/2012	3:01:22 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:01:22 PM	Tube furnace set to 150
2/14/2012	3:01:52 PM	H2 valve closed
2/14/2012	3:01:52 PM	BCl3 valve closed
2/14/2012	3:01:52 PM	PH3 valve closed
2/14/2012	3:01:52 PM	SiCl4 pre valve closed
2/14/2012	3:01:52 PM	SiCl4 post valve closed
2/14/2012	3:01:52 PM	Bypass valve closed
2/14/2012	3:01:52 PM	Bubbler valve closed
2/14/2012	3:01:52 PM	Helium valve opened
2/14/2012	3:01:52 PM	Main Vac valve opened
2/14/2012	3:01:52 PM	Helium MFC set to  20.000000
2/14/2012	3:01:52 PM	H2 MFC set to  0.000000
2/14/2012	3:01:52 PM	BCl3 MFC set to  0.000000
2/14/2012	3:01:52 PM	PH3 MFC set to  0.000000
2/14/2012	3:01:52 PM	SiCl4 MFC set to  0.000000
2/14/2012	3:01:52 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:01:52 PM	Tube furnace set to 150
2/14/2012	3:02:22 PM	Helium valve closed
2/14/2012	3:02:22 PM	H2 valve closed
2/14/2012	3:02:22 PM	BCl3 valve closed
2/14/2012	3:02:22 PM	PH3 valve closed
2/14/2012	3:02:22 PM	SiCl4 pre valve closed
2/14/2012	3:02:22 PM	SiCl4 post valve closed
2/14/2012	3:02:22 PM	Bypass valve closed
2/14/2012	3:02:22 PM	Bubbler valve closed
2/14/2012	3:02:22 PM	Main Vac valve opened
2/14/2012	3:02:22 PM	Helium MFC set to  0.000000
2/14/2012	3:02:22 PM	H2 MFC set to  0.000000
2/14/2012	3:02:22 PM	BCl3 MFC set to  0.000000
2/14/2012	3:02:22 PM	PH3 MFC set to  0.000000
2/14/2012	3:02:22 PM	SiCl4 MFC set to  0.000000
2/14/2012	3:02:22 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:02:22 PM	Tube furnace set to 150
2/14/2012	3:02:52 PM	H2 valve closed
2/14/2012	3:02:52 PM	BCl3 valve closed
2/14/2012	3:02:52 PM	PH3 valve closed
2/14/2012	3:02:52 PM	SiCl4 pre valve closed
2/14/2012	3:02:52 PM	SiCl4 post valve closed
2/14/2012	3:02:52 PM	Bypass valve closed
2/14/2012	3:02:52 PM	Bubbler valve closed
2/14/2012	3:02:52 PM	Helium valve opened
2/14/2012	3:02:52 PM	Main Vac valve opened
2/14/2012	3:02:52 PM	Helium MFC set to  20.000000
2/14/2012	3:02:52 PM	H2 MFC set to  0.000000
2/14/2012	3:02:52 PM	BCl3 MFC set to  0.000000
2/14/2012	3:02:52 PM	PH3 MFC set to  0.000000
2/14/2012	3:02:52 PM	SiCl4 MFC set to  0.000000
2/14/2012	3:02:52 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:02:53 PM	Tube furnace set to 150
2/14/2012	3:03:23 PM	Helium valve closed
2/14/2012	3:03:23 PM	H2 valve closed
2/14/2012	3:03:23 PM	BCl3 valve closed
2/14/2012	3:03:23 PM	PH3 valve closed
2/14/2012	3:03:23 PM	SiCl4 pre valve closed
2/14/2012	3:03:23 PM	SiCl4 post valve closed
2/14/2012	3:03:23 PM	Bypass valve closed
2/14/2012	3:03:23 PM	Bubbler valve closed
2/14/2012	3:03:23 PM	Main Vac valve opened
2/14/2012	3:03:23 PM	Helium MFC set to  0.000000
2/14/2012	3:03:23 PM	H2 MFC set to  0.000000
2/14/2012	3:03:23 PM	BCl3 MFC set to  0.000000
2/14/2012	3:03:23 PM	PH3 MFC set to  0.000000
2/14/2012	3:03:23 PM	SiCl4 MFC set to  0.000000
2/14/2012	3:03:23 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:03:23 PM	Tube furnace set to 150
2/14/2012	3:03:53 PM	H2 valve closed
2/14/2012	3:03:53 PM	BCl3 valve closed
2/14/2012	3:03:53 PM	PH3 valve closed
2/14/2012	3:03:53 PM	SiCl4 pre valve closed
2/14/2012	3:03:53 PM	SiCl4 post valve closed
2/14/2012	3:03:53 PM	Bypass valve closed
2/14/2012	3:03:53 PM	Bubbler valve closed
2/14/2012	3:03:53 PM	Helium valve opened
2/14/2012	3:03:53 PM	Main Vac valve opened
2/14/2012	3:03:53 PM	Helium MFC set to  20.000000
2/14/2012	3:03:53 PM	H2 MFC set to  0.000000
2/14/2012	3:03:53 PM	BCl3 MFC set to  0.000000
2/14/2012	3:03:53 PM	PH3 MFC set to  0.000000
2/14/2012	3:03:53 PM	SiCl4 MFC set to  0.000000
2/14/2012	3:03:53 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:03:53 PM	Tube furnace set to 150
2/14/2012	3:04:23 PM	Helium valve closed
2/14/2012	3:04:23 PM	H2 valve closed
2/14/2012	3:04:23 PM	BCl3 valve closed
2/14/2012	3:04:23 PM	PH3 valve closed
2/14/2012	3:04:23 PM	SiCl4 pre valve closed
2/14/2012	3:04:23 PM	SiCl4 post valve closed
2/14/2012	3:04:23 PM	Bypass valve closed
2/14/2012	3:04:23 PM	Bubbler valve closed
2/14/2012	3:04:23 PM	Main Vac valve opened
2/14/2012	3:04:23 PM	Helium MFC set to  0.000000
2/14/2012	3:04:23 PM	H2 MFC set to  0.000000
2/14/2012	3:04:23 PM	BCl3 MFC set to  0.000000
2/14/2012	3:04:23 PM	PH3 MFC set to  0.000000
2/14/2012	3:04:23 PM	SiCl4 MFC set to  0.000000
2/14/2012	3:04:23 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:04:23 PM	Tube furnace set to 150
2/14/2012	3:04:53 PM	H2 valve closed
2/14/2012	3:04:53 PM	BCl3 valve closed
2/14/2012	3:04:53 PM	PH3 valve closed
2/14/2012	3:04:53 PM	SiCl4 pre valve closed
2/14/2012	3:04:53 PM	SiCl4 post valve closed
2/14/2012	3:04:53 PM	Bypass valve closed
2/14/2012	3:04:53 PM	Bubbler valve closed
2/14/2012	3:04:53 PM	Helium valve opened
2/14/2012	3:04:53 PM	Main Vac valve opened
2/14/2012	3:04:53 PM	Helium MFC set to  20.000000
2/14/2012	3:04:53 PM	H2 MFC set to  0.000000
2/14/2012	3:04:53 PM	BCl3 MFC set to  0.000000
2/14/2012	3:04:53 PM	PH3 MFC set to  0.000000
2/14/2012	3:04:53 PM	SiCl4 MFC set to  0.000000
2/14/2012	3:04:53 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:04:53 PM	Tube furnace set to 150
2/14/2012	3:05:23 PM	Helium valve closed
2/14/2012	3:05:23 PM	H2 valve closed
2/14/2012	3:05:23 PM	BCl3 valve closed
2/14/2012	3:05:23 PM	PH3 valve closed
2/14/2012	3:05:23 PM	SiCl4 pre valve closed
2/14/2012	3:05:23 PM	SiCl4 post valve closed
2/14/2012	3:05:23 PM	Bypass valve closed
2/14/2012	3:05:23 PM	Bubbler valve closed
2/14/2012	3:05:23 PM	Main Vac valve opened
2/14/2012	3:05:23 PM	Helium MFC set to  0.000000
2/14/2012	3:05:23 PM	H2 MFC set to  0.000000
2/14/2012	3:05:23 PM	BCl3 MFC set to  0.000000
2/14/2012	3:05:23 PM	PH3 MFC set to  0.000000
2/14/2012	3:05:23 PM	SiCl4 MFC set to  0.000000
2/14/2012	3:05:23 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:05:24 PM	Tube furnace set to 150
2/14/2012	3:05:54 PM	H2 valve closed
2/14/2012	3:05:54 PM	BCl3 valve closed
2/14/2012	3:05:54 PM	PH3 valve closed
2/14/2012	3:05:54 PM	SiCl4 pre valve closed
2/14/2012	3:05:54 PM	SiCl4 post valve closed
2/14/2012	3:05:54 PM	Bypass valve closed
2/14/2012	3:05:54 PM	Bubbler valve closed
2/14/2012	3:05:54 PM	Helium valve opened
2/14/2012	3:05:54 PM	Main Vac valve opened
2/14/2012	3:05:54 PM	Helium MFC set to  20.000000
2/14/2012	3:05:54 PM	H2 MFC set to  0.000000
2/14/2012	3:05:54 PM	BCl3 MFC set to  0.000000
2/14/2012	3:05:54 PM	PH3 MFC set to  0.000000
2/14/2012	3:05:54 PM	SiCl4 MFC set to  0.000000
2/14/2012	3:05:54 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:05:54 PM	Tube furnace set to 150
2/14/2012	3:06:24 PM	Helium valve closed
2/14/2012	3:06:24 PM	H2 valve closed
2/14/2012	3:06:24 PM	BCl3 valve closed
2/14/2012	3:06:24 PM	PH3 valve closed
2/14/2012	3:06:24 PM	SiCl4 pre valve closed
2/14/2012	3:06:24 PM	SiCl4 post valve closed
2/14/2012	3:06:24 PM	Bypass valve closed
2/14/2012	3:06:24 PM	Bubbler valve closed
2/14/2012	3:06:24 PM	Main Vac valve opened
2/14/2012	3:06:24 PM	Helium MFC set to  0.000000
2/14/2012	3:06:24 PM	H2 MFC set to  0.000000
2/14/2012	3:06:24 PM	BCl3 MFC set to  0.000000
2/14/2012	3:06:24 PM	PH3 MFC set to  0.000000
2/14/2012	3:06:24 PM	SiCl4 MFC set to  0.000000
2/14/2012	3:06:24 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:06:24 PM	Tube furnace set to 150
2/14/2012	3:06:25 PM	Run finished at 3:06 PM
2/14/2012	3:07:09 PM	Main Vac valve closed
2/14/2012	3:07:40 PM	Main Vac valve opened
2/14/2012	3:07:59 PM	Recipe started at 3:07 PM
2/14/2012	3:07:59 PM	Helium valve closed
2/14/2012	3:07:59 PM	H2 valve closed
2/14/2012	3:07:59 PM	BCl3 valve closed
2/14/2012	3:07:59 PM	PH3 valve closed
2/14/2012	3:07:59 PM	SiCl4 pre valve closed
2/14/2012	3:07:59 PM	SiCl4 post valve closed
2/14/2012	3:07:59 PM	Main Vac valve closed
2/14/2012	3:07:59 PM	Bypass valve closed
2/14/2012	3:07:59 PM	Bubbler valve closed
2/14/2012	3:07:59 PM	Helium MFC set to  0.000000
2/14/2012	3:07:59 PM	H2 MFC set to  0.000000
2/14/2012	3:07:59 PM	BCl3 MFC set to  0.000000
2/14/2012	3:07:59 PM	PH3 MFC set to  0.000000
2/14/2012	3:07:59 PM	SiCl4 MFC set to  0.000000
2/14/2012	3:07:59 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:07:59 PM	Tube furnace set to 0
2/14/2012	3:08:02 PM	Helium valve closed
2/14/2012	3:08:02 PM	BCl3 valve closed
2/14/2012	3:08:02 PM	PH3 valve closed
2/14/2012	3:08:02 PM	SiCl4 pre valve closed
2/14/2012	3:08:02 PM	SiCl4 post valve closed
2/14/2012	3:08:02 PM	Main Vac valve closed
2/14/2012	3:08:02 PM	Bypass valve closed
2/14/2012	3:08:02 PM	Bubbler valve closed
2/14/2012	3:08:02 PM	H2 valve opened
2/14/2012	3:08:02 PM	Helium MFC set to  0.000000
2/14/2012	3:08:02 PM	H2 MFC set to  500.000000
2/14/2012	3:08:02 PM	BCl3 MFC set to  0.000000
2/14/2012	3:08:02 PM	PH3 MFC set to  0.000000
2/14/2012	3:08:02 PM	SiCl4 MFC set to  0.000000
2/14/2012	3:08:02 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:08:02 PM	Tube furnace set to 0
2/14/2012	3:09:05 PM	Helium valve closed
2/14/2012	3:09:05 PM	BCl3 valve closed
2/14/2012	3:09:05 PM	PH3 valve closed
2/14/2012	3:09:05 PM	SiCl4 pre valve closed
2/14/2012	3:09:05 PM	SiCl4 post valve closed
2/14/2012	3:09:05 PM	Main Vac valve closed
2/14/2012	3:09:05 PM	Bypass valve closed
2/14/2012	3:09:05 PM	H2 valve opened
2/14/2012	3:09:05 PM	Bubbler valve opened
2/14/2012	3:09:05 PM	Helium MFC set to  0.000000
2/14/2012	3:09:05 PM	H2 MFC set to  500.000000
2/14/2012	3:09:05 PM	BCl3 MFC set to  0.000000
2/14/2012	3:09:05 PM	PH3 MFC set to  0.000000
2/14/2012	3:09:05 PM	SiCl4 MFC set to  0.000000
2/14/2012	3:09:05 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:09:06 PM	Tube furnace set to 0
2/14/2012	3:09:07 PM	Helium valve closed
2/14/2012	3:09:07 PM	BCl3 valve closed
2/14/2012	3:09:07 PM	PH3 valve closed
2/14/2012	3:09:07 PM	SiCl4 pre valve closed
2/14/2012	3:09:07 PM	SiCl4 post valve closed
2/14/2012	3:09:07 PM	Main Vac valve closed
2/14/2012	3:09:07 PM	Bypass valve closed
2/14/2012	3:09:07 PM	H2 valve opened
2/14/2012	3:09:07 PM	Bubbler valve opened
2/14/2012	3:09:07 PM	Helium MFC set to  0.000000
2/14/2012	3:09:07 PM	H2 MFC set to  500.000000
2/14/2012	3:09:07 PM	BCl3 MFC set to  0.000000
2/14/2012	3:09:07 PM	PH3 MFC set to  0.000000
2/14/2012	3:09:07 PM	SiCl4 MFC set to  0.000000
2/14/2012	3:09:07 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:09:07 PM	Tube furnace set to 1000
2/14/2012	3:29:07 PM	Helium valve closed
2/14/2012	3:29:07 PM	PH3 valve closed
2/14/2012	3:29:07 PM	Main Vac valve closed
2/14/2012	3:29:07 PM	Bypass valve closed
2/14/2012	3:29:07 PM	H2 valve opened
2/14/2012	3:29:07 PM	BCl3 valve opened
2/14/2012	3:29:07 PM	SiCl4 pre valve opened
2/14/2012	3:29:07 PM	SiCl4 post valve opened
2/14/2012	3:29:07 PM	Bubbler valve opened
2/14/2012	3:29:07 PM	Helium MFC set to  0.000000
2/14/2012	3:29:07 PM	H2 MFC set to  500.000000
2/14/2012	3:29:07 PM	BCl3 MFC set to  20.000000
2/14/2012	3:29:07 PM	PH3 MFC set to  0.000000
2/14/2012	3:29:07 PM	SiCl4 MFC set to  50.000000
2/14/2012	3:29:07 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:29:07 PM	Tube furnace set to 1000
2/14/2012	3:39:07 PM	Helium valve closed
2/14/2012	3:39:07 PM	BCl3 valve closed
2/14/2012	3:39:07 PM	PH3 valve closed
2/14/2012	3:39:07 PM	SiCl4 pre valve closed
2/14/2012	3:39:07 PM	SiCl4 post valve closed
2/14/2012	3:39:07 PM	Main Vac valve closed
2/14/2012	3:39:07 PM	Bypass valve closed
2/14/2012	3:39:07 PM	H2 valve opened
2/14/2012	3:39:07 PM	Bubbler valve opened
2/14/2012	3:39:07 PM	Helium MFC set to  0.000000
2/14/2012	3:39:07 PM	H2 MFC set to  500.000000
2/14/2012	3:39:07 PM	BCl3 MFC set to  0.000000
2/14/2012	3:39:07 PM	PH3 MFC set to  0.000000
2/14/2012	3:39:07 PM	SiCl4 MFC set to  0.000000
2/14/2012	3:39:07 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:39:07 PM	Tube furnace set to 750
2/14/2012	3:44:07 PM	H2 valve closed
2/14/2012	3:44:07 PM	BCl3 valve closed
2/14/2012	3:44:07 PM	PH3 valve closed
2/14/2012	3:44:07 PM	SiCl4 pre valve closed
2/14/2012	3:44:07 PM	SiCl4 post valve closed
2/14/2012	3:44:07 PM	Main Vac valve closed
2/14/2012	3:44:07 PM	Bypass valve closed
2/14/2012	3:44:07 PM	Helium valve opened
2/14/2012	3:44:07 PM	Bubbler valve opened
2/14/2012	3:44:07 PM	Helium MFC set to  500.000000
2/14/2012	3:44:07 PM	H2 MFC set to  0.000000
2/14/2012	3:44:07 PM	BCl3 MFC set to  0.000000
2/14/2012	3:44:07 PM	PH3 MFC set to  0.000000
2/14/2012	3:44:07 PM	SiCl4 MFC set to  0.000000
2/14/2012	3:44:07 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	3:44:07 PM	Tube furnace set to 0
2/14/2012	4:04:07 PM	Helium valve closed
2/14/2012	4:04:07 PM	H2 valve closed
2/14/2012	4:04:07 PM	BCl3 valve closed
2/14/2012	4:04:07 PM	PH3 valve closed
2/14/2012	4:04:07 PM	SiCl4 pre valve closed
2/14/2012	4:04:07 PM	SiCl4 post valve closed
2/14/2012	4:04:07 PM	Main Vac valve closed
2/14/2012	4:04:07 PM	Bypass valve closed
2/14/2012	4:04:07 PM	Bubbler valve closed
2/14/2012	4:04:07 PM	Helium MFC set to  0.000000
2/14/2012	4:04:07 PM	H2 MFC set to  0.000000
2/14/2012	4:04:07 PM	BCl3 MFC set to  0.000000
2/14/2012	4:04:07 PM	PH3 MFC set to  0.000000
2/14/2012	4:04:07 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:04:07 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:04:07 PM	Tube furnace set to 0
2/14/2012	4:04:08 PM	Run finished at 4:04 PM
2/14/2012	4:07:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2012	4:07:40 PM	Recipe started at 4:07 PM
2/14/2012	4:07:40 PM	Helium valve closed
2/14/2012	4:07:40 PM	H2 valve closed
2/14/2012	4:07:40 PM	BCl3 valve closed
2/14/2012	4:07:40 PM	PH3 valve closed
2/14/2012	4:07:40 PM	SiCl4 pre valve closed
2/14/2012	4:07:40 PM	SiCl4 post valve closed
2/14/2012	4:07:40 PM	Main Vac valve closed
2/14/2012	4:07:40 PM	Bubbler valve closed
2/14/2012	4:07:40 PM	Bypass valve opened
2/14/2012	4:07:40 PM	Helium MFC set to  0.000000
2/14/2012	4:07:40 PM	H2 MFC set to  0.000000
2/14/2012	4:07:40 PM	BCl3 MFC set to  0.000000
2/14/2012	4:07:40 PM	PH3 MFC set to  0.000000
2/14/2012	4:07:40 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:07:40 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:07:40 PM	Tube furnace set to 0
2/14/2012	4:08:40 PM	Helium valve closed
2/14/2012	4:08:40 PM	H2 valve closed
2/14/2012	4:08:40 PM	BCl3 valve closed
2/14/2012	4:08:40 PM	PH3 valve closed
2/14/2012	4:08:40 PM	SiCl4 pre valve closed
2/14/2012	4:08:40 PM	SiCl4 post valve closed
2/14/2012	4:08:40 PM	Main Vac valve closed
2/14/2012	4:08:40 PM	Bubbler valve closed
2/14/2012	4:08:40 PM	Bypass valve opened
2/14/2012	4:08:40 PM	Helium MFC set to  0.000000
2/14/2012	4:08:40 PM	H2 MFC set to  0.000000
2/14/2012	4:08:40 PM	BCl3 MFC set to  0.000000
2/14/2012	4:08:40 PM	PH3 MFC set to  0.000000
2/14/2012	4:08:40 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:08:40 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:08:40 PM	Tube furnace set to 0
2/14/2012	4:09:40 PM	Helium valve closed
2/14/2012	4:09:40 PM	H2 valve closed
2/14/2012	4:09:40 PM	BCl3 valve closed
2/14/2012	4:09:40 PM	PH3 valve closed
2/14/2012	4:09:40 PM	SiCl4 pre valve closed
2/14/2012	4:09:40 PM	SiCl4 post valve closed
2/14/2012	4:09:40 PM	Bypass valve closed
2/14/2012	4:09:40 PM	Bubbler valve closed
2/14/2012	4:09:40 PM	Main Vac valve opened
2/14/2012	4:09:40 PM	Helium MFC set to  0.000000
2/14/2012	4:09:40 PM	H2 MFC set to  0.000000
2/14/2012	4:09:40 PM	BCl3 MFC set to  0.000000
2/14/2012	4:09:40 PM	PH3 MFC set to  0.000000
2/14/2012	4:09:40 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:09:40 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:09:40 PM	Tube furnace set to 0
2/14/2012	4:09:41 PM	Run finished at 4:09 PM
2/14/2012	4:09:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2012	4:10:15 PM	Recipe started at 4:10 PM
2/14/2012	4:10:15 PM	Helium valve closed
2/14/2012	4:10:15 PM	H2 valve closed
2/14/2012	4:10:15 PM	BCl3 valve closed
2/14/2012	4:10:15 PM	PH3 valve closed
2/14/2012	4:10:15 PM	SiCl4 pre valve closed
2/14/2012	4:10:15 PM	SiCl4 post valve closed
2/14/2012	4:10:15 PM	Bypass valve closed
2/14/2012	4:10:15 PM	Bubbler valve closed
2/14/2012	4:10:15 PM	Main Vac valve opened
2/14/2012	4:10:15 PM	Helium MFC set to  0.000000
2/14/2012	4:10:15 PM	H2 MFC set to  0.000000
2/14/2012	4:10:15 PM	BCl3 MFC set to  0.000000
2/14/2012	4:10:15 PM	PH3 MFC set to  0.000000
2/14/2012	4:10:15 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:10:15 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:10:15 PM	Tube furnace set to 150
2/14/2012	4:10:45 PM	H2 valve closed
2/14/2012	4:10:45 PM	BCl3 valve closed
2/14/2012	4:10:45 PM	PH3 valve closed
2/14/2012	4:10:45 PM	SiCl4 pre valve closed
2/14/2012	4:10:45 PM	SiCl4 post valve closed
2/14/2012	4:10:45 PM	Bypass valve closed
2/14/2012	4:10:45 PM	Bubbler valve closed
2/14/2012	4:10:45 PM	Helium valve opened
2/14/2012	4:10:45 PM	Main Vac valve opened
2/14/2012	4:10:45 PM	Helium MFC set to  20.000000
2/14/2012	4:10:45 PM	H2 MFC set to  0.000000
2/14/2012	4:10:45 PM	BCl3 MFC set to  0.000000
2/14/2012	4:10:45 PM	PH3 MFC set to  0.000000
2/14/2012	4:10:45 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:10:45 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:10:45 PM	Tube furnace set to 150
2/14/2012	4:11:15 PM	Helium valve closed
2/14/2012	4:11:15 PM	H2 valve closed
2/14/2012	4:11:15 PM	BCl3 valve closed
2/14/2012	4:11:15 PM	PH3 valve closed
2/14/2012	4:11:15 PM	SiCl4 pre valve closed
2/14/2012	4:11:15 PM	SiCl4 post valve closed
2/14/2012	4:11:15 PM	Bypass valve closed
2/14/2012	4:11:15 PM	Bubbler valve closed
2/14/2012	4:11:15 PM	Main Vac valve opened
2/14/2012	4:11:15 PM	Helium MFC set to  0.000000
2/14/2012	4:11:15 PM	H2 MFC set to  0.000000
2/14/2012	4:11:15 PM	BCl3 MFC set to  0.000000
2/14/2012	4:11:15 PM	PH3 MFC set to  0.000000
2/14/2012	4:11:15 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:11:15 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:11:15 PM	Tube furnace set to 150
2/14/2012	4:11:46 PM	H2 valve closed
2/14/2012	4:11:46 PM	BCl3 valve closed
2/14/2012	4:11:46 PM	PH3 valve closed
2/14/2012	4:11:46 PM	SiCl4 pre valve closed
2/14/2012	4:11:46 PM	SiCl4 post valve closed
2/14/2012	4:11:46 PM	Bypass valve closed
2/14/2012	4:11:46 PM	Bubbler valve closed
2/14/2012	4:11:46 PM	Helium valve opened
2/14/2012	4:11:46 PM	Main Vac valve opened
2/14/2012	4:11:46 PM	Helium MFC set to  20.000000
2/14/2012	4:11:46 PM	H2 MFC set to  0.000000
2/14/2012	4:11:46 PM	BCl3 MFC set to  0.000000
2/14/2012	4:11:46 PM	PH3 MFC set to  0.000000
2/14/2012	4:11:46 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:11:46 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:11:46 PM	Tube furnace set to 150
2/14/2012	4:12:16 PM	Helium valve closed
2/14/2012	4:12:16 PM	H2 valve closed
2/14/2012	4:12:16 PM	BCl3 valve closed
2/14/2012	4:12:16 PM	PH3 valve closed
2/14/2012	4:12:16 PM	SiCl4 pre valve closed
2/14/2012	4:12:16 PM	SiCl4 post valve closed
2/14/2012	4:12:16 PM	Bypass valve closed
2/14/2012	4:12:16 PM	Bubbler valve closed
2/14/2012	4:12:16 PM	Main Vac valve opened
2/14/2012	4:12:16 PM	Helium MFC set to  0.000000
2/14/2012	4:12:16 PM	H2 MFC set to  0.000000
2/14/2012	4:12:16 PM	BCl3 MFC set to  0.000000
2/14/2012	4:12:16 PM	PH3 MFC set to  0.000000
2/14/2012	4:12:16 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:12:16 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:12:16 PM	Tube furnace set to 150
2/14/2012	4:12:46 PM	H2 valve closed
2/14/2012	4:12:46 PM	BCl3 valve closed
2/14/2012	4:12:46 PM	PH3 valve closed
2/14/2012	4:12:46 PM	SiCl4 pre valve closed
2/14/2012	4:12:46 PM	SiCl4 post valve closed
2/14/2012	4:12:46 PM	Bypass valve closed
2/14/2012	4:12:46 PM	Bubbler valve closed
2/14/2012	4:12:46 PM	Helium valve opened
2/14/2012	4:12:46 PM	Main Vac valve opened
2/14/2012	4:12:46 PM	Helium MFC set to  20.000000
2/14/2012	4:12:46 PM	H2 MFC set to  0.000000
2/14/2012	4:12:46 PM	BCl3 MFC set to  0.000000
2/14/2012	4:12:46 PM	PH3 MFC set to  0.000000
2/14/2012	4:12:46 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:12:46 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:12:46 PM	Tube furnace set to 150
2/14/2012	4:13:16 PM	Helium valve closed
2/14/2012	4:13:16 PM	H2 valve closed
2/14/2012	4:13:16 PM	BCl3 valve closed
2/14/2012	4:13:16 PM	PH3 valve closed
2/14/2012	4:13:16 PM	SiCl4 pre valve closed
2/14/2012	4:13:16 PM	SiCl4 post valve closed
2/14/2012	4:13:16 PM	Bypass valve closed
2/14/2012	4:13:16 PM	Bubbler valve closed
2/14/2012	4:13:16 PM	Main Vac valve opened
2/14/2012	4:13:16 PM	Helium MFC set to  0.000000
2/14/2012	4:13:16 PM	H2 MFC set to  0.000000
2/14/2012	4:13:16 PM	BCl3 MFC set to  0.000000
2/14/2012	4:13:16 PM	PH3 MFC set to  0.000000
2/14/2012	4:13:16 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:13:16 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:13:16 PM	Tube furnace set to 150
2/14/2012	4:13:46 PM	H2 valve closed
2/14/2012	4:13:46 PM	BCl3 valve closed
2/14/2012	4:13:46 PM	PH3 valve closed
2/14/2012	4:13:46 PM	SiCl4 pre valve closed
2/14/2012	4:13:46 PM	SiCl4 post valve closed
2/14/2012	4:13:46 PM	Bypass valve closed
2/14/2012	4:13:46 PM	Bubbler valve closed
2/14/2012	4:13:46 PM	Helium valve opened
2/14/2012	4:13:46 PM	Main Vac valve opened
2/14/2012	4:13:46 PM	Helium MFC set to  20.000000
2/14/2012	4:13:46 PM	H2 MFC set to  0.000000
2/14/2012	4:13:46 PM	BCl3 MFC set to  0.000000
2/14/2012	4:13:46 PM	PH3 MFC set to  0.000000
2/14/2012	4:13:46 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:13:46 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:13:47 PM	Tube furnace set to 150
2/14/2012	4:14:17 PM	Helium valve closed
2/14/2012	4:14:17 PM	H2 valve closed
2/14/2012	4:14:17 PM	BCl3 valve closed
2/14/2012	4:14:17 PM	PH3 valve closed
2/14/2012	4:14:17 PM	SiCl4 pre valve closed
2/14/2012	4:14:17 PM	SiCl4 post valve closed
2/14/2012	4:14:17 PM	Bypass valve closed
2/14/2012	4:14:17 PM	Bubbler valve closed
2/14/2012	4:14:17 PM	Main Vac valve opened
2/14/2012	4:14:17 PM	Helium MFC set to  0.000000
2/14/2012	4:14:17 PM	H2 MFC set to  0.000000
2/14/2012	4:14:17 PM	BCl3 MFC set to  0.000000
2/14/2012	4:14:17 PM	PH3 MFC set to  0.000000
2/14/2012	4:14:17 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:14:17 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:14:17 PM	Tube furnace set to 150
2/14/2012	4:14:47 PM	H2 valve closed
2/14/2012	4:14:47 PM	BCl3 valve closed
2/14/2012	4:14:47 PM	PH3 valve closed
2/14/2012	4:14:47 PM	SiCl4 pre valve closed
2/14/2012	4:14:47 PM	SiCl4 post valve closed
2/14/2012	4:14:47 PM	Bypass valve closed
2/14/2012	4:14:47 PM	Bubbler valve closed
2/14/2012	4:14:47 PM	Helium valve opened
2/14/2012	4:14:47 PM	Main Vac valve opened
2/14/2012	4:14:47 PM	Helium MFC set to  20.000000
2/14/2012	4:14:47 PM	H2 MFC set to  0.000000
2/14/2012	4:14:47 PM	BCl3 MFC set to  0.000000
2/14/2012	4:14:47 PM	PH3 MFC set to  0.000000
2/14/2012	4:14:47 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:14:47 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:14:47 PM	Tube furnace set to 150
2/14/2012	4:15:17 PM	Helium valve closed
2/14/2012	4:15:17 PM	H2 valve closed
2/14/2012	4:15:17 PM	BCl3 valve closed
2/14/2012	4:15:17 PM	PH3 valve closed
2/14/2012	4:15:17 PM	SiCl4 pre valve closed
2/14/2012	4:15:17 PM	SiCl4 post valve closed
2/14/2012	4:15:17 PM	Bypass valve closed
2/14/2012	4:15:17 PM	Bubbler valve closed
2/14/2012	4:15:17 PM	Main Vac valve opened
2/14/2012	4:15:17 PM	Helium MFC set to  0.000000
2/14/2012	4:15:17 PM	H2 MFC set to  0.000000
2/14/2012	4:15:17 PM	BCl3 MFC set to  0.000000
2/14/2012	4:15:17 PM	PH3 MFC set to  0.000000
2/14/2012	4:15:17 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:15:17 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:15:17 PM	Tube furnace set to 150
2/14/2012	4:15:47 PM	H2 valve closed
2/14/2012	4:15:47 PM	BCl3 valve closed
2/14/2012	4:15:47 PM	PH3 valve closed
2/14/2012	4:15:47 PM	SiCl4 pre valve closed
2/14/2012	4:15:47 PM	SiCl4 post valve closed
2/14/2012	4:15:47 PM	Bypass valve closed
2/14/2012	4:15:47 PM	Bubbler valve closed
2/14/2012	4:15:47 PM	Helium valve opened
2/14/2012	4:15:47 PM	Main Vac valve opened
2/14/2012	4:15:47 PM	Helium MFC set to  20.000000
2/14/2012	4:15:47 PM	H2 MFC set to  0.000000
2/14/2012	4:15:47 PM	BCl3 MFC set to  0.000000
2/14/2012	4:15:47 PM	PH3 MFC set to  0.000000
2/14/2012	4:15:47 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:15:47 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:15:47 PM	Tube furnace set to 150
2/14/2012	4:16:17 PM	Helium valve closed
2/14/2012	4:16:17 PM	H2 valve closed
2/14/2012	4:16:17 PM	BCl3 valve closed
2/14/2012	4:16:17 PM	PH3 valve closed
2/14/2012	4:16:17 PM	SiCl4 pre valve closed
2/14/2012	4:16:17 PM	SiCl4 post valve closed
2/14/2012	4:16:17 PM	Bypass valve closed
2/14/2012	4:16:17 PM	Bubbler valve closed
2/14/2012	4:16:17 PM	Main Vac valve opened
2/14/2012	4:16:17 PM	Helium MFC set to  0.000000
2/14/2012	4:16:17 PM	H2 MFC set to  0.000000
2/14/2012	4:16:17 PM	BCl3 MFC set to  0.000000
2/14/2012	4:16:17 PM	PH3 MFC set to  0.000000
2/14/2012	4:16:17 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:16:17 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:16:18 PM	Tube furnace set to 150
2/14/2012	4:16:48 PM	H2 valve closed
2/14/2012	4:16:48 PM	BCl3 valve closed
2/14/2012	4:16:48 PM	PH3 valve closed
2/14/2012	4:16:48 PM	SiCl4 pre valve closed
2/14/2012	4:16:48 PM	SiCl4 post valve closed
2/14/2012	4:16:48 PM	Bypass valve closed
2/14/2012	4:16:48 PM	Bubbler valve closed
2/14/2012	4:16:48 PM	Helium valve opened
2/14/2012	4:16:48 PM	Main Vac valve opened
2/14/2012	4:16:48 PM	Helium MFC set to  20.000000
2/14/2012	4:16:48 PM	H2 MFC set to  0.000000
2/14/2012	4:16:48 PM	BCl3 MFC set to  0.000000
2/14/2012	4:16:48 PM	PH3 MFC set to  0.000000
2/14/2012	4:16:48 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:16:48 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:16:48 PM	Tube furnace set to 150
2/14/2012	4:17:18 PM	Helium valve closed
2/14/2012	4:17:18 PM	H2 valve closed
2/14/2012	4:17:18 PM	BCl3 valve closed
2/14/2012	4:17:18 PM	PH3 valve closed
2/14/2012	4:17:18 PM	SiCl4 pre valve closed
2/14/2012	4:17:18 PM	SiCl4 post valve closed
2/14/2012	4:17:18 PM	Bypass valve closed
2/14/2012	4:17:18 PM	Bubbler valve closed
2/14/2012	4:17:18 PM	Main Vac valve opened
2/14/2012	4:17:18 PM	Helium MFC set to  0.000000
2/14/2012	4:17:18 PM	H2 MFC set to  0.000000
2/14/2012	4:17:18 PM	BCl3 MFC set to  0.000000
2/14/2012	4:17:18 PM	PH3 MFC set to  0.000000
2/14/2012	4:17:18 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:17:18 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:17:18 PM	Tube furnace set to 150
2/14/2012	4:17:48 PM	H2 valve closed
2/14/2012	4:17:48 PM	BCl3 valve closed
2/14/2012	4:17:48 PM	PH3 valve closed
2/14/2012	4:17:48 PM	SiCl4 pre valve closed
2/14/2012	4:17:48 PM	SiCl4 post valve closed
2/14/2012	4:17:48 PM	Bypass valve closed
2/14/2012	4:17:48 PM	Bubbler valve closed
2/14/2012	4:17:48 PM	Helium valve opened
2/14/2012	4:17:48 PM	Main Vac valve opened
2/14/2012	4:17:48 PM	Helium MFC set to  20.000000
2/14/2012	4:17:48 PM	H2 MFC set to  0.000000
2/14/2012	4:17:48 PM	BCl3 MFC set to  0.000000
2/14/2012	4:17:48 PM	PH3 MFC set to  0.000000
2/14/2012	4:17:48 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:17:48 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:17:48 PM	Tube furnace set to 150
2/14/2012	4:18:19 PM	Helium valve closed
2/14/2012	4:18:19 PM	H2 valve closed
2/14/2012	4:18:19 PM	BCl3 valve closed
2/14/2012	4:18:19 PM	PH3 valve closed
2/14/2012	4:18:19 PM	SiCl4 pre valve closed
2/14/2012	4:18:19 PM	SiCl4 post valve closed
2/14/2012	4:18:19 PM	Bypass valve closed
2/14/2012	4:18:19 PM	Bubbler valve closed
2/14/2012	4:18:19 PM	Main Vac valve opened
2/14/2012	4:18:19 PM	Helium MFC set to  0.000000
2/14/2012	4:18:19 PM	H2 MFC set to  0.000000
2/14/2012	4:18:19 PM	BCl3 MFC set to  0.000000
2/14/2012	4:18:19 PM	PH3 MFC set to  0.000000
2/14/2012	4:18:19 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:18:19 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:18:19 PM	Tube furnace set to 150
2/14/2012	4:18:49 PM	H2 valve closed
2/14/2012	4:18:49 PM	BCl3 valve closed
2/14/2012	4:18:49 PM	PH3 valve closed
2/14/2012	4:18:49 PM	SiCl4 pre valve closed
2/14/2012	4:18:49 PM	SiCl4 post valve closed
2/14/2012	4:18:49 PM	Bypass valve closed
2/14/2012	4:18:49 PM	Bubbler valve closed
2/14/2012	4:18:49 PM	Helium valve opened
2/14/2012	4:18:49 PM	Main Vac valve opened
2/14/2012	4:18:49 PM	Helium MFC set to  20.000000
2/14/2012	4:18:49 PM	H2 MFC set to  0.000000
2/14/2012	4:18:49 PM	BCl3 MFC set to  0.000000
2/14/2012	4:18:49 PM	PH3 MFC set to  0.000000
2/14/2012	4:18:49 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:18:49 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:18:49 PM	Tube furnace set to 150
2/14/2012	4:19:19 PM	Helium valve closed
2/14/2012	4:19:19 PM	H2 valve closed
2/14/2012	4:19:19 PM	BCl3 valve closed
2/14/2012	4:19:19 PM	PH3 valve closed
2/14/2012	4:19:19 PM	SiCl4 pre valve closed
2/14/2012	4:19:19 PM	SiCl4 post valve closed
2/14/2012	4:19:19 PM	Bypass valve closed
2/14/2012	4:19:19 PM	Bubbler valve closed
2/14/2012	4:19:19 PM	Main Vac valve opened
2/14/2012	4:19:19 PM	Helium MFC set to  0.000000
2/14/2012	4:19:19 PM	H2 MFC set to  0.000000
2/14/2012	4:19:19 PM	BCl3 MFC set to  0.000000
2/14/2012	4:19:19 PM	PH3 MFC set to  0.000000
2/14/2012	4:19:19 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:19:19 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:19:19 PM	Tube furnace set to 150
2/14/2012	4:19:49 PM	H2 valve closed
2/14/2012	4:19:49 PM	BCl3 valve closed
2/14/2012	4:19:49 PM	PH3 valve closed
2/14/2012	4:19:49 PM	SiCl4 pre valve closed
2/14/2012	4:19:49 PM	SiCl4 post valve closed
2/14/2012	4:19:49 PM	Bypass valve closed
2/14/2012	4:19:49 PM	Bubbler valve closed
2/14/2012	4:19:49 PM	Helium valve opened
2/14/2012	4:19:49 PM	Main Vac valve opened
2/14/2012	4:19:49 PM	Helium MFC set to  20.000000
2/14/2012	4:19:49 PM	H2 MFC set to  0.000000
2/14/2012	4:19:49 PM	BCl3 MFC set to  0.000000
2/14/2012	4:19:49 PM	PH3 MFC set to  0.000000
2/14/2012	4:19:49 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:19:49 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:19:49 PM	Tube furnace set to 150
2/14/2012	4:20:20 PM	Helium valve closed
2/14/2012	4:20:20 PM	H2 valve closed
2/14/2012	4:20:20 PM	BCl3 valve closed
2/14/2012	4:20:20 PM	PH3 valve closed
2/14/2012	4:20:20 PM	SiCl4 pre valve closed
2/14/2012	4:20:20 PM	SiCl4 post valve closed
2/14/2012	4:20:20 PM	Bypass valve closed
2/14/2012	4:20:20 PM	Bubbler valve closed
2/14/2012	4:20:20 PM	Main Vac valve opened
2/14/2012	4:20:20 PM	Helium MFC set to  0.000000
2/14/2012	4:20:20 PM	H2 MFC set to  0.000000
2/14/2012	4:20:20 PM	BCl3 MFC set to  0.000000
2/14/2012	4:20:20 PM	PH3 MFC set to  0.000000
2/14/2012	4:20:20 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:20:20 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:20:20 PM	Tube furnace set to 150
2/14/2012	4:20:21 PM	Run finished at 4:20 PM
2/14/2012	4:22:09 PM	Main Vac valve closed
2/14/2012	4:22:25 PM	Main Vac valve opened
2/14/2012	4:22:46 PM	Recipe started at 4:22 PM
2/14/2012	4:22:46 PM	Helium valve closed
2/14/2012	4:22:46 PM	H2 valve closed
2/14/2012	4:22:46 PM	BCl3 valve closed
2/14/2012	4:22:46 PM	PH3 valve closed
2/14/2012	4:22:46 PM	SiCl4 pre valve closed
2/14/2012	4:22:46 PM	SiCl4 post valve closed
2/14/2012	4:22:46 PM	Bypass valve closed
2/14/2012	4:22:46 PM	Bubbler valve closed
2/14/2012	4:22:46 PM	Main Vac valve opened
2/14/2012	4:22:46 PM	Helium MFC set to  0.000000
2/14/2012	4:22:46 PM	H2 MFC set to  0.000000
2/14/2012	4:22:46 PM	BCl3 MFC set to  0.000000
2/14/2012	4:22:46 PM	PH3 MFC set to  0.000000
2/14/2012	4:22:46 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:22:46 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:22:46 PM	Tube furnace set to 150
2/14/2012	4:23:16 PM	H2 valve closed
2/14/2012	4:23:16 PM	BCl3 valve closed
2/14/2012	4:23:16 PM	PH3 valve closed
2/14/2012	4:23:16 PM	SiCl4 pre valve closed
2/14/2012	4:23:16 PM	SiCl4 post valve closed
2/14/2012	4:23:16 PM	Bypass valve closed
2/14/2012	4:23:16 PM	Bubbler valve closed
2/14/2012	4:23:16 PM	Helium valve opened
2/14/2012	4:23:16 PM	Main Vac valve opened
2/14/2012	4:23:16 PM	Helium MFC set to  20.000000
2/14/2012	4:23:16 PM	H2 MFC set to  0.000000
2/14/2012	4:23:16 PM	BCl3 MFC set to  0.000000
2/14/2012	4:23:16 PM	PH3 MFC set to  0.000000
2/14/2012	4:23:16 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:23:16 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:23:16 PM	Tube furnace set to 150
2/14/2012	4:23:46 PM	Helium valve closed
2/14/2012	4:23:46 PM	H2 valve closed
2/14/2012	4:23:46 PM	BCl3 valve closed
2/14/2012	4:23:46 PM	PH3 valve closed
2/14/2012	4:23:46 PM	SiCl4 pre valve closed
2/14/2012	4:23:46 PM	SiCl4 post valve closed
2/14/2012	4:23:46 PM	Bypass valve closed
2/14/2012	4:23:46 PM	Bubbler valve closed
2/14/2012	4:23:46 PM	Main Vac valve opened
2/14/2012	4:23:46 PM	Helium MFC set to  0.000000
2/14/2012	4:23:46 PM	H2 MFC set to  0.000000
2/14/2012	4:23:46 PM	BCl3 MFC set to  0.000000
2/14/2012	4:23:46 PM	PH3 MFC set to  0.000000
2/14/2012	4:23:46 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:23:46 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:23:47 PM	Tube furnace set to 150
2/14/2012	4:24:17 PM	H2 valve closed
2/14/2012	4:24:17 PM	BCl3 valve closed
2/14/2012	4:24:17 PM	PH3 valve closed
2/14/2012	4:24:17 PM	SiCl4 pre valve closed
2/14/2012	4:24:17 PM	SiCl4 post valve closed
2/14/2012	4:24:17 PM	Bypass valve closed
2/14/2012	4:24:17 PM	Bubbler valve closed
2/14/2012	4:24:17 PM	Helium valve opened
2/14/2012	4:24:17 PM	Main Vac valve opened
2/14/2012	4:24:17 PM	Helium MFC set to  20.000000
2/14/2012	4:24:17 PM	H2 MFC set to  0.000000
2/14/2012	4:24:17 PM	BCl3 MFC set to  0.000000
2/14/2012	4:24:17 PM	PH3 MFC set to  0.000000
2/14/2012	4:24:17 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:24:17 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:24:17 PM	Tube furnace set to 150
2/14/2012	4:24:47 PM	Helium valve closed
2/14/2012	4:24:47 PM	H2 valve closed
2/14/2012	4:24:47 PM	BCl3 valve closed
2/14/2012	4:24:47 PM	PH3 valve closed
2/14/2012	4:24:47 PM	SiCl4 pre valve closed
2/14/2012	4:24:47 PM	SiCl4 post valve closed
2/14/2012	4:24:47 PM	Bypass valve closed
2/14/2012	4:24:47 PM	Bubbler valve closed
2/14/2012	4:24:47 PM	Main Vac valve opened
2/14/2012	4:24:47 PM	Helium MFC set to  0.000000
2/14/2012	4:24:47 PM	H2 MFC set to  0.000000
2/14/2012	4:24:47 PM	BCl3 MFC set to  0.000000
2/14/2012	4:24:47 PM	PH3 MFC set to  0.000000
2/14/2012	4:24:47 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:24:47 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:24:47 PM	Tube furnace set to 150
2/14/2012	4:25:17 PM	H2 valve closed
2/14/2012	4:25:17 PM	BCl3 valve closed
2/14/2012	4:25:17 PM	PH3 valve closed
2/14/2012	4:25:17 PM	SiCl4 pre valve closed
2/14/2012	4:25:17 PM	SiCl4 post valve closed
2/14/2012	4:25:17 PM	Bypass valve closed
2/14/2012	4:25:17 PM	Bubbler valve closed
2/14/2012	4:25:17 PM	Helium valve opened
2/14/2012	4:25:17 PM	Main Vac valve opened
2/14/2012	4:25:17 PM	Helium MFC set to  20.000000
2/14/2012	4:25:17 PM	H2 MFC set to  0.000000
2/14/2012	4:25:17 PM	BCl3 MFC set to  0.000000
2/14/2012	4:25:17 PM	PH3 MFC set to  0.000000
2/14/2012	4:25:17 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:25:17 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:25:17 PM	Tube furnace set to 150
2/14/2012	4:25:47 PM	Helium valve closed
2/14/2012	4:25:47 PM	H2 valve closed
2/14/2012	4:25:47 PM	BCl3 valve closed
2/14/2012	4:25:47 PM	PH3 valve closed
2/14/2012	4:25:47 PM	SiCl4 pre valve closed
2/14/2012	4:25:47 PM	SiCl4 post valve closed
2/14/2012	4:25:47 PM	Bypass valve closed
2/14/2012	4:25:47 PM	Bubbler valve closed
2/14/2012	4:25:47 PM	Main Vac valve opened
2/14/2012	4:25:47 PM	Helium MFC set to  0.000000
2/14/2012	4:25:47 PM	H2 MFC set to  0.000000
2/14/2012	4:25:47 PM	BCl3 MFC set to  0.000000
2/14/2012	4:25:47 PM	PH3 MFC set to  0.000000
2/14/2012	4:25:47 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:25:47 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:25:47 PM	Tube furnace set to 150
2/14/2012	4:26:17 PM	H2 valve closed
2/14/2012	4:26:17 PM	BCl3 valve closed
2/14/2012	4:26:17 PM	PH3 valve closed
2/14/2012	4:26:17 PM	SiCl4 pre valve closed
2/14/2012	4:26:17 PM	SiCl4 post valve closed
2/14/2012	4:26:17 PM	Bypass valve closed
2/14/2012	4:26:17 PM	Bubbler valve closed
2/14/2012	4:26:17 PM	Helium valve opened
2/14/2012	4:26:17 PM	Main Vac valve opened
2/14/2012	4:26:17 PM	Helium MFC set to  20.000000
2/14/2012	4:26:17 PM	H2 MFC set to  0.000000
2/14/2012	4:26:17 PM	BCl3 MFC set to  0.000000
2/14/2012	4:26:17 PM	PH3 MFC set to  0.000000
2/14/2012	4:26:17 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:26:17 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:26:18 PM	Tube furnace set to 150
2/14/2012	4:26:48 PM	Helium valve closed
2/14/2012	4:26:48 PM	H2 valve closed
2/14/2012	4:26:48 PM	BCl3 valve closed
2/14/2012	4:26:48 PM	PH3 valve closed
2/14/2012	4:26:48 PM	SiCl4 pre valve closed
2/14/2012	4:26:48 PM	SiCl4 post valve closed
2/14/2012	4:26:48 PM	Bypass valve closed
2/14/2012	4:26:48 PM	Bubbler valve closed
2/14/2012	4:26:48 PM	Main Vac valve opened
2/14/2012	4:26:48 PM	Helium MFC set to  0.000000
2/14/2012	4:26:48 PM	H2 MFC set to  0.000000
2/14/2012	4:26:48 PM	BCl3 MFC set to  0.000000
2/14/2012	4:26:48 PM	PH3 MFC set to  0.000000
2/14/2012	4:26:48 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:26:48 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:26:48 PM	Tube furnace set to 150
2/14/2012	4:27:18 PM	H2 valve closed
2/14/2012	4:27:18 PM	BCl3 valve closed
2/14/2012	4:27:18 PM	PH3 valve closed
2/14/2012	4:27:18 PM	SiCl4 pre valve closed
2/14/2012	4:27:18 PM	SiCl4 post valve closed
2/14/2012	4:27:18 PM	Bypass valve closed
2/14/2012	4:27:18 PM	Bubbler valve closed
2/14/2012	4:27:18 PM	Helium valve opened
2/14/2012	4:27:18 PM	Main Vac valve opened
2/14/2012	4:27:18 PM	Helium MFC set to  20.000000
2/14/2012	4:27:18 PM	H2 MFC set to  0.000000
2/14/2012	4:27:18 PM	BCl3 MFC set to  0.000000
2/14/2012	4:27:18 PM	PH3 MFC set to  0.000000
2/14/2012	4:27:18 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:27:18 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:27:18 PM	Tube furnace set to 150
2/14/2012	4:27:48 PM	Helium valve closed
2/14/2012	4:27:48 PM	H2 valve closed
2/14/2012	4:27:48 PM	BCl3 valve closed
2/14/2012	4:27:48 PM	PH3 valve closed
2/14/2012	4:27:48 PM	SiCl4 pre valve closed
2/14/2012	4:27:48 PM	SiCl4 post valve closed
2/14/2012	4:27:48 PM	Bypass valve closed
2/14/2012	4:27:48 PM	Bubbler valve closed
2/14/2012	4:27:48 PM	Main Vac valve opened
2/14/2012	4:27:48 PM	Helium MFC set to  0.000000
2/14/2012	4:27:48 PM	H2 MFC set to  0.000000
2/14/2012	4:27:48 PM	BCl3 MFC set to  0.000000
2/14/2012	4:27:48 PM	PH3 MFC set to  0.000000
2/14/2012	4:27:48 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:27:48 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:27:48 PM	Tube furnace set to 150
2/14/2012	4:28:18 PM	H2 valve closed
2/14/2012	4:28:18 PM	BCl3 valve closed
2/14/2012	4:28:18 PM	PH3 valve closed
2/14/2012	4:28:18 PM	SiCl4 pre valve closed
2/14/2012	4:28:18 PM	SiCl4 post valve closed
2/14/2012	4:28:18 PM	Bypass valve closed
2/14/2012	4:28:18 PM	Bubbler valve closed
2/14/2012	4:28:18 PM	Helium valve opened
2/14/2012	4:28:18 PM	Main Vac valve opened
2/14/2012	4:28:18 PM	Helium MFC set to  20.000000
2/14/2012	4:28:18 PM	H2 MFC set to  0.000000
2/14/2012	4:28:18 PM	BCl3 MFC set to  0.000000
2/14/2012	4:28:18 PM	PH3 MFC set to  0.000000
2/14/2012	4:28:18 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:28:18 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:28:18 PM	Tube furnace set to 150
2/14/2012	4:28:48 PM	Helium valve closed
2/14/2012	4:28:48 PM	H2 valve closed
2/14/2012	4:28:48 PM	BCl3 valve closed
2/14/2012	4:28:48 PM	PH3 valve closed
2/14/2012	4:28:48 PM	SiCl4 pre valve closed
2/14/2012	4:28:48 PM	SiCl4 post valve closed
2/14/2012	4:28:48 PM	Bypass valve closed
2/14/2012	4:28:48 PM	Bubbler valve closed
2/14/2012	4:28:48 PM	Main Vac valve opened
2/14/2012	4:28:48 PM	Helium MFC set to  0.000000
2/14/2012	4:28:48 PM	H2 MFC set to  0.000000
2/14/2012	4:28:48 PM	BCl3 MFC set to  0.000000
2/14/2012	4:28:48 PM	PH3 MFC set to  0.000000
2/14/2012	4:28:48 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:28:48 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:28:49 PM	Tube furnace set to 150
2/14/2012	4:29:19 PM	H2 valve closed
2/14/2012	4:29:19 PM	BCl3 valve closed
2/14/2012	4:29:19 PM	PH3 valve closed
2/14/2012	4:29:19 PM	SiCl4 pre valve closed
2/14/2012	4:29:19 PM	SiCl4 post valve closed
2/14/2012	4:29:19 PM	Bypass valve closed
2/14/2012	4:29:19 PM	Bubbler valve closed
2/14/2012	4:29:19 PM	Helium valve opened
2/14/2012	4:29:19 PM	Main Vac valve opened
2/14/2012	4:29:19 PM	Helium MFC set to  20.000000
2/14/2012	4:29:19 PM	H2 MFC set to  0.000000
2/14/2012	4:29:19 PM	BCl3 MFC set to  0.000000
2/14/2012	4:29:19 PM	PH3 MFC set to  0.000000
2/14/2012	4:29:19 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:29:19 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:29:19 PM	Tube furnace set to 150
2/14/2012	4:29:49 PM	Helium valve closed
2/14/2012	4:29:49 PM	H2 valve closed
2/14/2012	4:29:49 PM	BCl3 valve closed
2/14/2012	4:29:49 PM	PH3 valve closed
2/14/2012	4:29:49 PM	SiCl4 pre valve closed
2/14/2012	4:29:49 PM	SiCl4 post valve closed
2/14/2012	4:29:49 PM	Bypass valve closed
2/14/2012	4:29:49 PM	Bubbler valve closed
2/14/2012	4:29:49 PM	Main Vac valve opened
2/14/2012	4:29:49 PM	Helium MFC set to  0.000000
2/14/2012	4:29:49 PM	H2 MFC set to  0.000000
2/14/2012	4:29:49 PM	BCl3 MFC set to  0.000000
2/14/2012	4:29:49 PM	PH3 MFC set to  0.000000
2/14/2012	4:29:49 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:29:49 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:29:49 PM	Tube furnace set to 150
2/14/2012	4:30:19 PM	H2 valve closed
2/14/2012	4:30:19 PM	BCl3 valve closed
2/14/2012	4:30:19 PM	PH3 valve closed
2/14/2012	4:30:19 PM	SiCl4 pre valve closed
2/14/2012	4:30:19 PM	SiCl4 post valve closed
2/14/2012	4:30:19 PM	Bypass valve closed
2/14/2012	4:30:19 PM	Bubbler valve closed
2/14/2012	4:30:19 PM	Helium valve opened
2/14/2012	4:30:19 PM	Main Vac valve opened
2/14/2012	4:30:19 PM	Helium MFC set to  20.000000
2/14/2012	4:30:19 PM	H2 MFC set to  0.000000
2/14/2012	4:30:19 PM	BCl3 MFC set to  0.000000
2/14/2012	4:30:19 PM	PH3 MFC set to  0.000000
2/14/2012	4:30:19 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:30:19 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:30:19 PM	Tube furnace set to 150
2/14/2012	4:30:49 PM	Helium valve closed
2/14/2012	4:30:49 PM	H2 valve closed
2/14/2012	4:30:49 PM	BCl3 valve closed
2/14/2012	4:30:49 PM	PH3 valve closed
2/14/2012	4:30:49 PM	SiCl4 pre valve closed
2/14/2012	4:30:49 PM	SiCl4 post valve closed
2/14/2012	4:30:49 PM	Bypass valve closed
2/14/2012	4:30:49 PM	Bubbler valve closed
2/14/2012	4:30:49 PM	Main Vac valve opened
2/14/2012	4:30:49 PM	Helium MFC set to  0.000000
2/14/2012	4:30:49 PM	H2 MFC set to  0.000000
2/14/2012	4:30:49 PM	BCl3 MFC set to  0.000000
2/14/2012	4:30:49 PM	PH3 MFC set to  0.000000
2/14/2012	4:30:49 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:30:49 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:30:49 PM	Tube furnace set to 150
2/14/2012	4:31:19 PM	H2 valve closed
2/14/2012	4:31:19 PM	BCl3 valve closed
2/14/2012	4:31:19 PM	PH3 valve closed
2/14/2012	4:31:19 PM	SiCl4 pre valve closed
2/14/2012	4:31:19 PM	SiCl4 post valve closed
2/14/2012	4:31:19 PM	Bypass valve closed
2/14/2012	4:31:19 PM	Bubbler valve closed
2/14/2012	4:31:19 PM	Helium valve opened
2/14/2012	4:31:19 PM	Main Vac valve opened
2/14/2012	4:31:19 PM	Helium MFC set to  20.000000
2/14/2012	4:31:19 PM	H2 MFC set to  0.000000
2/14/2012	4:31:19 PM	BCl3 MFC set to  0.000000
2/14/2012	4:31:19 PM	PH3 MFC set to  0.000000
2/14/2012	4:31:20 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:31:20 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:31:20 PM	Tube furnace set to 150
2/14/2012	4:31:50 PM	Helium valve closed
2/14/2012	4:31:50 PM	H2 valve closed
2/14/2012	4:31:50 PM	BCl3 valve closed
2/14/2012	4:31:50 PM	PH3 valve closed
2/14/2012	4:31:50 PM	SiCl4 pre valve closed
2/14/2012	4:31:50 PM	SiCl4 post valve closed
2/14/2012	4:31:50 PM	Bypass valve closed
2/14/2012	4:31:50 PM	Bubbler valve closed
2/14/2012	4:31:50 PM	Main Vac valve opened
2/14/2012	4:31:50 PM	Helium MFC set to  0.000000
2/14/2012	4:31:50 PM	H2 MFC set to  0.000000
2/14/2012	4:31:50 PM	BCl3 MFC set to  0.000000
2/14/2012	4:31:50 PM	PH3 MFC set to  0.000000
2/14/2012	4:31:50 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:31:50 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:31:50 PM	Tube furnace set to 150
2/14/2012	4:32:20 PM	H2 valve closed
2/14/2012	4:32:20 PM	BCl3 valve closed
2/14/2012	4:32:20 PM	PH3 valve closed
2/14/2012	4:32:20 PM	SiCl4 pre valve closed
2/14/2012	4:32:20 PM	SiCl4 post valve closed
2/14/2012	4:32:20 PM	Bypass valve closed
2/14/2012	4:32:20 PM	Bubbler valve closed
2/14/2012	4:32:20 PM	Helium valve opened
2/14/2012	4:32:20 PM	Main Vac valve opened
2/14/2012	4:32:20 PM	Helium MFC set to  20.000000
2/14/2012	4:32:20 PM	H2 MFC set to  0.000000
2/14/2012	4:32:20 PM	BCl3 MFC set to  0.000000
2/14/2012	4:32:20 PM	PH3 MFC set to  0.000000
2/14/2012	4:32:20 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:32:20 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:32:20 PM	Tube furnace set to 150
2/14/2012	4:32:50 PM	Helium valve closed
2/14/2012	4:32:50 PM	H2 valve closed
2/14/2012	4:32:50 PM	BCl3 valve closed
2/14/2012	4:32:50 PM	PH3 valve closed
2/14/2012	4:32:50 PM	SiCl4 pre valve closed
2/14/2012	4:32:50 PM	SiCl4 post valve closed
2/14/2012	4:32:50 PM	Bypass valve closed
2/14/2012	4:32:50 PM	Bubbler valve closed
2/14/2012	4:32:50 PM	Main Vac valve opened
2/14/2012	4:32:50 PM	Helium MFC set to  0.000000
2/14/2012	4:32:50 PM	H2 MFC set to  0.000000
2/14/2012	4:32:50 PM	BCl3 MFC set to  0.000000
2/14/2012	4:32:50 PM	PH3 MFC set to  0.000000
2/14/2012	4:32:50 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:32:50 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:32:50 PM	Tube furnace set to 150
2/14/2012	4:32:51 PM	Run finished at 4:32 PM
2/14/2012	4:33:26 PM	Main Vac valve closed
2/14/2012	4:33:42 PM	Main Vac valve opened
2/14/2012	4:34:20 PM	Recipe started at 4:34 PM
2/14/2012	4:34:20 PM	Helium valve closed
2/14/2012	4:34:20 PM	H2 valve closed
2/14/2012	4:34:20 PM	BCl3 valve closed
2/14/2012	4:34:20 PM	PH3 valve closed
2/14/2012	4:34:20 PM	SiCl4 pre valve closed
2/14/2012	4:34:20 PM	SiCl4 post valve closed
2/14/2012	4:34:20 PM	Main Vac valve closed
2/14/2012	4:34:20 PM	Bypass valve closed
2/14/2012	4:34:20 PM	Bubbler valve closed
2/14/2012	4:34:20 PM	Helium MFC set to  0.000000
2/14/2012	4:34:20 PM	H2 MFC set to  0.000000
2/14/2012	4:34:20 PM	BCl3 MFC set to  0.000000
2/14/2012	4:34:20 PM	PH3 MFC set to  0.000000
2/14/2012	4:34:20 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:34:20 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:34:20 PM	Tube furnace set to 0
2/14/2012	4:34:23 PM	Helium valve closed
2/14/2012	4:34:23 PM	BCl3 valve closed
2/14/2012	4:34:23 PM	PH3 valve closed
2/14/2012	4:34:23 PM	SiCl4 pre valve closed
2/14/2012	4:34:23 PM	SiCl4 post valve closed
2/14/2012	4:34:23 PM	Main Vac valve closed
2/14/2012	4:34:23 PM	Bypass valve closed
2/14/2012	4:34:23 PM	Bubbler valve closed
2/14/2012	4:34:23 PM	H2 valve opened
2/14/2012	4:34:23 PM	Helium MFC set to  0.000000
2/14/2012	4:34:24 PM	H2 MFC set to  500.000000
2/14/2012	4:34:24 PM	BCl3 MFC set to  0.000000
2/14/2012	4:34:24 PM	PH3 MFC set to  0.000000
2/14/2012	4:34:24 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:34:24 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:34:24 PM	Tube furnace set to 0
2/14/2012	4:35:27 PM	Helium valve closed
2/14/2012	4:35:27 PM	BCl3 valve closed
2/14/2012	4:35:27 PM	PH3 valve closed
2/14/2012	4:35:27 PM	SiCl4 pre valve closed
2/14/2012	4:35:27 PM	SiCl4 post valve closed
2/14/2012	4:35:27 PM	Main Vac valve closed
2/14/2012	4:35:27 PM	Bypass valve closed
2/14/2012	4:35:27 PM	H2 valve opened
2/14/2012	4:35:27 PM	Bubbler valve opened
2/14/2012	4:35:27 PM	Helium MFC set to  0.000000
2/14/2012	4:35:27 PM	H2 MFC set to  500.000000
2/14/2012	4:35:27 PM	BCl3 MFC set to  0.000000
2/14/2012	4:35:27 PM	PH3 MFC set to  0.000000
2/14/2012	4:35:27 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:35:27 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:35:27 PM	Tube furnace set to 0
2/14/2012	4:35:28 PM	Helium valve closed
2/14/2012	4:35:28 PM	BCl3 valve closed
2/14/2012	4:35:28 PM	PH3 valve closed
2/14/2012	4:35:28 PM	SiCl4 pre valve closed
2/14/2012	4:35:28 PM	SiCl4 post valve closed
2/14/2012	4:35:28 PM	Main Vac valve closed
2/14/2012	4:35:28 PM	Bypass valve closed
2/14/2012	4:35:28 PM	H2 valve opened
2/14/2012	4:35:28 PM	Bubbler valve opened
2/14/2012	4:35:28 PM	Helium MFC set to  0.000000
2/14/2012	4:35:28 PM	H2 MFC set to  500.000000
2/14/2012	4:35:28 PM	BCl3 MFC set to  0.000000
2/14/2012	4:35:28 PM	PH3 MFC set to  0.000000
2/14/2012	4:35:28 PM	SiCl4 MFC set to  0.000000
2/14/2012	4:35:28 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:35:28 PM	Tube furnace set to 1000
2/14/2012	4:55:28 PM	Helium valve closed
2/14/2012	4:55:28 PM	PH3 valve closed
2/14/2012	4:55:28 PM	Main Vac valve closed
2/14/2012	4:55:28 PM	Bypass valve closed
2/14/2012	4:55:28 PM	H2 valve opened
2/14/2012	4:55:28 PM	BCl3 valve opened
2/14/2012	4:55:28 PM	SiCl4 pre valve opened
2/14/2012	4:55:28 PM	SiCl4 post valve opened
2/14/2012	4:55:28 PM	Bubbler valve opened
2/14/2012	4:55:28 PM	Helium MFC set to  0.000000
2/14/2012	4:55:28 PM	H2 MFC set to  500.000000
2/14/2012	4:55:28 PM	BCl3 MFC set to  20.000000
2/14/2012	4:55:28 PM	PH3 MFC set to  0.000000
2/14/2012	4:55:28 PM	SiCl4 MFC set to  50.000000
2/14/2012	4:55:28 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	4:55:28 PM	Tube furnace set to 1000
2/14/2012	5:05:28 PM	Helium valve closed
2/14/2012	5:05:28 PM	BCl3 valve closed
2/14/2012	5:05:28 PM	PH3 valve closed
2/14/2012	5:05:28 PM	SiCl4 pre valve closed
2/14/2012	5:05:28 PM	SiCl4 post valve closed
2/14/2012	5:05:28 PM	Main Vac valve closed
2/14/2012	5:05:28 PM	Bypass valve closed
2/14/2012	5:05:28 PM	H2 valve opened
2/14/2012	5:05:28 PM	Bubbler valve opened
2/14/2012	5:05:28 PM	Helium MFC set to  0.000000
2/14/2012	5:05:28 PM	H2 MFC set to  500.000000
2/14/2012	5:05:28 PM	BCl3 MFC set to  0.000000
2/14/2012	5:05:28 PM	PH3 MFC set to  0.000000
2/14/2012	5:05:28 PM	SiCl4 MFC set to  0.000000
2/14/2012	5:05:28 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	5:05:28 PM	Tube furnace set to 750
2/14/2012	5:10:28 PM	H2 valve closed
2/14/2012	5:10:28 PM	BCl3 valve closed
2/14/2012	5:10:28 PM	PH3 valve closed
2/14/2012	5:10:28 PM	SiCl4 pre valve closed
2/14/2012	5:10:28 PM	SiCl4 post valve closed
2/14/2012	5:10:28 PM	Main Vac valve closed
2/14/2012	5:10:28 PM	Bypass valve closed
2/14/2012	5:10:28 PM	Helium valve opened
2/14/2012	5:10:28 PM	Bubbler valve opened
2/14/2012	5:10:28 PM	Helium MFC set to  500.000000
2/14/2012	5:10:28 PM	H2 MFC set to  0.000000
2/14/2012	5:10:28 PM	BCl3 MFC set to  0.000000
2/14/2012	5:10:28 PM	PH3 MFC set to  0.000000
2/14/2012	5:10:28 PM	SiCl4 MFC set to  0.000000
2/14/2012	5:10:28 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	5:10:29 PM	Tube furnace set to 0
2/14/2012	5:30:29 PM	Helium valve closed
2/14/2012	5:30:29 PM	H2 valve closed
2/14/2012	5:30:29 PM	BCl3 valve closed
2/14/2012	5:30:29 PM	PH3 valve closed
2/14/2012	5:30:29 PM	SiCl4 pre valve closed
2/14/2012	5:30:29 PM	SiCl4 post valve closed
2/14/2012	5:30:29 PM	Main Vac valve closed
2/14/2012	5:30:29 PM	Bypass valve closed
2/14/2012	5:30:29 PM	Bubbler valve closed
2/14/2012	5:30:29 PM	Helium MFC set to  0.000000
2/14/2012	5:30:29 PM	H2 MFC set to  0.000000
2/14/2012	5:30:29 PM	BCl3 MFC set to  0.000000
2/14/2012	5:30:29 PM	PH3 MFC set to  0.000000
2/14/2012	5:30:29 PM	SiCl4 MFC set to  0.000000
2/14/2012	5:30:29 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	5:30:29 PM	Tube furnace set to 0
2/14/2012	5:30:30 PM	Run finished at 5:30 PM
2/14/2012	5:54:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2012	5:54:11 PM	Recipe started at 5:54 PM
2/14/2012	5:54:11 PM	Helium valve closed
2/14/2012	5:54:11 PM	H2 valve closed
2/14/2012	5:54:11 PM	BCl3 valve closed
2/14/2012	5:54:11 PM	PH3 valve closed
2/14/2012	5:54:11 PM	SiCl4 pre valve closed
2/14/2012	5:54:11 PM	SiCl4 post valve closed
2/14/2012	5:54:11 PM	Main Vac valve closed
2/14/2012	5:54:11 PM	Bubbler valve closed
2/14/2012	5:54:11 PM	Bypass valve opened
2/14/2012	5:54:11 PM	Helium MFC set to  0.000000
2/14/2012	5:54:11 PM	H2 MFC set to  0.000000
2/14/2012	5:54:11 PM	BCl3 MFC set to  0.000000
2/14/2012	5:54:11 PM	PH3 MFC set to  0.000000
2/14/2012	5:54:11 PM	SiCl4 MFC set to  0.000000
2/14/2012	5:54:11 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	5:54:11 PM	Tube furnace set to 0
2/14/2012	5:55:09 PM	Helium valve closed
2/14/2012	5:55:09 PM	H2 valve closed
2/14/2012	5:55:09 PM	BCl3 valve closed
2/14/2012	5:55:09 PM	PH3 valve closed
2/14/2012	5:55:09 PM	SiCl4 pre valve closed
2/14/2012	5:55:09 PM	SiCl4 post valve closed
2/14/2012	5:55:09 PM	Main Vac valve closed
2/14/2012	5:55:09 PM	Bubbler valve closed
2/14/2012	5:55:09 PM	Bypass valve opened
2/14/2012	5:55:09 PM	Helium MFC set to  0.000000
2/14/2012	5:55:09 PM	H2 MFC set to  0.000000
2/14/2012	5:55:09 PM	BCl3 MFC set to  0.000000
2/14/2012	5:55:09 PM	PH3 MFC set to  0.000000
2/14/2012	5:55:09 PM	SiCl4 MFC set to  0.000000
2/14/2012	5:55:09 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	5:55:09 PM	Tube furnace set to 0
2/14/2012	5:56:09 PM	Helium valve closed
2/14/2012	5:56:09 PM	H2 valve closed
2/14/2012	5:56:09 PM	BCl3 valve closed
2/14/2012	5:56:09 PM	PH3 valve closed
2/14/2012	5:56:09 PM	SiCl4 pre valve closed
2/14/2012	5:56:09 PM	SiCl4 post valve closed
2/14/2012	5:56:09 PM	Bypass valve closed
2/14/2012	5:56:09 PM	Bubbler valve closed
2/14/2012	5:56:09 PM	Main Vac valve opened
2/14/2012	5:56:09 PM	Helium MFC set to  0.000000
2/14/2012	5:56:09 PM	H2 MFC set to  0.000000
2/14/2012	5:56:09 PM	BCl3 MFC set to  0.000000
2/14/2012	5:56:09 PM	PH3 MFC set to  0.000000
2/14/2012	5:56:09 PM	SiCl4 MFC set to  0.000000
2/14/2012	5:56:09 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	5:56:10 PM	Tube furnace set to 0
2/14/2012	5:56:11 PM	Run finished at 5:56 PM
2/14/2012	5:56:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2012	6:37:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2012	6:37:01 PM	Recipe started at 6:37 PM
2/14/2012	6:37:01 PM	Helium valve closed
2/14/2012	6:37:01 PM	H2 valve closed
2/14/2012	6:37:01 PM	BCl3 valve closed
2/14/2012	6:37:01 PM	PH3 valve closed
2/14/2012	6:37:01 PM	SiCl4 pre valve closed
2/14/2012	6:37:01 PM	SiCl4 post valve closed
2/14/2012	6:37:01 PM	Main Vac valve closed
2/14/2012	6:37:01 PM	Bypass valve closed
2/14/2012	6:37:01 PM	Bubbler valve closed
2/14/2012	6:37:01 PM	Helium MFC set to  0.000000
2/14/2012	6:37:01 PM	H2 MFC set to  0.000000
2/14/2012	6:37:01 PM	BCl3 MFC set to  0.000000
2/14/2012	6:37:01 PM	PH3 MFC set to  0.000000
2/14/2012	6:37:01 PM	SiCl4 MFC set to  0.000000
2/14/2012	6:37:01 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	6:37:01 PM	Tube furnace set to 0
2/14/2012	6:37:04 PM	H2 valve closed
2/14/2012	6:37:04 PM	BCl3 valve closed
2/14/2012	6:37:04 PM	PH3 valve closed
2/14/2012	6:37:04 PM	SiCl4 pre valve closed
2/14/2012	6:37:04 PM	SiCl4 post valve closed
2/14/2012	6:37:04 PM	Main Vac valve closed
2/14/2012	6:37:04 PM	Bypass valve closed
2/14/2012	6:37:04 PM	Bubbler valve closed
2/14/2012	6:37:04 PM	Helium valve opened
2/14/2012	6:37:04 PM	Helium MFC set to  500.000000
2/14/2012	6:37:04 PM	H2 MFC set to  0.000000
2/14/2012	6:37:04 PM	BCl3 MFC set to  0.000000
2/14/2012	6:37:04 PM	PH3 MFC set to  0.000000
2/14/2012	6:37:04 PM	SiCl4 MFC set to  0.000000
2/14/2012	6:37:04 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	6:37:04 PM	Tube furnace set to 0
2/14/2012	6:38:05 PM	Helium valve closed
2/14/2012	6:38:05 PM	H2 valve closed
2/14/2012	6:38:05 PM	BCl3 valve closed
2/14/2012	6:38:05 PM	PH3 valve closed
2/14/2012	6:38:05 PM	SiCl4 pre valve closed
2/14/2012	6:38:05 PM	SiCl4 post valve closed
2/14/2012	6:38:05 PM	Main Vac valve closed
2/14/2012	6:38:05 PM	Bypass valve closed
2/14/2012	6:38:05 PM	Bubbler valve closed
2/14/2012	6:38:05 PM	Helium MFC set to  0.000000
2/14/2012	6:38:05 PM	H2 MFC set to  0.000000
2/14/2012	6:38:05 PM	BCl3 MFC set to  0.000000
2/14/2012	6:38:05 PM	PH3 MFC set to  0.000000
2/14/2012	6:38:05 PM	SiCl4 MFC set to  0.000000
2/14/2012	6:38:05 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	6:38:05 PM	Tube furnace set to 0
2/14/2012	6:38:06 PM	Run finished at 6:38 PM
2/14/2012	6:38:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2012	6:39:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2012	6:39:56 PM	Recipe started at 6:39 PM
2/14/2012	6:39:56 PM	Helium valve closed
2/14/2012	6:39:56 PM	H2 valve closed
2/14/2012	6:39:56 PM	BCl3 valve closed
2/14/2012	6:39:56 PM	PH3 valve closed
2/14/2012	6:39:56 PM	SiCl4 pre valve closed
2/14/2012	6:39:56 PM	SiCl4 post valve closed
2/14/2012	6:39:56 PM	Main Vac valve closed
2/14/2012	6:39:56 PM	Bubbler valve closed
2/14/2012	6:39:56 PM	Bypass valve opened
2/14/2012	6:39:56 PM	Helium MFC set to  0.000000
2/14/2012	6:39:56 PM	H2 MFC set to  0.000000
2/14/2012	6:39:56 PM	BCl3 MFC set to  0.000000
2/14/2012	6:39:56 PM	PH3 MFC set to  0.000000
2/14/2012	6:39:56 PM	SiCl4 MFC set to  0.000000
2/14/2012	6:39:56 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	6:39:56 PM	Tube furnace set to 0
2/14/2012	6:40:57 PM	Helium valve closed
2/14/2012	6:40:57 PM	H2 valve closed
2/14/2012	6:40:57 PM	BCl3 valve closed
2/14/2012	6:40:57 PM	PH3 valve closed
2/14/2012	6:40:57 PM	SiCl4 pre valve closed
2/14/2012	6:40:57 PM	SiCl4 post valve closed
2/14/2012	6:40:57 PM	Main Vac valve closed
2/14/2012	6:40:57 PM	Bubbler valve closed
2/14/2012	6:40:57 PM	Bypass valve opened
2/14/2012	6:40:57 PM	Helium MFC set to  0.000000
2/14/2012	6:40:57 PM	H2 MFC set to  0.000000
2/14/2012	6:40:57 PM	BCl3 MFC set to  0.000000
2/14/2012	6:40:57 PM	PH3 MFC set to  0.000000
2/14/2012	6:40:57 PM	SiCl4 MFC set to  0.000000
2/14/2012	6:40:57 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	6:40:57 PM	Tube furnace set to 0
2/14/2012	6:41:57 PM	Helium valve closed
2/14/2012	6:41:57 PM	H2 valve closed
2/14/2012	6:41:57 PM	BCl3 valve closed
2/14/2012	6:41:57 PM	PH3 valve closed
2/14/2012	6:41:57 PM	SiCl4 pre valve closed
2/14/2012	6:41:57 PM	SiCl4 post valve closed
2/14/2012	6:41:57 PM	Bypass valve closed
2/14/2012	6:41:57 PM	Bubbler valve closed
2/14/2012	6:41:57 PM	Main Vac valve opened
2/14/2012	6:41:57 PM	Helium MFC set to  0.000000
2/14/2012	6:41:57 PM	H2 MFC set to  0.000000
2/14/2012	6:41:57 PM	BCl3 MFC set to  0.000000
2/14/2012	6:41:57 PM	PH3 MFC set to  0.000000
2/14/2012	6:41:57 PM	SiCl4 MFC set to  0.000000
2/14/2012	6:41:57 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	6:41:57 PM	Tube furnace set to 0
2/14/2012	6:41:58 PM	Run finished at 6:41 PM
2/14/2012	6:41:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2012	7:28:38 PM	Recipe started at 7:28 PM
2/14/2012	7:28:38 PM	Helium valve closed
2/14/2012	7:28:38 PM	H2 valve closed
2/14/2012	7:28:38 PM	BCl3 valve closed
2/14/2012	7:28:38 PM	PH3 valve closed
2/14/2012	7:28:38 PM	SiCl4 pre valve closed
2/14/2012	7:28:38 PM	SiCl4 post valve closed
2/14/2012	7:28:38 PM	Bypass valve closed
2/14/2012	7:28:38 PM	Bubbler valve closed
2/14/2012	7:28:38 PM	Main Vac valve opened
2/14/2012	7:28:38 PM	Helium MFC set to  0.000000
2/14/2012	7:28:38 PM	H2 MFC set to  0.000000
2/14/2012	7:28:38 PM	BCl3 MFC set to  0.000000
2/14/2012	7:28:38 PM	PH3 MFC set to  0.000000
2/14/2012	7:28:38 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:28:38 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:28:38 PM	Tube furnace set to 0
2/14/2012	7:28:47 PM	H2 valve closed
2/14/2012	7:28:47 PM	BCl3 valve closed
2/14/2012	7:28:47 PM	PH3 valve closed
2/14/2012	7:28:47 PM	SiCl4 pre valve closed
2/14/2012	7:28:47 PM	SiCl4 post valve closed
2/14/2012	7:28:47 PM	Bypass valve closed
2/14/2012	7:28:47 PM	Bubbler valve closed
2/14/2012	7:28:48 PM	Helium valve opened
2/14/2012	7:28:48 PM	Main Vac valve opened
2/14/2012	7:28:48 PM	Helium MFC set to  20.000000
2/14/2012	7:28:48 PM	H2 MFC set to  0.000000
2/14/2012	7:28:48 PM	BCl3 MFC set to  0.000000
2/14/2012	7:28:48 PM	PH3 MFC set to  0.000000
2/14/2012	7:28:48 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:28:48 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:28:48 PM	Tube furnace set to 0
2/14/2012	7:29:18 PM	Helium valve closed
2/14/2012	7:29:18 PM	H2 valve closed
2/14/2012	7:29:18 PM	BCl3 valve closed
2/14/2012	7:29:18 PM	PH3 valve closed
2/14/2012	7:29:18 PM	SiCl4 pre valve closed
2/14/2012	7:29:18 PM	SiCl4 post valve closed
2/14/2012	7:29:18 PM	Bypass valve closed
2/14/2012	7:29:18 PM	Bubbler valve closed
2/14/2012	7:29:18 PM	Main Vac valve opened
2/14/2012	7:29:18 PM	Helium MFC set to  0.000000
2/14/2012	7:29:18 PM	H2 MFC set to  0.000000
2/14/2012	7:29:18 PM	BCl3 MFC set to  0.000000
2/14/2012	7:29:18 PM	PH3 MFC set to  0.000000
2/14/2012	7:29:18 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:29:18 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:29:18 PM	Tube furnace set to 0
2/14/2012	7:29:48 PM	H2 valve closed
2/14/2012	7:29:48 PM	BCl3 valve closed
2/14/2012	7:29:48 PM	PH3 valve closed
2/14/2012	7:29:48 PM	SiCl4 pre valve closed
2/14/2012	7:29:48 PM	SiCl4 post valve closed
2/14/2012	7:29:48 PM	Bypass valve closed
2/14/2012	7:29:48 PM	Bubbler valve closed
2/14/2012	7:29:48 PM	Helium valve opened
2/14/2012	7:29:48 PM	Main Vac valve opened
2/14/2012	7:29:48 PM	Helium MFC set to  20.000000
2/14/2012	7:29:48 PM	H2 MFC set to  0.000000
2/14/2012	7:29:48 PM	BCl3 MFC set to  0.000000
2/14/2012	7:29:48 PM	PH3 MFC set to  0.000000
2/14/2012	7:29:48 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:29:48 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:29:48 PM	Tube furnace set to 0
2/14/2012	7:30:18 PM	Helium valve closed
2/14/2012	7:30:18 PM	H2 valve closed
2/14/2012	7:30:18 PM	BCl3 valve closed
2/14/2012	7:30:18 PM	PH3 valve closed
2/14/2012	7:30:18 PM	SiCl4 pre valve closed
2/14/2012	7:30:18 PM	SiCl4 post valve closed
2/14/2012	7:30:18 PM	Bypass valve closed
2/14/2012	7:30:18 PM	Bubbler valve closed
2/14/2012	7:30:18 PM	Main Vac valve opened
2/14/2012	7:30:18 PM	Helium MFC set to  0.000000
2/14/2012	7:30:18 PM	H2 MFC set to  0.000000
2/14/2012	7:30:18 PM	BCl3 MFC set to  0.000000
2/14/2012	7:30:18 PM	PH3 MFC set to  0.000000
2/14/2012	7:30:18 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:30:18 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:30:18 PM	Tube furnace set to 0
2/14/2012	7:30:48 PM	H2 valve closed
2/14/2012	7:30:48 PM	BCl3 valve closed
2/14/2012	7:30:48 PM	PH3 valve closed
2/14/2012	7:30:48 PM	SiCl4 pre valve closed
2/14/2012	7:30:48 PM	SiCl4 post valve closed
2/14/2012	7:30:48 PM	Bypass valve closed
2/14/2012	7:30:48 PM	Bubbler valve closed
2/14/2012	7:30:48 PM	Helium valve opened
2/14/2012	7:30:48 PM	Main Vac valve opened
2/14/2012	7:30:48 PM	Helium MFC set to  20.000000
2/14/2012	7:30:48 PM	H2 MFC set to  0.000000
2/14/2012	7:30:48 PM	BCl3 MFC set to  0.000000
2/14/2012	7:30:48 PM	PH3 MFC set to  0.000000
2/14/2012	7:30:48 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:30:48 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:30:48 PM	Tube furnace set to 0
2/14/2012	7:31:18 PM	Helium valve closed
2/14/2012	7:31:18 PM	H2 valve closed
2/14/2012	7:31:18 PM	BCl3 valve closed
2/14/2012	7:31:19 PM	PH3 valve closed
2/14/2012	7:31:19 PM	SiCl4 pre valve closed
2/14/2012	7:31:19 PM	SiCl4 post valve closed
2/14/2012	7:31:19 PM	Bypass valve closed
2/14/2012	7:31:19 PM	Bubbler valve closed
2/14/2012	7:31:19 PM	Main Vac valve opened
2/14/2012	7:31:19 PM	Helium MFC set to  0.000000
2/14/2012	7:31:19 PM	H2 MFC set to  0.000000
2/14/2012	7:31:19 PM	BCl3 MFC set to  0.000000
2/14/2012	7:31:19 PM	PH3 MFC set to  0.000000
2/14/2012	7:31:19 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:31:19 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:31:19 PM	Tube furnace set to 0
2/14/2012	7:31:49 PM	H2 valve closed
2/14/2012	7:31:49 PM	BCl3 valve closed
2/14/2012	7:31:49 PM	PH3 valve closed
2/14/2012	7:31:49 PM	SiCl4 pre valve closed
2/14/2012	7:31:49 PM	SiCl4 post valve closed
2/14/2012	7:31:49 PM	Bypass valve closed
2/14/2012	7:31:49 PM	Bubbler valve closed
2/14/2012	7:31:49 PM	Helium valve opened
2/14/2012	7:31:49 PM	Main Vac valve opened
2/14/2012	7:31:49 PM	Helium MFC set to  20.000000
2/14/2012	7:31:49 PM	H2 MFC set to  0.000000
2/14/2012	7:31:49 PM	BCl3 MFC set to  0.000000
2/14/2012	7:31:49 PM	PH3 MFC set to  0.000000
2/14/2012	7:31:49 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:31:49 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:31:49 PM	Tube furnace set to 0
2/14/2012	7:32:19 PM	Helium valve closed
2/14/2012	7:32:19 PM	H2 valve closed
2/14/2012	7:32:19 PM	BCl3 valve closed
2/14/2012	7:32:19 PM	PH3 valve closed
2/14/2012	7:32:19 PM	SiCl4 pre valve closed
2/14/2012	7:32:19 PM	SiCl4 post valve closed
2/14/2012	7:32:19 PM	Bypass valve closed
2/14/2012	7:32:19 PM	Bubbler valve closed
2/14/2012	7:32:19 PM	Main Vac valve opened
2/14/2012	7:32:19 PM	Helium MFC set to  0.000000
2/14/2012	7:32:19 PM	H2 MFC set to  0.000000
2/14/2012	7:32:19 PM	BCl3 MFC set to  0.000000
2/14/2012	7:32:19 PM	PH3 MFC set to  0.000000
2/14/2012	7:32:19 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:32:19 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:32:19 PM	Tube furnace set to 0
2/14/2012	7:32:49 PM	H2 valve closed
2/14/2012	7:32:49 PM	BCl3 valve closed
2/14/2012	7:32:49 PM	PH3 valve closed
2/14/2012	7:32:49 PM	SiCl4 pre valve closed
2/14/2012	7:32:49 PM	SiCl4 post valve closed
2/14/2012	7:32:49 PM	Bypass valve closed
2/14/2012	7:32:49 PM	Bubbler valve closed
2/14/2012	7:32:49 PM	Helium valve opened
2/14/2012	7:32:49 PM	Main Vac valve opened
2/14/2012	7:32:49 PM	Helium MFC set to  20.000000
2/14/2012	7:32:49 PM	H2 MFC set to  0.000000
2/14/2012	7:32:49 PM	BCl3 MFC set to  0.000000
2/14/2012	7:32:49 PM	PH3 MFC set to  0.000000
2/14/2012	7:32:49 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:32:49 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:32:49 PM	Tube furnace set to 0
2/14/2012	7:33:19 PM	Helium valve closed
2/14/2012	7:33:19 PM	H2 valve closed
2/14/2012	7:33:19 PM	BCl3 valve closed
2/14/2012	7:33:19 PM	PH3 valve closed
2/14/2012	7:33:19 PM	SiCl4 pre valve closed
2/14/2012	7:33:19 PM	SiCl4 post valve closed
2/14/2012	7:33:19 PM	Bypass valve closed
2/14/2012	7:33:19 PM	Bubbler valve closed
2/14/2012	7:33:19 PM	Main Vac valve opened
2/14/2012	7:33:19 PM	Helium MFC set to  0.000000
2/14/2012	7:33:19 PM	H2 MFC set to  0.000000
2/14/2012	7:33:19 PM	BCl3 MFC set to  0.000000
2/14/2012	7:33:19 PM	PH3 MFC set to  0.000000
2/14/2012	7:33:19 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:33:19 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:33:19 PM	Tube furnace set to 0
2/14/2012	7:33:50 PM	H2 valve closed
2/14/2012	7:33:50 PM	BCl3 valve closed
2/14/2012	7:33:50 PM	PH3 valve closed
2/14/2012	7:33:50 PM	SiCl4 pre valve closed
2/14/2012	7:33:50 PM	SiCl4 post valve closed
2/14/2012	7:33:50 PM	Bypass valve closed
2/14/2012	7:33:50 PM	Bubbler valve closed
2/14/2012	7:33:50 PM	Helium valve opened
2/14/2012	7:33:50 PM	Main Vac valve opened
2/14/2012	7:33:50 PM	Helium MFC set to  20.000000
2/14/2012	7:33:50 PM	H2 MFC set to  0.000000
2/14/2012	7:33:50 PM	BCl3 MFC set to  0.000000
2/14/2012	7:33:50 PM	PH3 MFC set to  0.000000
2/14/2012	7:33:50 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:33:50 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:33:50 PM	Tube furnace set to 0
2/14/2012	7:34:20 PM	Helium valve closed
2/14/2012	7:34:20 PM	H2 valve closed
2/14/2012	7:34:20 PM	BCl3 valve closed
2/14/2012	7:34:20 PM	PH3 valve closed
2/14/2012	7:34:20 PM	SiCl4 pre valve closed
2/14/2012	7:34:20 PM	SiCl4 post valve closed
2/14/2012	7:34:20 PM	Bypass valve closed
2/14/2012	7:34:20 PM	Bubbler valve closed
2/14/2012	7:34:20 PM	Main Vac valve opened
2/14/2012	7:34:20 PM	Helium MFC set to  0.000000
2/14/2012	7:34:20 PM	H2 MFC set to  0.000000
2/14/2012	7:34:20 PM	BCl3 MFC set to  0.000000
2/14/2012	7:34:20 PM	PH3 MFC set to  0.000000
2/14/2012	7:34:20 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:34:20 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:34:20 PM	Tube furnace set to 0
2/14/2012	7:34:50 PM	H2 valve closed
2/14/2012	7:34:50 PM	BCl3 valve closed
2/14/2012	7:34:50 PM	PH3 valve closed
2/14/2012	7:34:50 PM	SiCl4 pre valve closed
2/14/2012	7:34:50 PM	SiCl4 post valve closed
2/14/2012	7:34:50 PM	Bypass valve closed
2/14/2012	7:34:50 PM	Bubbler valve closed
2/14/2012	7:34:50 PM	Helium valve opened
2/14/2012	7:34:50 PM	Main Vac valve opened
2/14/2012	7:34:50 PM	Helium MFC set to  20.000000
2/14/2012	7:34:50 PM	H2 MFC set to  0.000000
2/14/2012	7:34:50 PM	BCl3 MFC set to  0.000000
2/14/2012	7:34:50 PM	PH3 MFC set to  0.000000
2/14/2012	7:34:50 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:34:50 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:34:50 PM	Tube furnace set to 0
2/14/2012	7:35:20 PM	Helium valve closed
2/14/2012	7:35:20 PM	H2 valve closed
2/14/2012	7:35:20 PM	BCl3 valve closed
2/14/2012	7:35:20 PM	PH3 valve closed
2/14/2012	7:35:20 PM	SiCl4 pre valve closed
2/14/2012	7:35:20 PM	SiCl4 post valve closed
2/14/2012	7:35:20 PM	Bypass valve closed
2/14/2012	7:35:20 PM	Bubbler valve closed
2/14/2012	7:35:20 PM	Main Vac valve opened
2/14/2012	7:35:20 PM	Helium MFC set to  0.000000
2/14/2012	7:35:20 PM	H2 MFC set to  0.000000
2/14/2012	7:35:20 PM	BCl3 MFC set to  0.000000
2/14/2012	7:35:20 PM	PH3 MFC set to  0.000000
2/14/2012	7:35:20 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:35:20 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:35:20 PM	Tube furnace set to 0
2/14/2012	7:35:50 PM	H2 valve closed
2/14/2012	7:35:50 PM	BCl3 valve closed
2/14/2012	7:35:50 PM	PH3 valve closed
2/14/2012	7:35:50 PM	SiCl4 pre valve closed
2/14/2012	7:35:50 PM	SiCl4 post valve closed
2/14/2012	7:35:50 PM	Bypass valve closed
2/14/2012	7:35:50 PM	Bubbler valve closed
2/14/2012	7:35:50 PM	Helium valve opened
2/14/2012	7:35:50 PM	Main Vac valve opened
2/14/2012	7:35:50 PM	Helium MFC set to  20.000000
2/14/2012	7:35:50 PM	H2 MFC set to  0.000000
2/14/2012	7:35:50 PM	BCl3 MFC set to  0.000000
2/14/2012	7:35:50 PM	PH3 MFC set to  0.000000
2/14/2012	7:35:50 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:35:50 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:35:51 PM	Tube furnace set to 0
2/14/2012	7:36:21 PM	Helium valve closed
2/14/2012	7:36:21 PM	H2 valve closed
2/14/2012	7:36:21 PM	BCl3 valve closed
2/14/2012	7:36:21 PM	PH3 valve closed
2/14/2012	7:36:21 PM	SiCl4 pre valve closed
2/14/2012	7:36:21 PM	SiCl4 post valve closed
2/14/2012	7:36:21 PM	Bypass valve closed
2/14/2012	7:36:21 PM	Bubbler valve closed
2/14/2012	7:36:21 PM	Main Vac valve opened
2/14/2012	7:36:21 PM	Helium MFC set to  0.000000
2/14/2012	7:36:21 PM	H2 MFC set to  0.000000
2/14/2012	7:36:21 PM	BCl3 MFC set to  0.000000
2/14/2012	7:36:21 PM	PH3 MFC set to  0.000000
2/14/2012	7:36:21 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:36:21 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:36:21 PM	Tube furnace set to 0
2/14/2012	7:36:51 PM	H2 valve closed
2/14/2012	7:36:51 PM	BCl3 valve closed
2/14/2012	7:36:51 PM	PH3 valve closed
2/14/2012	7:36:51 PM	SiCl4 pre valve closed
2/14/2012	7:36:51 PM	SiCl4 post valve closed
2/14/2012	7:36:51 PM	Bypass valve closed
2/14/2012	7:36:51 PM	Bubbler valve closed
2/14/2012	7:36:51 PM	Helium valve opened
2/14/2012	7:36:51 PM	Main Vac valve opened
2/14/2012	7:36:51 PM	Helium MFC set to  20.000000
2/14/2012	7:36:51 PM	H2 MFC set to  0.000000
2/14/2012	7:36:51 PM	BCl3 MFC set to  0.000000
2/14/2012	7:36:51 PM	PH3 MFC set to  0.000000
2/14/2012	7:36:51 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:36:51 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:36:51 PM	Tube furnace set to 0
2/14/2012	7:37:21 PM	Helium valve closed
2/14/2012	7:37:21 PM	H2 valve closed
2/14/2012	7:37:21 PM	BCl3 valve closed
2/14/2012	7:37:21 PM	PH3 valve closed
2/14/2012	7:37:21 PM	SiCl4 pre valve closed
2/14/2012	7:37:21 PM	SiCl4 post valve closed
2/14/2012	7:37:21 PM	Bypass valve closed
2/14/2012	7:37:21 PM	Bubbler valve closed
2/14/2012	7:37:21 PM	Main Vac valve opened
2/14/2012	7:37:21 PM	Helium MFC set to  0.000000
2/14/2012	7:37:21 PM	H2 MFC set to  0.000000
2/14/2012	7:37:21 PM	BCl3 MFC set to  0.000000
2/14/2012	7:37:21 PM	PH3 MFC set to  0.000000
2/14/2012	7:37:21 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:37:21 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:37:21 PM	Tube furnace set to 200
2/14/2012	7:37:51 PM	H2 valve closed
2/14/2012	7:37:51 PM	BCl3 valve closed
2/14/2012	7:37:51 PM	PH3 valve closed
2/14/2012	7:37:51 PM	SiCl4 pre valve closed
2/14/2012	7:37:51 PM	SiCl4 post valve closed
2/14/2012	7:37:51 PM	Bypass valve closed
2/14/2012	7:37:51 PM	Bubbler valve closed
2/14/2012	7:37:51 PM	Helium valve opened
2/14/2012	7:37:51 PM	Main Vac valve opened
2/14/2012	7:37:51 PM	Helium MFC set to  20.000000
2/14/2012	7:37:51 PM	H2 MFC set to  0.000000
2/14/2012	7:37:51 PM	BCl3 MFC set to  0.000000
2/14/2012	7:37:51 PM	PH3 MFC set to  0.000000
2/14/2012	7:37:51 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:37:51 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:37:51 PM	Tube furnace set to 200
2/14/2012	7:38:21 PM	Helium valve closed
2/14/2012	7:38:21 PM	H2 valve closed
2/14/2012	7:38:21 PM	BCl3 valve closed
2/14/2012	7:38:21 PM	PH3 valve closed
2/14/2012	7:38:21 PM	SiCl4 pre valve closed
2/14/2012	7:38:21 PM	SiCl4 post valve closed
2/14/2012	7:38:21 PM	Bypass valve closed
2/14/2012	7:38:21 PM	Bubbler valve closed
2/14/2012	7:38:21 PM	Main Vac valve opened
2/14/2012	7:38:21 PM	Helium MFC set to  0.000000
2/14/2012	7:38:21 PM	H2 MFC set to  0.000000
2/14/2012	7:38:21 PM	BCl3 MFC set to  0.000000
2/14/2012	7:38:21 PM	PH3 MFC set to  0.000000
2/14/2012	7:38:21 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:38:21 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:38:22 PM	Tube furnace set to 200
2/14/2012	7:38:52 PM	H2 valve closed
2/14/2012	7:38:52 PM	BCl3 valve closed
2/14/2012	7:38:52 PM	PH3 valve closed
2/14/2012	7:38:52 PM	SiCl4 pre valve closed
2/14/2012	7:38:52 PM	SiCl4 post valve closed
2/14/2012	7:38:52 PM	Bypass valve closed
2/14/2012	7:38:52 PM	Bubbler valve closed
2/14/2012	7:38:52 PM	Helium valve opened
2/14/2012	7:38:52 PM	Main Vac valve opened
2/14/2012	7:38:52 PM	Helium MFC set to  20.000000
2/14/2012	7:38:52 PM	H2 MFC set to  0.000000
2/14/2012	7:38:52 PM	BCl3 MFC set to  0.000000
2/14/2012	7:38:52 PM	PH3 MFC set to  0.000000
2/14/2012	7:38:52 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:38:52 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:38:52 PM	Tube furnace set to 200
2/14/2012	7:39:22 PM	Helium valve closed
2/14/2012	7:39:22 PM	H2 valve closed
2/14/2012	7:39:22 PM	BCl3 valve closed
2/14/2012	7:39:22 PM	PH3 valve closed
2/14/2012	7:39:22 PM	SiCl4 pre valve closed
2/14/2012	7:39:22 PM	SiCl4 post valve closed
2/14/2012	7:39:22 PM	Bypass valve closed
2/14/2012	7:39:22 PM	Bubbler valve closed
2/14/2012	7:39:22 PM	Main Vac valve opened
2/14/2012	7:39:22 PM	Helium MFC set to  0.000000
2/14/2012	7:39:22 PM	H2 MFC set to  0.000000
2/14/2012	7:39:22 PM	BCl3 MFC set to  0.000000
2/14/2012	7:39:22 PM	PH3 MFC set to  0.000000
2/14/2012	7:39:22 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:39:22 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:39:22 PM	Tube furnace set to 200
2/14/2012	7:39:52 PM	H2 valve closed
2/14/2012	7:39:52 PM	BCl3 valve closed
2/14/2012	7:39:52 PM	PH3 valve closed
2/14/2012	7:39:52 PM	SiCl4 pre valve closed
2/14/2012	7:39:52 PM	SiCl4 post valve closed
2/14/2012	7:39:52 PM	Bypass valve closed
2/14/2012	7:39:52 PM	Bubbler valve closed
2/14/2012	7:39:52 PM	Helium valve opened
2/14/2012	7:39:52 PM	Main Vac valve opened
2/14/2012	7:39:52 PM	Helium MFC set to  20.000000
2/14/2012	7:39:52 PM	H2 MFC set to  0.000000
2/14/2012	7:39:52 PM	BCl3 MFC set to  0.000000
2/14/2012	7:39:52 PM	PH3 MFC set to  0.000000
2/14/2012	7:39:52 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:39:52 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:39:52 PM	Tube furnace set to 200
2/14/2012	7:40:22 PM	Helium valve closed
2/14/2012	7:40:22 PM	H2 valve closed
2/14/2012	7:40:22 PM	BCl3 valve closed
2/14/2012	7:40:22 PM	PH3 valve closed
2/14/2012	7:40:22 PM	SiCl4 pre valve closed
2/14/2012	7:40:22 PM	SiCl4 post valve closed
2/14/2012	7:40:22 PM	Bypass valve closed
2/14/2012	7:40:22 PM	Bubbler valve closed
2/14/2012	7:40:22 PM	Main Vac valve opened
2/14/2012	7:40:22 PM	Helium MFC set to  0.000000
2/14/2012	7:40:22 PM	H2 MFC set to  0.000000
2/14/2012	7:40:22 PM	BCl3 MFC set to  0.000000
2/14/2012	7:40:22 PM	PH3 MFC set to  0.000000
2/14/2012	7:40:22 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:40:22 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:40:22 PM	Tube furnace set to 200
2/14/2012	7:40:52 PM	H2 valve closed
2/14/2012	7:40:52 PM	BCl3 valve closed
2/14/2012	7:40:52 PM	PH3 valve closed
2/14/2012	7:40:52 PM	SiCl4 pre valve closed
2/14/2012	7:40:52 PM	SiCl4 post valve closed
2/14/2012	7:40:52 PM	Bypass valve closed
2/14/2012	7:40:52 PM	Bubbler valve closed
2/14/2012	7:40:52 PM	Helium valve opened
2/14/2012	7:40:52 PM	Main Vac valve opened
2/14/2012	7:40:52 PM	Helium MFC set to  20.000000
2/14/2012	7:40:52 PM	H2 MFC set to  0.000000
2/14/2012	7:40:52 PM	BCl3 MFC set to  0.000000
2/14/2012	7:40:52 PM	PH3 MFC set to  0.000000
2/14/2012	7:40:53 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:40:53 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:40:53 PM	Tube furnace set to 200
2/14/2012	7:41:23 PM	Helium valve closed
2/14/2012	7:41:23 PM	H2 valve closed
2/14/2012	7:41:23 PM	BCl3 valve closed
2/14/2012	7:41:23 PM	PH3 valve closed
2/14/2012	7:41:23 PM	SiCl4 pre valve closed
2/14/2012	7:41:23 PM	SiCl4 post valve closed
2/14/2012	7:41:23 PM	Bypass valve closed
2/14/2012	7:41:23 PM	Bubbler valve closed
2/14/2012	7:41:23 PM	Main Vac valve opened
2/14/2012	7:41:23 PM	Helium MFC set to  0.000000
2/14/2012	7:41:23 PM	H2 MFC set to  0.000000
2/14/2012	7:41:23 PM	BCl3 MFC set to  0.000000
2/14/2012	7:41:23 PM	PH3 MFC set to  0.000000
2/14/2012	7:41:23 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:41:23 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:41:23 PM	Tube furnace set to 200
2/14/2012	7:41:53 PM	H2 valve closed
2/14/2012	7:41:53 PM	BCl3 valve closed
2/14/2012	7:41:53 PM	PH3 valve closed
2/14/2012	7:41:53 PM	SiCl4 pre valve closed
2/14/2012	7:41:53 PM	SiCl4 post valve closed
2/14/2012	7:41:53 PM	Bypass valve closed
2/14/2012	7:41:53 PM	Bubbler valve closed
2/14/2012	7:41:53 PM	Helium valve opened
2/14/2012	7:41:53 PM	Main Vac valve opened
2/14/2012	7:41:53 PM	Helium MFC set to  20.000000
2/14/2012	7:41:53 PM	H2 MFC set to  0.000000
2/14/2012	7:41:53 PM	BCl3 MFC set to  0.000000
2/14/2012	7:41:53 PM	PH3 MFC set to  0.000000
2/14/2012	7:41:53 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:41:53 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:41:53 PM	Tube furnace set to 200
2/14/2012	7:42:23 PM	Helium valve closed
2/14/2012	7:42:23 PM	H2 valve closed
2/14/2012	7:42:23 PM	BCl3 valve closed
2/14/2012	7:42:23 PM	PH3 valve closed
2/14/2012	7:42:23 PM	SiCl4 pre valve closed
2/14/2012	7:42:23 PM	SiCl4 post valve closed
2/14/2012	7:42:23 PM	Bypass valve closed
2/14/2012	7:42:23 PM	Bubbler valve closed
2/14/2012	7:42:23 PM	Main Vac valve opened
2/14/2012	7:42:23 PM	Helium MFC set to  0.000000
2/14/2012	7:42:23 PM	H2 MFC set to  0.000000
2/14/2012	7:42:23 PM	BCl3 MFC set to  0.000000
2/14/2012	7:42:23 PM	PH3 MFC set to  0.000000
2/14/2012	7:42:23 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:42:23 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:42:23 PM	Tube furnace set to 200
2/14/2012	7:42:53 PM	H2 valve closed
2/14/2012	7:42:53 PM	BCl3 valve closed
2/14/2012	7:42:53 PM	PH3 valve closed
2/14/2012	7:42:53 PM	SiCl4 pre valve closed
2/14/2012	7:42:53 PM	SiCl4 post valve closed
2/14/2012	7:42:53 PM	Bypass valve closed
2/14/2012	7:42:53 PM	Bubbler valve closed
2/14/2012	7:42:53 PM	Helium valve opened
2/14/2012	7:42:53 PM	Main Vac valve opened
2/14/2012	7:42:53 PM	Helium MFC set to  20.000000
2/14/2012	7:42:53 PM	H2 MFC set to  0.000000
2/14/2012	7:42:53 PM	BCl3 MFC set to  0.000000
2/14/2012	7:42:53 PM	PH3 MFC set to  0.000000
2/14/2012	7:42:53 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:42:53 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:42:54 PM	Tube furnace set to 200
2/14/2012	7:43:24 PM	Helium valve closed
2/14/2012	7:43:24 PM	H2 valve closed
2/14/2012	7:43:24 PM	BCl3 valve closed
2/14/2012	7:43:24 PM	PH3 valve closed
2/14/2012	7:43:24 PM	SiCl4 pre valve closed
2/14/2012	7:43:24 PM	SiCl4 post valve closed
2/14/2012	7:43:24 PM	Bypass valve closed
2/14/2012	7:43:24 PM	Bubbler valve closed
2/14/2012	7:43:24 PM	Main Vac valve opened
2/14/2012	7:43:24 PM	Helium MFC set to  0.000000
2/14/2012	7:43:24 PM	H2 MFC set to  0.000000
2/14/2012	7:43:24 PM	BCl3 MFC set to  0.000000
2/14/2012	7:43:24 PM	PH3 MFC set to  0.000000
2/14/2012	7:43:24 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:43:24 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:43:24 PM	Tube furnace set to 0
2/14/2012	7:43:25 PM	Run finished at 7:43 PM
2/14/2012	7:55:05 PM	Recipe started at 7:55 PM
2/14/2012	7:55:05 PM	Helium valve closed
2/14/2012	7:55:05 PM	H2 valve closed
2/14/2012	7:55:05 PM	BCl3 valve closed
2/14/2012	7:55:05 PM	PH3 valve closed
2/14/2012	7:55:05 PM	SiCl4 pre valve closed
2/14/2012	7:55:05 PM	SiCl4 post valve closed
2/14/2012	7:55:05 PM	Bypass valve closed
2/14/2012	7:55:05 PM	Bubbler valve closed
2/14/2012	7:55:05 PM	Main Vac valve opened
2/14/2012	7:55:05 PM	Helium MFC set to  0.000000
2/14/2012	7:55:05 PM	H2 MFC set to  0.000000
2/14/2012	7:55:05 PM	BCl3 MFC set to  0.000000
2/14/2012	7:55:05 PM	PH3 MFC set to  0.000000
2/14/2012	7:55:05 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:55:05 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:55:05 PM	Tube furnace set to 0
2/14/2012	7:55:14 PM	Helium valve closed
2/14/2012	7:55:14 PM	H2 valve closed
2/14/2012	7:55:14 PM	BCl3 valve closed
2/14/2012	7:55:14 PM	PH3 valve closed
2/14/2012	7:55:14 PM	SiCl4 pre valve closed
2/14/2012	7:55:14 PM	SiCl4 post valve closed
2/14/2012	7:55:14 PM	Bypass valve closed
2/14/2012	7:55:14 PM	Bubbler valve closed
2/14/2012	7:55:14 PM	Main Vac valve opened
2/14/2012	7:55:14 PM	Helium MFC set to  0.000000
2/14/2012	7:55:14 PM	H2 MFC set to  0.000000
2/14/2012	7:55:14 PM	BCl3 MFC set to  0.000000
2/14/2012	7:55:14 PM	PH3 MFC set to  0.000000
2/14/2012	7:55:14 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:55:14 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:55:14 PM	Tube furnace set to 1100
2/14/2012	7:55:52 PM	H2 valve closed
2/14/2012	7:55:52 PM	BCl3 valve closed
2/14/2012	7:55:52 PM	PH3 valve closed
2/14/2012	7:55:52 PM	SiCl4 pre valve closed
2/14/2012	7:55:52 PM	SiCl4 post valve closed
2/14/2012	7:55:52 PM	Bypass valve closed
2/14/2012	7:55:52 PM	Bubbler valve closed
2/14/2012	7:55:52 PM	Helium valve opened
2/14/2012	7:55:52 PM	Main Vac valve opened
2/14/2012	7:55:52 PM	Helium MFC set to  20.000000
2/14/2012	7:55:52 PM	H2 MFC set to  0.000000
2/14/2012	7:55:52 PM	BCl3 MFC set to  0.000000
2/14/2012	7:55:52 PM	PH3 MFC set to  0.000000
2/14/2012	7:55:52 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:55:52 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:55:52 PM	Tube furnace set to 1100
2/14/2012	7:56:14 PM	Helium valve closed
2/14/2012	7:56:14 PM	H2 valve closed
2/14/2012	7:56:14 PM	BCl3 valve closed
2/14/2012	7:56:14 PM	PH3 valve closed
2/14/2012	7:56:14 PM	SiCl4 pre valve closed
2/14/2012	7:56:14 PM	SiCl4 post valve closed
2/14/2012	7:56:14 PM	Bypass valve closed
2/14/2012	7:56:14 PM	Bubbler valve closed
2/14/2012	7:56:14 PM	Main Vac valve opened
2/14/2012	7:56:14 PM	Helium MFC set to  0.000000
2/14/2012	7:56:14 PM	H2 MFC set to  0.000000
2/14/2012	7:56:14 PM	BCl3 MFC set to  0.000000
2/14/2012	7:56:14 PM	PH3 MFC set to  0.000000
2/14/2012	7:56:14 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:56:14 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:56:14 PM	Tube furnace set to 1100
2/14/2012	7:56:53 PM	Helium valve closed
2/14/2012	7:56:53 PM	H2 valve closed
2/14/2012	7:56:53 PM	BCl3 valve closed
2/14/2012	7:56:53 PM	PH3 valve closed
2/14/2012	7:56:53 PM	SiCl4 pre valve closed
2/14/2012	7:56:53 PM	SiCl4 post valve closed
2/14/2012	7:56:53 PM	Bypass valve closed
2/14/2012	7:56:53 PM	Bubbler valve closed
2/14/2012	7:56:53 PM	Main Vac valve opened
2/14/2012	7:56:53 PM	Helium MFC set to  0.000000
2/14/2012	7:56:53 PM	H2 MFC set to  0.000000
2/14/2012	7:56:53 PM	BCl3 MFC set to  0.000000
2/14/2012	7:56:53 PM	PH3 MFC set to  0.000000
2/14/2012	7:56:53 PM	SiCl4 MFC set to  0.000000
2/14/2012	7:56:53 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	7:56:53 PM	Tube furnace set to 0
2/14/2012	7:56:54 PM	Run finished at 7:56 PM
2/14/2012	9:34:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2012	9:34:50 PM	Recipe started at 9:34 PM
2/14/2012	9:34:50 PM	Helium valve closed
2/14/2012	9:34:50 PM	H2 valve closed
2/14/2012	9:34:50 PM	BCl3 valve closed
2/14/2012	9:34:50 PM	PH3 valve closed
2/14/2012	9:34:50 PM	SiCl4 pre valve closed
2/14/2012	9:34:50 PM	SiCl4 post valve closed
2/14/2012	9:34:50 PM	Main Vac valve closed
2/14/2012	9:34:50 PM	Bypass valve closed
2/14/2012	9:34:50 PM	Bubbler valve closed
2/14/2012	9:34:50 PM	Helium MFC set to  0.000000
2/14/2012	9:34:50 PM	H2 MFC set to  0.000000
2/14/2012	9:34:50 PM	BCl3 MFC set to  0.000000
2/14/2012	9:34:50 PM	PH3 MFC set to  0.000000
2/14/2012	9:34:50 PM	SiCl4 MFC set to  0.000000
2/14/2012	9:34:50 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	9:34:50 PM	Tube furnace set to 0
2/14/2012	9:34:53 PM	H2 valve closed
2/14/2012	9:34:53 PM	BCl3 valve closed
2/14/2012	9:34:53 PM	PH3 valve closed
2/14/2012	9:34:53 PM	SiCl4 pre valve closed
2/14/2012	9:34:53 PM	SiCl4 post valve closed
2/14/2012	9:34:53 PM	Main Vac valve closed
2/14/2012	9:34:53 PM	Bypass valve closed
2/14/2012	9:34:53 PM	Bubbler valve closed
2/14/2012	9:34:53 PM	Helium valve opened
2/14/2012	9:34:53 PM	Helium MFC set to  500.000000
2/14/2012	9:34:53 PM	H2 MFC set to  0.000000
2/14/2012	9:34:53 PM	BCl3 MFC set to  0.000000
2/14/2012	9:34:53 PM	PH3 MFC set to  0.000000
2/14/2012	9:34:53 PM	SiCl4 MFC set to  0.000000
2/14/2012	9:34:53 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	9:34:53 PM	Tube furnace set to 0
2/14/2012	9:35:57 PM	Helium valve closed
2/14/2012	9:35:57 PM	H2 valve closed
2/14/2012	9:35:57 PM	BCl3 valve closed
2/14/2012	9:35:57 PM	PH3 valve closed
2/14/2012	9:35:57 PM	SiCl4 pre valve closed
2/14/2012	9:35:57 PM	SiCl4 post valve closed
2/14/2012	9:35:57 PM	Main Vac valve closed
2/14/2012	9:35:57 PM	Bypass valve closed
2/14/2012	9:35:57 PM	Bubbler valve closed
2/14/2012	9:35:57 PM	Helium MFC set to  0.000000
2/14/2012	9:35:57 PM	H2 MFC set to  0.000000
2/14/2012	9:35:57 PM	BCl3 MFC set to  0.000000
2/14/2012	9:35:57 PM	PH3 MFC set to  0.000000
2/14/2012	9:35:57 PM	SiCl4 MFC set to  0.000000
2/14/2012	9:35:57 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	9:35:57 PM	Tube furnace set to 0
2/14/2012	9:35:58 PM	Run finished at 9:35 PM
2/14/2012	9:35:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2012	9:59:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2012	9:59:51 PM	Recipe started at 9:59 PM
2/14/2012	9:59:51 PM	Helium valve closed
2/14/2012	9:59:51 PM	H2 valve closed
2/14/2012	9:59:51 PM	BCl3 valve closed
2/14/2012	9:59:51 PM	PH3 valve closed
2/14/2012	9:59:51 PM	SiCl4 pre valve closed
2/14/2012	9:59:51 PM	SiCl4 post valve closed
2/14/2012	9:59:51 PM	Main Vac valve closed
2/14/2012	9:59:51 PM	Bubbler valve closed
2/14/2012	9:59:51 PM	Bypass valve opened
2/14/2012	9:59:51 PM	Helium MFC set to  0.000000
2/14/2012	9:59:51 PM	H2 MFC set to  0.000000
2/14/2012	9:59:51 PM	BCl3 MFC set to  0.000000
2/14/2012	9:59:51 PM	PH3 MFC set to  0.000000
2/14/2012	9:59:51 PM	SiCl4 MFC set to  0.000000
2/14/2012	9:59:51 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	9:59:52 PM	Tube furnace set to 0
2/14/2012	10:00:57 PM	Helium valve closed
2/14/2012	10:00:57 PM	H2 valve closed
2/14/2012	10:00:57 PM	BCl3 valve closed
2/14/2012	10:00:57 PM	PH3 valve closed
2/14/2012	10:00:57 PM	SiCl4 pre valve closed
2/14/2012	10:00:57 PM	SiCl4 post valve closed
2/14/2012	10:00:57 PM	Main Vac valve closed
2/14/2012	10:00:57 PM	Bubbler valve closed
2/14/2012	10:00:57 PM	Bypass valve opened
2/14/2012	10:00:57 PM	Helium MFC set to  0.000000
2/14/2012	10:00:57 PM	H2 MFC set to  0.000000
2/14/2012	10:00:57 PM	BCl3 MFC set to  0.000000
2/14/2012	10:00:57 PM	PH3 MFC set to  0.000000
2/14/2012	10:00:57 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:00:57 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:00:57 PM	Tube furnace set to 0
2/14/2012	10:01:57 PM	Helium valve closed
2/14/2012	10:01:57 PM	H2 valve closed
2/14/2012	10:01:57 PM	BCl3 valve closed
2/14/2012	10:01:57 PM	PH3 valve closed
2/14/2012	10:01:57 PM	SiCl4 pre valve closed
2/14/2012	10:01:57 PM	SiCl4 post valve closed
2/14/2012	10:01:57 PM	Bypass valve closed
2/14/2012	10:01:57 PM	Bubbler valve closed
2/14/2012	10:01:57 PM	Main Vac valve opened
2/14/2012	10:01:57 PM	Helium MFC set to  0.000000
2/14/2012	10:01:57 PM	H2 MFC set to  0.000000
2/14/2012	10:01:57 PM	BCl3 MFC set to  0.000000
2/14/2012	10:01:57 PM	PH3 MFC set to  0.000000
2/14/2012	10:01:57 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:01:57 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:01:58 PM	Tube furnace set to 0
2/14/2012	10:01:59 PM	Run finished at 10:01 PM
2/14/2012	10:01:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2012	10:07:10 PM	Recipe started at 10:07 PM
2/14/2012	10:07:10 PM	Helium valve closed
2/14/2012	10:07:10 PM	H2 valve closed
2/14/2012	10:07:10 PM	BCl3 valve closed
2/14/2012	10:07:10 PM	PH3 valve closed
2/14/2012	10:07:10 PM	SiCl4 pre valve closed
2/14/2012	10:07:10 PM	SiCl4 post valve closed
2/14/2012	10:07:10 PM	Bypass valve closed
2/14/2012	10:07:10 PM	Bubbler valve closed
2/14/2012	10:07:10 PM	Main Vac valve opened
2/14/2012	10:07:10 PM	Helium MFC set to  0.000000
2/14/2012	10:07:10 PM	H2 MFC set to  0.000000
2/14/2012	10:07:10 PM	BCl3 MFC set to  0.000000
2/14/2012	10:07:10 PM	PH3 MFC set to  0.000000
2/14/2012	10:07:10 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:07:10 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:07:10 PM	Tube furnace set to 0
2/14/2012	10:07:40 PM	H2 valve closed
2/14/2012	10:07:40 PM	BCl3 valve closed
2/14/2012	10:07:40 PM	PH3 valve closed
2/14/2012	10:07:40 PM	SiCl4 pre valve closed
2/14/2012	10:07:40 PM	SiCl4 post valve closed
2/14/2012	10:07:40 PM	Bypass valve closed
2/14/2012	10:07:40 PM	Bubbler valve closed
2/14/2012	10:07:40 PM	Helium valve opened
2/14/2012	10:07:40 PM	Main Vac valve opened
2/14/2012	10:07:40 PM	Helium MFC set to  20.000000
2/14/2012	10:07:40 PM	H2 MFC set to  0.000000
2/14/2012	10:07:40 PM	BCl3 MFC set to  0.000000
2/14/2012	10:07:40 PM	PH3 MFC set to  0.000000
2/14/2012	10:07:40 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:07:40 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:07:41 PM	Tube furnace set to 0
2/14/2012	10:08:11 PM	Helium valve closed
2/14/2012	10:08:11 PM	H2 valve closed
2/14/2012	10:08:11 PM	BCl3 valve closed
2/14/2012	10:08:11 PM	PH3 valve closed
2/14/2012	10:08:11 PM	SiCl4 pre valve closed
2/14/2012	10:08:11 PM	SiCl4 post valve closed
2/14/2012	10:08:11 PM	Bypass valve closed
2/14/2012	10:08:11 PM	Bubbler valve closed
2/14/2012	10:08:11 PM	Main Vac valve opened
2/14/2012	10:08:11 PM	Helium MFC set to  0.000000
2/14/2012	10:08:11 PM	H2 MFC set to  0.000000
2/14/2012	10:08:11 PM	BCl3 MFC set to  0.000000
2/14/2012	10:08:11 PM	PH3 MFC set to  0.000000
2/14/2012	10:08:11 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:08:11 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:08:11 PM	Tube furnace set to 0
2/14/2012	10:08:41 PM	H2 valve closed
2/14/2012	10:08:41 PM	BCl3 valve closed
2/14/2012	10:08:41 PM	PH3 valve closed
2/14/2012	10:08:41 PM	SiCl4 pre valve closed
2/14/2012	10:08:41 PM	SiCl4 post valve closed
2/14/2012	10:08:41 PM	Bypass valve closed
2/14/2012	10:08:41 PM	Bubbler valve closed
2/14/2012	10:08:41 PM	Helium valve opened
2/14/2012	10:08:41 PM	Main Vac valve opened
2/14/2012	10:08:41 PM	Helium MFC set to  20.000000
2/14/2012	10:08:41 PM	H2 MFC set to  0.000000
2/14/2012	10:08:41 PM	BCl3 MFC set to  0.000000
2/14/2012	10:08:41 PM	PH3 MFC set to  0.000000
2/14/2012	10:08:41 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:08:41 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:08:41 PM	Tube furnace set to 0
2/14/2012	10:09:11 PM	Helium valve closed
2/14/2012	10:09:11 PM	H2 valve closed
2/14/2012	10:09:11 PM	BCl3 valve closed
2/14/2012	10:09:11 PM	PH3 valve closed
2/14/2012	10:09:11 PM	SiCl4 pre valve closed
2/14/2012	10:09:11 PM	SiCl4 post valve closed
2/14/2012	10:09:11 PM	Bypass valve closed
2/14/2012	10:09:11 PM	Bubbler valve closed
2/14/2012	10:09:11 PM	Main Vac valve opened
2/14/2012	10:09:11 PM	Helium MFC set to  0.000000
2/14/2012	10:09:11 PM	H2 MFC set to  0.000000
2/14/2012	10:09:11 PM	BCl3 MFC set to  0.000000
2/14/2012	10:09:11 PM	PH3 MFC set to  0.000000
2/14/2012	10:09:11 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:09:11 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:09:11 PM	Tube furnace set to 0
2/14/2012	10:09:41 PM	H2 valve closed
2/14/2012	10:09:41 PM	BCl3 valve closed
2/14/2012	10:09:41 PM	PH3 valve closed
2/14/2012	10:09:41 PM	SiCl4 pre valve closed
2/14/2012	10:09:41 PM	SiCl4 post valve closed
2/14/2012	10:09:41 PM	Bypass valve closed
2/14/2012	10:09:41 PM	Bubbler valve closed
2/14/2012	10:09:41 PM	Helium valve opened
2/14/2012	10:09:41 PM	Main Vac valve opened
2/14/2012	10:09:41 PM	Helium MFC set to  20.000000
2/14/2012	10:09:41 PM	H2 MFC set to  0.000000
2/14/2012	10:09:41 PM	BCl3 MFC set to  0.000000
2/14/2012	10:09:41 PM	PH3 MFC set to  0.000000
2/14/2012	10:09:41 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:09:41 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:09:41 PM	Tube furnace set to 0
2/14/2012	10:10:11 PM	Helium valve closed
2/14/2012	10:10:11 PM	H2 valve closed
2/14/2012	10:10:11 PM	BCl3 valve closed
2/14/2012	10:10:11 PM	PH3 valve closed
2/14/2012	10:10:11 PM	SiCl4 pre valve closed
2/14/2012	10:10:11 PM	SiCl4 post valve closed
2/14/2012	10:10:11 PM	Bypass valve closed
2/14/2012	10:10:11 PM	Bubbler valve closed
2/14/2012	10:10:11 PM	Main Vac valve opened
2/14/2012	10:10:11 PM	Helium MFC set to  0.000000
2/14/2012	10:10:11 PM	H2 MFC set to  0.000000
2/14/2012	10:10:11 PM	BCl3 MFC set to  0.000000
2/14/2012	10:10:11 PM	PH3 MFC set to  0.000000
2/14/2012	10:10:11 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:10:11 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:10:12 PM	Tube furnace set to 0
2/14/2012	10:10:42 PM	H2 valve closed
2/14/2012	10:10:42 PM	BCl3 valve closed
2/14/2012	10:10:42 PM	PH3 valve closed
2/14/2012	10:10:42 PM	SiCl4 pre valve closed
2/14/2012	10:10:42 PM	SiCl4 post valve closed
2/14/2012	10:10:42 PM	Bypass valve closed
2/14/2012	10:10:42 PM	Bubbler valve closed
2/14/2012	10:10:42 PM	Helium valve opened
2/14/2012	10:10:42 PM	Main Vac valve opened
2/14/2012	10:10:42 PM	Helium MFC set to  20.000000
2/14/2012	10:10:42 PM	H2 MFC set to  0.000000
2/14/2012	10:10:42 PM	BCl3 MFC set to  0.000000
2/14/2012	10:10:42 PM	PH3 MFC set to  0.000000
2/14/2012	10:10:42 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:10:42 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:10:42 PM	Tube furnace set to 0
2/14/2012	10:11:12 PM	Helium valve closed
2/14/2012	10:11:12 PM	H2 valve closed
2/14/2012	10:11:12 PM	BCl3 valve closed
2/14/2012	10:11:12 PM	PH3 valve closed
2/14/2012	10:11:12 PM	SiCl4 pre valve closed
2/14/2012	10:11:12 PM	SiCl4 post valve closed
2/14/2012	10:11:12 PM	Bypass valve closed
2/14/2012	10:11:12 PM	Bubbler valve closed
2/14/2012	10:11:12 PM	Main Vac valve opened
2/14/2012	10:11:12 PM	Helium MFC set to  0.000000
2/14/2012	10:11:12 PM	H2 MFC set to  0.000000
2/14/2012	10:11:12 PM	BCl3 MFC set to  0.000000
2/14/2012	10:11:12 PM	PH3 MFC set to  0.000000
2/14/2012	10:11:12 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:11:12 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:11:12 PM	Tube furnace set to 0
2/14/2012	10:11:42 PM	H2 valve closed
2/14/2012	10:11:42 PM	BCl3 valve closed
2/14/2012	10:11:42 PM	PH3 valve closed
2/14/2012	10:11:42 PM	SiCl4 pre valve closed
2/14/2012	10:11:42 PM	SiCl4 post valve closed
2/14/2012	10:11:42 PM	Bypass valve closed
2/14/2012	10:11:42 PM	Bubbler valve closed
2/14/2012	10:11:42 PM	Helium valve opened
2/14/2012	10:11:42 PM	Main Vac valve opened
2/14/2012	10:11:42 PM	Helium MFC set to  20.000000
2/14/2012	10:11:42 PM	H2 MFC set to  0.000000
2/14/2012	10:11:42 PM	BCl3 MFC set to  0.000000
2/14/2012	10:11:42 PM	PH3 MFC set to  0.000000
2/14/2012	10:11:42 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:11:42 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:11:42 PM	Tube furnace set to 0
2/14/2012	10:12:12 PM	Helium valve closed
2/14/2012	10:12:12 PM	H2 valve closed
2/14/2012	10:12:12 PM	BCl3 valve closed
2/14/2012	10:12:12 PM	PH3 valve closed
2/14/2012	10:12:12 PM	SiCl4 pre valve closed
2/14/2012	10:12:12 PM	SiCl4 post valve closed
2/14/2012	10:12:12 PM	Bypass valve closed
2/14/2012	10:12:12 PM	Bubbler valve closed
2/14/2012	10:12:12 PM	Main Vac valve opened
2/14/2012	10:12:12 PM	Helium MFC set to  0.000000
2/14/2012	10:12:12 PM	H2 MFC set to  0.000000
2/14/2012	10:12:12 PM	BCl3 MFC set to  0.000000
2/14/2012	10:12:12 PM	PH3 MFC set to  0.000000
2/14/2012	10:12:12 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:12:12 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:12:12 PM	Tube furnace set to 0
2/14/2012	10:12:42 PM	H2 valve closed
2/14/2012	10:12:42 PM	BCl3 valve closed
2/14/2012	10:12:42 PM	PH3 valve closed
2/14/2012	10:12:42 PM	SiCl4 pre valve closed
2/14/2012	10:12:42 PM	SiCl4 post valve closed
2/14/2012	10:12:42 PM	Bypass valve closed
2/14/2012	10:12:42 PM	Bubbler valve closed
2/14/2012	10:12:42 PM	Helium valve opened
2/14/2012	10:12:42 PM	Main Vac valve opened
2/14/2012	10:12:42 PM	Helium MFC set to  20.000000
2/14/2012	10:12:43 PM	H2 MFC set to  0.000000
2/14/2012	10:12:43 PM	BCl3 MFC set to  0.000000
2/14/2012	10:12:43 PM	PH3 MFC set to  0.000000
2/14/2012	10:12:43 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:12:43 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:12:43 PM	Tube furnace set to 0
2/14/2012	10:13:13 PM	Helium valve closed
2/14/2012	10:13:13 PM	H2 valve closed
2/14/2012	10:13:13 PM	BCl3 valve closed
2/14/2012	10:13:13 PM	PH3 valve closed
2/14/2012	10:13:13 PM	SiCl4 pre valve closed
2/14/2012	10:13:13 PM	SiCl4 post valve closed
2/14/2012	10:13:13 PM	Bypass valve closed
2/14/2012	10:13:13 PM	Bubbler valve closed
2/14/2012	10:13:13 PM	Main Vac valve opened
2/14/2012	10:13:13 PM	Helium MFC set to  0.000000
2/14/2012	10:13:13 PM	H2 MFC set to  0.000000
2/14/2012	10:13:13 PM	BCl3 MFC set to  0.000000
2/14/2012	10:13:13 PM	PH3 MFC set to  0.000000
2/14/2012	10:13:13 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:13:13 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:13:13 PM	Tube furnace set to 0
2/14/2012	10:13:43 PM	H2 valve closed
2/14/2012	10:13:43 PM	BCl3 valve closed
2/14/2012	10:13:43 PM	PH3 valve closed
2/14/2012	10:13:43 PM	SiCl4 pre valve closed
2/14/2012	10:13:43 PM	SiCl4 post valve closed
2/14/2012	10:13:43 PM	Bypass valve closed
2/14/2012	10:13:43 PM	Bubbler valve closed
2/14/2012	10:13:43 PM	Helium valve opened
2/14/2012	10:13:43 PM	Main Vac valve opened
2/14/2012	10:13:43 PM	Helium MFC set to  20.000000
2/14/2012	10:13:43 PM	H2 MFC set to  0.000000
2/14/2012	10:13:43 PM	BCl3 MFC set to  0.000000
2/14/2012	10:13:43 PM	PH3 MFC set to  0.000000
2/14/2012	10:13:43 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:13:43 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:13:43 PM	Tube furnace set to 0
2/14/2012	10:14:13 PM	Helium valve closed
2/14/2012	10:14:13 PM	H2 valve closed
2/14/2012	10:14:13 PM	BCl3 valve closed
2/14/2012	10:14:13 PM	PH3 valve closed
2/14/2012	10:14:13 PM	SiCl4 pre valve closed
2/14/2012	10:14:13 PM	SiCl4 post valve closed
2/14/2012	10:14:13 PM	Bypass valve closed
2/14/2012	10:14:13 PM	Bubbler valve closed
2/14/2012	10:14:13 PM	Main Vac valve opened
2/14/2012	10:14:13 PM	Helium MFC set to  0.000000
2/14/2012	10:14:13 PM	H2 MFC set to  0.000000
2/14/2012	10:14:13 PM	BCl3 MFC set to  0.000000
2/14/2012	10:14:13 PM	PH3 MFC set to  0.000000
2/14/2012	10:14:13 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:14:13 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:14:13 PM	Tube furnace set to 0
2/14/2012	10:14:43 PM	H2 valve closed
2/14/2012	10:14:43 PM	BCl3 valve closed
2/14/2012	10:14:43 PM	PH3 valve closed
2/14/2012	10:14:43 PM	SiCl4 pre valve closed
2/14/2012	10:14:43 PM	SiCl4 post valve closed
2/14/2012	10:14:43 PM	Bypass valve closed
2/14/2012	10:14:43 PM	Bubbler valve closed
2/14/2012	10:14:43 PM	Helium valve opened
2/14/2012	10:14:43 PM	Main Vac valve opened
2/14/2012	10:14:43 PM	Helium MFC set to  20.000000
2/14/2012	10:14:43 PM	H2 MFC set to  0.000000
2/14/2012	10:14:43 PM	BCl3 MFC set to  0.000000
2/14/2012	10:14:43 PM	PH3 MFC set to  0.000000
2/14/2012	10:14:43 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:14:43 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:14:43 PM	Tube furnace set to 0
2/14/2012	10:15:14 PM	Helium valve closed
2/14/2012	10:15:14 PM	H2 valve closed
2/14/2012	10:15:14 PM	BCl3 valve closed
2/14/2012	10:15:14 PM	PH3 valve closed
2/14/2012	10:15:14 PM	SiCl4 pre valve closed
2/14/2012	10:15:14 PM	SiCl4 post valve closed
2/14/2012	10:15:14 PM	Bypass valve closed
2/14/2012	10:15:14 PM	Bubbler valve closed
2/14/2012	10:15:14 PM	Main Vac valve opened
2/14/2012	10:15:14 PM	Helium MFC set to  0.000000
2/14/2012	10:15:14 PM	H2 MFC set to  0.000000
2/14/2012	10:15:14 PM	BCl3 MFC set to  0.000000
2/14/2012	10:15:14 PM	PH3 MFC set to  0.000000
2/14/2012	10:15:14 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:15:14 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:15:14 PM	Tube furnace set to 0
2/14/2012	10:15:44 PM	H2 valve closed
2/14/2012	10:15:44 PM	BCl3 valve closed
2/14/2012	10:15:44 PM	PH3 valve closed
2/14/2012	10:15:44 PM	SiCl4 pre valve closed
2/14/2012	10:15:44 PM	SiCl4 post valve closed
2/14/2012	10:15:44 PM	Bypass valve closed
2/14/2012	10:15:44 PM	Bubbler valve closed
2/14/2012	10:15:44 PM	Helium valve opened
2/14/2012	10:15:44 PM	Main Vac valve opened
2/14/2012	10:15:44 PM	Helium MFC set to  20.000000
2/14/2012	10:15:44 PM	H2 MFC set to  0.000000
2/14/2012	10:15:44 PM	BCl3 MFC set to  0.000000
2/14/2012	10:15:44 PM	PH3 MFC set to  0.000000
2/14/2012	10:15:44 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:15:44 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:15:44 PM	Tube furnace set to 0
2/14/2012	10:16:14 PM	Helium valve closed
2/14/2012	10:16:14 PM	H2 valve closed
2/14/2012	10:16:14 PM	BCl3 valve closed
2/14/2012	10:16:14 PM	PH3 valve closed
2/14/2012	10:16:14 PM	SiCl4 pre valve closed
2/14/2012	10:16:14 PM	SiCl4 post valve closed
2/14/2012	10:16:14 PM	Bypass valve closed
2/14/2012	10:16:14 PM	Bubbler valve closed
2/14/2012	10:16:14 PM	Main Vac valve opened
2/14/2012	10:16:14 PM	Helium MFC set to  0.000000
2/14/2012	10:16:14 PM	H2 MFC set to  0.000000
2/14/2012	10:16:14 PM	BCl3 MFC set to  0.000000
2/14/2012	10:16:14 PM	PH3 MFC set to  0.000000
2/14/2012	10:16:14 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:16:14 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:16:14 PM	Tube furnace set to 200
2/14/2012	10:16:44 PM	H2 valve closed
2/14/2012	10:16:44 PM	BCl3 valve closed
2/14/2012	10:16:44 PM	PH3 valve closed
2/14/2012	10:16:44 PM	SiCl4 pre valve closed
2/14/2012	10:16:44 PM	SiCl4 post valve closed
2/14/2012	10:16:44 PM	Bypass valve closed
2/14/2012	10:16:44 PM	Bubbler valve closed
2/14/2012	10:16:44 PM	Helium valve opened
2/14/2012	10:16:44 PM	Main Vac valve opened
2/14/2012	10:16:44 PM	Helium MFC set to  20.000000
2/14/2012	10:16:44 PM	H2 MFC set to  0.000000
2/14/2012	10:16:44 PM	BCl3 MFC set to  0.000000
2/14/2012	10:16:44 PM	PH3 MFC set to  0.000000
2/14/2012	10:16:44 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:16:44 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:16:44 PM	Tube furnace set to 200
2/14/2012	10:17:14 PM	Helium valve closed
2/14/2012	10:17:14 PM	H2 valve closed
2/14/2012	10:17:14 PM	BCl3 valve closed
2/14/2012	10:17:14 PM	PH3 valve closed
2/14/2012	10:17:14 PM	SiCl4 pre valve closed
2/14/2012	10:17:14 PM	SiCl4 post valve closed
2/14/2012	10:17:14 PM	Bypass valve closed
2/14/2012	10:17:14 PM	Bubbler valve closed
2/14/2012	10:17:14 PM	Main Vac valve opened
2/14/2012	10:17:14 PM	Helium MFC set to  0.000000
2/14/2012	10:17:14 PM	H2 MFC set to  0.000000
2/14/2012	10:17:14 PM	BCl3 MFC set to  0.000000
2/14/2012	10:17:14 PM	PH3 MFC set to  0.000000
2/14/2012	10:17:14 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:17:14 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:17:15 PM	Tube furnace set to 200
2/14/2012	10:17:45 PM	H2 valve closed
2/14/2012	10:17:45 PM	BCl3 valve closed
2/14/2012	10:17:45 PM	PH3 valve closed
2/14/2012	10:17:45 PM	SiCl4 pre valve closed
2/14/2012	10:17:45 PM	SiCl4 post valve closed
2/14/2012	10:17:45 PM	Bypass valve closed
2/14/2012	10:17:45 PM	Bubbler valve closed
2/14/2012	10:17:45 PM	Helium valve opened
2/14/2012	10:17:45 PM	Main Vac valve opened
2/14/2012	10:17:45 PM	Helium MFC set to  20.000000
2/14/2012	10:17:45 PM	H2 MFC set to  0.000000
2/14/2012	10:17:45 PM	BCl3 MFC set to  0.000000
2/14/2012	10:17:45 PM	PH3 MFC set to  0.000000
2/14/2012	10:17:45 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:17:45 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:17:45 PM	Tube furnace set to 200
2/14/2012	10:18:15 PM	Helium valve closed
2/14/2012	10:18:15 PM	H2 valve closed
2/14/2012	10:18:15 PM	BCl3 valve closed
2/14/2012	10:18:15 PM	PH3 valve closed
2/14/2012	10:18:15 PM	SiCl4 pre valve closed
2/14/2012	10:18:15 PM	SiCl4 post valve closed
2/14/2012	10:18:15 PM	Bypass valve closed
2/14/2012	10:18:15 PM	Bubbler valve closed
2/14/2012	10:18:15 PM	Main Vac valve opened
2/14/2012	10:18:15 PM	Helium MFC set to  0.000000
2/14/2012	10:18:15 PM	H2 MFC set to  0.000000
2/14/2012	10:18:15 PM	BCl3 MFC set to  0.000000
2/14/2012	10:18:15 PM	PH3 MFC set to  0.000000
2/14/2012	10:18:15 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:18:15 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:18:15 PM	Tube furnace set to 200
2/14/2012	10:18:45 PM	H2 valve closed
2/14/2012	10:18:45 PM	BCl3 valve closed
2/14/2012	10:18:45 PM	PH3 valve closed
2/14/2012	10:18:45 PM	SiCl4 pre valve closed
2/14/2012	10:18:45 PM	SiCl4 post valve closed
2/14/2012	10:18:45 PM	Bypass valve closed
2/14/2012	10:18:45 PM	Bubbler valve closed
2/14/2012	10:18:45 PM	Helium valve opened
2/14/2012	10:18:45 PM	Main Vac valve opened
2/14/2012	10:18:45 PM	Helium MFC set to  20.000000
2/14/2012	10:18:45 PM	H2 MFC set to  0.000000
2/14/2012	10:18:45 PM	BCl3 MFC set to  0.000000
2/14/2012	10:18:45 PM	PH3 MFC set to  0.000000
2/14/2012	10:18:45 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:18:45 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:18:45 PM	Tube furnace set to 200
2/14/2012	10:19:15 PM	Helium valve closed
2/14/2012	10:19:15 PM	H2 valve closed
2/14/2012	10:19:15 PM	BCl3 valve closed
2/14/2012	10:19:15 PM	PH3 valve closed
2/14/2012	10:19:15 PM	SiCl4 pre valve closed
2/14/2012	10:19:15 PM	SiCl4 post valve closed
2/14/2012	10:19:15 PM	Bypass valve closed
2/14/2012	10:19:15 PM	Bubbler valve closed
2/14/2012	10:19:15 PM	Main Vac valve opened
2/14/2012	10:19:15 PM	Helium MFC set to  0.000000
2/14/2012	10:19:15 PM	H2 MFC set to  0.000000
2/14/2012	10:19:15 PM	BCl3 MFC set to  0.000000
2/14/2012	10:19:15 PM	PH3 MFC set to  0.000000
2/14/2012	10:19:15 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:19:15 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:19:15 PM	Tube furnace set to 200
2/14/2012	10:19:45 PM	H2 valve closed
2/14/2012	10:19:45 PM	BCl3 valve closed
2/14/2012	10:19:45 PM	PH3 valve closed
2/14/2012	10:19:45 PM	SiCl4 pre valve closed
2/14/2012	10:19:45 PM	SiCl4 post valve closed
2/14/2012	10:19:45 PM	Bypass valve closed
2/14/2012	10:19:45 PM	Bubbler valve closed
2/14/2012	10:19:45 PM	Helium valve opened
2/14/2012	10:19:45 PM	Main Vac valve opened
2/14/2012	10:19:45 PM	Helium MFC set to  20.000000
2/14/2012	10:19:45 PM	H2 MFC set to  0.000000
2/14/2012	10:19:45 PM	BCl3 MFC set to  0.000000
2/14/2012	10:19:45 PM	PH3 MFC set to  0.000000
2/14/2012	10:19:45 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:19:45 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:19:46 PM	Tube furnace set to 200
2/14/2012	10:20:16 PM	Helium valve closed
2/14/2012	10:20:16 PM	H2 valve closed
2/14/2012	10:20:16 PM	BCl3 valve closed
2/14/2012	10:20:16 PM	PH3 valve closed
2/14/2012	10:20:16 PM	SiCl4 pre valve closed
2/14/2012	10:20:16 PM	SiCl4 post valve closed
2/14/2012	10:20:16 PM	Bypass valve closed
2/14/2012	10:20:16 PM	Bubbler valve closed
2/14/2012	10:20:16 PM	Main Vac valve opened
2/14/2012	10:20:16 PM	Helium MFC set to  0.000000
2/14/2012	10:20:16 PM	H2 MFC set to  0.000000
2/14/2012	10:20:16 PM	BCl3 MFC set to  0.000000
2/14/2012	10:20:16 PM	PH3 MFC set to  0.000000
2/14/2012	10:20:16 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:20:16 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:20:16 PM	Tube furnace set to 200
2/14/2012	10:20:46 PM	H2 valve closed
2/14/2012	10:20:46 PM	BCl3 valve closed
2/14/2012	10:20:46 PM	PH3 valve closed
2/14/2012	10:20:46 PM	SiCl4 pre valve closed
2/14/2012	10:20:46 PM	SiCl4 post valve closed
2/14/2012	10:20:46 PM	Bypass valve closed
2/14/2012	10:20:46 PM	Bubbler valve closed
2/14/2012	10:20:46 PM	Helium valve opened
2/14/2012	10:20:46 PM	Main Vac valve opened
2/14/2012	10:20:46 PM	Helium MFC set to  20.000000
2/14/2012	10:20:46 PM	H2 MFC set to  0.000000
2/14/2012	10:20:46 PM	BCl3 MFC set to  0.000000
2/14/2012	10:20:46 PM	PH3 MFC set to  0.000000
2/14/2012	10:20:46 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:20:46 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:20:46 PM	Tube furnace set to 200
2/14/2012	10:21:16 PM	Helium valve closed
2/14/2012	10:21:16 PM	H2 valve closed
2/14/2012	10:21:16 PM	BCl3 valve closed
2/14/2012	10:21:16 PM	PH3 valve closed
2/14/2012	10:21:16 PM	SiCl4 pre valve closed
2/14/2012	10:21:16 PM	SiCl4 post valve closed
2/14/2012	10:21:16 PM	Bypass valve closed
2/14/2012	10:21:16 PM	Bubbler valve closed
2/14/2012	10:21:16 PM	Main Vac valve opened
2/14/2012	10:21:16 PM	Helium MFC set to  0.000000
2/14/2012	10:21:16 PM	H2 MFC set to  0.000000
2/14/2012	10:21:16 PM	BCl3 MFC set to  0.000000
2/14/2012	10:21:16 PM	PH3 MFC set to  0.000000
2/14/2012	10:21:16 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:21:16 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:21:16 PM	Tube furnace set to 200
2/14/2012	10:21:46 PM	H2 valve closed
2/14/2012	10:21:46 PM	BCl3 valve closed
2/14/2012	10:21:46 PM	PH3 valve closed
2/14/2012	10:21:46 PM	SiCl4 pre valve closed
2/14/2012	10:21:46 PM	SiCl4 post valve closed
2/14/2012	10:21:46 PM	Bypass valve closed
2/14/2012	10:21:46 PM	Bubbler valve closed
2/14/2012	10:21:46 PM	Helium valve opened
2/14/2012	10:21:46 PM	Main Vac valve opened
2/14/2012	10:21:46 PM	Helium MFC set to  20.000000
2/14/2012	10:21:46 PM	H2 MFC set to  0.000000
2/14/2012	10:21:46 PM	BCl3 MFC set to  0.000000
2/14/2012	10:21:46 PM	PH3 MFC set to  0.000000
2/14/2012	10:21:46 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:21:46 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:21:46 PM	Tube furnace set to 200
2/14/2012	10:22:16 PM	Helium valve closed
2/14/2012	10:22:16 PM	H2 valve closed
2/14/2012	10:22:16 PM	BCl3 valve closed
2/14/2012	10:22:16 PM	PH3 valve closed
2/14/2012	10:22:16 PM	SiCl4 pre valve closed
2/14/2012	10:22:16 PM	SiCl4 post valve closed
2/14/2012	10:22:16 PM	Bypass valve closed
2/14/2012	10:22:16 PM	Bubbler valve closed
2/14/2012	10:22:16 PM	Main Vac valve opened
2/14/2012	10:22:16 PM	Helium MFC set to  0.000000
2/14/2012	10:22:16 PM	H2 MFC set to  0.000000
2/14/2012	10:22:16 PM	BCl3 MFC set to  0.000000
2/14/2012	10:22:16 PM	PH3 MFC set to  0.000000
2/14/2012	10:22:16 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:22:16 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:22:17 PM	Tube furnace set to 0
2/14/2012	10:22:18 PM	Run finished at 10:22 PM
2/14/2012	10:26:26 PM	Main Vac valve closed
2/14/2012	10:26:33 PM	Main Vac valve opened
2/14/2012	10:26:55 PM	Recipe started at 10:26 PM
2/14/2012	10:26:55 PM	Helium valve closed
2/14/2012	10:26:55 PM	H2 valve closed
2/14/2012	10:26:55 PM	BCl3 valve closed
2/14/2012	10:26:55 PM	PH3 valve closed
2/14/2012	10:26:55 PM	SiCl4 pre valve closed
2/14/2012	10:26:55 PM	SiCl4 post valve closed
2/14/2012	10:26:55 PM	Bypass valve closed
2/14/2012	10:26:55 PM	Bubbler valve closed
2/14/2012	10:26:55 PM	Main Vac valve opened
2/14/2012	10:26:55 PM	Helium MFC set to  0.000000
2/14/2012	10:26:55 PM	H2 MFC set to  0.000000
2/14/2012	10:26:55 PM	BCl3 MFC set to  0.000000
2/14/2012	10:26:55 PM	PH3 MFC set to  0.000000
2/14/2012	10:26:55 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:26:55 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:26:55 PM	Tube furnace set to 0
2/14/2012	10:27:25 PM	H2 valve closed
2/14/2012	10:27:25 PM	BCl3 valve closed
2/14/2012	10:27:25 PM	PH3 valve closed
2/14/2012	10:27:25 PM	SiCl4 pre valve closed
2/14/2012	10:27:25 PM	SiCl4 post valve closed
2/14/2012	10:27:25 PM	Bypass valve closed
2/14/2012	10:27:25 PM	Bubbler valve closed
2/14/2012	10:27:25 PM	Helium valve opened
2/14/2012	10:27:25 PM	Main Vac valve opened
2/14/2012	10:27:25 PM	Helium MFC set to  20.000000
2/14/2012	10:27:25 PM	H2 MFC set to  0.000000
2/14/2012	10:27:25 PM	BCl3 MFC set to  0.000000
2/14/2012	10:27:25 PM	PH3 MFC set to  0.000000
2/14/2012	10:27:25 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:27:25 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:27:25 PM	Tube furnace set to 0
2/14/2012	10:27:55 PM	Helium valve closed
2/14/2012	10:27:55 PM	H2 valve closed
2/14/2012	10:27:55 PM	BCl3 valve closed
2/14/2012	10:27:55 PM	PH3 valve closed
2/14/2012	10:27:55 PM	SiCl4 pre valve closed
2/14/2012	10:27:55 PM	SiCl4 post valve closed
2/14/2012	10:27:55 PM	Bypass valve closed
2/14/2012	10:27:55 PM	Bubbler valve closed
2/14/2012	10:27:55 PM	Main Vac valve opened
2/14/2012	10:27:55 PM	Helium MFC set to  0.000000
2/14/2012	10:27:55 PM	H2 MFC set to  0.000000
2/14/2012	10:27:55 PM	BCl3 MFC set to  0.000000
2/14/2012	10:27:55 PM	PH3 MFC set to  0.000000
2/14/2012	10:27:55 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:27:55 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:27:55 PM	Tube furnace set to 0
2/14/2012	10:28:25 PM	H2 valve closed
2/14/2012	10:28:25 PM	BCl3 valve closed
2/14/2012	10:28:25 PM	PH3 valve closed
2/14/2012	10:28:25 PM	SiCl4 pre valve closed
2/14/2012	10:28:25 PM	SiCl4 post valve closed
2/14/2012	10:28:25 PM	Bypass valve closed
2/14/2012	10:28:25 PM	Bubbler valve closed
2/14/2012	10:28:25 PM	Helium valve opened
2/14/2012	10:28:25 PM	Main Vac valve opened
2/14/2012	10:28:25 PM	Helium MFC set to  20.000000
2/14/2012	10:28:25 PM	H2 MFC set to  0.000000
2/14/2012	10:28:25 PM	BCl3 MFC set to  0.000000
2/14/2012	10:28:25 PM	PH3 MFC set to  0.000000
2/14/2012	10:28:25 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:28:25 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:28:26 PM	Tube furnace set to 0
2/14/2012	10:28:56 PM	Helium valve closed
2/14/2012	10:28:56 PM	H2 valve closed
2/14/2012	10:28:56 PM	BCl3 valve closed
2/14/2012	10:28:56 PM	PH3 valve closed
2/14/2012	10:28:56 PM	SiCl4 pre valve closed
2/14/2012	10:28:56 PM	SiCl4 post valve closed
2/14/2012	10:28:56 PM	Bypass valve closed
2/14/2012	10:28:56 PM	Bubbler valve closed
2/14/2012	10:28:56 PM	Main Vac valve opened
2/14/2012	10:28:56 PM	Helium MFC set to  0.000000
2/14/2012	10:28:56 PM	H2 MFC set to  0.000000
2/14/2012	10:28:56 PM	BCl3 MFC set to  0.000000
2/14/2012	10:28:56 PM	PH3 MFC set to  0.000000
2/14/2012	10:28:56 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:28:56 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:28:56 PM	Tube furnace set to 0
2/14/2012	10:29:26 PM	H2 valve closed
2/14/2012	10:29:26 PM	BCl3 valve closed
2/14/2012	10:29:26 PM	PH3 valve closed
2/14/2012	10:29:26 PM	SiCl4 pre valve closed
2/14/2012	10:29:26 PM	SiCl4 post valve closed
2/14/2012	10:29:26 PM	Bypass valve closed
2/14/2012	10:29:26 PM	Bubbler valve closed
2/14/2012	10:29:26 PM	Helium valve opened
2/14/2012	10:29:26 PM	Main Vac valve opened
2/14/2012	10:29:26 PM	Helium MFC set to  20.000000
2/14/2012	10:29:26 PM	H2 MFC set to  0.000000
2/14/2012	10:29:26 PM	BCl3 MFC set to  0.000000
2/14/2012	10:29:26 PM	PH3 MFC set to  0.000000
2/14/2012	10:29:26 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:29:26 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:29:26 PM	Tube furnace set to 0
2/14/2012	10:29:56 PM	Helium valve closed
2/14/2012	10:29:56 PM	H2 valve closed
2/14/2012	10:29:56 PM	BCl3 valve closed
2/14/2012	10:29:56 PM	PH3 valve closed
2/14/2012	10:29:56 PM	SiCl4 pre valve closed
2/14/2012	10:29:56 PM	SiCl4 post valve closed
2/14/2012	10:29:56 PM	Bypass valve closed
2/14/2012	10:29:56 PM	Bubbler valve closed
2/14/2012	10:29:56 PM	Main Vac valve opened
2/14/2012	10:29:56 PM	Helium MFC set to  0.000000
2/14/2012	10:29:56 PM	H2 MFC set to  0.000000
2/14/2012	10:29:56 PM	BCl3 MFC set to  0.000000
2/14/2012	10:29:56 PM	PH3 MFC set to  0.000000
2/14/2012	10:29:56 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:29:56 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:29:56 PM	Tube furnace set to 0
2/14/2012	10:30:26 PM	H2 valve closed
2/14/2012	10:30:26 PM	BCl3 valve closed
2/14/2012	10:30:26 PM	PH3 valve closed
2/14/2012	10:30:26 PM	SiCl4 pre valve closed
2/14/2012	10:30:26 PM	SiCl4 post valve closed
2/14/2012	10:30:26 PM	Bypass valve closed
2/14/2012	10:30:26 PM	Bubbler valve closed
2/14/2012	10:30:26 PM	Helium valve opened
2/14/2012	10:30:26 PM	Main Vac valve opened
2/14/2012	10:30:26 PM	Helium MFC set to  20.000000
2/14/2012	10:30:26 PM	H2 MFC set to  0.000000
2/14/2012	10:30:26 PM	BCl3 MFC set to  0.000000
2/14/2012	10:30:26 PM	PH3 MFC set to  0.000000
2/14/2012	10:30:26 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:30:26 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:30:26 PM	Tube furnace set to 0
2/14/2012	10:30:56 PM	Helium valve closed
2/14/2012	10:30:56 PM	H2 valve closed
2/14/2012	10:30:56 PM	BCl3 valve closed
2/14/2012	10:30:56 PM	PH3 valve closed
2/14/2012	10:30:56 PM	SiCl4 pre valve closed
2/14/2012	10:30:56 PM	SiCl4 post valve closed
2/14/2012	10:30:56 PM	Bypass valve closed
2/14/2012	10:30:56 PM	Bubbler valve closed
2/14/2012	10:30:56 PM	Main Vac valve opened
2/14/2012	10:30:56 PM	Helium MFC set to  0.000000
2/14/2012	10:30:56 PM	H2 MFC set to  0.000000
2/14/2012	10:30:56 PM	BCl3 MFC set to  0.000000
2/14/2012	10:30:56 PM	PH3 MFC set to  0.000000
2/14/2012	10:30:56 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:30:56 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:30:57 PM	Tube furnace set to 0
2/14/2012	10:31:27 PM	H2 valve closed
2/14/2012	10:31:27 PM	BCl3 valve closed
2/14/2012	10:31:27 PM	PH3 valve closed
2/14/2012	10:31:27 PM	SiCl4 pre valve closed
2/14/2012	10:31:27 PM	SiCl4 post valve closed
2/14/2012	10:31:27 PM	Bypass valve closed
2/14/2012	10:31:27 PM	Bubbler valve closed
2/14/2012	10:31:27 PM	Helium valve opened
2/14/2012	10:31:27 PM	Main Vac valve opened
2/14/2012	10:31:27 PM	Helium MFC set to  20.000000
2/14/2012	10:31:27 PM	H2 MFC set to  0.000000
2/14/2012	10:31:27 PM	BCl3 MFC set to  0.000000
2/14/2012	10:31:27 PM	PH3 MFC set to  0.000000
2/14/2012	10:31:27 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:31:27 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:31:27 PM	Tube furnace set to 0
2/14/2012	10:31:57 PM	Helium valve closed
2/14/2012	10:31:57 PM	H2 valve closed
2/14/2012	10:31:57 PM	BCl3 valve closed
2/14/2012	10:31:57 PM	PH3 valve closed
2/14/2012	10:31:57 PM	SiCl4 pre valve closed
2/14/2012	10:31:57 PM	SiCl4 post valve closed
2/14/2012	10:31:57 PM	Bypass valve closed
2/14/2012	10:31:57 PM	Bubbler valve closed
2/14/2012	10:31:57 PM	Main Vac valve opened
2/14/2012	10:31:57 PM	Helium MFC set to  0.000000
2/14/2012	10:31:57 PM	H2 MFC set to  0.000000
2/14/2012	10:31:57 PM	BCl3 MFC set to  0.000000
2/14/2012	10:31:57 PM	PH3 MFC set to  0.000000
2/14/2012	10:31:57 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:31:57 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:31:57 PM	Tube furnace set to 0
2/14/2012	10:32:27 PM	H2 valve closed
2/14/2012	10:32:27 PM	BCl3 valve closed
2/14/2012	10:32:27 PM	PH3 valve closed
2/14/2012	10:32:27 PM	SiCl4 pre valve closed
2/14/2012	10:32:27 PM	SiCl4 post valve closed
2/14/2012	10:32:27 PM	Bypass valve closed
2/14/2012	10:32:27 PM	Bubbler valve closed
2/14/2012	10:32:27 PM	Helium valve opened
2/14/2012	10:32:27 PM	Main Vac valve opened
2/14/2012	10:32:27 PM	Helium MFC set to  20.000000
2/14/2012	10:32:27 PM	H2 MFC set to  0.000000
2/14/2012	10:32:27 PM	BCl3 MFC set to  0.000000
2/14/2012	10:32:27 PM	PH3 MFC set to  0.000000
2/14/2012	10:32:27 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:32:27 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:32:27 PM	Tube furnace set to 0
2/14/2012	10:32:57 PM	Helium valve closed
2/14/2012	10:32:57 PM	H2 valve closed
2/14/2012	10:32:57 PM	BCl3 valve closed
2/14/2012	10:32:57 PM	PH3 valve closed
2/14/2012	10:32:57 PM	SiCl4 pre valve closed
2/14/2012	10:32:57 PM	SiCl4 post valve closed
2/14/2012	10:32:57 PM	Bypass valve closed
2/14/2012	10:32:57 PM	Bubbler valve closed
2/14/2012	10:32:57 PM	Main Vac valve opened
2/14/2012	10:32:57 PM	Helium MFC set to  0.000000
2/14/2012	10:32:57 PM	H2 MFC set to  0.000000
2/14/2012	10:32:57 PM	BCl3 MFC set to  0.000000
2/14/2012	10:32:57 PM	PH3 MFC set to  0.000000
2/14/2012	10:32:57 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:32:57 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:32:57 PM	Tube furnace set to 0
2/14/2012	10:33:27 PM	H2 valve closed
2/14/2012	10:33:27 PM	BCl3 valve closed
2/14/2012	10:33:27 PM	PH3 valve closed
2/14/2012	10:33:27 PM	SiCl4 pre valve closed
2/14/2012	10:33:27 PM	SiCl4 post valve closed
2/14/2012	10:33:27 PM	Bypass valve closed
2/14/2012	10:33:27 PM	Bubbler valve closed
2/14/2012	10:33:27 PM	Helium valve opened
2/14/2012	10:33:27 PM	Main Vac valve opened
2/14/2012	10:33:27 PM	Helium MFC set to  20.000000
2/14/2012	10:33:28 PM	H2 MFC set to  0.000000
2/14/2012	10:33:28 PM	BCl3 MFC set to  0.000000
2/14/2012	10:33:28 PM	PH3 MFC set to  0.000000
2/14/2012	10:33:28 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:33:28 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:33:28 PM	Tube furnace set to 0
2/14/2012	10:33:58 PM	Helium valve closed
2/14/2012	10:33:58 PM	H2 valve closed
2/14/2012	10:33:58 PM	BCl3 valve closed
2/14/2012	10:33:58 PM	PH3 valve closed
2/14/2012	10:33:58 PM	SiCl4 pre valve closed
2/14/2012	10:33:58 PM	SiCl4 post valve closed
2/14/2012	10:33:58 PM	Bypass valve closed
2/14/2012	10:33:58 PM	Bubbler valve closed
2/14/2012	10:33:58 PM	Main Vac valve opened
2/14/2012	10:33:58 PM	Helium MFC set to  0.000000
2/14/2012	10:33:58 PM	H2 MFC set to  0.000000
2/14/2012	10:33:58 PM	BCl3 MFC set to  0.000000
2/14/2012	10:33:58 PM	PH3 MFC set to  0.000000
2/14/2012	10:33:58 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:33:58 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:33:58 PM	Tube furnace set to 0
2/14/2012	10:34:28 PM	H2 valve closed
2/14/2012	10:34:28 PM	BCl3 valve closed
2/14/2012	10:34:28 PM	PH3 valve closed
2/14/2012	10:34:28 PM	SiCl4 pre valve closed
2/14/2012	10:34:28 PM	SiCl4 post valve closed
2/14/2012	10:34:28 PM	Bypass valve closed
2/14/2012	10:34:28 PM	Bubbler valve closed
2/14/2012	10:34:28 PM	Helium valve opened
2/14/2012	10:34:28 PM	Main Vac valve opened
2/14/2012	10:34:28 PM	Helium MFC set to  20.000000
2/14/2012	10:34:28 PM	H2 MFC set to  0.000000
2/14/2012	10:34:28 PM	BCl3 MFC set to  0.000000
2/14/2012	10:34:28 PM	PH3 MFC set to  0.000000
2/14/2012	10:34:28 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:34:28 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:34:28 PM	Tube furnace set to 0
2/14/2012	10:34:58 PM	Helium valve closed
2/14/2012	10:34:58 PM	H2 valve closed
2/14/2012	10:34:58 PM	BCl3 valve closed
2/14/2012	10:34:58 PM	PH3 valve closed
2/14/2012	10:34:58 PM	SiCl4 pre valve closed
2/14/2012	10:34:58 PM	SiCl4 post valve closed
2/14/2012	10:34:58 PM	Bypass valve closed
2/14/2012	10:34:58 PM	Bubbler valve closed
2/14/2012	10:34:58 PM	Main Vac valve opened
2/14/2012	10:34:58 PM	Helium MFC set to  0.000000
2/14/2012	10:34:58 PM	H2 MFC set to  0.000000
2/14/2012	10:34:58 PM	BCl3 MFC set to  0.000000
2/14/2012	10:34:58 PM	PH3 MFC set to  0.000000
2/14/2012	10:34:58 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:34:58 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:34:58 PM	Tube furnace set to 0
2/14/2012	10:35:28 PM	H2 valve closed
2/14/2012	10:35:28 PM	BCl3 valve closed
2/14/2012	10:35:28 PM	PH3 valve closed
2/14/2012	10:35:28 PM	SiCl4 pre valve closed
2/14/2012	10:35:28 PM	SiCl4 post valve closed
2/14/2012	10:35:28 PM	Bypass valve closed
2/14/2012	10:35:28 PM	Bubbler valve closed
2/14/2012	10:35:28 PM	Helium valve opened
2/14/2012	10:35:28 PM	Main Vac valve opened
2/14/2012	10:35:28 PM	Helium MFC set to  20.000000
2/14/2012	10:35:28 PM	H2 MFC set to  0.000000
2/14/2012	10:35:28 PM	BCl3 MFC set to  0.000000
2/14/2012	10:35:28 PM	PH3 MFC set to  0.000000
2/14/2012	10:35:28 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:35:28 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:35:29 PM	Tube furnace set to 0
2/14/2012	10:35:59 PM	Helium valve closed
2/14/2012	10:35:59 PM	H2 valve closed
2/14/2012	10:35:59 PM	BCl3 valve closed
2/14/2012	10:35:59 PM	PH3 valve closed
2/14/2012	10:35:59 PM	SiCl4 pre valve closed
2/14/2012	10:35:59 PM	SiCl4 post valve closed
2/14/2012	10:35:59 PM	Bypass valve closed
2/14/2012	10:35:59 PM	Bubbler valve closed
2/14/2012	10:35:59 PM	Main Vac valve opened
2/14/2012	10:35:59 PM	Helium MFC set to  0.000000
2/14/2012	10:35:59 PM	H2 MFC set to  0.000000
2/14/2012	10:35:59 PM	BCl3 MFC set to  0.000000
2/14/2012	10:35:59 PM	PH3 MFC set to  0.000000
2/14/2012	10:35:59 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:35:59 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:35:59 PM	Tube furnace set to 200
2/14/2012	10:36:29 PM	H2 valve closed
2/14/2012	10:36:29 PM	BCl3 valve closed
2/14/2012	10:36:29 PM	PH3 valve closed
2/14/2012	10:36:29 PM	SiCl4 pre valve closed
2/14/2012	10:36:29 PM	SiCl4 post valve closed
2/14/2012	10:36:29 PM	Bypass valve closed
2/14/2012	10:36:29 PM	Bubbler valve closed
2/14/2012	10:36:29 PM	Helium valve opened
2/14/2012	10:36:29 PM	Main Vac valve opened
2/14/2012	10:36:29 PM	Helium MFC set to  20.000000
2/14/2012	10:36:29 PM	H2 MFC set to  0.000000
2/14/2012	10:36:29 PM	BCl3 MFC set to  0.000000
2/14/2012	10:36:29 PM	PH3 MFC set to  0.000000
2/14/2012	10:36:29 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:36:29 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:36:29 PM	Tube furnace set to 200
2/14/2012	10:36:59 PM	Helium valve closed
2/14/2012	10:36:59 PM	H2 valve closed
2/14/2012	10:36:59 PM	BCl3 valve closed
2/14/2012	10:36:59 PM	PH3 valve closed
2/14/2012	10:36:59 PM	SiCl4 pre valve closed
2/14/2012	10:36:59 PM	SiCl4 post valve closed
2/14/2012	10:36:59 PM	Bypass valve closed
2/14/2012	10:36:59 PM	Bubbler valve closed
2/14/2012	10:36:59 PM	Main Vac valve opened
2/14/2012	10:36:59 PM	Helium MFC set to  0.000000
2/14/2012	10:36:59 PM	H2 MFC set to  0.000000
2/14/2012	10:36:59 PM	BCl3 MFC set to  0.000000
2/14/2012	10:36:59 PM	PH3 MFC set to  0.000000
2/14/2012	10:36:59 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:36:59 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:36:59 PM	Tube furnace set to 200
2/14/2012	10:37:29 PM	H2 valve closed
2/14/2012	10:37:29 PM	BCl3 valve closed
2/14/2012	10:37:29 PM	PH3 valve closed
2/14/2012	10:37:29 PM	SiCl4 pre valve closed
2/14/2012	10:37:29 PM	SiCl4 post valve closed
2/14/2012	10:37:29 PM	Bypass valve closed
2/14/2012	10:37:29 PM	Bubbler valve closed
2/14/2012	10:37:29 PM	Helium valve opened
2/14/2012	10:37:29 PM	Main Vac valve opened
2/14/2012	10:37:29 PM	Helium MFC set to  20.000000
2/14/2012	10:37:29 PM	H2 MFC set to  0.000000
2/14/2012	10:37:29 PM	BCl3 MFC set to  0.000000
2/14/2012	10:37:29 PM	PH3 MFC set to  0.000000
2/14/2012	10:37:29 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:37:29 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:37:29 PM	Tube furnace set to 200
2/14/2012	10:37:59 PM	Helium valve closed
2/14/2012	10:37:59 PM	H2 valve closed
2/14/2012	10:37:59 PM	BCl3 valve closed
2/14/2012	10:37:59 PM	PH3 valve closed
2/14/2012	10:37:59 PM	SiCl4 pre valve closed
2/14/2012	10:37:59 PM	SiCl4 post valve closed
2/14/2012	10:37:59 PM	Bypass valve closed
2/14/2012	10:37:59 PM	Bubbler valve closed
2/14/2012	10:37:59 PM	Main Vac valve opened
2/14/2012	10:37:59 PM	Helium MFC set to  0.000000
2/14/2012	10:37:59 PM	H2 MFC set to  0.000000
2/14/2012	10:37:59 PM	BCl3 MFC set to  0.000000
2/14/2012	10:37:59 PM	PH3 MFC set to  0.000000
2/14/2012	10:37:59 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:37:59 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:38:00 PM	Tube furnace set to 200
2/14/2012	10:38:30 PM	H2 valve closed
2/14/2012	10:38:30 PM	BCl3 valve closed
2/14/2012	10:38:30 PM	PH3 valve closed
2/14/2012	10:38:30 PM	SiCl4 pre valve closed
2/14/2012	10:38:30 PM	SiCl4 post valve closed
2/14/2012	10:38:30 PM	Bypass valve closed
2/14/2012	10:38:30 PM	Bubbler valve closed
2/14/2012	10:38:30 PM	Helium valve opened
2/14/2012	10:38:30 PM	Main Vac valve opened
2/14/2012	10:38:30 PM	Helium MFC set to  20.000000
2/14/2012	10:38:30 PM	H2 MFC set to  0.000000
2/14/2012	10:38:30 PM	BCl3 MFC set to  0.000000
2/14/2012	10:38:30 PM	PH3 MFC set to  0.000000
2/14/2012	10:38:30 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:38:30 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:38:30 PM	Tube furnace set to 200
2/14/2012	10:39:00 PM	Helium valve closed
2/14/2012	10:39:00 PM	H2 valve closed
2/14/2012	10:39:00 PM	BCl3 valve closed
2/14/2012	10:39:00 PM	PH3 valve closed
2/14/2012	10:39:00 PM	SiCl4 pre valve closed
2/14/2012	10:39:00 PM	SiCl4 post valve closed
2/14/2012	10:39:00 PM	Bypass valve closed
2/14/2012	10:39:00 PM	Bubbler valve closed
2/14/2012	10:39:00 PM	Main Vac valve opened
2/14/2012	10:39:00 PM	Helium MFC set to  0.000000
2/14/2012	10:39:00 PM	H2 MFC set to  0.000000
2/14/2012	10:39:00 PM	BCl3 MFC set to  0.000000
2/14/2012	10:39:00 PM	PH3 MFC set to  0.000000
2/14/2012	10:39:00 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:39:00 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:39:00 PM	Tube furnace set to 200
2/14/2012	10:39:30 PM	H2 valve closed
2/14/2012	10:39:30 PM	BCl3 valve closed
2/14/2012	10:39:30 PM	PH3 valve closed
2/14/2012	10:39:30 PM	SiCl4 pre valve closed
2/14/2012	10:39:30 PM	SiCl4 post valve closed
2/14/2012	10:39:30 PM	Bypass valve closed
2/14/2012	10:39:30 PM	Bubbler valve closed
2/14/2012	10:39:30 PM	Helium valve opened
2/14/2012	10:39:30 PM	Main Vac valve opened
2/14/2012	10:39:30 PM	Helium MFC set to  20.000000
2/14/2012	10:39:30 PM	H2 MFC set to  0.000000
2/14/2012	10:39:30 PM	BCl3 MFC set to  0.000000
2/14/2012	10:39:30 PM	PH3 MFC set to  0.000000
2/14/2012	10:39:30 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:39:30 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:39:30 PM	Tube furnace set to 200
2/14/2012	10:40:00 PM	Helium valve closed
2/14/2012	10:40:00 PM	H2 valve closed
2/14/2012	10:40:00 PM	BCl3 valve closed
2/14/2012	10:40:00 PM	PH3 valve closed
2/14/2012	10:40:00 PM	SiCl4 pre valve closed
2/14/2012	10:40:00 PM	SiCl4 post valve closed
2/14/2012	10:40:00 PM	Bypass valve closed
2/14/2012	10:40:00 PM	Bubbler valve closed
2/14/2012	10:40:00 PM	Main Vac valve opened
2/14/2012	10:40:00 PM	Helium MFC set to  0.000000
2/14/2012	10:40:00 PM	H2 MFC set to  0.000000
2/14/2012	10:40:00 PM	BCl3 MFC set to  0.000000
2/14/2012	10:40:00 PM	PH3 MFC set to  0.000000
2/14/2012	10:40:00 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:40:00 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:40:00 PM	Tube furnace set to 200
2/14/2012	10:40:30 PM	H2 valve closed
2/14/2012	10:40:30 PM	BCl3 valve closed
2/14/2012	10:40:30 PM	PH3 valve closed
2/14/2012	10:40:30 PM	SiCl4 pre valve closed
2/14/2012	10:40:30 PM	SiCl4 post valve closed
2/14/2012	10:40:30 PM	Bypass valve closed
2/14/2012	10:40:30 PM	Bubbler valve closed
2/14/2012	10:40:30 PM	Helium valve opened
2/14/2012	10:40:30 PM	Main Vac valve opened
2/14/2012	10:40:30 PM	Helium MFC set to  20.000000
2/14/2012	10:40:30 PM	H2 MFC set to  0.000000
2/14/2012	10:40:30 PM	BCl3 MFC set to  0.000000
2/14/2012	10:40:30 PM	PH3 MFC set to  0.000000
2/14/2012	10:40:30 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:40:30 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:40:31 PM	Tube furnace set to 200
2/14/2012	10:41:01 PM	Helium valve closed
2/14/2012	10:41:01 PM	H2 valve closed
2/14/2012	10:41:01 PM	BCl3 valve closed
2/14/2012	10:41:01 PM	PH3 valve closed
2/14/2012	10:41:01 PM	SiCl4 pre valve closed
2/14/2012	10:41:01 PM	SiCl4 post valve closed
2/14/2012	10:41:01 PM	Bypass valve closed
2/14/2012	10:41:01 PM	Bubbler valve closed
2/14/2012	10:41:01 PM	Main Vac valve opened
2/14/2012	10:41:01 PM	Helium MFC set to  0.000000
2/14/2012	10:41:01 PM	H2 MFC set to  0.000000
2/14/2012	10:41:01 PM	BCl3 MFC set to  0.000000
2/14/2012	10:41:01 PM	PH3 MFC set to  0.000000
2/14/2012	10:41:01 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:41:01 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:41:01 PM	Tube furnace set to 200
2/14/2012	10:41:31 PM	H2 valve closed
2/14/2012	10:41:31 PM	BCl3 valve closed
2/14/2012	10:41:31 PM	PH3 valve closed
2/14/2012	10:41:31 PM	SiCl4 pre valve closed
2/14/2012	10:41:31 PM	SiCl4 post valve closed
2/14/2012	10:41:31 PM	Bypass valve closed
2/14/2012	10:41:31 PM	Bubbler valve closed
2/14/2012	10:41:31 PM	Helium valve opened
2/14/2012	10:41:31 PM	Main Vac valve opened
2/14/2012	10:41:31 PM	Helium MFC set to  20.000000
2/14/2012	10:41:31 PM	H2 MFC set to  0.000000
2/14/2012	10:41:31 PM	BCl3 MFC set to  0.000000
2/14/2012	10:41:31 PM	PH3 MFC set to  0.000000
2/14/2012	10:41:31 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:41:31 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:41:31 PM	Tube furnace set to 200
2/14/2012	10:42:01 PM	Helium valve closed
2/14/2012	10:42:01 PM	H2 valve closed
2/14/2012	10:42:01 PM	BCl3 valve closed
2/14/2012	10:42:01 PM	PH3 valve closed
2/14/2012	10:42:01 PM	SiCl4 pre valve closed
2/14/2012	10:42:01 PM	SiCl4 post valve closed
2/14/2012	10:42:01 PM	Bypass valve closed
2/14/2012	10:42:01 PM	Bubbler valve closed
2/14/2012	10:42:01 PM	Main Vac valve opened
2/14/2012	10:42:01 PM	Helium MFC set to  0.000000
2/14/2012	10:42:01 PM	H2 MFC set to  0.000000
2/14/2012	10:42:01 PM	BCl3 MFC set to  0.000000
2/14/2012	10:42:01 PM	PH3 MFC set to  0.000000
2/14/2012	10:42:01 PM	SiCl4 MFC set to  0.000000
2/14/2012	10:42:01 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	10:42:01 PM	Tube furnace set to 0
2/14/2012	10:42:02 PM	Run finished at 10:42 PM
2/14/2012	10:59:56 PM	Main Vac valve closed
2/14/2012	11:00:06 PM	Main Vac valve opened
2/14/2012	11:01:46 PM	Recipe started at 11:01 PM
2/14/2012	11:01:46 PM	Helium valve closed
2/14/2012	11:01:46 PM	H2 valve closed
2/14/2012	11:01:46 PM	BCl3 valve closed
2/14/2012	11:01:46 PM	PH3 valve closed
2/14/2012	11:01:46 PM	SiCl4 pre valve closed
2/14/2012	11:01:46 PM	SiCl4 post valve closed
2/14/2012	11:01:46 PM	Bypass valve closed
2/14/2012	11:01:46 PM	Bubbler valve closed
2/14/2012	11:01:46 PM	Main Vac valve opened
2/14/2012	11:01:46 PM	Helium MFC set to  0.000000
2/14/2012	11:01:46 PM	H2 MFC set to  0.000000
2/14/2012	11:01:46 PM	BCl3 MFC set to  0.000000
2/14/2012	11:01:46 PM	PH3 MFC set to  0.000000
2/14/2012	11:01:46 PM	SiCl4 MFC set to  0.000000
2/14/2012	11:01:46 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:01:46 PM	Tube furnace set to 0
2/14/2012	11:02:16 PM	H2 valve closed
2/14/2012	11:02:16 PM	BCl3 valve closed
2/14/2012	11:02:16 PM	PH3 valve closed
2/14/2012	11:02:16 PM	SiCl4 pre valve closed
2/14/2012	11:02:16 PM	SiCl4 post valve closed
2/14/2012	11:02:16 PM	Bypass valve closed
2/14/2012	11:02:16 PM	Bubbler valve closed
2/14/2012	11:02:16 PM	Helium valve opened
2/14/2012	11:02:16 PM	Main Vac valve opened
2/14/2012	11:02:16 PM	Helium MFC set to  20.000000
2/14/2012	11:02:16 PM	H2 MFC set to  0.000000
2/14/2012	11:02:16 PM	BCl3 MFC set to  0.000000
2/14/2012	11:02:16 PM	PH3 MFC set to  0.000000
2/14/2012	11:02:16 PM	SiCl4 MFC set to  0.000000
2/14/2012	11:02:16 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:02:16 PM	Tube furnace set to 1100
2/14/2012	11:03:54 PM	Helium valve closed
2/14/2012	11:03:54 PM	BCl3 valve closed
2/14/2012	11:03:54 PM	PH3 valve closed
2/14/2012	11:03:54 PM	SiCl4 pre valve closed
2/14/2012	11:03:54 PM	SiCl4 post valve closed
2/14/2012	11:03:54 PM	Bypass valve closed
2/14/2012	11:03:54 PM	Bubbler valve closed
2/14/2012	11:03:54 PM	H2 valve opened
2/14/2012	11:03:54 PM	Main Vac valve opened
2/14/2012	11:03:54 PM	Helium MFC set to  0.000000
2/14/2012	11:03:54 PM	H2 MFC set to  20.000000
2/14/2012	11:03:54 PM	BCl3 MFC set to  0.000000
2/14/2012	11:03:54 PM	PH3 MFC set to  0.000000
2/14/2012	11:03:54 PM	SiCl4 MFC set to  0.000000
2/14/2012	11:03:54 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:03:54 PM	Tube furnace set to 1100
2/14/2012	11:04:56 PM	Helium valve closed
2/14/2012	11:04:56 PM	H2 valve closed
2/14/2012	11:04:56 PM	BCl3 valve closed
2/14/2012	11:04:56 PM	PH3 valve closed
2/14/2012	11:04:56 PM	SiCl4 pre valve closed
2/14/2012	11:04:56 PM	SiCl4 post valve closed
2/14/2012	11:04:56 PM	Bypass valve closed
2/14/2012	11:04:56 PM	Bubbler valve closed
2/14/2012	11:04:56 PM	Main Vac valve opened
2/14/2012	11:04:56 PM	Helium MFC set to  0.000000
2/14/2012	11:04:56 PM	H2 MFC set to  0.000000
2/14/2012	11:04:56 PM	BCl3 MFC set to  0.000000
2/14/2012	11:04:56 PM	PH3 MFC set to  0.000000
2/14/2012	11:04:56 PM	SiCl4 MFC set to  0.000000
2/14/2012	11:04:56 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:04:56 PM	Tube furnace set to 1100
2/14/2012	11:30:18 PM	H2 valve closed
2/14/2012	11:30:18 PM	BCl3 valve closed
2/14/2012	11:30:18 PM	PH3 valve closed
2/14/2012	11:30:18 PM	SiCl4 pre valve closed
2/14/2012	11:30:18 PM	SiCl4 post valve closed
2/14/2012	11:30:18 PM	Bypass valve closed
2/14/2012	11:30:18 PM	Bubbler valve closed
2/14/2012	11:30:18 PM	Helium valve opened
2/14/2012	11:30:18 PM	Main Vac valve opened
2/14/2012	11:30:18 PM	Helium MFC set to  20.000000
2/14/2012	11:30:18 PM	H2 MFC set to  0.000000
2/14/2012	11:30:18 PM	BCl3 MFC set to  0.000000
2/14/2012	11:30:18 PM	PH3 MFC set to  0.000000
2/14/2012	11:30:18 PM	SiCl4 MFC set to  0.000000
2/14/2012	11:30:18 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:30:18 PM	Tube furnace set to 1100
2/14/2012	11:35:18 PM	Helium valve closed
2/14/2012	11:35:18 PM	H2 valve closed
2/14/2012	11:35:18 PM	BCl3 valve closed
2/14/2012	11:35:18 PM	PH3 valve closed
2/14/2012	11:35:18 PM	SiCl4 pre valve closed
2/14/2012	11:35:18 PM	SiCl4 post valve closed
2/14/2012	11:35:18 PM	Bypass valve closed
2/14/2012	11:35:18 PM	Bubbler valve closed
2/14/2012	11:35:18 PM	Main Vac valve opened
2/14/2012	11:35:18 PM	Helium MFC set to  0.000000
2/14/2012	11:35:18 PM	H2 MFC set to  0.000000
2/14/2012	11:35:18 PM	BCl3 MFC set to  0.000000
2/14/2012	11:35:18 PM	PH3 MFC set to  0.000000
2/14/2012	11:35:18 PM	SiCl4 MFC set to  0.000000
2/14/2012	11:35:18 PM	Bypass solenoid MFC set to  0.000000
2/14/2012	11:35:18 PM	Tube furnace set to 1100
